EP1618992A1 - Device and process for grinding and/or polishing surfaces - Google Patents

Device and process for grinding and/or polishing surfaces Download PDF

Info

Publication number
EP1618992A1
EP1618992A1 EP04017330A EP04017330A EP1618992A1 EP 1618992 A1 EP1618992 A1 EP 1618992A1 EP 04017330 A EP04017330 A EP 04017330A EP 04017330 A EP04017330 A EP 04017330A EP 1618992 A1 EP1618992 A1 EP 1618992A1
Authority
EP
European Patent Office
Prior art keywords
liquid
gas
abrasive
arrangement
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04017330A
Other languages
German (de)
French (fr)
Other versions
EP1618992B1 (en
Inventor
Oliver Dr. Fähnle
Torsten Wons
Wilhelmus Messelink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisba Optik AG
Original Assignee
Fisba Optik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisba Optik AG filed Critical Fisba Optik AG
Priority to EP04017330A priority Critical patent/EP1618992B1/en
Priority to AT04017330T priority patent/ATE411138T1/en
Priority to DE502004008269T priority patent/DE502004008269D1/en
Publication of EP1618992A1 publication Critical patent/EP1618992A1/en
Application granted granted Critical
Publication of EP1618992B1 publication Critical patent/EP1618992B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0084—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a mixture of liquid and gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C11/00—Selection of abrasive materials or additives for abrasive blasts
    • B24C11/005—Selection of abrasive materials or additives for abrasive blasts of additives, e.g. anti-corrosive or disinfecting agents in solid, liquid or gaseous form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier

Definitions

  • the invention relates to a device and a method for removing material during grinding and / or polishing of surfaces of workpieces according to the independent claims.
  • the rate of removal depends on the one hand on the size of the abrasive particles in the beam, and on the other hand on the energy and thus the speed of the particles at the time when they hit the surface.
  • the rate of removal is the amount of material removed per time.
  • the known methods have the disadvantage that the surface quality is not always satisfactory.
  • the surface quality depends on the roughness and cleanliness of the surface (ISO standard 10110). As roughness, the average deviation of the surface height per area is defined. The cleanliness results from the number of foreign substances per area.
  • the object of the present invention to avoid the disadvantages of the known, ie in particular to provide a device and a method for grinding or polishing surfaces with homogeneous sanding images.
  • the invention aims in particular at optimizing the surface quality of optical components.
  • the device for removing material from a surface of a workpiece when grinding or polishing the surface by means of abrasive particles which are conveyed by a liquid contains a device for adjusting, in particular for removing, the gas component from the liquid.
  • This gas is mainly air because air is naturally contained in liquids.
  • the invention also relates to other gases, for example CO 2 or oxygen, which may be bound, dissolved or mixed in liquids.
  • the device for removing the gas from the liquid may have different designs.
  • the gas can be removed from the liquid by causing it to vibrate. This can be achieved by a mechanical vibration unit or by generating ultrasonic vibrations in the liquid.
  • the gas content in the liquid can also be reduced by heating the liquid or by applying pressure to the liquid.
  • a membrane degassing with or without the help of a negative pressure can be used.
  • the gas is withdrawn from the liquid through a membrane, which is gas but not liquid permeable.
  • Membrane degassing is used, for example, in the turbine industry or in the ink-jet printing process.
  • Also advantageous may be chemical degassing, e.g. by exciting a chemical reaction with the gas bound in the liquid.
  • chemical degassing e.g. by exciting a chemical reaction with the gas bound in the liquid.
  • the means for extracting the gas can be used at different locations of the device.
  • the removal of the gas preferably takes place in or on a storage tank for the liquid.
  • the device for extracting gas can also be arranged in or on a feed pump or delivery line for conveying the gas or connected thereto and arranged as a separate element.
  • the gas is preferably withdrawn so far that the gas fraction in the abrasive liquid is reduced to below 5%, preferably below 1% of the volume.
  • the device according to the invention is preferably designed to generate a delivery pressure of less than 100 bar, more preferably less than 50 bar or even less than 20 bar. Compared to high-pressure arrangements, energy is thus saved during conveying, which has an economic and ecological advantage.
  • a reduction of the delivery pressure can be achieved by appropriate, suitable arrangements for accelerating the abrasive fluid.
  • an arrangement for accelerating the abrasive liquid can be provided, in which the abrasive liquid is advantageously accelerated to a speed of over 20 m / s.
  • the abrasive particles receive the necessary energy, so that material is removed.
  • the energy of the particles grows quadratically with the speed of the beam.
  • the impact energy of the abrasive particles is more homogeneous due to the gas withdrawal.
  • the acceleration arrangement can have, for example, one or more nozzles.
  • the arrangement for accelerating the abrasive liquid may also include an arrangement for adjusting the distance between at least one exit opening of the liquid and the surface.
  • the acceleration is then adjustable between the at least one outlet opening and the surface as a function of the cross section of a liquid feed opening and the cross section of the gap between the surface and the at least one outlet opening.
  • the arrangement according to EP 1 409 199 could be designed.
  • the abrasive particles preferably have an average grain diameter of less than 50 microns, preferably 1 to 10 microns.
  • the grain size varies depending on the application.
  • the delivery liquid is preferably predominantly water.
  • other known liquids are also within the scope of the invention.
  • oil or alcohol based fluids could be used.
  • the gas content in the liquid could be continuously measured and the intensity of the gas withdrawal adjusted accordingly.
  • the gas fraction in the liquid can be determined, for example, via the viscosity of the liquid.
  • the surface texture is enhanced by the removal of gas from the abrasive liquid.
  • the gas is air, but other gases are conceivable.
  • the surface quality of a workpiece can be significantly improved in a simple manner. Particularly in the field of optics, extremely smooth and clean surfaces are of utmost importance. The surface quality can also be improved without significant additional cost.
  • the gas is reduced in the liquid to a proportion of less than 5%, preferably less than 1% of the volume.
  • the workpiece 2 is held with a holder 8 in a closed container 11.
  • the holder 8 is slidable along a horizontal axis and rotatable about a vertical axis. This is indicated by the arrows B.
  • the surface S which is to be ground and polished, is located on the upper side of the workpiece 2.
  • a liquid tank 12 In a liquid tank 12 is the liquid 3, in this example water. To the water 3 are added abrasive particles 5 in a concentration of 10% by weight. As abrasive particles 5 particles of silicon carbide are used with an average particle size of 7 microns. The abrasive liquid 3 is conveyed by a pump 7 in the direction of the arrows 6 through the delivery line 10. The delivery pressure is 12 bar.
  • the delivery line 10 leads into the interior of the container 11. There, the water is accelerated in a 3 with a nozzle 9 to about 40 m / s. The nozzle 9 is directed to the surface S, which is moved with the holding device 8 below.
  • the used water 3 is returned to the tank 12 via a drain 13.
  • the abrasive particles 5 are thus in a closed circuit, which is indicated by the arrows 6. As a result, the material consumption is significantly reduced.
  • the water 3 has as little gas inclusions, in particular air, it is heated by a heater 4.
  • a heater 4 As the solubility of air in the water decreases with increasing temperature, air bubbles form which rise and leave the water. Suitable is a water temperature of 70 ° C.
  • sensitive workpieces such as optical workpieces made of glass, are processed, the water is advantageously cooled before the nozzle 9 back to room temperature. As a result, stresses in the workpiece are avoided, which could lead to deformations or cracks.
  • a cooling element which with a is cooled by continuous cooling liquid, placed around the line 10.
  • FIG. 1 An alternative embodiment of the device 1 according to the invention is shown in FIG.
  • the abrasive liquid 3 is also in this embodiment in a closed circuit, which is indicated by the arrows 6.
  • the liquid 3 used is again water.
  • no nozzle 9 (FIG. 1) is used in this example. Instead, the abrasive liquid 3 exits through a delivery head 14. The acceleration of the water 3 takes place in the gap 15, which is formed between the head 14 and the surface S. To regulate the gap 15, the holding device 8 as indicated by the arrows B also displaceable in a vertical direction. The acceleration is greater the smaller the area of the gap compared to the cross-sectional area of the delivery line 10. The ratio of the cross-sectional area of the delivery line to the area of the gap is 10: 1 in this example.
  • ultrasonic waves 17 are generated in the tank.
  • the ultrasonic sources 16 are fixed to the inner walls of the tank 12.
  • the gas is displaced by the ultrasonic waves 17 from the water 3.
  • the air can also be withdrawn if e.g. Ultrasonic transmitter 16 are connected to the line 10 or the pump 7. Then, an opening for removal of the air separated from the water must be provided in the conduit 10.
  • the water By adding chemicals to the tank 12, the water can be degassed. Since many chemical reactions take place preferably at elevated temperature, the addition is useful, in particular in an arrangement according to FIG. With the heater 4, the water is brought to a temperature of 70 ° C. The total content of air in the water can thus be reduced to approximately 1% of the total volume.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

The grinding and/or polishing device (1) grinds material from a surface (S) of a workpiece (2), grinding it with abrasive particles (5) supplied in a liquid (3). The grinding device includes a device for setting the gas content in the fluid, in particular, to remove a gas (4) usually air, from the fluid; this may include a pump (7).

Description

Die Erfindung betrifft eine Vorrichtung und ein Verfahren zum Abtragen von Material beim Schleifen und/oder Polieren von Oberflächen von Werkstücken gemäss den unabhängigen Patentansprüchen.The invention relates to a device and a method for removing material during grinding and / or polishing of surfaces of workpieces according to the independent claims.

Es ist bekannt, Oberflächen mit Abrasivmittel-Teilchen, die in einer Flüssigkeit gefördert werden, zu Schleifen oder zu Polieren. Das hat den Vorteil, dass auf ein Schleifwerkzeug verzichtet werden kann.It is known to sand or polish surfaces with abrasive particles conveyed in a liquid. This has the advantage that it is possible to dispense with a grinding tool.

Die Abtragrate hängt einerseits von der Grösse der Abrasivmittel-Teilchen im Strahl ab, und andererseits von der Energie und dadurch von der Geschwindigkeit der Partikel zum Zeitpunkt, wenn sie auf die Oberfläche prallen. Als Abtragrate wird die Menge des abgetragenen Materials pro Zeit bezeichnet.The rate of removal depends on the one hand on the size of the abrasive particles in the beam, and on the other hand on the energy and thus the speed of the particles at the time when they hit the surface. The rate of removal is the amount of material removed per time.

Aus US 5 700 181 sind beispielsweise ein Verfahren zum Schleifen und eine Düse zum Beschleunigen der Abrasiv-Flüssigkeit bekannt. Die Abrasiv-Flüssigkeit wird unter hohem Druck in die Düse gefördert und von dort auf die Oberfläche beschleunigt. Die Beschleunigung findet einerseits in der Düse, andererseits im Spalt zwischen der Düse und dem Werkstück statt.From US 5,700,181, for example, a method for grinding and a nozzle for accelerating the abrasive liquid are known. The abrasive liquid is conveyed under high pressure into the nozzle and accelerated from there to the surface. The acceleration takes place on the one hand in the nozzle, on the other hand in the gap between the nozzle and the workpiece.

Ein ähnliches Verfahren ist aus EP 1 409 199 bekannt. Statt einer Düse wird ein Werkzeug mit einem breiten Auslass verwendet. Die Beschleunigung der Abrasivmittel-Teilchen findet im Spalt zwischen dem Auslass und der Oberfläche statt.A similar process is known from EP 1 409 199. Instead of a nozzle, a tool with a wide outlet is used. The acceleration of the abrasive particles takes place in the gap between the outlet and the surface.

Die bekannten Verfahren haben Nachteil, dass die Oberflächenqualität nicht immer befriedigend ist. Die Oberflächenqualität hängt von der Rauheit und der Sauberkeit der Oberfläche ab (ISO Norm 10110). Als Rauheit wird die mittlere Abweichung der Oberflächenhöhe pro Fläche definiert. Die Sauberkeit ergibt sich aus der Anzahl der Fremdstoffe pro Fläche.The known methods have the disadvantage that the surface quality is not always satisfactory. The surface quality depends on the roughness and cleanliness of the surface (ISO standard 10110). As roughness, the average deviation of the surface height per area is defined. The cleanliness results from the number of foreign substances per area.

Besonders bei optischen Elementen, wo äusserste Genauigkeit gefordert wird, ist das Erreichen von guter Oberflächenqualität wichtig.Especially with optical elements, where extreme accuracy is required, the achievement of good surface quality is important.

Es ist daher die Aufgabe der vorliegenden Erfindung, die Nachteile des Bekannten zu vermeiden, also insbesondere eine Vorrichtung und ein Verfahren zum Schleifen bzw. Polieren von Oberflächen mit homogenen Schleifbildern zu schaffen. Die Erfindung zielt insbesondere auf das Optimieren der Oberflächenqualität von optischen Bauteilen ab.It is therefore the object of the present invention to avoid the disadvantages of the known, ie in particular to provide a device and a method for grinding or polishing surfaces with homogeneous sanding images. The invention aims in particular at optimizing the surface quality of optical components.

Diese Aufgabe wird mit einer Vorrichtung und mit einem Verfahren zum Abtragen von Material beim Schleifen bzw. Polieren von Oberflächen gemäss den unabhängigen Patentansprüchen gelöst. Überraschend hat sich gezeigt, dass durch das Entziehen von Luft aus der Abrasiv-Flüssigkeit homogenere Schleifbilder erreicht werden können.This object is achieved with a device and with a method for removing material during the grinding or polishing of surfaces according to the independent patent claims. Surprisingly, it has been shown that by removing air from the abrasive liquid more homogeneous sanding images can be achieved.

Die Vorrichtung zum Abtragen von Material einer Oberfläche eines Werkstücks beim Schleifen bzw. Polieren der Oberfläche mittels Abrasivmittel-Teilchen, die von einer Flüssigkeit gefördert werden, enthält eine Einrichtung zum Einstellen, insbesondere zum Entziehen, des Gasanteils aus der Flüssigkeit.The device for removing material from a surface of a workpiece when grinding or polishing the surface by means of abrasive particles which are conveyed by a liquid contains a device for adjusting, in particular for removing, the gas component from the liquid.

Es hat sich überraschenderweise gezeigt, dass sich durch Reduktion von Gaseinschlüssen in der Abrasiv-Flüssigkeit wesentlich homogenere Oberflächen mit höherer Qualität beim Schleifen oder Polieren erreichen lassen. Vor allem optische Oberflächen lassen sich auf diese Weise wesentlich verbessern.It has surprisingly been found that by reducing gas inclusions in the abrasive liquid much more homogeneous surfaces with higher quality during grinding or Achieve polishing. Above all, optical surfaces can be significantly improved in this way.

Dieses Gas ist hauptsächlich Luft, weil Luft in natürlicher Weise in Flüssigkeiten enthalten ist. Die Erfindung bezieht sich aber auch auf andere Gase, z.B. CO2 oder Sauerstoff, die in Flüssigkeiten gebunden, gelöst bzw. gemischt sein können.This gas is mainly air because air is naturally contained in liquids. However, the invention also relates to other gases, for example CO 2 or oxygen, which may be bound, dissolved or mixed in liquids.

Die Einrichtung zum Entziehen des Gases aus der Flüssigkeit kann unterschiedliche Ausführungen haben. Beispielsweise kann das Gas der Flüssigkeit entzogen werden, indem diese in Vibrationen versetzt wird. Dies kann durch eine mechanische Vibrationseinheit oder auch durch das Erzeugen von Ultraschallschwingungen in der Flüssigkeit erreicht werden.The device for removing the gas from the liquid may have different designs. For example, the gas can be removed from the liquid by causing it to vibrate. This can be achieved by a mechanical vibration unit or by generating ultrasonic vibrations in the liquid.

Der Gasgehalt in der Flüssigkeit kann auch reduziert werden, indem die Flüssigkeit erwärmt wird oder indem Druck auf die Flüssigkeit ausgeübt wird. Auch eine Membranentgasung mit oder ohne Hilfe eines Unterdrucks kann eingesetzt werden. Bei einer Membranentgasung wird das Gas der Flüssigkeit durch eine Membran entzogen, welche gas- aber nicht flüssigkeitsdurchlässig ist. Membranentgasungen werden beispielsweise in der Turbinenindustrie oder beim Tintenstrahl-Druckverfahren eingesetzt.The gas content in the liquid can also be reduced by heating the liquid or by applying pressure to the liquid. A membrane degassing with or without the help of a negative pressure can be used. In a membrane degassing, the gas is withdrawn from the liquid through a membrane, which is gas but not liquid permeable. Membrane degassing is used, for example, in the turbine industry or in the ink-jet printing process.

Ebenfalls vorteilhaft kann chemisches Entgasen sein, z.B. durch Anregen einer chemischen Reaktion mit dem in der Flüssigkeit gebundenen Gas. Weitere Möglichkeiten zum Entziehen von Gas aus der Förderflüssigkeit sind dem Fachmann bekannt und ebenfalls im Rahmen der Erfindung anwendbar.Also advantageous may be chemical degassing, e.g. by exciting a chemical reaction with the gas bound in the liquid. Further possibilities for removing gas from the delivery fluid are known to the person skilled in the art and likewise applicable within the scope of the invention.

All diese Möglichkeiten können beliebig miteinander kombiniert werden. Es ist vorteilhaft, mehrere Einrichtungen zum Entziehen des Gases aus der Flüssigkeit zu verwenden, um einen möglichst vollständigen Entzug zu erreichen. Dadurch findet das Schleifen bzw. Polieren homogener statt und die Oberflächenqualität wird besser.All these possibilities can be combined with each other. It is advantageous to use a plurality of devices for extracting the gas from the liquid to one as possible to achieve complete withdrawal. As a result, the grinding or polishing takes place more homogeneously and the surface quality is better.

Die Einrichtungen zum Entziehen des Gases können an verschiedenen Orten der Vorrichtung eingesetzt werden. Bevorzugt findet das Entziehen des Gases in oder an einem Vorratstank für die Flüssigkeit statt. Die Einrichtung zum Entziehen von Gas kann aber auch in oder an einer Förderpumpe oder Förderleitung für das Fördern des Gases angeordnet oder damit verbunden und als separates Element angeordnet sein.The means for extracting the gas can be used at different locations of the device. The removal of the gas preferably takes place in or on a storage tank for the liquid. The device for extracting gas can also be arranged in or on a feed pump or delivery line for conveying the gas or connected thereto and arranged as a separate element.

Das Gas wird vorzugsweise so weit entzogen, dass der Gasanteil in der Abrasiv-Flüssigkeit auf unter 5%, vorzugsweise unter 1% des Volumens reduziert wird.The gas is preferably withdrawn so far that the gas fraction in the abrasive liquid is reduced to below 5%, preferably below 1% of the volume.

Die erfindungsgemässe Vorrichtung ist bevorzugt zum Erzeugen eines Förderdrucks von weniger als 100 bar, besonders bevorzugt von weniger als 50 bar oder sogar weniger als 20 bar ausgelegt. Im Vergleich zu Hochdruck-Anordnungen wird so beim Fördern Energie gespart, was sich sowohl ökonomisch als auch ökologisch günstig auswirkt. Eine Reduktion des Förderdrucks lässt sich durch entsprechende, geeignete Anordnungen zum Beschleunigen der Abrasiv-Flüssigkeit erzielen. So kann beispielsweise eine Anordnung zum Beschleunigen der Abrasiv-Flüssigkeit vorgesehen werden, in welcher die Abrasiv-Flüssigkeit vorteilhaft auf eine Geschwindigkeit von über 20 m/s beschleunigt wird. Dadurch erhalten die Abrasivmittel-Teilchen die notwendige Energie, damit Material abgetragen wird. Die Energie der Teilchen wächst quadratisch mit der Geschwindigkeit des Strahls an. Die Aufprallenergie der Abrasivmittel-Teilchen ist aufgrund des Gasentzugs homogener.The device according to the invention is preferably designed to generate a delivery pressure of less than 100 bar, more preferably less than 50 bar or even less than 20 bar. Compared to high-pressure arrangements, energy is thus saved during conveying, which has an economic and ecological advantage. A reduction of the delivery pressure can be achieved by appropriate, suitable arrangements for accelerating the abrasive fluid. Thus, for example, an arrangement for accelerating the abrasive liquid can be provided, in which the abrasive liquid is advantageously accelerated to a speed of over 20 m / s. As a result, the abrasive particles receive the necessary energy, so that material is removed. The energy of the particles grows quadratically with the speed of the beam. The impact energy of the abrasive particles is more homogeneous due to the gas withdrawal.

Die Beschleunigungsanordnung kann beispielsweise eine oder mehrere Düsen aufweisen.The acceleration arrangement can have, for example, one or more nozzles.

Die Anordnung zum Beschleunigen der Abrasiv-Flüssigkeit kann auch eine Anordnung zum Einstellen des Abstands zwischen mindestens einer Austrittsöffnung der Flüssigkeit und der Oberfläche enthalten. Die Beschleunigung ist dann zwischen der mindestens einen Austrittsöffnung und der Oberfläche in Abhängigkeit des Querschnitts einer Flüssigkeitszufuhr-Öffnung und dem Querschnitt des Spalts zwischen der Oberfläche und der mindestens einen Austrittsöffnung einstellbar. Je kleiner der Spalt im Vergleich zum Querschnitt der Flüssigkeitszufuhr-Öffnung ist, desto stärker ist die Beschleunigung der Abrasiv-Flüssigkeit. Beispielsweise könnte die Anordnung gemäss EP 1 409 199 gestaltet sein.The arrangement for accelerating the abrasive liquid may also include an arrangement for adjusting the distance between at least one exit opening of the liquid and the surface. The acceleration is then adjustable between the at least one outlet opening and the surface as a function of the cross section of a liquid feed opening and the cross section of the gap between the surface and the at least one outlet opening. The smaller the gap compared to the cross section of the liquid feed opening, the stronger the acceleration of the abrasive liquid. For example, the arrangement according to EP 1 409 199 could be designed.

Die Abrasivmittel-Teilchen haben vorzugsweise einen durchschnittlichen Korndurchmesser von unter 50 µm, vorzugsweise 1 bis 10 µm. Die Korngrösse variiert aber je nach Anwendung.The abrasive particles preferably have an average grain diameter of less than 50 microns, preferably 1 to 10 microns. The grain size varies depending on the application.

Die Förderflüssigkeit ist bevorzugt vorwiegend Wasser. Andere bekannte Flüssigkeiten liegen aber ebenfalls im Rahmen der Erfindung. Beispielsweise könnten Flüssigkeiten auf Öl- oder Alkoholbasis verwendet werden.The delivery liquid is preferably predominantly water. However, other known liquids are also within the scope of the invention. For example, oil or alcohol based fluids could be used.

Weiter ist es denkbar, eine Anordnung zum Regeln des Gasentzugs vorzusehen. Beispielsweise könnte der Gasanteil in der Flüssigkeit laufend gemessen und die Intensität des Gasentzugs dementsprechend eingestellt werden. Der Gasanteil in der Flüssigkeit kann beispielsweise über die Viskosität der Flüssigkeit bestimmt werden.Further, it is conceivable to provide an arrangement for controlling the gas withdrawal. For example, the gas content in the liquid could be continuously measured and the intensity of the gas withdrawal adjusted accordingly. The gas fraction in the liquid can be determined, for example, via the viscosity of the liquid.

Beim Verfahren zum Abtragen von Material einer Oberfläche eines Werkstücks zum Schleifen bzw. Polieren der Oberfläche mit Abrasivmittel-Teilchen, die von einer Flüssigkeit gefördert werden, wird die Oberflächenbeschaffenheit durch den Entzug von Gas aus der Abrasiv-Flüssigkeit verbessert. Üblicherweise ist das Gas Luft, aber auch andere Gase sind denkbar.In the method of abrading material of a surface of a workpiece to grind or polish the surface with abrasive particles conveyed by a liquid, the surface texture is enhanced by the removal of gas from the abrasive liquid. Usually, the gas is air, but other gases are conceivable.

Es ist ein Vorteil des Verfahrens, dass die Oberflächenqualität eines Werkstücks auf einfache Weise deutlich verbessert werden kann. Insbesondere im Bereich der Optik sind äusserst glatte und saubere Oberflächen von grösster Wichtigkeit. Die Oberflächenqualität kann ausserdem ohne wesentlichen zusätzlichen Kostenaufwand verbessert werden.It is an advantage of the method that the surface quality of a workpiece can be significantly improved in a simple manner. Particularly in the field of optics, extremely smooth and clean surfaces are of utmost importance. The surface quality can also be improved without significant additional cost.

Besonders vorteilhaft wird das Gas in der Flüssigkeit auf einen Anteil von unter 5%, vorzugsweise unter 1% des Volumens reduziert.Particularly advantageously, the gas is reduced in the liquid to a proportion of less than 5%, preferably less than 1% of the volume.

Im folgenden wird die Erfindung anhand von Ausführungsbeispielen und Zeichnungen erläutert. Es zeigen:

Figur 1
eine schematische Darstellung der erfindungsgemässen Vorrichtung in einer ersten Ausführungsform, und
Figur 2
eine schematische Darstellung der erfindungsgemässen Vorrichtung in einer zweiten Ausführungsform.
In the following the invention will be explained with reference to embodiments and drawings. Show it:
FIG. 1
a schematic representation of the inventive device in a first embodiment, and
FIG. 2
a schematic representation of the inventive device in a second embodiment.

In einer ersten Ausführungsform der erfindungsgemässen Vorrichtung 1 wird das Werkstück 2 mit einer Halterung 8 in einem geschlossenen Behälter 11 gehalten. Die Halterung 8 ist entlang einer horizontalen Achse verschiebbar und um eine vertikale Achse drehbar. Dies ist mit den Pfeilen B angedeutet.In a first embodiment of the inventive device 1, the workpiece 2 is held with a holder 8 in a closed container 11. The holder 8 is slidable along a horizontal axis and rotatable about a vertical axis. This is indicated by the arrows B.

Die Oberfläche S, welche geschliffen und poliert werden soll, befindet sich auf der Oberseite des Werkstücks 2.The surface S, which is to be ground and polished, is located on the upper side of the workpiece 2.

In einem Flüssigkeitstank 12 befindet sich die Flüssigkeit 3, in diesem Beispiel Wasser. Dem Wasser 3 sind Abrasivmittel-Teilchen 5 in einer Konzentration von 10 % des Gewichts zugegeben. Als Abrasivmittel-Teilchen 5 werden Teilchen aus Silizium-Karbit mit einer durchschnittlichen Korngrösse von 7 µm eingesetzt. Die Abrasiv-Flüssigkeit 3 wird mit einer Pumpe 7 in Richtung der Pfeile 6 durch die Förderleitung 10 gefördert. Der Förderdruck beträgt 12 bar.In a liquid tank 12 is the liquid 3, in this example water. To the water 3 are added abrasive particles 5 in a concentration of 10% by weight. As abrasive particles 5 particles of silicon carbide are used with an average particle size of 7 microns. The abrasive liquid 3 is conveyed by a pump 7 in the direction of the arrows 6 through the delivery line 10. The delivery pressure is 12 bar.

Die Förderleitung 10 führt in den Innenraum des Behälters 11. Dort wird das Wasser 3 in einer mit einer Düse 9 auf ca. 40 m/s beschleunigt. Die Düse 9 ist auf die Oberfläche S gerichtet, die mit der Haltevorrichtung 8 darunter bewegt wird.The delivery line 10 leads into the interior of the container 11. There, the water is accelerated in a 3 with a nozzle 9 to about 40 m / s. The nozzle 9 is directed to the surface S, which is moved with the holding device 8 below.

Das verwendete Wasser 3 wird über einen Abfluss 13 wieder in den Tank 12 geführt. Die Abrasivmittel-Teilchen 5 befinden sich also in einem geschlossenen Kreislauf, welcher mit den Pfeilen 6 angedeutet ist. Dadurch wird der Materialverbrauch wesentlich reduziert.The used water 3 is returned to the tank 12 via a drain 13. The abrasive particles 5 are thus in a closed circuit, which is indicated by the arrows 6. As a result, the material consumption is significantly reduced.

Damit das Wasser 3 möglichst wenig Gaseinschlüsse, insbesondere Luft, aufweist, wird es mit einer Heizung 4 erwärmt. Da die Löslichkeit von Luft im Wasser mit zunehmender Temperatur sinkt, bilden sich Luftbläschen, die aufsteigen und das Wasser verlassen. Geeignet ist eine Wassertemperatur von 70 °C. Wenn empfindliche Werkstücke, z.B. optische Werkstücke aus Glas, bearbeitet werden, wird das Wasser vorteilhaft vor der Düse 9 wieder auf Raumtemperatur abgekühlt. Dadurch werden Spannungen im Werkstück vermieden, die zu Verformungen oder Rissen führen könnten. Zum Abkühlen wird beispielsweise ein Kühlelement, das mit einer durchlaufenden Kühlflüssigkeit gekühlt wird, um die Leitung 10 gelegt.So that the water 3 has as little gas inclusions, in particular air, it is heated by a heater 4. As the solubility of air in the water decreases with increasing temperature, air bubbles form which rise and leave the water. Suitable is a water temperature of 70 ° C. If sensitive workpieces, such as optical workpieces made of glass, are processed, the water is advantageously cooled before the nozzle 9 back to room temperature. As a result, stresses in the workpiece are avoided, which could lead to deformations or cracks. For cooling, for example, a cooling element, which with a is cooled by continuous cooling liquid, placed around the line 10.

Eine alternative Ausführungsform der erfindungsgemässen Vorrichtung 1 ist in Figur 2 dargestellt. Wie im Ausführungsbeispiel nach Figur 1 befindet sich die Abrasiv-Flüssigkeit 3 auch bei dieser Ausführungsform in einem geschlossenen Kreislauf, der durch die Pfeile 6 angedeutet ist. Die verwendete Flüssigkeit 3 ist wiederum Wasser.An alternative embodiment of the device 1 according to the invention is shown in FIG. As in the embodiment of Figure 1, the abrasive liquid 3 is also in this embodiment in a closed circuit, which is indicated by the arrows 6. The liquid 3 used is again water.

Zur Beschleunigung des Wassers 3 auf die Oberfläche S des Werkstücks 2 wird in diesem Beispiel keine Düse 9 (Figur 1) verwendet. Statt dessen tritt die Abrasiv-Flüssigkeit 3 durch einen Förderkopf 14 aus. Die Beschleunigung des Wassers 3 findet im Spalt 15 statt, der zwischen dem Kopf 14 und der Oberfläche S gebildet wird. Zur Regulierung des Spalts 15 ist die Haltevorrichtung 8 wie mit den Pfeilen B angedeutet auch in eine vertikale Richtung verschiebbar. Die Beschleunigung ist umso grösser, je kleiner die Fläche des Spalts im Vergleich zur Querschnittsfläche der Förderleitung 10 ist. Das Verhältnis der Querschnittsfläche der Förderleitung zur Fläche des Spalts beträgt in diesem Beispiel 10 : 1.In order to accelerate the water 3 onto the surface S of the workpiece 2, no nozzle 9 (FIG. 1) is used in this example. Instead, the abrasive liquid 3 exits through a delivery head 14. The acceleration of the water 3 takes place in the gap 15, which is formed between the head 14 and the surface S. To regulate the gap 15, the holding device 8 as indicated by the arrows B also displaceable in a vertical direction. The acceleration is greater the smaller the area of the gap compared to the cross-sectional area of the delivery line 10. The ratio of the cross-sectional area of the delivery line to the area of the gap is 10: 1 in this example.

Zum Entziehen von Gas aus dem Wasser 3 werden im Tank 12 Ultraschall-Wellen 17 erzeugt. Die Ultraschall-Quellen 16 sind an den Innenwänden des Tanks 12 befestigt. Das Gas wird durch die Ultraschall-Wellen 17 aus dem Wasser 3 verdrängt. Je nach Bauart wäre es auch möglich, die Quellen 16 auf der Aussenseite des Tanks 12 zu befestigen. Dann würden der gesamte Tank 12 in Ultraschall-Schwingungen versetzt werden.To remove gas from the water 3 12 ultrasonic waves 17 are generated in the tank. The ultrasonic sources 16 are fixed to the inner walls of the tank 12. The gas is displaced by the ultrasonic waves 17 from the water 3. Depending on the design, it would also be possible to secure the sources 16 on the outside of the tank 12. Then the entire tank 12 would be vibrated ultrasonically.

Selbstverständlich sind andere Ausführungsformen der Erfindung realisierbar. Die hier erwähnten Beispiele dienen nur zur Erläuterung und haben keine einschränkende Wirkung.Of course, other embodiments of the invention can be realized. The examples mentioned here are for illustration only and have no limiting effect.

Die Luft lässt sich auch entziehen, wenn z.B. Ultraschall-Sender 16 mit der Leitung 10 oder der Pumpe 7 verbunden sind. Dann muss in der Leitung 10 eine Öffnung zum Entzug der vom Wasser getrennten Luft vorgesehen sein.The air can also be withdrawn if e.g. Ultrasonic transmitter 16 are connected to the line 10 or the pump 7. Then, an opening for removal of the air separated from the water must be provided in the conduit 10.

Auch durch Beigabe von Chemikalien in den Tank 12 lässt sich das Wasser entgasen. Da viele chemische Reaktionen bevorzugt bei erhöhter Temperatur stattfinden, ist die Beigabe insbesondere in einer Anordnung nach Figur 1 sinnvoll. Mit der Heizung 4 wird das Wasser auf eine Temperatur von 70 °C gebracht. Der Gesamtgehalt an Luft im Wasser kann somit auf ca. l % des Gesamtvolumens reduziert werden.By adding chemicals to the tank 12, the water can be degassed. Since many chemical reactions take place preferably at elevated temperature, the addition is useful, in particular in an arrangement according to FIG. With the heater 4, the water is brought to a temperature of 70 ° C. The total content of air in the water can thus be reduced to approximately 1% of the total volume.

Claims (18)

Vorrichtung (1) zum Abtragen von Material einer Oberfläche (S) eines Werkstücks (2) beim Schleifen und/oder Polieren der Oberfläche (S) mittels Abrasivmittel-Teilchen (5), die von einer Flüssigkeit (3) gefördert werden,
enthaltend eine Einrichtung (4; 16,17) zum Einstellen des Gasanteils in der Flüssigkeit (3), insbesondere Entziehen von Gas (4), insbesondere Luft, aus der Flüssigkeit (3).Device (1) for removing material from a surface (S) of a workpiece (2) during grinding and / or polishing of the surface (S) by means of abrasive particles (5) conveyed by a liquid (3),
containing means (4; 16, 17) for adjusting the proportion of gas in the liquid (3), in particular withdrawing gas (4), in particular air, from the liquid (3). Vorrichtung (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Einrichtung (4; 16,17) zum Entziehen des Gases (4) aus der Flüssigkeit (3) mit einem Tank (12) für die Flüssigkeit (3), mit einer Pumpe (7) zum Fördern der Flüssigkeit (3) und/oder mit einer Förderleitung (10) für die Flüssigkeit (3) verbunden ist.Apparatus (1) according to claim 1, characterized in that the means (4; 16,17) for withdrawing the gas (4) from the liquid (3) to a tank (12) for the liquid (3), with a pump (7) for conveying the liquid (3) and / or with a delivery line (10) for the liquid (3) is connected. Vorrichtung (1) nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Einrichtung (4; 16,17) zum Entziehen von Gas (4) eine Vibrationseinrichtung (16,17), eine Pumpanordnung, eine Erwärmungsanordnung (4) und/oder chemische Mittel umfasst.Device (1) according to claim 1 or 2, characterized in that the device (4; 16,17) for withdrawing gas (4) comprises a vibration device (16,17), a pumping arrangement, a heating arrangement (4) and / or chemical Comprises means. Vorrichtung (1) nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Vorrichtung (1) zum Erzeugen eines Förderdrucks von weniger als 100 bar, vorzugsweise weniger als 50 bar, ausgelegt ist.Device (1) according to one of claims 1 to 4, characterized in that the device (1) for generating a delivery pressure of less than 100 bar, preferably less than 50 bar, is designed. Vorrichtung (1) nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass eine Anordnung (9; 14,15) zum Beschleunigen der Abrasiv-Flüssigkeit (3) vorgesehen ist.Device (1) according to one of claims 1 to 4, characterized in that an arrangement (9; 14, 15) is provided for accelerating the abrasive fluid (3). Vorrichtung (1) nach Anspruch 5, dadurch gekennzeichnet, dass die Abrasiv-Flüssigkeit (3) auf eine Geschwindigkeit von über 20 m/s beschleunigbar ist.Device (1) according to claim 5, characterized in that the abrasive liquid (3) can be accelerated to a speed of more than 20 m / s. Vorrichtung (1) nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass die Anordnung (9; 14,15) zum Beschleunigen mindestens eine Düse (9) aufweist.Device (1) according to claim 5 or 6, characterized in that the arrangement (9; 14,15) for accelerating at least one nozzle (9). Vorrichtung (1) nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass die Anordnung (9; 14,16) zum Beschleunigen der Abrasiv-Flüssigkeit (3) eine Anordnung (B) zum Einstellen des Abstands zwischen mindestens einer Austrittsöffnung (14) der Flüssigkeit (3) und der Oberfläche (S) enthält und die Beschleunigung zwischen der mindestens einen Austrittsöffnung (14) und der Oberfläche (S) in Abhängigkeit von Querschnitt einer Flüssigkeitszufuhr-Öffnung und dem Querschnitt des Spalts (15) zwischen der Oberfläche und der mindestens einen Austrittsöffnung (14) einstellbar ist.Apparatus (1) according to claim 5 or 6, characterized in that the arrangement (9; 14,16) for accelerating the abrasive liquid (3) has an arrangement (B) for adjusting the distance between at least one outlet opening (14) of the liquid (3) and the surface (S) and the acceleration between the at least one outlet opening (14) and the surface (S) in dependence on cross section of a liquid feed opening and the cross section of the gap (15) between the surface and the at least one Outlet opening (14) is adjustable. Vorrichtung (1) nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die Vorrichtung (1) zur Verwendung von Abrasivmittel-Teilchen (5) mit einem durchschnittlichen Korndurchmesser von 5 bis 50 µm ausgelegt ist.Device (1) according to one of claims 1 to 8, characterized in that the device (1) for the use of abrasive particles (5) is designed with an average grain diameter of 5 to 50 microns. Vorrichtung (1) nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Flüssigkeit (3) vorwiegend Wasser ist.Device (1) according to one of claims 1 to 9, characterized in that the liquid (3) is predominantly water. Vorrichtung (1) nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Vorrichtung (1) zum Entziehen des Gases (4) auf einen Gasgehalt von unter 5%, vorzugsweise unter 1% des Volumens ausgelegt ist.Device (1) according to one of the preceding claims, characterized in that the device (1) for removing the gas (4) is designed for a gas content of less than 5%, preferably less than 1% of the volume. Verfahren zum Abtragen von Material einer Oberfläche (S) eines Werkstücks (2) zum Schleifen und/oder Polieren der Oberfläche (S) mit Abrasivmittel-Teilchen (5), die von einer Flüssigkeit (3) gefördert werden,
dadurch gekennzeichnet, dass der Gasanteil in der Flüssigkeit eingestellt wird.Method for removing material from a surface (S) of a workpiece (2) for grinding and / or polishing the surface (S) with abrasive particles (5) conveyed by a liquid (3)
characterized in that the gas content is adjusted in the liquid. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass der Abrasiv-Flüssigkeit (3) Gas (4), insbesondere Luft, entzogen wird und/oder dass eine Flüssigkeit (3) mit einem reduzierten Gasanteil verwendet wird.A method according to claim 12, characterized in that the abrasive liquid (3) gas (4), in particular air, is withdrawn and / or that a liquid (3) is used with a reduced proportion of gas. Verfahren nach Anspruch 12 oder 13, dadurch gekennzeichnet, dass das Gas (4) auf einen Anteil von unter 5%, vorzugsweise unter 1% des Volumens reduziert wird.A method according to claim 12 or 13, characterized in that the gas (4) is reduced to a proportion of less than 5%, preferably less than 1% of the volume. Verfahren nach einem der Ansprüche 12 bis 14, dadurch gekennzeichnet, dass mit Abrasivmittel-Teilchen (5) mit einem durchschnittlichen Korndurchmesser von 5 bis 50 µm die Oberfläche (S) geschliffen und/oder poliert wird.Method according to one of claims 12 to 14, characterized in that with abrasive particles (5) having an average grain diameter of 5 to 50 microns, the surface (S) is ground and / or polished. Verfahren nach einem der Ansprüche 12 bis 15, dadurch gekennzeichnet, dass der Förderdruck der Abrasiv-Flüssigkeit (3) zum Schleifen und/oder Polieren bei unter 100 bar, vorzugsweise unter 50 bar, konstant gehalten wird.Method according to one of claims 12 to 15, characterized in that the delivery pressure of the abrasive liquid (3) for grinding and / or polishing at below 100 bar, preferably below 50 bar, is kept constant. Verfahren nach einem der Ansprüche 12 bis 16, dadurch gekennzeichnet, dass als Flüssigkeit (4) vorwiegend Wasser verwendet wird.Method according to one of claims 12 to 16, characterized in that as liquid (4) predominantly water is used. Verwendung einer Flüssigkeit (3) mit reduziertem Gasanteil, insbesondere mit einem Gasanteil von unter 5%, besonders vorteilhaft unter 1% des Volumens als Abrasiv-Flüssigkeit (3) zur Erhöhung der Oberflächenqualität eines Werkstücks (2).Use of a liquid (3) with a reduced proportion of gas, in particular with a gas content of less than 5%, particularly advantageous Below 1% of the volume as abrasive liquid (3) to increase the surface quality of a workpiece (2).
EP04017330A 2004-07-22 2004-07-22 Device and process for grinding and/or polishing surfaces Expired - Lifetime EP1618992B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04017330A EP1618992B1 (en) 2004-07-22 2004-07-22 Device and process for grinding and/or polishing surfaces
AT04017330T ATE411138T1 (en) 2004-07-22 2004-07-22 APPARATUS AND METHOD FOR GRINDING AND/OR POLISHING SURFACES
DE502004008269T DE502004008269D1 (en) 2004-07-22 2004-07-22 Apparatus and method for grinding and / or polishing surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04017330A EP1618992B1 (en) 2004-07-22 2004-07-22 Device and process for grinding and/or polishing surfaces

Publications (2)

Publication Number Publication Date
EP1618992A1 true EP1618992A1 (en) 2006-01-25
EP1618992B1 EP1618992B1 (en) 2008-10-15

Family

ID=34925869

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04017330A Expired - Lifetime EP1618992B1 (en) 2004-07-22 2004-07-22 Device and process for grinding and/or polishing surfaces

Country Status (3)

Country Link
EP (1) EP1618992B1 (en)
AT (1) ATE411138T1 (en)
DE (1) DE502004008269D1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117680779A (en) * 2024-02-04 2024-03-12 成都鼎易精密模具有限公司 Special processing method for complex cavity

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB225639A (en) * 1923-09-18 1924-12-11 James Borrowman Maclean Improvements in and relating to apparatus for degasifying liquids
US5372634A (en) * 1993-06-01 1994-12-13 The United States Of America As Represented By The Secretary Of The Navy Sonic apparatus for degassing liquids
US5384989A (en) * 1993-04-12 1995-01-31 Shibano; Yoshihide Method of ultrasonically grinding workpiece
US5700181A (en) * 1993-09-24 1997-12-23 Eastman Kodak Company Abrasive-liquid polishing and compensating nozzle
US20020132568A1 (en) * 2001-01-31 2002-09-19 Nidek Co., Ltd. Tank unit for grinding water used in processing eyeglass lens, and eyeglass lens processing apparatus having the same
DE10113599A1 (en) * 2001-03-20 2002-10-02 Fisba Optik Ag St Gallen Device for the abrasive processing of surfaces of optical elements

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB225639A (en) * 1923-09-18 1924-12-11 James Borrowman Maclean Improvements in and relating to apparatus for degasifying liquids
US5384989A (en) * 1993-04-12 1995-01-31 Shibano; Yoshihide Method of ultrasonically grinding workpiece
US5372634A (en) * 1993-06-01 1994-12-13 The United States Of America As Represented By The Secretary Of The Navy Sonic apparatus for degassing liquids
US5700181A (en) * 1993-09-24 1997-12-23 Eastman Kodak Company Abrasive-liquid polishing and compensating nozzle
US20020132568A1 (en) * 2001-01-31 2002-09-19 Nidek Co., Ltd. Tank unit for grinding water used in processing eyeglass lens, and eyeglass lens processing apparatus having the same
DE10113599A1 (en) * 2001-03-20 2002-10-02 Fisba Optik Ag St Gallen Device for the abrasive processing of surfaces of optical elements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117680779A (en) * 2024-02-04 2024-03-12 成都鼎易精密模具有限公司 Special processing method for complex cavity
CN117680779B (en) * 2024-02-04 2024-04-16 成都鼎易精密模具有限公司 Special processing method for complex cavity

Also Published As

Publication number Publication date
EP1618992B1 (en) 2008-10-15
ATE411138T1 (en) 2008-10-15
DE502004008269D1 (en) 2008-11-27

Similar Documents

Publication Publication Date Title
EP0597911B1 (en) Plant for the production of spherical alginate pellets
EP0625795B1 (en) Process for the wet chemical processing of objects
EP1618993B1 (en) Process for grinding and/or polishing surfaces
DE3640645A1 (en) METHOD FOR SAWING CRYSTAL RODS OR BLOCKS BY MEANS OF INTERNAL HOLE SAWS IN THIN WINDOWS
DE3787529T2 (en) BLASTING TREATMENT.
DE3023886A1 (en) METHOD AND DEVICE FOR MACHINING AND PROCESSING MATERIALS, ESPECIALLY FLOWABLE SOLID MATERIAL MIXTURES AND DISPERSIONS, BY VIBRATING TOOLS
DE2725849C3 (en) Apparatus for the production of spherical particles
DE69806779T2 (en) DYNAMIC MEMBRANE FILTRATION BY MEANS OF VIBRATIONS
DE69517516T2 (en) SPIN JET SYSTEM
DE112017002641T5 (en) cleaning fluid
DE69811392T2 (en) METHOD AND DEVICE FOR MACHINING A WORKPIECE
EP1618992B1 (en) Device and process for grinding and/or polishing surfaces
DE3533340A1 (en) METHOD FOR CUTTING GLASS OF DIFFERENT STRENGTH
DE3035331C2 (en) Apparatus for the production of spherical particles
WO2023011843A1 (en) Apparatus and method for separating fluid mixtures
EP0980712A1 (en) Process and device for separating absorbent and buoyant material from substance mixtures by sink-float-separation
EP3188822B1 (en) Selfcleaning dead-end filter system with microsieve
EP0494305A1 (en) Method for abrasive treatment of articles
DE102023203263A1 (en) Water production system and wafer manufacturing process
DE102020113321B4 (en) Embedding press for specimens
EP0611275B1 (en) Process and apparatus for separating small workpieces
DE3041128A1 (en) ELECTRIC MACHINING DEVICE
DE102022128599A1 (en) Dosing device, additive manufacturing device and dosing method
CN114346913A (en) Nano cerium oxide liquid auxiliary grinding supply system and method
DE112020004428T5 (en) Systems and processes for intermediate and final treatment of products using high pressure and water jets

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL HR LT LV MK

17P Request for examination filed

Effective date: 20060717

AKX Designation fees paid

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

17Q First examination report despatched

Effective date: 20061108

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: HEPP WENGER RYFFEL AG

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REF Corresponds to:

Ref document number: 502004008269

Country of ref document: DE

Date of ref document: 20081127

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090126

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090115

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090316

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090115

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

26N No opposition filed

Effective date: 20090716

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

BERE Be: lapsed

Owner name: FISBA OPTIK A.G.

Effective date: 20090731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090116

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090722

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090722

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081015

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20160628

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20160711

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20160720

Year of fee payment: 13

Ref country code: GB

Payment date: 20160720

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20160927

Year of fee payment: 13

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502004008269

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: NL

Ref legal event code: MM

Effective date: 20170801

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20170722

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20180330

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170731

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170731

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180201

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170722

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170801

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170731