EP1618993B1 - Process for grinding and/or polishing surfaces - Google Patents

Process for grinding and/or polishing surfaces Download PDF

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Publication number
EP1618993B1
EP1618993B1 EP04017335A EP04017335A EP1618993B1 EP 1618993 B1 EP1618993 B1 EP 1618993B1 EP 04017335 A EP04017335 A EP 04017335A EP 04017335 A EP04017335 A EP 04017335A EP 1618993 B1 EP1618993 B1 EP 1618993B1
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EP
European Patent Office
Prior art keywords
liquid
gas
abrasive
grinding
polishing
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EP04017335A
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German (de)
French (fr)
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EP1618993A1 (en
EP1618993B9 (en
Inventor
Oliver Dr. Fähnle
Torsten Wons
Wilhelmus Messelink
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Fisba Optik AG
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Fisba Optik AG
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Priority to DE502004008271T priority Critical patent/DE502004008271D1/en
Priority to EP04017335A priority patent/EP1618993B9/en
Priority to AT04017335T priority patent/ATE411139T1/en
Priority to US11/186,802 priority patent/US20060019580A1/en
Publication of EP1618993A1 publication Critical patent/EP1618993A1/en
Priority to US11/775,018 priority patent/US20080261493A1/en
Publication of EP1618993B1 publication Critical patent/EP1618993B1/en
Application granted granted Critical
Publication of EP1618993B9 publication Critical patent/EP1618993B9/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0084Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a mixture of liquid and gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C11/00Selection of abrasive materials or additives for abrasive blasts
    • B24C11/005Selection of abrasive materials or additives for abrasive blasts of additives, e.g. anti-corrosive or disinfecting agents in solid, liquid or gaseous form
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0007Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier

Definitions

  • the invention relates to a method for removing material during the grinding and / or polishing of surfaces of workpieces according to claim 1.
  • the removal rate of the surface depends on the size of the abrasive particles in the jet. On the other hand, it depends on the energy and thereby the speed of the particles at the time when they hit the surface.
  • the material removal rate per time is considered as the removal rate.
  • the removal rate should be set individually as simply as possible.
  • This object is achieved by a method for removing material during grinding and / or polishing surfaces according to claim 1. It has surprisingly been found that with increasing proportion of gas with the same size of the abrasive grain and the same process parameters (for example delivery pressure), the removal rate is increased. Therefore, when the device is provided with means for adjusting the gas content in the liquid, the rate of removal can be easily controlled or changed. Thanks to the present invention, it is possible to achieve high removal rates with relatively small grain sizes. By setting a high proportion of gas, the removal rate is increased without the need to use larger abrasive grain.
  • the removal rate and also the transition from coarse grinding to fine grinding and polishing can be varied continuously.
  • the grain size of the abrasive grains and the delivery pressure of the abrasive liquid for coarse and fine grinding and for polishing can be the same.
  • the removal rate is easily controlled and changed as needed. It can be worked with the same delivery pressure and with the same abrasive grain. The change from one grain size to another and the associated cleaning of the machine is eliminated.
  • the device for removing material from a surface of a workpiece during grinding or polishing of the surface by means of abrasive particles conveyed by a liquid for this purpose contains a device for adding gas to the liquid.
  • This gas is preferably air because air is inexpensive and does not pollute the environment.
  • gases or gas mixtures for example argon, helium, nitrogen, CO 2 or oxygen, but can also be used and are not excluded from the invention.
  • the gas can be contained either in the form of gas bubbles or in dissolved or bound form in the liquid.
  • the present invention has the advantage that with a device as needed a workpiece can be both ground and polished.
  • Expensive and procedurally delicate steps such as cleaning the workpiece or the device or the transport of the workpiece from one device to another thus eliminated.
  • the advantages of the present invention are particularly advantageous in the grinding and polishing of high precision parts, e.g. Parts of optics or medical technology. Due to the broad applicability of the device and the method, both spherical and aspherical shapes can be precisely ground and polished.
  • the device for adding the gas to the liquid comprises an arrangement for adjusting the amount of added gas. It is advantageous if the amount of gas supplied is continuously variable. This can be used e.g. increase the removal rate by increasing the amount of gas. Reducing the amount of gas leads to smaller removal.
  • the device for adding the gas to the liquid can be arranged, for example, in a tank for the liquid be. It is also conceivable to install the device in a pump for conveying the liquid or in a conveying line for the liquid. Combinations thereof for more efficient and controlled addition of the gas are advantageous.
  • the gas can be added with a propeller in the tank, for example.
  • a pressure connection to the line, the tank or the pump can be provided.
  • chemically oxidize the gas e.g. to be enclosed with tablets.
  • a chemical substance pressed in tablet form can be added to the water, which reacts on contact with water and gives off gaseous reaction products.
  • gas to the water electrolytically or to generate gas electrolytically in the water.
  • the gas content is controlled and adjusted according to the invention. Typically, the amount of gas (in volume percent) is adjusted to desired levels. In this case, the gas can either be dissolved or bound in the liquid or present in the form of bubbles therein.
  • the mixing ratio can be determined by the viscosity of the abrasive fluid. ever the greater the proportion of gas in the liquid, the lower the viscosity.
  • the bubble size may be e.g. be determined optically. In order to have a favorable influence on the removal rate, it is advantageous if the resulting gas bubbles are larger than the abrasive particles.
  • the measurement preferably takes place between a pump for the abrasive fluid and an outlet port for the fluid.
  • the gas content in the liquid controls the removal rate at the surface of the workpiece.
  • the removal rate depends on the impact energy of the abrasive particles.
  • the transition from grinding to polishing surfaces can be directly controlled by the gas content in the abrasive fluid.
  • the transition from grinding to polishing can at the same time correspond to a transition from brittle to ductile removal of material from the surface. (See, eg Appl. Opt. 37, pp. 6771-6773 (1998) )
  • the removal rate is increased by the gas content in the liquid, because the gas inclusions are more compressible on impact than the liquid itself.
  • the abrasive particles are thus braked faster than the impact of the liquid just before the impact.
  • particles that are in a gas bubble are less strongly cooled when hitting the surface than particles that are surrounded by liquid. It is believed that the increased temperature increases the likelihood of cracks forming. As a result, the removal rate is increased, because in the brittle removal of material the erosion is preceded by cracking on the surface.
  • the viscosity of the abrasive liquid decreases.
  • the abrasive fluid is thereby accelerated more. This acceleration increases the impact energy of the abrasive particles.
  • a method according to the preamble of claim 1 is disclosed in document US 5,283,991 described.
  • the inventive method is designed to generate a delivery pressure of less than 100 bar, more preferably less than 50 or even less than 20 bar. Since a gas is added to the liquid, the impact energy of the abrasive particles can be increased. This allows a reduction of the delivery pressure with the same removal rate. Compared to high-pressure arrangements energy is thus saved during conveying, which has an economic and ecological advantage. A further reduction of the delivery pressure can also be achieved by appropriate, suitable arrangements for accelerating the abrasive fluid. So, for example an arrangement for accelerating the abrasive liquid are provided, in which the abrasive liquid is advantageously accelerated to a speed of about 20 m / s. As a result, the abrasive particles receive the necessary energy, so that material is removed. The energy of the particles grows quadratically with the speed of the beam.
  • the acceleration arrangement can have, for example, one or more nozzles.
  • the arrangement for accelerating the abrasive liquid may also include an arrangement for adjusting the distance between at least one exit opening of the liquid and the surface.
  • the acceleration is then adjustable between the at least one outlet opening and the surface as a function of the cross section of a liquid feed opening and the cross section of the gap between the surface and the at least one outlet opening.
  • the arrangement according to EP 1 409 199 be designed.
  • the abrasive particles have an average grain diameter less than 50 microns, preferably 1 to 10 microns ..
  • the grain size varies but depending on the application. The finer the surface to be polished, the finer abrasive particles are used.
  • the delivery liquid is preferably predominantly water.
  • other known liquids are also within the scope of the invention.
  • Other liquids e.g. oil or alcohol based may also be suitable.
  • gas inclusions of a conveying fluid for abrasive particles for influencing the removal rate when removing material of a surface of a workpiece during grinding or polishing of the surface is also within the scope of the invention.
  • the gas is preferably air.
  • the removal rate is influenced by the adjustment of the gas content in the pumped liquid, by adding a gas to the abrasive.
  • a gas is air, but other gases are not excluded from the invention.
  • the abrasive liquid is added to gas from 0 to 70% of the total volume.
  • the greater the amount of added gas the greater the removal rate.
  • To polish the surface little or no gas is added, since during polishing a low removal rate is desired.
  • the reduction of the gas supply is continuous.
  • the transition from grinding to polishing is not discrete.
  • the delivery pressure of the abrasive liquid is kept constant for grinding and polishing at below 100 bar, advantageously below 50 bar, particularly advantageously below 20 bar. This simplifies the process because the delivery pressure of the liquid does not have to be changed if the removal rate is to be varied.
  • FIG. 1 a first embodiment of the invention is shown schematically.
  • a workpiece 2 is located on a holder 10 in a closed container 11.
  • the surface S which is to be ground and polished, is located on the upper side of the workpiece 2.
  • the holder 10 is displaceable along a longitudinal axis and rotatable about a vertical axis. The movement of the holder 10 is indicated by the arrows B.
  • a liquid tank 12 In a liquid tank 12 is a liquid 3, in this example water. To the water 3 are added abrasive particles 5 in a concentration of 10% by weight. There are used abrasive particles 5 of silicon carbide with a particle size of 7 microns in diameter. The abrasive liquid 3 is conveyed by a pump 7 in the direction of the arrows 6 through the delivery line 14. The delivery pressure is 12 bar.
  • the removal of material takes place at room temperature, ie at about 21 ° C instead. Due to the mechanical stress, the abrasive fluid can heat up to approx. 25 ° C, which does not affect the removal rate negatively.
  • the delivery line 14 leads into the interior of the container 11. There, the water 3 is accelerated with a nozzle 9 to about 40 m / s. The nozzle 9 is directed to the surface S, which is moved with the holding device 10 below.
  • a pressure tank 13 In a pressure tank 13 is air 4, which can be introduced via a connecting line 16 in the water 3.
  • the air supply is varied via a valve 8. The greater the desired removal rate, the more air 4 is added to the water 3.
  • the maximum air content in the water 3 is 70% of the total volume.
  • the pressure in the tank 13 is 250 bar.
  • the air 4 is supplied at a pressure of 14 to 50 bar. It is essential here that the supply pressure of the air is greater than the delivery pressure of the water. For polishing, the air supply is prevented or at least reduced.
  • the used water 3 is fed via a drain 15 back into the tank 12.
  • the abrasive particles 5 are thus in a closed circuit, which is indicated by the arrows 6.
  • the material consumption is kept as low as possible.
  • the air supply is calibrated on a reference workpiece (not shown).
  • the removal rate can then be adjusted as needed on the workpiece 2 due to this calibration.
  • FIG. 2 An alternative embodiment of the device 1 is shown in FIG. 2 shown.
  • the abrasive liquid 3 in this embodiment in a closed circuit, which is indicated by the arrows 6.
  • the liquid 3 used is again water.
  • the abrasive liquid 3 exits through a delivery head 17.
  • the acceleration of the water 3 takes place in the gap 18, which is formed between the head 17 and the surface S.
  • the holding device 8 as indicated by the arrows B also displaceable in a vertical direction. The acceleration is greater the smaller the area of the gap compared to the cross-sectional area of the delivery line 14.
  • the ratio of the cross-sectional area of the delivery line to the area of the gap is 10: 1 in this example.
  • the removal rate is controlled by the supply of air 4 in the water 3 in the tank itself.
  • Air 4 is located in the tank 12 above the water 3 and is stirred with a propeller 19 under the water 3.
  • the propeller 19 is driven by an electric motor M. The speed of the motor M determines the amount of air 4 supplied. Since the water 3 is used in a closed circuit, the level of the water 3 is relatively constant. The propeller 19 is large enough in comparison to the water tank 12 that fluctuations in the water level do not adversely affect the amount of air supplied.
  • FIG. 3 shows a device analog FIG. 1 , in addition, however, a device for reducing the air content in the water 3 in the tank 12 is provided for carrying out a method not according to the invention.
  • the gas content of water may vary due to environmental parameters.
  • ultrasonic transducers 20 are mounted in the tank 12 to reduce the air content in the water. These send out ultrasonic waves 21, which displace the air inclusions in the water 3.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Cleaning In General (AREA)

Abstract

The assembly (1) to remove material from a workpiece surface (S), by grinding and/or polishing, uses abrasive particles (5) carried in a liquid (3) mostly of water. A gas (4) and especially air is fed into the liquid or its holding tank (12) through a volume control (8) by a pump (7). At the workstation, a jet (9) accelerates the flow of liquid and particles against the workpiece surface. A gas pressure is used for grinding, and no pressure is used for polishing.

Description

Die Erfindung betrifft ein Verfahren zum Abtragen von Material beim Schleifen und/oder Polieren von Oberflächen von Werkstücken gemäss Anspruch 1.The invention relates to a method for removing material during the grinding and / or polishing of surfaces of workpieces according to claim 1.

Es ist bekannt, Oberflächen mit Abrasivmittel-Teilchen, die in einer Flüssigkeit gefördert werden, zu schleifen oder zu polieren. Das hat den Vorteil, dass auf ein Schleifwerkzeug verzichtet werden kann.It is known to grind or polish surfaces with abrasive particles conveyed in a liquid. This has the advantage that it is possible to dispense with a grinding tool.

Die Abtragrate der Oberfläche hängt einerseits von der Grösse der Abrasivmittel-Teilchen im Strahl ab. Andererseits hängt sie von der Energie und dadurch von der Geschwindigkeit der Partikel zum Zeitpunkt ab, wenn sie auf die Oberfläche prallen. Als Abtragrate wird der Materialabtrag pro Zeit betrachtet.On the one hand, the removal rate of the surface depends on the size of the abrasive particles in the jet. On the other hand, it depends on the energy and thereby the speed of the particles at the time when they hit the surface. The material removal rate per time is considered as the removal rate.

Aus US 5 700 181 sind beispielsweise ein Verfahren zum Schleifen und eine Düse zum Beschleunigen der Abrasiv-Flüssigkeit bekannt. Die Abrasiv-Flüssigkeit wird unter hohem Druck in die Düse gefördert und von dort auf die Oberfläche beschleunigt. Die Beschleunigung findet einerseits in der Düse, andererseits im Spalt zwischen der Düse und dem zu bearbeitenden Werkstück statt.Out US 5,700,181 For example, a method of grinding and a nozzle for accelerating the abrasive liquid are known. The abrasive liquid is conveyed under high pressure into the nozzle and accelerated from there to the surface. The acceleration takes place on the one hand in the nozzle, on the other hand in the gap between the nozzle and the workpiece to be machined.

Ein ähnliches Verfahren ist aus EP 1 409 199 bekannt. Statt einer Düse wird ein Werkzeug mit einem breiten Auslass verwendet. Die Beschleunigung der Abrasivmittel-Teilchen findet im Spalt zwischen dem Auslass und der Oberfläche statt.A similar procedure is off EP 1 409 199 known. Instead of a nozzle, a tool with a wide outlet is used. The acceleration of the abrasive particles takes place in the gap between the outlet and the surface.

Diese bekannten Verfahren haben den Nachteil, dass beim stark abtragenden Bearbeiten, insbesondere Schleifen, gröbere Abrasivmittel-Teilchen verwendet werden müssen als zum Feinschleifen und Polieren. Durch die gröberen Teilchen entstehen auch gröbere Schleifspuren, die anschliessend mit dem feineren Korn geglättet werden müssen. Der Übergang von Schleifen zu Polieren kann auch nicht kontinuierlich erfolgen. Zwischen Schleifen und Feinschleifen/Polieren muss das Schleifmittel gewechselt werden.These known methods have the disadvantage that coarser abrasive particles must be used in the highly abrasive machining, especially grinding, than for fine grinding and polishing. The coarser particles also result in coarser sanding marks, which then have to be smoothed with the finer grain. The transition from grinding to polishing can not be continuous. Between grinding and fine grinding / polishing, the abrasive must be changed.

Die Verwendung von unterschiedlich groben Teilchen erfordert eine äusserst gründliche Reinigung des Geräts und des Werkstücks, wenn feiner geschliffen oder poliert werden soll. Falls beim Feinschleifen oder Polieren noch gröbere Teilchen vorhanden sind, führen diese zu tiefen Kratzspuren, die das gesamte Werkstück unbrauchbar machen können.The use of differently coarse particles requires extremely thorough cleaning of the tool and the workpiece if it is to be finely ground or polished. If coarser particles are present during fine grinding or polishing, they lead to deep scratch marks, which can render the entire workpiece unusable.

Oft werden für das Schleifen und für das Polieren unterschiedliche Geräte verwendet. Diese Geräte können beispielsweise mit unterschiedlichem Druck arbeiten. Dies erhöht die Beschaffungs- bzw. Herstellungskosten. Ausserdem muss das Werkstück während dem Bearbeitungsvorgang transportiert werden. Dies wiederum erhöht die Arbeitszeit und die Herstellungskosten. Dabei können ausserdem Verunreinigungen entstehen oder das Werkstück kann beschädigt werden,Often different devices are used for grinding and polishing. These devices can work with different pressures, for example. This increases the procurement or manufacturing costs. In addition, the workpiece must be transported during the machining process. This in turn increases working time and manufacturing costs. This can also cause contamination or the workpiece can be damaged,

Es ist die Aufgabe der vorliegenden Erfindung die Nachteile des Bekannten zu vermeiden, also insbesondere ein verbessertes Verfahren zum Schleifen und/oder Polieren von Oberflächen zu schaffen bei dem ein Wechsel zwischen Schleifen und Polieren auf einfache Art und Weise erfolgen kann. Insbesondere soll die Abtragrate auf möglichst einfache Weise individuell eingestellt werden.It is the object of the present invention to avoid the disadvantages of the known, ie in particular to provide an improved method for grinding and / or polishing surfaces in which a change between grinding and polishing can be done in a simple manner. In particular, the removal rate should be set individually as simply as possible.

Diese Aufgabe wird mit einem Verfahren zum Abtragen von Material beim Schleifen und/oder Polieren von Oberflächen gemäss Anspruch 1 gelöst. Es hat sich überraschend gezeigt, dass mit steigendem Gasanteil bei gleicher Grösse des Schleifkorns und gleichen Prozessparametern (z.B. Förderdruck) die Abtragrate erhöht wird. Wenn die Vorrichtung mit einer Einrichtung zum Einstellen des Gasanteils in der Flüssigkeit versehen ist, lässt sich daher die Abtragrate auf einfache Weise kontrollieren oder ändern. Dank der vorliegenden Erfindung ist es möglich, mit relativ kleinen Korngrössen grosse Abtragraten zu erzielen. Durch das Einstellen eines hohen Gasanteils wird die Abtragrate erhöht, ohne dass grösseres Schleifkorn eingesetzt werden muss.This object is achieved by a method for removing material during grinding and / or polishing surfaces according to claim 1. It has surprisingly been found that with increasing proportion of gas with the same size of the abrasive grain and the same process parameters (for example delivery pressure), the removal rate is increased. Therefore, when the device is provided with means for adjusting the gas content in the liquid, the rate of removal can be easily controlled or changed. Thanks to the present invention, it is possible to achieve high removal rates with relatively small grain sizes. By setting a high proportion of gas, the removal rate is increased without the need to use larger abrasive grain.

Vorteilhaft lässt sich dabei auch die Abtragrate und auch der Übergang von grobem Schleifen zum Feinschleifen und zum Polieren kontinuierlich variieren. Auch lässt sich die Korngrösse der Schleifkörner und der Förderdruck der Abrasiv-Flüssigkeit für grobes und feines Schleifen sowie für das Polieren gleich halten. Durch die Einstellung des Gasanteils in der Flüssigkeit wird die Abtragrate auf einfache Art und Weise kontrolliert und nach Bedarf geändert. Dabei kann mit gleichem Förderdruck und mit gleichem Schleifkorn gearbeitet werden. Der Wechsel von einer Korngrösse zur anderen und die damit verbundene Reinigung der Maschine entfällt.Advantageously, the removal rate and also the transition from coarse grinding to fine grinding and polishing can be varied continuously. Also, the grain size of the abrasive grains and the delivery pressure of the abrasive liquid for coarse and fine grinding and for polishing can be the same. By adjusting the gas content in the liquid, the removal rate is easily controlled and changed as needed. It can be worked with the same delivery pressure and with the same abrasive grain. The change from one grain size to another and the associated cleaning of the machine is eliminated.

Die Vorrichtung zum Abtragen von Material einer Oberfläche eines Werkstücks beim Schleifen bzw. Polieren der Oberfläche mittels Abrasivmittel-Teilchen, die von einer Flüssigkeit gefördert werden, enthält dazu eine Einrichtung zum Beimengen von Gas zur Flüssigkeit.The device for removing material from a surface of a workpiece during grinding or polishing of the surface by means of abrasive particles conveyed by a liquid for this purpose contains a device for adding gas to the liquid.

Dieses Gas ist vorzugsweise Luft, weil Luft kostengünstig ist und die Umwelt nicht belastet. Andere Gase bzw. Gasmischungen, z.B. Argon, Helium, Stickstoff, CO2 oder Sauerstoff, können aber ebenfalls verwendet werden und sind von der Erfindung nicht ausgenommen. Das Gas kann entweder in Form von Gasbläschen oder in gelöster bzw. gebundener Form in der Flüssigkeit enthalten sein.This gas is preferably air because air is inexpensive and does not pollute the environment. Other gases or gas mixtures, for example argon, helium, nitrogen, CO 2 or oxygen, but can also be used and are not excluded from the invention. The gas can be contained either in the form of gas bubbles or in dissolved or bound form in the liquid.

Die vorliegende Erfindung bringt den Vorteil, dass mit einer Vorrichtung je nach Bedarf ein Werkstück sowohl geschliffen als auch poliert werden kann. Je mehr Gas die Abrasiv-Flüssigkeit enthält, desto grösser ist die Abtragrate. Teure und verfahrenstechnisch heikle Schritte wie das Reinigen des Werkstücks oder des Geräts oder der Transport des Werkstücks von einem Gerät zu einem anderen entfallen somit.The present invention has the advantage that with a device as needed a workpiece can be both ground and polished. The more gas the abrasive fluid contains, the greater the removal rate. Expensive and procedurally delicate steps such as cleaning the workpiece or the device or the transport of the workpiece from one device to another thus eliminated.

Die Vorteile der vorliegenden Erfindung sind besonders vorteilhaft beim Schleifen und Polieren von Hochpräzisions-Teilen, wie z.B. Teilen aus der Optik oder Medizinaltechnik. Durch die breite Einsetzbarkeit der Vorrichtung und des Verfahrens können sowohl sphärische als auch asphärische Formen exakt geschliffen und poliert werden.The advantages of the present invention are particularly advantageous in the grinding and polishing of high precision parts, e.g. Parts of optics or medical technology. Due to the broad applicability of the device and the method, both spherical and aspherical shapes can be precisely ground and polished.

Es ist vorteilhaft wenn die Einrichtung zum Beimengen des Gases zur Flüssigkeit eine Anordnung zum Einstellen der Menge des zugefügten Gases umfasst. Dabei ist es vorteilhaft, wenn die Menge des zugeführten Gases kontinuierlich variierbar ist. Damit lässt sich z.B. die Abtragrate durch Erhöhen der Gasmenge erhöhen. Reduzieren der Gasmenge führt zu kleinerem Abtrag.It is advantageous if the device for adding the gas to the liquid comprises an arrangement for adjusting the amount of added gas. It is advantageous if the amount of gas supplied is continuously variable. This can be used e.g. increase the removal rate by increasing the amount of gas. Reducing the amount of gas leads to smaller removal.

Die Einrichtung zum Beimengen des Gases zur Flüssigkeit kann beispielsweise in einem Tank für die Flüssigkeit angeordnet sein. Ebenfalls denkbar ist es, die Einrichtung in einer Pumpe zum Fördern der Flüssigkeit oder in einer Förderleitung für die Flüssigkeit anzubringen. Kombinationen davon zum effizienteren und kontrollierteren Beifügen des Gases sind vorteilhaft.The device for adding the gas to the liquid can be arranged, for example, in a tank for the liquid be. It is also conceivable to install the device in a pump for conveying the liquid or in a conveying line for the liquid. Combinations thereof for more efficient and controlled addition of the gas are advantageous.

Das Gas kann zum Beispiel mit einem Propeller im Tank beigefügt werden. Weiter kann ein Druckanschluss an die Leitung, den Tank oder die Pumpe vorgesehen sein. Ausserdem ist es auch möglich, das Gas chemisch, z.B. mit Tabletten beizufügen. Beispielsweise kann in der Art von Brausetabletten ein in Tablettenform gepresster chemischer Stoff dem Wasser beigefügt werden, der bei Kontakt mit Wasser reagiert und gasförmige Reaktionsprodukte abgibt. Es ist auch denkbar, dem Wasser elektrolytisch Gas beizufügen bzw. Gas elektrolytisch im Wasser zu erzeugen. Durch Anlegen einer Spannung in der Abrasiv-Flüssigkeit können z.B. Wassermoleküle in der Schleifflüssigkeit zu Wasserstoff und Sauerstoff getrennt werden. Kombinationen der genannten Möglichkeiten sind von der Erfindung ebenfalls umfasst.The gas can be added with a propeller in the tank, for example. Furthermore, a pressure connection to the line, the tank or the pump can be provided. Moreover, it is also possible to chemically oxidize the gas, e.g. to be enclosed with tablets. For example, in the form of effervescent tablets, a chemical substance pressed in tablet form can be added to the water, which reacts on contact with water and gives off gaseous reaction products. It is also conceivable to add gas to the water electrolytically or to generate gas electrolytically in the water. By applying a voltage in the abrasive liquid, e.g. Water molecules in the grinding fluid to be separated into hydrogen and oxygen. Combinations of said possibilities are also included in the invention.

Der Gasgehalt wird erfindungsgemäss kontrolliert und eingestellt. Typischerweise wird die Gasmenge (in Volumenprozent) auf gewünschte Werte eingestellt. Dabei kann das Gas entweder in der Flüssigkeit gelöst bzw. gebunden sein oder in Form von Blasen darin vorliegen.The gas content is controlled and adjusted according to the invention. Typically, the amount of gas (in volume percent) is adjusted to desired levels. In this case, the gas can either be dissolved or bound in the liquid or present in the form of bubbles therein.

Es kann auch eine Regelanordnung zum Regeln des Gasgehalts eingesetzt werden. Dabei wird der Gasanteil in der Flüssigkeit laufend gemessen und abhängig von dieser Messung eingestellt.It is also possible to use a regulating arrangement for regulating the gas content. The gas content in the liquid is continuously measured and adjusted depending on this measurement.

Wenn das Gas gelöst bzw. gebunden ist, kann das Mischverhältnis über die Viskosität der Abrasiv-Flüssigkeit bestimmt werden. Je grösser der Gasanteil in der Flüssigkeit ist, desto geringer wird die Viskosität.When the gas is dissolved or bound, the mixing ratio can be determined by the viscosity of the abrasive fluid. ever the greater the proportion of gas in the liquid, the lower the viscosity.

Wenn das Gas in Blasen vorliegt, kann die Blasengrösse z.B. optisch bestimmt werden. Damit die Abtragrate günstig beeinflusst wird, ist es vorteilhaft, wenn die entstehenden Gasblasen grösser sind als die Abrasivmittel-Teilchen.If the gas is in bubbles, the bubble size may be e.g. be determined optically. In order to have a favorable influence on the removal rate, it is advantageous if the resulting gas bubbles are larger than the abrasive particles.

In beiden Fällen findet die Messung vorzugsweise zwischen einer Pumpe für die Abrasiv-Flüssigkeit und einer Austritts-Öffnung für die Flüssigkeit statt.In both cases, the measurement preferably takes place between a pump for the abrasive fluid and an outlet port for the fluid.

Über den Gasgehalt in der Flüssigkeit wird die Abtragrate an der Oberfläche des Werkstücks kontrolliert. Je grösser der Gasanteil in der Abrasiv-Flüssigkeit ist, desto grösser ist auch die Abtragrate.The gas content in the liquid controls the removal rate at the surface of the workpiece. The greater the gas content in the abrasive fluid, the greater the removal rate.

Die Abtragrate hängt von der Aufprallenergie der Abrasivmittel-Teilchen ab. Der Übergang vom Schleifen zum Polieren von Oberflächen kann über den Gasanteil in der Abrasiv-Flüssigkeit direkt kontrolliert werden. Je kleiner der Gasanteil in der Abrasiv-Flüssigkeiten, desto kleiner ist die Abtragrate, und desto eher wird die Oberfläche poliert. Bei spröden Oberflächen, z.B. bei Werkstücken aus Keramik oder Glas, kann der der Übergang vom Schleifen zum Polieren zugleich einem Übergang vom spröden zum duktilen Abtragen von Material von der Oberfläche entsprechen. (Siehe z.B. Appl. Opt. 37, pp. 6771-6773 (1998) )The removal rate depends on the impact energy of the abrasive particles. The transition from grinding to polishing surfaces can be directly controlled by the gas content in the abrasive fluid. The smaller the gas content in the abrasive fluids, the smaller the removal rate, and the sooner the surface is polished. For brittle surfaces, eg workpieces made of ceramic or glass, the transition from grinding to polishing can at the same time correspond to a transition from brittle to ductile removal of material from the surface. (See, eg Appl. Opt. 37, pp. 6771-6773 (1998) )

Es wird angenommen, dass sich die Abtragrate durch den Gasgehalt in der Flüssigkeit erhöht, weil die Gaseinschlüsse beim Aufprall besser kompressibel sind als die Flüssigkeit selbst. Die Schleifmittelteilchen werden kurz vor dem Aufprall durch die Flüssigkeit also stärker gebremst als durch das Gas. Je grösser der Gasanteil, desto grösser ist also auch die Aufprallenergie der Abrasivmittel-Teilchen.It is believed that the removal rate is increased by the gas content in the liquid, because the gas inclusions are more compressible on impact than the liquid itself. The abrasive particles are thus braked faster than the impact of the liquid just before the impact. The bigger the gas content, the greater the impact energy of the abrasive particles.

Weiter werden Teilchen, die sich in einer Gasblase befinden, beim Auftreffen auf die Oberfläche weniger stark gekühlt als Teilchen, die von Flüssigkeit umgeben sind. Es wird davon ausgegangen, dass durch die erhöhte Temperatur die Wahrscheinlichkeit steigt, dass sich Risse bilden. Dadurch wird die Abtragrate erhöht, weil beim spröden Abtragen von Material dem Abtrag eine Rissbildung auf der Oberfläche vorangeht.Further, particles that are in a gas bubble are less strongly cooled when hitting the surface than particles that are surrounded by liquid. It is believed that the increased temperature increases the likelihood of cracks forming. As a result, the removal rate is increased, because in the brittle removal of material the erosion is preceded by cracking on the surface.

Wenn das Gas nicht in Bläschen vorliegt sondern in der Flüssigkeit gelöst ist, sinkt die Viskosität der Abrasiv-Flüssigkeit. Bei gleichem Förderdruck wird die Abrasiv-Flüssigkeit dadurch stärker beschleunigt. Über diese grössere Beschleunigung steigt die Aufprall-Energie der Abrasivmittel-Teilchen an.If the gas is not present in bubbles but is dissolved in the liquid, the viscosity of the abrasive liquid decreases. At the same delivery pressure, the abrasive fluid is thereby accelerated more. This acceleration increases the impact energy of the abrasive particles.

Es ist ausserdem möglich, dass weitere Faktoren zur erhöhten Abtragrate beitragen.It is also possible that other factors contribute to the increased ablation rate.

Ein Verfahren gemäß dem Oberbegriff von Anspruch 1 wird in Dokument US 5 283 991 beschrieben.A method according to the preamble of claim 1 is disclosed in document US 5,283,991 described.

Das erfindungsgemäße Verfahren ist zur Erzeugen eines Förderdrucks von weniger als 100 bar, besonders bevorzugt von weniger als 50 oder sogar weniger als 20 bar ausgelegt. Da der Flüssigkeit ein Gas beigemengt wird, kann die Aufprallenergie der Schleifmittelteilchen erhöht werden. Dies erlaubt bei gleich bleibender Abtragrate eine Reduktion des Förderdrucks. Im Vergleich zu Hochdruckanordnungen wird so beim Fördern Energie eingespart, was sich ökonomisch als auch ökologisch günstig auswirkt. Eine weitere Reduktion des Förderdrucks lässt sich auch durch entsprechende, geeignete Anordnungen zum Beschleunigen der Abrasiv-Flüssigkeit erzielen. So kann beispielsweise eine Anordnung zum Beschleunigen der Abrasiv-Flüssigkeit vorgesehen werden, in welcher die Abrasiv-Flüssigkeit vorteilhaft auf eine Geschwindigkeit von über 20 m/s beschleunigt wird. Dadurch erhalten die Abrasivmittel-Teilchen die notwendige Energie, damit Material abgetragen wird. Die Energie der Teilchen wächst quadratisch mit der Geschwindigkeit des Strahls an.The inventive method is designed to generate a delivery pressure of less than 100 bar, more preferably less than 50 or even less than 20 bar. Since a gas is added to the liquid, the impact energy of the abrasive particles can be increased. This allows a reduction of the delivery pressure with the same removal rate. Compared to high-pressure arrangements energy is thus saved during conveying, which has an economic and ecological advantage. A further reduction of the delivery pressure can also be achieved by appropriate, suitable arrangements for accelerating the abrasive fluid. So, for example an arrangement for accelerating the abrasive liquid are provided, in which the abrasive liquid is advantageously accelerated to a speed of about 20 m / s. As a result, the abrasive particles receive the necessary energy, so that material is removed. The energy of the particles grows quadratically with the speed of the beam.

Die Beschleunigungsanordnung kann beispielsweise eine oder mehrere Düsen aufweisen.The acceleration arrangement can have, for example, one or more nozzles.

Die Anordnung zum Beschleunigen der Abrasiv-Flüssigkeit kann auch eine Anordnung zum Einstellen des Abstands zwischen mindestens einer Austrittsöffnung der Flüssigkeit und der Oberfläche enthalten. Die Beschleunigung ist dann zwischen der mindestens einen Austrittsöffnung und der Oberfläche in Abhängigkeit des Querschnitts einer Flüssigkeitszufuhr-Öffnung und dem Querschnitt des Spalts zwischen der Oberfläche und der mindestens einen Austrittsöffnung einstellbar. Je kleiner der Spalt im Vergleich zum Querschnitt der Flüssigkeitszufuhr-Öffnung ist, desto stärker ist die Beschleunigung der Abrasiv-Flüssigkeit. Beispielsweise könnte die Anordnung gemäss EP 1 409 199 gestaltet sein.The arrangement for accelerating the abrasive liquid may also include an arrangement for adjusting the distance between at least one exit opening of the liquid and the surface. The acceleration is then adjustable between the at least one outlet opening and the surface as a function of the cross section of a liquid feed opening and the cross section of the gap between the surface and the at least one outlet opening. The smaller the gap compared to the cross section of the liquid feed opening, the stronger the acceleration of the abrasive liquid. For example, the arrangement according to EP 1 409 199 be designed.

Die Kombination von mechanischen Massnahmen zur Erhöhung der Austrittsgeschwindigkeit und dem Beifügen von Gas zum Erhöhen der Auftreffgeschwindigkeit der Partikel auf der zu bearbeitenden Oberfläche führt auf besonders effektive Weise zu einer Reduktion des notwendigen Förderdrucks. Gleichzeitig ist aufgrund der Regulierbarkeit des Gasanteils eine individuelle Einstellung der Abtragrate möglich. Besonders vorteilhaft ist, dass bei gleichen Prozessparametern und gleicher Abrasiv-Flüssigkeit durch das zuführen von Gas eine bessere Abtragrate erzielt werden kann.The combination of mechanical measures to increase the exit velocity and the addition of gas to increase the impact velocity of the particles on the surface to be machined leads to a particularly effective manner to a reduction of the necessary delivery pressure. At the same time an individual adjustment of the removal rate is possible due to the adjustability of the gas content. It is particularly advantageous that with the same process parameters and the same abrasive liquid By supplying gas a better removal rate can be achieved.

Die Abrasivmittel-Teilchen haben einen durchschnittlichen Korndurchmesser unter 50 µm, vorzugsweise 1 bis 10 µm.. Die Korngrösse variiert aber je nach Anwendung. Je feiner die Oberfläche poliert werden soll, desto feinere Abrasivmittel-Teilchen werden verwendet.The abrasive particles have an average grain diameter less than 50 microns, preferably 1 to 10 microns .. The grain size varies but depending on the application. The finer the surface to be polished, the finer abrasive particles are used.

Falls Gasblasen erzeugt werden, sollte ihre Durchmesser grösser sein als der Durchmesser der Abrasivmittel-TeilchenIf gas bubbles are generated, their diameters should be greater than the diameter of the abrasive particles

Die Förderflüssigkeit ist bevorzugt vorwiegend Wasser. Andere bekannte Flüssigkeiten liegen aber ebenfalls im Rahmen der Erfindung. Andere Flüssigkeiten, z.B. auf Öl- oder Alkoholbasis können ebenfalls geeignet sein.The delivery liquid is preferably predominantly water. However, other known liquids are also within the scope of the invention. Other liquids, e.g. oil or alcohol based may also be suitable.

Die Verwendung von Gaseinschlüssen einer Förderflüssigkeit für Abrasivmittel-Teilchen zum Beeinflussen der Abtragrate beim Abtragen von Material einer Oberfläche eines Werkstücks beim Schleifen bzw. Polieren der Oberfläche liegt ebenfalls im Rahmen der Erfindung. Das Gas ist vorzugsweise Luft.The use of gas inclusions of a conveying fluid for abrasive particles for influencing the removal rate when removing material of a surface of a workpiece during grinding or polishing of the surface is also within the scope of the invention. The gas is preferably air.

Beim Verfahren zum Abtragen von Material einer Oberfläche eines Werkstücks zum Schleifen bzw. Polieren der Oberfläche mit Schleifmittelteilchen, die von einer Flüssigkeit gefördert werden, wird die Abtragrate durch die Einstellung des Gasanteils in der Förderflüssigkeit beeinflusst, und zwar durch das Beimengen eines Gases zur Abrasiv-Flüssigkeit. Vorzugsweise ist das Gas Luft, andere Gase sind von der Erfindung aber nicht ausgenommen.In the method for removing material from a surface of a workpiece for grinding or polishing the surface with abrasive particles that are conveyed by a liquid, the removal rate is influenced by the adjustment of the gas content in the pumped liquid, by adding a gas to the abrasive. Liquid. Preferably, the gas is air, but other gases are not excluded from the invention.

Der Abrasiv-Flüssigkeit wird Gas von 0 bis 70% des Gesamtvolumens beigemengt. Je grösser die Menge des beigemengten Gases, desto grösser ist die Abtragrate. Zum Polieren der Oberfläche wird kein oder nur wenig Gas beigemengt, da beim Polieren eine geringe Abtragrate erwünscht ist.The abrasive liquid is added to gas from 0 to 70% of the total volume. The greater the amount of added gas, the greater the removal rate. To polish the surface little or no gas is added, since during polishing a low removal rate is desired.

Es ist durchaus denkbar, während des Abtragverfahrens die Menge und/oder Art der erzeugten Gasblasen bzw. das Mischverhältnis des gelösten oder gebundenen Gases zur Flüssigkeit zu variieren. So ist es insbesondere denkbar, in einem ersten Schritt durch Zufuhr einer grossen Gasmenge hohe Abtragraten zu erzielen und in einem zweiten Schritt während des gleichen Bearbeitungsverfahrens die Menge der Gaszufuhr zu reduzieren und so die Abtragrate zu reduzieren. In diesem Fall erfolgt in einem zweiten Schritt bei Zugabe von weniger Gas oder ohne Gaszugabe ein Polieren.It is quite conceivable during the removal process to vary the amount and / or nature of the gas bubbles produced or the mixing ratio of the dissolved or bound gas to the liquid. Thus, it is particularly conceivable to achieve high removal rates in a first step by supplying a large amount of gas and to reduce the amount of gas supply in a second step during the same processing method and thus to reduce the removal rate. In this case, polishing takes place in a second step with the addition of less gas or without addition of gas.

In einem bevorzugten Ausführungsbeispiel verläuft die Reduktion der Gaszufuhr kontinuierlich. Der Übergang vom Schleifen zum Polieren ist dadurch nicht diskret.In a preferred embodiment, the reduction of the gas supply is continuous. The transition from grinding to polishing is not discrete.

Der Förderdruck der Abrasiv-Flüssigkeit wird zum Schleifen sowie zum Polieren bei unter 100 bar, vorteilhaft unter 50 bar, besonders vorteilhaft unter 20 bar, konstant gehalten. Dadurch vereinfacht sich das Verfahren, weil der Förderdruck der Flüssigkeit nicht verändert werden muss, wenn die Abtragrate variiert werden soll.The delivery pressure of the abrasive liquid is kept constant for grinding and polishing at below 100 bar, advantageously below 50 bar, particularly advantageously below 20 bar. This simplifies the process because the delivery pressure of the liquid does not have to be changed if the removal rate is to be varied.

Im Folgenden wird die Erfindung anhand von Ausführungsbeispielen und Zeichnungen erläutert. Es zeigen:

Figur 1
ein Ausführungsbeispiel einer Vorrichtung zur Durchführung des erfindungsgemäßen Verfahrens in einer schematischen Darstellung,
Figur 2
eine alternative Ausführungsform der Vorrichtung in einer schematischen Darstellung und,
Figur 3
eine weitere alternative Ausführungsform der Vorrichtung in einer schematischen Darstellung.
In the following the invention will be explained with reference to exemplary embodiments and drawings. Show it:
FIG. 1
An embodiment of an apparatus for carrying out the method according to the invention in a schematic representation,
FIG. 2
an alternative embodiment of the device in a schematic representation and,
FIG. 3
a further alternative embodiment of the device in a schematic representation.

In Figur 1 ist ein erstes Ausführungsbeispiel der Erfindung schematisch dargestellt. Ein Werkstück 2 befindet sich auf einer Halterung 10 in einem abgeschlossenen Behälter 11. Die Oberfläche S, welche geschliffen und poliert werden soll, befindet sich auf der Oberseite des Werkstücks 2.In FIG. 1 a first embodiment of the invention is shown schematically. A workpiece 2 is located on a holder 10 in a closed container 11. The surface S, which is to be ground and polished, is located on the upper side of the workpiece 2.

Die Halterung 10 ist entlang einer Längsachse verschiebbar und um eine vertikale Achse drehbar. Die Bewegung der Halterung 10 ist mit den Pfeilen B angedeutet.The holder 10 is displaceable along a longitudinal axis and rotatable about a vertical axis. The movement of the holder 10 is indicated by the arrows B.

In einem Flüssigkeitstank 12 befindet sich eine Flüssigkeit 3, in diesem Beispiel Wasser. Dem Wasser 3 sind Abrasivmittel-Teilchen 5 in einer Konzentration von 10 % des Gewichts zugegeben. Es werden Abrasivmittel-Teilchen 5 aus Silizium-Karbid mit einer Korngrösse von 7 µm Durchmesser verwendet. Die Abrasiv-Flüssigkeit 3 wird mit einer Pumpe 7 in Richtung der Pfeile 6 durch die Förderleitung 14 gefördert. Der Förderdruck beträgt 12 bar.In a liquid tank 12 is a liquid 3, in this example water. To the water 3 are added abrasive particles 5 in a concentration of 10% by weight. There are used abrasive particles 5 of silicon carbide with a particle size of 7 microns in diameter. The abrasive liquid 3 is conveyed by a pump 7 in the direction of the arrows 6 through the delivery line 14. The delivery pressure is 12 bar.

Das Abtragen von Material findet bei Zimmertemperatur, d.h. bei ca. 21°C statt. Durch die mechanische Belastung kann sich die Abrasiv-Flüssigkeit auf ca. 25°C erwärmen, was die Abtragrate jedoch nicht negativ beeinflusst.The removal of material takes place at room temperature, ie at about 21 ° C instead. Due to the mechanical stress, the abrasive fluid can heat up to approx. 25 ° C, which does not affect the removal rate negatively.

Die Förderleitung 14 führt in den Innenraum des Behälters 11. Dort wird das Wasser 3 mit einer Düse 9 auf ca. 40 m/s beschleunigt. Die Düse 9 ist auf die Oberfläche S gerichtet, die mit der Haltevorrichtung 10 darunter bewegt wird.The delivery line 14 leads into the interior of the container 11. There, the water 3 is accelerated with a nozzle 9 to about 40 m / s. The nozzle 9 is directed to the surface S, which is moved with the holding device 10 below.

In einem Drucktank 13 befindet sich Luft 4, die über eine Anschlussleitung 16 in das Wasser 3 eingebracht werden kann. Die Luftzufuhr wird über ein Ventil 8 variiert. Je grösser die erwünschte Abtragrate ist, desto mehr wird Luft 4 wird dem Wasser 3 beigefügt. Der maximale Luftgehalt im Wasser 3 beträgt 70% des Gesamtvolumens. Der Druck im Tank 13 beträgt 250 bar. Zugeführt wird die Luft 4 mit einem Druck von 14 bis 50 bar. Wesentlich ist hierbei, dass der Zufuhrdruck der Luft grösser ist als der Förderdruck des Wassers. Zum Polieren wird die Luftzufuhr unterbunden oder zumindest reduziert.In a pressure tank 13 is air 4, which can be introduced via a connecting line 16 in the water 3. The air supply is varied via a valve 8. The greater the desired removal rate, the more air 4 is added to the water 3. The maximum air content in the water 3 is 70% of the total volume. The pressure in the tank 13 is 250 bar. The air 4 is supplied at a pressure of 14 to 50 bar. It is essential here that the supply pressure of the air is greater than the delivery pressure of the water. For polishing, the air supply is prevented or at least reduced.

Das verwendete Wasser 3 wird über einen Abfluss 15 wieder in den Tank 12 geführt. Die Abrasivmittel-Teilchen 5 befinden sich also in einem geschlossenen Kreislauf, welcher mit den Pfeilen 6 angedeutet ist. Dadurch wird der Materialverbrauch möglichst gering gehalten.The used water 3 is fed via a drain 15 back into the tank 12. The abrasive particles 5 are thus in a closed circuit, which is indicated by the arrows 6. As a result, the material consumption is kept as low as possible.

Die Luftzufuhr wird an einem Referenz-Werkstück (nicht dargestellt) geeicht. Die Abtragrate kann dann aufgrund dieser Eichung beim Werkstück 2 nach Bedarf eingestellt werden.The air supply is calibrated on a reference workpiece (not shown). The removal rate can then be adjusted as needed on the workpiece 2 due to this calibration.

Eine alternative Ausführungsform der Vorrichtung 1 ist in Figur 2 dargestellt. Wie im Ausführungsbeispiel nach Figur 1 befindet sich die Abrasiv-Flüssigkeit 3 auch bei dieser Ausführungsform in einem geschlossenen Kreislauf, der durch die Pfeile 6 angedeutet ist. Die verwendete Flüssigkeit 3 ist wiederum Wasser.An alternative embodiment of the device 1 is shown in FIG FIG. 2 shown. As in the embodiment according to FIG. 1 is the abrasive liquid 3 in this embodiment in a closed circuit, which is indicated by the arrows 6. The liquid 3 used is again water.

Zur Beschleunigung des Wassers 3 auf die Oberfläche S des Werkstücks 2 wird in diesem Beispiel im Gegensatz zum Beispiel gemäss Figur 1 keine Düse verwendet. Statt dessen tritt die Abrasiv-Flüssigkeit 3 durch einen Förderkopf 17 aus. Die Beschleunigung des Wassers 3 findet im Spalt 18 statt, der zwischen dem Kopf 17 und der Oberfläche S gebildet wird. Zur Regulierung der Breite des Spalts 18 ist die Haltevorrichtung 8 wie mit den Pfeilen B angedeutet auch in eine vertikale Richtung verschiebbar. Die Beschleunigung ist umso grösser, je kleiner die Fläche des Spalts im Vergleich zur Querschnittsfläche der Förderleitung 14 ist. Das Verhältnis der Querschnittsfläche der Förderleitung zur Fläche des Spalts beträgt in diesem Beispiel 10 : 1.To accelerate the water 3 to the surface S of the workpiece 2 is in this example, in contrast to the example according to FIG. 1 no nozzle used. Instead, the abrasive liquid 3 exits through a delivery head 17. The acceleration of the water 3 takes place in the gap 18, which is formed between the head 17 and the surface S. To regulate the width of the gap 18, the holding device 8 as indicated by the arrows B also displaceable in a vertical direction. The acceleration is greater the smaller the area of the gap compared to the cross-sectional area of the delivery line 14. The ratio of the cross-sectional area of the delivery line to the area of the gap is 10: 1 in this example.

Die Abtragrate wird durch die Zufuhr von Luft 4 in das Wasser 3 im Tank selbst kontrolliert. Luft 4 befindet sich im Tank 12 oberhalb des Wassers 3 und wird mit einem Propeller 19 unter das Wasser 3 gerührt. Angetrieben wird der Propeller 19 durch einen Elektromotor M. Die Drehzahl des Motors M bestimmt die Menge der zugeführten Luft 4. Da das Wasser 3 in einem geschlossenen Kreislauf verwendet wird, ist der Stand des Wassers 3 relativ konstant. Der Propeller 19 ist im Vergleich zum Wassertank 12 gross genug, dass sich Schwankungen des Wasserstands nicht negativ auf die zugeführte Luftmenge auswirken.The removal rate is controlled by the supply of air 4 in the water 3 in the tank itself. Air 4 is located in the tank 12 above the water 3 and is stirred with a propeller 19 under the water 3. The propeller 19 is driven by an electric motor M. The speed of the motor M determines the amount of air 4 supplied. Since the water 3 is used in a closed circuit, the level of the water 3 is relatively constant. The propeller 19 is large enough in comparison to the water tank 12 that fluctuations in the water level do not adversely affect the amount of air supplied.

Figur 3 zeigt eine Vorrichtung analog Figur 1. Zusätzlich ist aber zur Durchführung eines nicht erfindungsgemäßen Verfahrens eine Vorrichtung zum Reduzieren des Luftgehalt im Wasser 3 im Tank 12 vorgesehen. Der Gasanteil von Wasser kann aufgrund von Umgebungsparametern variieren. FIG. 3 shows a device analog FIG. 1 , In addition, however, a device for reducing the air content in the water 3 in the tank 12 is provided for carrying out a method not according to the invention. The gas content of water may vary due to environmental parameters.

Gemäss Figur 3 sind zur Reduktion des Luftgehalts im Wasser 3 Ultraschall-Sender 20 im Tank 12 angebracht. Diese senden Ultraschall-Wellen 21 aus, welche die Lufteinschlüsse im Wasser 3 verdrängen.According to FIG. 3 3 ultrasonic transducers 20 are mounted in the tank 12 to reduce the air content in the water. These send out ultrasonic waves 21, which displace the air inclusions in the water 3.

Claims (5)

  1. Process for removing material from, in particular grinding and/or polishing, a surface (S) of a workpiece using abrasive particles (5) which are delivered by a liquid (3), wherein the gas content in the liquid is set, the abrasive liquid (3) is supplied with gas (4) amounting to 0 to 70% of the volume, characterized in that the abrasive particles (5) have a mean grain diameter of less than 50 µm, preferably from 1 to 10 µm, and in that a delivery pressure of the abrasive liquid (3) less than 100 bar, in particular less than 50 bar is generated.
  2. Process according to Claim 1, characterized in that gas (4) is admixed with the abrasive liquid (3) during a first step for grinding the surface (S), and in that no gas (4) is admixed with the abrasive liquid in a second step for polishing the surface.
  3. Process according to one of the preceding Claims 1 to 2, characterized in that the delivery pressure of the abrasive liquid (3) is kept constant at less than 100 bar, in particular less than 50 bar, for both grinding and polishing.
  4. Process according to one of Claims 1 to 3, characterized in that the liquid (3) used is predominantly water.
  5. Process according to one of Claims 1 to 4, characterized in that gas bubbles which are larger than the abrasive particles (5) are generated in the liquid (3).
EP04017335A 2004-07-22 2004-07-22 Process for grinding and/or polishing surfaces Expired - Lifetime EP1618993B9 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE502004008271T DE502004008271D1 (en) 2004-07-22 2004-07-22 Method for grinding and / or polishing surfaces
EP04017335A EP1618993B9 (en) 2004-07-22 2004-07-22 Process for grinding and/or polishing surfaces
AT04017335T ATE411139T1 (en) 2004-07-22 2004-07-22 METHOD FOR GRINDING AND/OR POLISHING SURFACES
US11/186,802 US20060019580A1 (en) 2004-07-22 2005-07-22 Apparatus for removing material, use of gas inclusions in an abrasive liquid and process for grinding and/or polishing surfaces
US11/775,018 US20080261493A1 (en) 2004-07-22 2007-07-09 Apparatus for Removing Material, Use of Gas Inclusions in an Abrasive Liquid and Process for Grinding and/or Polishing Surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04017335A EP1618993B9 (en) 2004-07-22 2004-07-22 Process for grinding and/or polishing surfaces

Publications (3)

Publication Number Publication Date
EP1618993A1 EP1618993A1 (en) 2006-01-25
EP1618993B1 true EP1618993B1 (en) 2008-10-15
EP1618993B9 EP1618993B9 (en) 2009-03-18

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EP04017335A Expired - Lifetime EP1618993B9 (en) 2004-07-22 2004-07-22 Process for grinding and/or polishing surfaces

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US (2) US20060019580A1 (en)
EP (1) EP1618993B9 (en)
AT (1) ATE411139T1 (en)
DE (1) DE502004008271D1 (en)

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JP4787063B2 (en) * 2005-12-09 2011-10-05 株式会社荏原製作所 Polishing apparatus and polishing method
CN101360585A (en) * 2006-02-23 2009-02-04 三菱麻铁里亚尔株式会社 Grinding material feeding device
DE102006009468A1 (en) * 2006-02-27 2007-08-30 Aequos Endoprothetik Gmbh Method for machining a workpiece, e.g. a endoprosthetic device, comprises using a liquid in the absence of ambient air
US7749049B2 (en) * 2006-05-25 2010-07-06 Lightmachinery Inc. Submerged fluid jet polishing
CN101422872B (en) * 2007-10-30 2010-05-26 昆明市凯跃机电塑料有限责任公司 Air-flotation type mechanical polishing method
WO2009064254A1 (en) * 2007-11-13 2009-05-22 Khoon Leong Chong High pressure liquid abrasive de-burring system and process for same
KR100965852B1 (en) * 2008-04-22 2010-06-28 (주)일신오토클레이브 A Catchtank of Suspensor Waterjet
JP2012222107A (en) * 2011-04-07 2012-11-12 Toshiba Corp Semiconductor device manufacturing method
CN103522195A (en) * 2013-05-07 2014-01-22 河南星智发明电子科技有限公司 Grinding and polishing method
US10363648B2 (en) 2016-08-04 2019-07-30 C.J. Spray Apparatus, components, methods and systems for use in selectively texturing concrete surfaces
CN106695576B (en) * 2017-03-17 2023-08-15 河南理工大学 Pre-mixing type pulse abrasive gas jet erosion method and device
DE102017127934A1 (en) 2017-11-27 2019-05-29 Sumteq Gmbh Powder of foam
JP7163098B2 (en) * 2018-08-07 2022-10-31 株式会社富士技建 Wet blasting equipment and wet blasting method

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US4555872A (en) * 1982-06-11 1985-12-03 Fluidyne Corporation High velocity particulate containing fluid jet process
DE3469145D1 (en) * 1984-08-14 1988-03-10 Johan Szucs Stone and metal cleaning system
US5203698A (en) * 1991-04-25 1993-04-20 Blake Thomas S Wet foam sandblaster
US5283991A (en) * 1992-09-08 1994-02-08 Josef Keizers Sandblasting method and a moist-sand blasting apparatus
US5700181A (en) * 1993-09-24 1997-12-23 Eastman Kodak Company Abrasive-liquid polishing and compensating nozzle
US5827114A (en) * 1996-09-25 1998-10-27 Church & Dwight Co., Inc. Slurry blasting process
DE10113599A1 (en) * 2001-03-20 2002-10-02 Fisba Optik Ag St Gallen Device for the abrasive processing of surfaces of optical elements

Also Published As

Publication number Publication date
US20080261493A1 (en) 2008-10-23
EP1618993A1 (en) 2006-01-25
DE502004008271D1 (en) 2008-11-27
US20060019580A1 (en) 2006-01-26
ATE411139T1 (en) 2008-10-15
EP1618993B9 (en) 2009-03-18

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