EP1582831A2 - Apparatus for handling workpieces or workpieces groups - Google Patents

Abstract

The apparatus for treatment of workpieces or workpiece groups comprises a housing with rotatable treatment chambers arranged at least at two levels, and at least one unit for transfer of workpieces or workpiece groups from an exit opening at one level to an entry opening at another level.

Description

The present invention relates to a treatment device for treatment of workpieces or groups of workpieces coming from an input to be transported to an outlet of the treatment device.

Such a device is known for example from DE 44 42 152 A1.

In the treatment device known from DE 44 42 152 A1 the parts to be treated are fed to so-called "virtual chambers" and into these virtual chambers transported by procedural treatments. This treatment device consists of several at a distance superimposed circular floors, by a wall cylinder be enclosed and between each one with even Angular distances arranged wing share is located. The wings are rotating together relative to the floors, each floor having a window and the windows of the successive in the direction of passage of the workpieces Trays relative to each other against the direction of rotation of the wing shares are arranged offset so that the workpieces, each in a through two wings limited "virtual chamber" are fed to the floors in each case an incomplete circular path up to the window of the relevant floor go back and then fall to the underlying ground where the next incomplete circular path is traversed. The chambers will be referred to as "virtual" in this device, because they during the workpiece transport continuously exchange their real floor and ceiling walls.

The known from DE 44 42 152 A1 treatment device is for the procedural treatment of small workpieces provided, which through the case through a floor window from one level to the next Level of the treatment device will not be damaged.

Especially for heavier workpieces whose surface is not damaged is an uncontrolled fall from one level to another Level of the treatment device, however, represents a significant risk.

The present invention is based on the object, a treatment device for the treatment of workpieces or workpiece groups, which transported from an entrance to an outlet of the treatment device with the treatment device having multiple treatment levels to provide, in which the workpieces to be treated in safer and be moved in a controlled manner from level to level.

This object is achieved according to the invention by a treatment device, the housing and rotating relative to the housing receiving chambers for receiving the workpieces or workpiece groups, wherein the receiving chambers arranged in at least two different chamber levels and a first chamber level, the first of the workpieces or workpiece groups is passed through, an outlet opening in the housing and a second chamber level, after the first chamber level is traversed by the workpieces or workpiece groups, a Associated with access opening, and wherein the treatment device at least a transfer device comprising the workpieces or groups of workpieces moved from the outlet opening to the access opening.

The treatment device according to the invention makes it possible, too heavy workpieces with sensitive surface inspected and damage-free within the levels of the treatment device and during the Transfer from one level to the next level can be moved.

The advantages of the known from DE 44 42 152 A1 treatment device remain receive.

In particular, workpieces supplied to the treatment device remain isolated singulated in the treatment device and are at the same time ejected again.

The treatment device according to the invention is wound with a rectilinear flow system comparable and thus requires only a small Footprint.

In a preferred embodiment of the treatment device according to the invention is provided that the workpieces or workpiece groups means the transfer device in a defined spatial position of the outlet opening are movable to the access opening.

Furthermore, it is preferably provided that the workpieces or workpiece groups in the first chamber level and / or in the second chamber level an angle of at least about 90 °, preferably at least about 180 °, in particular of at least about 270 °, about an axis of rotation the treatment device to be moved.

Furthermore, the workpieces or workpiece groups in the first chamber level and / or in the second chamber plane preferably at an angle is moved by less than 360 ° about a rotation axis of the treatment device.

Preferably, all the receiving chambers of the same chamber level rotate synchronously together.

In particular, it can be provided that all receiving chambers of the same Chamber level are rigidly interconnected.

Furthermore, it is advantageous if at least two receiving chambers different Chamber levels rotate synchronously with each other.

In particular, it can be provided that at least two receiving chambers different chamber levels are rigidly interconnected.

In a preferred embodiment of the treatment device according to the invention is provided that all receiving chambers of all chamber levels rotate synchronously with each other.

In particular, it can be provided that all receiving chambers of all chamber levels are rigidly connected.

The receiving chambers of the treatment device can thereby in particular be formed, that the treatment device one, preferably in essentially cylindrical chamber drum, which is about an axis of rotation the chamber drum is rotatable and at least one bottom wall, the is formed transverse to the axis of rotation, and at least two partitions, the are aligned transverse to the bottom wall, comprises.

In particular, it can be provided that the chamber drum at least two bottom walls and at least one ceiling wall transverse to the axis of rotation is aligned.

To the receiving chambers formed in the chamber drum fluid-tight is to separate from each other and from the environment of the receiving chambers, is advantageously provided that the chamber drum at its periphery with a surface seal is provided. In this way it is possible to get the workpieces in the receiving chambers of a treatment using a to subject liquid or gaseous treatment medium.

Furthermore, it is possible by the use of such a seal, at least to form a chamber level of the treatment device as a lock, in which the workpieces gradually from an initial state adapted to a new environmental condition. The adaptation time on the new ambient state can be considerably longer than the clock, in which the workpieces or workpiece groups that the treatment device be fed, follow one another.

The area of the treatment device which has a lock function, may also extend over several levels of the treatment device.

If the workpiece follow-up cycle is, for example, ten workpieces / second and For example, the treatment device comprises ten receiving chambers per level, the rotational speed of the receiving chambers one revolution / second. The lock area extends over three levels Such a treatment device, so stand for the Einschleusvorgang about three seconds, which is 30 times the workpiece follow time equivalent.

The material of the surface seal preferably comprises a plastic low sliding friction, for example polyethylene.

The material of the surface seal can also be a fluoropolymer or a fluoropolymer compound include, as these substances have high chemical resistance and have a low friction.

Under a fluoropolymer compound is in this description and in the appended claims a mixture of at least one fluoropolymer and at least one organic or inorganic filler to understand. As such fillers are in particular graphite, carbon, carbon fibers, Bronze, molybdenum disulfide or organic fillers, in particular high temperature resistant Thermoplastics and thermosetting plastics, for example Polyimide, into consideration.

As a fluoropolymer is preferably polytetrafluoroethylene (PTFE) or a modified Polytetrafluoroethylene used. Under a "modified polytetrafluoroethylene" is to be understood as a PTFE-like substance in which the molecular structure of the PTFE has been chemically modified by the fact that the Fluorine atoms of the PTFE are partially replaced by substituents.

To differences in the thermal expansion of the material of the surface seal on the one hand and the material of other components of the treatment device On the other hand, reducing or even compensating is the surface seal preferably provided with compensating recesses, wherein the compensating recesses each comprise at least one compensation area, its width is at a temperature change of the surface seal and / or upon application of the surface seal with a mechanical Tension changed.

In this way, it becomes possible the surface seal in a wide temperature range without risk of fatigue.

In a preferred embodiment of the surface seal is provided that at least some of the compensatory recesses each have at least one Have balancing area, which is a transversely, preferably substantially perpendicular, aligned with the circumferential direction of the chamber drum longitudinal direction having.

Alternatively or additionally, it can be provided that at least some the compensation recesses each have at least one compensation area, which is a substantially parallel to the circumferential direction of the chamber drum aligned longitudinal direction.

It is preferably provided that at least some of the compensating recesses each comprise at least two compensation areas.

It is particularly advantageous if in each case at least two compensation areas a compensating recess transversely, preferably substantially perpendicular, have aligned longitudinal directions. In this way can have different thermal expansions both in the circumferential direction be compensated in the axial direction of the chamber drum.

In a preferred embodiment of the treatment device according to the invention is provided that the compensating recesses of the surface seal each comprise at least one compensation area whose width is in the assembled state of the surface seal with a change in temperature the surface seal changed so that the different thermal expansions the surface seal and the chamber drum at least partially, preferably substantially completely.

Furthermore, it has proven to be favorable if at least some of the compensating recesses have a central area in which at least two compensation areas of the compensation recess open.

These two opening into the central area of the same Ausgleichsausnehmung Balancing areas advantageously have transverse, preferably in essentially perpendicular, aligned longitudinal directions.

To bring the workpieces into the receiving chambers of the chamber drum or to be able to remove it from, the surface seal advantageously in addition to the compensating recesses access openings on which in the assembled state of the surface seal access to receiving chambers allow the chamber drum.

When the face seal separates these access openings from each other Webs comprises, so are preferably at least some of the compensating recesses arranged the surface seal in crossing areas of the webs.

In a preferred embodiment of the treatment device according to the invention is provided that the surface seal in the assembled state the Chamber drum surrounds annular.

It is particularly favorable if the surface seal is formed in one piece. Such a one-piece surface seal is particularly simple and time-saving can be produced and mounted or exchanged during a required maintenance.

The possibility of the receiving chambers against each other and against the Environment through a single, the chamber drum spanning surface seal To be able to seal, represents a significant advantage of the invention Treatment device over from the DE 44 42 152 A1 known treatment device in which the Move wings relative to the bottoms of the treatment device and thus in addition for the upper edge and the lower edge of each wing respectively a seal must be provided.

Furthermore, in the treatment device according to the invention also eliminates Necessity, the receiving chambers with respect to a central rotating shaft to seal the treatment device, since the receiving chambers together move with the central rotation shaft of the treatment device.

The outer surface of the, preferably cylindrical, chamber drum is simple to work mechanically.

The arranged on this peripheral surface of the chamber drum surface seal is easily accessible and easily replaceable.

In order to make the maintenance of the treatment device particularly simple, is preferably provided that the receiving chambers from the housing are removable.

It is particularly advantageous if several receiving chambers components of a Form chamber drum, which can be removed as a whole from the housing.

To the workpieces during a procedural treatment within to be able to rotate the respective receiving chamber is in a preferred Design of the treatment device provided that at least one of the receiving chambers is provided with a workpiece holder, by means of which the workpiece within the receiving chamber relative to the Recording chamber is rotatable.

In particular, it can be provided that the workpiece by means of the workpiece holder around a substantially parallel to the axis of rotation of the receiving chambers the treatment device aligned rotational axis rotatable is.

Alternatively, it can also be provided that the workpiece by means of Workpiece holder about a transversely, preferably substantially vertically, aligned to the axis of rotation of the receiving chambers of the treatment device Rotary axis is rotatable.

For driving the rotational movement of the workpiece within the receiving chamber There are a lot of possibilities.

For example, it may be provided that at least one of the receiving chambers is provided with a rotating device, which means for tapping a rotational movement of an inner wall of the housing of the treatment device includes.

Alternatively or additionally, it can be provided that at least one the receiving chambers is provided with a rotating device which a comprising a rotary shaft passed through a wall of the receiving chamber.

To a subsequent procedural treatment of the workpieces under To be able to perform a vacuum, it is advantageous if at least one Chamber level of the treatment device designed as a vacuum lock is.

It is particularly favorable when the receiving chambers as a vacuum lock trained chamber level during their movement from an access opening this chamber level to an outlet opening of this chamber level be evacuated in several discrete stages.

Due to the multi-stage evacuation stands for the generation of the vacuum in each receiving chamber extended compared to the workpiece cycle time Period available. Furthermore, the pressure difference and thus the Leak rate across the chamber seal through the multi-stage evacuation reduced.

Furthermore, it is advantageous if the receiving chambers of the vacuum lock trained chamber level during its movement from an exit opening this chamber level to an access opening of this chamber level in be ventilated several discrete stages.

Furthermore, it has proven to be advantageous if in each case at least one of the receiving chambers the trained as a vacuum chamber chamber level, the on the way from the access opening of this chamber level to the outlet opening this chamber level is located, each with a different receiving chamber This Chamber level is connected by gas technology, which on the way from the exit opening of this chamber level to the access opening this chamber level is located. This will be a gas technical Short circuit between a not yet fully evacuated receiving chamber, on the way from the access opening to the exit opening and a not yet fully ventilated receiving chamber, which on the way from the exit opening back to the access opening is carried out. By such a gas short circuit is a part of the evacuation of a receiving chamber already without use achieved a vacuum pump, so that the vacuum pump each receiving chamber only from an already reduced chamber pressure, except for the must evacuate desired vacuum final pressure. Furthermore, the amount of gas which is pumped out of the receiving chambers by means of a vacuum pump must be significantly reduced in this way.

Further features and advantages of the invention are the subject of the following Description and the drawings of exemplary embodiments.

Fig. 1

einen schematischen horizontalen Querschnitt durch eine Behandlungsvorrichtung;

Fig. 2

einen schematischen vertikalen Längsschnitt durch die Behandlungsvorrichtung aus Fig. 1;

Fig. 3

eine schematische Darstellung einer Übergabevorrichtung zum Transportieren von Werkstücken zwischen zwei Kammerebenen der Behandlungsvorrichtung;

Fig. 4

einen schematischen vertikalen Längsschnitt durch die Behandlungsvorrichtung, wobei eine Kammertrommel der Behandlungsvorrichtung aus einem Gehäuse der Behandlungsvorrichtung herausgehoben wird;

Fig. 5

eine schematische Abwicklung einer Flächendichtung der Behandlungsvorrichtung in einem kalten Montagezustand;

Fig. 6

eine schematische Draufsicht auf eine Ausgleichsausnehmung der Flächendichtung aus Fig. 5, deren Ausgleichsbereiche in dem kalten Montagezustand verbreitert sind;

Fig. 7

eine schematische Abwicklung der Flächendichtung aus Fig. 5 in einem warmen Betriebszustand;

Fig. 8

eine schematische Draufsicht auf eine Ausgleichsausnehmung der Flächendichtung, deren Ausgleichsbereiche in dem warmen Betriebszustand verengt sind;

Fig. 9

eine ausschnittsweise schematische Draufsicht auf die Umfangsfläche einer Kammertrommel der Behandlungsvorrichtung mit einer auf die Kammertrommel aufgelegten Flächendichtung, bevor die Flächendichtung durch Mitnehmerelemente der Kammertrommel gedehnt worden ist;

Fig. 10

ein ausschnittsweiser schematischer radialer Schnitt durch einen Randbereich der Kammertrommel mit der aufgelegten Flächendichtung, bevor die Flächendichtung mittels der Mitnehmerelemente gedehnt worden ist, mit der Blickrichtung in Richtung des Pfeiles 10 in Fig. 9;

Fig. 11

eine der Fig. 9 entsprechende Darstellung, nachdem die Flächendichtung mittels der Mitnehmerelemente gedehnt worden ist;

Fig. 12

eine der Fig. 10 entsprechende Darstellung, nachdem die Flächendichtung mittels der Mitnehmerelemente gedehnt worden ist, mit der Blickrichtung in Richtung des Pfeiles 12 in Fig. 11;

Fig. 13

eine schematische Darstellung einer Vorrichtung zum Drehen eines Werkstücks in einer Aufnahmekammer, wobei die Drehvorrichtung eine durch eine Wand der Aufnahmekammer hindurchgeführte Antriebswelle umfaßt;

Fig. 14

eine schematische Darstellung einer Drehvorrichtung zum Drehen eines Werkstücks in einer Aufnahmekammer, wobei die Drehvorrichtung durch Reibschluß mit dem Gehäuse der Behandlungsvorrichtung angetrieben wird; und

Fig. 15

einen schematischen horizontalen Schnitt durch eine Kammerebene der Behandlungsvorrichtung, die als Vakuumschleuse ausgebildet ist.

In the drawings show:

Fig. 1

a schematic horizontal cross section through a treatment device;

Fig. 2

a schematic vertical longitudinal section through the treatment device of Fig. 1;

Fig. 3

a schematic representation of a transfer device for transporting workpieces between two chamber levels of the treatment device;

Fig. 4

a schematic vertical longitudinal section through the treatment device, wherein a chamber drum of the treatment device is lifted out of a housing of the treatment device;

Fig. 5

a schematic development of a surface seal of the treatment device in a cold mounting state;

Fig. 6

a schematic plan view of a compensation recess of the surface seal of Figure 5, the compensation areas are widened in the cold mounting state.

Fig. 7

a schematic development of the surface seal of Figure 5 in a warm operating condition.

Fig. 8

a schematic plan view of a compensating recess of the surface seal whose compensation areas are narrowed in the warm operating condition;

Fig. 9

a fragmentary schematic plan view of the peripheral surface of a chamber drum of the treatment device with a surface seal placed on the chamber drum, before the surface seal has been stretched by driving elements of the chamber drum;

Fig. 10

a fragmentary schematic radial section through an edge region of the chamber drum with the applied surface seal before the surface seal has been stretched by means of the driver elements, with the viewing direction in the direction of the arrow 10 in Fig. 9;

Fig. 11

a representation corresponding to Figure 9, after the surface seal has been stretched by means of the driver elements.

Fig. 12

a representation corresponding to FIG. 10, after the surface seal has been stretched by means of the driver elements, with the viewing direction in the direction of the arrow 12 in FIG. 11;

Fig. 13

a schematic representation of an apparatus for rotating a workpiece in a receiving chamber, wherein the rotating device comprises a guided through a wall of the receiving chamber drive shaft;

Fig. 14

a schematic representation of a rotating device for rotating a workpiece in a receiving chamber, wherein the rotating device is driven by frictional engagement with the housing of the treatment device; and

Fig. 15

a schematic horizontal section through a chamber level of the treatment device, which is designed as a vacuum lock.

Equal or functionally equivalent elements are the same in all figures Reference numeral.

A treatment apparatus shown as a whole as 100 shown in FIGS. 1 to 8 for procedural treatment of workpieces 102 comprises a housing 104 with a circular disk-shaped bottom plate 106 and a hollow cylindrical housing wall 108 extending from the top of the Bottom plate 106 extends from above (see Fig. 2).

The bottom plate 106 of the housing 104 rests on a plurality of supports 110, which supported on a (not shown) underground.

At the top, the housing 104 is open.

In the interior of the housing 104 is a designated as a whole with 112 Chamber drum about a substantially vertical axis of rotation 114 rotatable arranged.

The chamber drum 112 comprises at its lower end a circular disk-shaped Drum bottom plate 116, from the top of which is a hollow cylindrical, Coaxial with the drum bottom plate 116 aligned hollow shaft 118th extends upwards.

The height of the drum bottom plate 116 and the hollow shaft 118 correspond together substantially the height of the housing wall 108th

From the outside of the hollow shaft 118, a plurality of annular disc-shaped extend Bottom plates 120 and one at the upper end of the hollow shaft 118th arranged circular disc-shaped cover plate 122 in the radial and horizontal Outward direction, wherein the bottom plates 120 in the axial direction of the Hollow shaft 118 from each other, from the drum base plate 116 and of the Cover plate 122 are spaced.

As can be seen from Fig. 1, extend from the outside of the hollow shaft 118 further vertical partition walls 124 in the radially outward direction, wherein each of the partition walls 124 between each two bottom plates 120, between a bottom plate 120 and the drum bottom plate 116 or between a bottom plate 120 and the cover plate 122 is arranged.

By two vertical partitions 124, through a portion of the hollow shaft 118 and by two bottom plates 120 or by a bottom plate 120th and the drum bottom plate 116 or through a bottom plate 120 and the Cover plate 122 is in each case a receiving chamber 126 of the chamber drum 112 limited.

The receiving chambers 126, which at the same height in the chamber drum 112 are arranged together form a chamber level 128 of the chamber drum 112th

The exemplified treatment device 100 thus comprises a Chamber drum 112 with six chamber levels 128, each having eight receiving chambers 126 include.

However, the number of receiving chambers 126 need not be in each chamber level Be the same; rather, the number of receiving chambers per Chamber level 128 vary as desired.

In particular, it can be provided that in one or more chamber levels one or more of the partitions 124 between successive ones Recording chambers 126 omitted.

All receiving chambers 126 the same chamber level 128 and the receiving chambers 126 different chamber levels 128 are rotatable with each other connected so that they together about the axis of rotation 114 of the chamber drum 112 are rotatable.

To drive this rotating device is a designated as a whole with 130 Rotary drive, one at the bottom of the bottom plate 106 of the housing 104 arranged rotary drive motor 132, for example, an electric Geared motor, includes.

The output shaft 134 of the rotary drive motor 132 is through a central Passage opening 136 in the bottom plate 106 of the housing 104 passed and with the underside of the drum bottom plate 116 of the chamber drum 112 rotatably connected.

To the introduction of workpieces 102 in the treatment apparatus 100th to allow the housing wall 108 is at the height of the top chamber level 128a provided with a, for example quadrangular, access opening 138a. The extent of the access opening 138a substantially corresponds to Expansion of the vertical partitions 124, the bottom plate 120th and the cover plate 122 defining the mouth opening 140 of each of the receiving chambers 126 of the uppermost chamber level 128a, so that the receiving chambers 126 of the top chamber level 128a alternately into a loading position can be brought, in which the mouth opening 140 of the respective receiving chamber 126 with the access opening 138a in the housing wall 108 is aligned, as shown in Fig. 1 for the chamber 126 a.

After introducing a workpiece 102 to be treated through the access opening 138 in the respectively aligned with the access opening 138 receiving chamber 126, the respective receiving chamber 126 with the therein arranged workpiece 102 by the rotational movement of the chamber drum 112 - continuously or intermittently - by a rotation angle of less than 360 Degree rotated about the rotation axis 114 in a transfer position, in which the Mouth opening 140 of the respective receiving chamber 126 with an outlet opening 142 is aligned, which in the housing wall 108 also on the Height of the uppermost chamber level 128a is arranged. In Fig. 1, the Receiving chamber 126g just reached this transfer position.

Preferably, the angular distance between the outlet opening 142 corresponds and the access opening 138 of a chamber plane 128 to the circumferential angle, over which one of the receiving chambers 126 or more receiving chambers 126 of the relevant chamber level 128 extend.

On the way between the inlet opening 138 and the outlet opening 142 can arranged in the receiving chamber 126 workpiece 102 of any subjected to process engineering treatment.

These procedural treatments may include, for example, heat treatments, in particular annealing treatments, such as "soft annealing" of tubes, or drying treatments, such as the Dry a paint coating of the workpiece 102 be.

Furthermore, it may be in the procedural treatments, for example for sandblasting a workpiece 102 or for vapor deposition a workpiece 102 act.

Other possible treatments of a workpiece 102 include, for example Washing treatments with aqueous or hydrocarbon liquids and / or those treatments which take place under protective gas or in vacuo have to.

On each chamber level 128, the workpiece 102 may be one or more be subjected to such procedural treatment steps.

If the receiving chamber 126 for such a treatment, a treatment medium to be supplied, this is done via feed nozzle 144, the are arranged on the housing wall 108 at the angular position, which of the receiving chamber 126 happens at the desired time of treatment becomes. To remove a treatment medium from a receiving chamber 126, are provided on the housing wall 108 Abführstutzen 146 opposite the respective associated feed port 144 offset by a rotation angle are, which corresponds to the desired treatment duration.

However, the discharge port 146 for a treatment medium need not necessarily be are on the same plane as the feed port 144 for same treatment medium. Rather, it can be provided that an on a level of the treatment device 100 supplied treatment medium only at an immediately or indirectly subsequent level removed again becomes.

To a workpiece 102 after passing through a plane 128 of the treatment device 100 to hand over to a subsequent treatment level, For example, the treatment device 100 includes a plurality of transfer devices 148, one of which is shown schematically in FIG.

The transfer device 148 comprises a housing 150, the fluid-tight to a Mounting flange 152 of the housing 104 of the treatment device 100th is flanged.

The mounting flange 152 surrounds a portion of the housing wall 108, which the exit opening 142 of a first chamber level 128a and an access opening 138 a second chamber level 128 b surrounds, so that through the Mounting flange 152, the housing 150 of the transfer device 148 and the housing wall 108 of the treatment device 100 a the outlet opening 142 fluid-tight with the access opening 138 connecting closed Chamber 154 is formed.

The transfer device 148 further includes a moving device 156 for the workpiece 102, which is disposed within the chamber 154.

The moving device 156 comprises a movable workpiece holder 158, for example in the form of a movable fork 160, which by means of a Chain hoist 162 is displaceable in the vertical direction.

The chain hoist 162 includes, for example, a pull chain 164, which is driven by a Sprocket 166 and two Umlenkkettenräder 168 is guided.

The chain hoist 162 together with the fork 160 is by means of a pneumatic piston 170 displaceable in the radial direction of the chamber drum 112.

The pneumatic piston 170 is displaceable in a pneumatic cylinder 172 held and can at its two end faces 174 alternately with a increased gas pressure to the chain hoist 162 with the therein arranged fork 160 to the axis of rotation 114 of the chamber drum 112 out or to move away from the rotation axis 114.

The to be transferred from the chamber level 128a to the chamber level 128b Workpiece 102 rests in the receiving chamber 126 of the chamber level 128a Spacers 176, which are supported on the bottom of the receiving chamber 126.

For receiving the workpiece 102, the fork 160 by means of the chain hoist 162 raised to the level of the chamber level 128a.

Subsequently, the fork 160 is interposed by means of the pneumatic piston 170 the spacers 176 pushed through under the workpiece 102.

By means of the chain hoist 162, the fork 160 is slightly raised thereon, so that the workpiece 102 now rests on the fork 160 and the spacers 176 of the receiving chamber 126 is lifted.

Now, the fork 160 with the workpiece 102 by means of the pneumatic piston 170 pulled out of the receiving chamber 126 of the chamber level 128a and by means of the chain hoist 162 to the retracting height of the chamber plane 128b lowered.

Subsequently, the fork 160 with the workpiece 102 by means of the pneumatic piston 170 inserted into a receiving chamber 126 'of the chamber level 128b.

By lowering the fork 160 by means of the chain hoist 162, the workpiece 102 deposited on the spacers 176 at the bottom of the receiving chamber 126 '.

Subsequently, the pneumatic piston 170 pulls the fork 160 completely again from the receiving chamber 126 'out, and the fork 160 is by means of Chain hoist 162 raised to the level of the chamber level 128a to the expected next workpiece 102 from the chamber level 128a and take over.

Since the transfer device 148 is encapsulated, may also be in the Chamber level 128a supplied treatment medium through the chamber 154th the transfer device 148 continue to flow into the chamber level 128b.

Furthermore, there is also a pressure balance between the receiving chambers of Chamber level 128a and the chamber level 128b instead, so that in particular a vacuum generated in the chamber plane 128a in the chamber plane 128b preserved.

After the transfer of a workpiece 102 from a chamber level 128a the subsequent chamber plane 128b becomes the workpiece 102 in question the chamber plane 128b by rotation of the chamber drum 112 to a Angle of less than 360 degrees about the axis of rotation 114, up to the outlet opening 142 of the chamber level promoted 128b.

While passing through this level of treatment device 100 may the workpiece 102 in the receiving chamber 126 'further procedural Treatments are subjected.

Upon reaching the exit opening 142 of the chamber level 128b, the workpiece 102 by means of another transfer device 148, the corresponding the above-described transfer device 148 may be formed to the access opening 138 passed to another chamber level 128 or, if the chamber plane 128b is the last one of the workpiece 102 to be traversed level, taken from the treatment device 100.

In the embodiment described above, the levels of the treatment device Go through 100 from top to bottom. As well would be However, it is also possible, the workpieces 102 first in the lowest chamber level 128f and bring the workpieces 102 from the bottom to at the top through the treatment device 100 up to the uppermost chamber level To promote 128a and return it from this level to the treatment device 100 to take.

In particular, when in the treatment apparatus 100 is liquid or gaseous treatment media are used and / or if within the treatment device 100 is generated a vacuum, it is necessary that between the outer surface of the chamber drum 112 and the Inner surface of the housing wall 108 is a surface seal 178, which prevents that a liquid or gaseous medium from a receiving chamber 126 in vertically or horizontally adjacent receiving chambers 126 or drains into the environment.

This surface seal 178 is on the peripheral surface of the chamber drum 112 rotatably arranged and moves together with the chamber drum 112th through the interior of the housing 104 of the treatment apparatus 100.

The surface seal 178 is formed as a one-piece wrapping foil seal.

A settlement of the wound up on the chamber drum 112 surface seal 178 in a cold mounting state (at room temperature) is shown in FIG. 5 shown.

A development of the surface seal 178 in a warm operating condition (At an operating temperature of for example 120 ° C) is shown in Fig. 7.

The surface seal 178 is made as a film of a sealing material, which is made of a fluoropolymer plastic or a fluoropolymer compound is made. In particular, the surface seal 178 be formed of a polytetrafluoroethylene (PTFE) film.

As can be seen from Figs. 5 and 7, the surface seal 178 with in essentially rectangular openings 180 provided, which in on the chamber drum 112 arranged state of the surface seal 178 respectively with a mouth 140 of a receiving chamber 126 substantially are congruent.

Consequently, the passage openings 180 are arranged in a regular grid, wherein the number of superimposed rows 182 of the number the chamber levels 128 of the treatment device 100 and the number of Columns 184 of the grid of the number of receiving chambers 126 per chamber level 128 corresponds.

The passage openings 180 of the surface seals 178 are by vertical Webs 186 and separated by horizontal webs 188, wherein the horizontal webs 188 and the vertical webs 186 in approximately square Intersection areas 190 intersect.

In the assembled state of the surface seal 178, the horizontal extend Webs 188 along the circumferential direction 187 of the chamber drum 112 and the vertical webs 186 along the axial direction 189 of the chamber drum 112th

As best seen in Figs. 5 and 6, the surface seal is 178 in each crossing region 190, each with a compensation recess 192, which has a substantially circular central area 193 from which there are two vertical compensation areas 194, which are the shape have vertical slots, up and down and from which There are two horizontal compensation areas 196, which form the horizontal Slots, extend to the left or to the right.

The passage openings 180 and the Ausgleichsausnehmungen 192 are through a suitable separation process from a substantially flat film of the Sealing material, for example, by punching or cutting, separated out.

In a specific embodiment, the thickness of the surface seal 178 about 5 mm. The height of the chamber drum 112 and thus the Height H of the surface seal 178 is, for example, about 1,000 mm. For example, the diameter of the chamber drum 112 is approximately 800 mm, so that the circumference of the chamber drum 112 and thus the length L the surface seal 178 is about 2,513 mm. Furthermore, in the Embodiment six chamber levels 128 and eight receiving chambers 126 provided per chamber level 128, so that the width of the vertical webs 186 and the horizontal webs 188 each about 30 mm.

The horizontal extension I and the vertical extension h of the compensating recesses 192 is preferably larger than the width of the vertical webs 186 and the horizontal webs 188th

In a specific embodiment, the vertical extent h the compensation recesses 192, for example, about 40 mm. In the same Embodiment is the horizontal extension I of the compensating recesses 192, for example, also about 40 mm.

The material of the surface seal 178 (for example PTFE or a PTFE compound) has a much higher thermal expansion coefficient as the material of the chamber drum 112 (usually a metallic material, especially a steel). When heated from room temperature to an operating temperature of, for example, about 120 ° C therefore expands the surface seal 178 is about 1 percent relative to the peripheral surface the chamber drum 112, in the concrete embodiment described above ie about 25 mm in the circumferential direction of the chamber drum 112 and about 10 mm in the axial direction of the chamber drum 112th

This difference in the thermal expansions of the surface seal 178 on the one hand and the chamber drum 112, on the other hand, is replaced by those in the intersection areas 190 of the surface seal 178 provided Ausgleichsausnehmungen 192 balanced.

As can be seen from Figs. 5 and 6, stands on the chamber drum 112th mounted surface seal 178 in the assembled state (at room temperature) under a mechanical bias, due to which the compensation areas 194, 196 of the compensating recesses 192 are widened.

In particular, the vertical compensation regions 194 extend from their punctiform tip 198 to their mouth in the central region of the Ausgleichsaufnehmung 192 to a width b _1, for example, about 3 mm. The horizontal compensation regions 196 expand in the assembled state at room temperature in each case from its tip 200 to its mouth in the middle region 193 of the compensation recess 192 to a width b ₂ of, for example, approximately 1.5 mm.

Due to the greater thermal expansion of the surface seal 178 relative to the chamber drum 112 when heating from room temperature to the operating temperature of, for example, about 120 ° C, the width of the vertical compensation areas 194 and horizontal compensation areas 196 increases upon heating of the chamber drum 112 and the surface seal 178 Operating temperature until the width b _{1 of} the vertical compensation areas 194 and the width b _{2 of} the horizontal compensation regions 196 in the operating state is approximately equal to zero (see Fig. 8).

In the operating state, the surface seal 178 is thus essentially free of stress, in particular without in the circumferential direction 187 of the chamber drum 112 or acting in the axial direction 189 of the chamber drum 112 Tensions, on the outside of the chamber drum 112 at. In this way For example, the face seal 178 may be in a wide operating temperature range be used without risk of fatigue.

The surface seal 178 may be used in the manufacture of the treatment device 100 or when required after a certain period of operation Exchange can be easily mounted on the chamber drum 112.

For this purpose, first the chamber drum 112, as shown in Fig. 4, after lifted out of the housing 104 of the treatment apparatus 100 above.

For this purpose, as a whole with 202 designated lifting device used which are several set at the top of the cover plate 122 Holding ring 204 includes, through which a tether 206 is pulled. The upper ends of the tethers 206 are at location 208 with a lower one End of a support cable 210 connected, which via a stationary pulley 212 is guided and by means of a motor (not shown) Rope winch can be raised or lowered to the chamber drum 112 from the To lift out housing 104 or to lower the chamber drum 112 again.

The surface seal 178 is in its dimensions to the warm operating condition designed, that is designed so that the vertical and horizontal Slots of Ausgleichsausnehmungen 192 closed in the warm operating condition are.

The surface seal 178 can now basically at the operating temperature be mounted on the chamber drum 112. However, this must be the Chamber drum 112 and the surface seal 178 outside the housing 104 of the treatment device are heated to the operating temperature, what - especially in the case of the replacement of a surface seal 178 in As part of a maintenance of the treatment device 100 - not at all or only difficult is possible.

Alternatively, however, the surface seal 178 may be cold initially placed loosely on the cold chamber drum 112 and then successively in the circumferential direction 187 and in the axial direction 189 of the chamber drum 112 are stretched.

The expansion of the surface seal 178 in the circumferential direction 187 of the chamber drum 112 takes place by means of vertical carrier plates 214 (see FIG. 9), which by several, for example two, fixing screws 216, with their shafts in vertically spaced threaded blind holes 218 engage and each have a through hole 220 in the vertical Pass through the driver plate 214, on each one of the partitions 124 of the Chamber drum 112, in the region of the mouth opening 140 a Receiving chamber 126, are held, wherein an outer edge 222 of the respective Mitnehmerblechs 214 in the radial direction of the chamber drum 112 um a distance d which is smaller than the thickness of the surface seal 178, for example by about 3 mm, over the respective partition 124 after protrudes outside (see Fig. 10).

The required elongation of the surface seal 178 in the axial direction 189 The chamber drum 112 is effected by means of horizontal driving plates 224, the each by a plurality, for example four, fixing screws 216, pass through the passage holes 220 in the horizontal drive plate 224 and in threaded sack holes 218 in the bottom wall or ceiling wall of one Receiving chamber 126 are screwed to the respective bottom wall or Ceiling wall of the receiving chamber 126 are held, close to the Mouth opening 140 of the receiving chamber 126, wherein an outer edge 222 the horizontal driving plate 224 in the radial direction of the chamber drum 112 by a distance d ', which is smaller than the thickness of the surface seal 178, for example by about 3 mm, over the relevant bottom plate 120, 116 and cover plate 122 of the chamber drum 112 protrudes outward.

At room temperature, the length L of the surface seal 178 (e.g. 25 mm) shorter than the circumference of the chamber drum 112 and the height H the surface seal (for example, 10 mm) is less than the height of the Chamber drum 112.

In the cold pre-assembly condition of the surface seal in which the surface seal 178 is not subjected to external stresses, are the compensation areas 194, 196 of the compensating recesses 192 of the surface seal 178 (as well as in warm operating condition) closed.

For mounting the surface seal 178 on the chamber drum 112 is the Surface seal 178 first with one of its vertical bars 186 on a Row of mutually arranged partitions 124 of the chamber drum 112th placed on and on this web 186 by means of the adjacent thereto vertical Carrier plates 214 attached to the chamber drum 112 by the mounting screws 216 of the relevant vertical carrier plates 214 completely be tightened until the driver plates 214 to the relevant Partition 124 lie flat.

The rest of the surface seal 178 is initially only loose around the chamber drum 112 pulled so that a gap of at least 25 mm width between the ends of the surface seal 178 remains.

Starting from the first vertical web 186, with which the surface seal 178 has been attached to the chamber drum 112, the surface seal 178 at its in the circumferential direction 187 of the chamber drum 112th adjacent vertical web 186 'to the expected thermal expansion stretched by the fastening screws 216 of the vertical driving plates 214, which rest against the vertical web 186 'and initially at about 4 mm from the respective partition wall 124 protrude (see FIG. 9) are fully tightened (see FIG. 11) until the respectively associated ones vertical cam plates 214 flat on the respective partition 124th issue. In this case, the surface seal 178 at the vertical compensation areas 194 arranged on the webs 186 Ausgleichsausnehmungen 192 pulled apart and thereby in the circumferential direction 187 of the chamber drum 112 stretched.

Since this is only narrow, lying next to the vertical compensation areas 194 Web portions of the surface seal 178 are easily deformed, this is Elongation of the surface seal 178 with a much lower force connected as would be the case if the entire vertical webs 186 in their entire width of, for example, about 30 mm from their material stretched out by the same amount (for example, about 3mm) would have to be.

In the same manner described above, the surface seal 178 with their in the circumferential direction 187 of the chamber drum 112 on the vertical Stay 186 'following vertical webs attached to the chamber drum 112.

Subsequently, the surface seal 178 is successively in the axial direction 189th the chamber drum 112 stretched.

For this purpose, the surface seal 178 with a horizontal web 188 at a Bottom plate 120 of the chamber drum 112 attached by the fastening screws 216 of the adjacent horizontal cam plates 224 completely be tightened until the respective horizontal Mitnehmerbleche 224 flat at the top or at the bottom of the relevant base plate 120 abut.

Subsequently, the surface seal 178 in the axial direction 189 of the chamber drum 112 stretched by a first horizontal bar 188 in vertical Direction adjacent horizontal ridge 188 'at a vertically adjacent Base plate 120 'is fixed, by fully tightening the fastening screws 216 of the horizontal web 188 'adjacent horizontal driver plates 224, to also these driver plates 224th lie flat against the underside or at the top of the bottom plate 120 '.

In this case, the surface seal 178 at the horizontal compensation areas 196 of the compensating recesses 192, which in the range of horizontal Bridge 188 are arranged, pulled apart, causing the surface seal 178 about the expected thermal expansion in the axial direction 189 the chamber drum 112 is stretched.

The stretching of the surface seal 178 in the axial direction 189 is then continued, by the surface seal 178 with another, on the web 188 ' in the axial direction 189 following horizontal web on another base plate 120 or on the cover plate 122 or on the drum bottom plate 116th the chamber drum 112 is set.

If all vertical webs 186 and all horizontal webs 188 of the surface seal 178 by means of the driver plates 214, 224 on the chamber drum 112 determined and thus the surface seal 178 completely on the chamber drum 112 is clamped, the assembly of the surface seal 178 is on the chamber drum 112 finished.

Subsequently, the chamber drum 112 by means of the lifting device 202 be re-inserted into the housing 104 of the treatment apparatus 100.

In a second embodiment of the treatment device shown in FIG 100 are the processing device 100 passing through Workpieces 102 in at least one receiving chamber 126 is not stationary Spacers 176 stored, but in a workpiece holder 226th which is about a radial to the axis of rotation 114 of the chamber drum 112 aligned rotation axis 228 is rotatable.

The rotation about the axis of rotation 228 takes place by means of a rotary shaft 230, which on a radially inner end wall 232 of the workpiece holder 226th is fixed and rotatably mounted on the hollow shaft 118 of the chamber drum 112 is.

An inside of the hollow shaft 118 lying end of the rotary shaft 230 is with a bevel gear 234 which engages a stationary central Bevel gear 236 is, which is coaxial with the axis of rotation 114 of the chamber drum 112 is aligned and via a vertical holding tube 238, the one Through hole 240 in the drum base plate 116 passes through, with the Top of the bottom plate 106 of the housing 104 of the treatment device 100 is connected.

During a rotational movement of the hollow shaft 118 about the axis of rotation 114 of the chamber drum 112 thus rotates with the stationary central bevel gear 236 meshing bevel gear 234 and thus the workpiece holder 226 with the workpiece 102 received therein around the horizontal axis of rotation 228.

To the workpiece 102 by means of a transfer device 148 from the workpiece holder To be able to remove 226, are on the workpiece holder 226 a plurality of spacers 242 provided so that a movable Workpiece holder 158 of the transfer device 148, for example a movable fork 160, in the space between the workpiece 102 and a Wall of the workpiece holder 226 can be moved to the To lift workpiece 202 from the spacers 242 and out of the workpiece holder 226 move out.

To the rotational speed of the workpiece holders 226 in the receiving chambers 126 of the rotational speed of the chamber drum 112 to decouple about the axis of rotation 114 may also be provided that the central bevel gear 236, which is formed coaxially with the rotation axis 114, not fixed, but is rotatably mounted relative to the housing 104 and has its own rotary drive.

Otherwise, the second embodiment of a treatment device is correct 100 in terms of structure and function with the first embodiment, to the above description in this respect reference is made.

A illustrated in Fig. 14 third embodiment of a treatment device 100 differs from the first embodiment in that the Workpieces 102 in at least one receiving chamber 126 of the chamber drum 112 do not rest on stationary spacers 176, but in one aligned about a parallel to the axis of rotation 114 of the chamber drum 112 Rotary axis 244 rotatable workpiece holder 246 are held.

The workpiece holder 246 includes a hub 248 at the top thereof Spacer 250 are arranged, on which the respective workpiece 102nd rests.

The underside of the hub 248 is coaxial with the axis of rotation 244 aligned and (by means not shown bearings) at the bottom of the receiving chamber 126 rotatably mounted rotary shaft 252 with a friction wheel 254th connected, the peripheral surface with the inner surface of the housing wall 108th of the housing 104 of the treatment device 100 is in contact.

During a rotational movement of the chamber drum 112 about the rotation axis 114 rolls the friction wheel 254 on the inner surface of the housing wall 108 due to the frictional engagement between the friction wheel 254 and the housing wall 108, whereby the friction wheel 254 and thus the workpiece holder 246 in a rotational movement be offset about the rotation axis 244.

The spacers 250 of the workpiece holder 246 allow a movable workpiece holder 158 a transfer device 148 between the turntable 248 and the workpiece 102 can be moved to the Pick workpiece 102 from the spacers 250 and then out the receiving chamber 126 to move out.

Otherwise, the third embodiment of a treatment device is correct 100 in terms of structure and function with the first execution function to the above description of which reference is made.

In a fourth embodiment of a treatment device shown in FIG 100 has at least one plane of the treatment device 100 the function of a vacuum lock.

In the embodiment shown in Fig. 15, the relevant chamber level 128 provided with 16 receiving chambers 126, which due to the Rotary movement of the chamber drum 112 about the axis of rotation 114 of the Access opening 138 of the chamber level 128, through which the chamber level 128 communicates with the surrounding atmosphere and through which the workpieces 102 are introduced into the chamber plane 128, to the in an angular distance of 180 degrees of the access opening 138 opposite Outlet opening 142 of the chamber plane 128 are moved, at which the vacuum end pressure of the chamber level 128 is reached and over which the Chamber level 128 with a subsequent, also at least partially connected under vacuum chamber level 128 is connected.

Due to the rotational movement of the chamber drum 112, the receiving chambers 126 - after removal of the workpieces 102 through the outlet opening 142 - moved back to the access opening 138 in the empty state.

At this level, each receiving chamber 126 thus always moves from one High pressure area (access opening 138) to an area with the Vakuumenddruck (outlet opening 142) and back again.

In the vacuum lock shown in Fig. 15, the vacuum gradually becomes generated by each an empty receiving chamber 126, in the still vacuum is, with a equipped with a workpiece 102 receiving chamber, in which the final vacuum pressure is not yet reached, gas shorted becomes.

For this purpose, the housing wall 108 in a (in the direction of rotation 255 seen) on the access opening 138 following area with a first Luftabführstutzen 256a provided via a first shorting line 258a is connected to a first air supply port 260a, which on the housing wall 108 (seen in the direction of rotation 255) after the outlet opening 142 and in front of the access opening 138 is arranged.

One (seen in the direction of rotation 255) after the first air outlet 256a arranged second Luftabführstutzen 256b is connected via a second shorting line 258b with one (seen in the direction of rotation 255) in front of the first air supply port 260a disposed second air supply port 260b connected.

One (seen in the direction of rotation 255) after the second air outlet 256b arranged third Luftabeitstutzen 256c is connected via a third shorting line 258c with a (seen in the direction of rotation 255) in front of the second air supply port 260b arranged third air supply port 260c connected.

One (seen in the direction of rotation 255) after the third air outlet 256c arranged fourth air outlet nozzle 256d is via a fourth shorting line 258d with one (seen in the direction of rotation 255) before the third Air supply port 260c arranged fourth air supply port 260d connected.

Between the fourth air discharge nozzle 256 d and the outlet opening 142 the chamber level 128, a fifth Luftabeitstutzen 256e is arranged, which via a suction line 262 with a (not shown) vacuum pump connected is.

A between the first air supply port 260 a and the access opening 138 the chamber level 128 arranged fifth air supply nozzle 260e opens into the surrounding atmosphere, so that each in the area of the fifth air supply 260e receiving chamber 126 through the fifth air supply pipe 260e is ventilated to atmospheric pressure.

In the above-described, serving as a vacuum lock chamber level 128 thus becomes a total of four times a short circuit between one not fully evacuated receiving chamber 126, which is on the way from the inlet opening 138 to the outlet opening 142, and a not fully ventilated receiving chamber 126, which is located on the Away from the exit port 142 back to the access port 138, carried out.

Starting from an atmospheric pressure of, for example, 1,000 mbar and a desired vacuum pressure of, for example, 10 mbar is the Chamber pressure after pressure equalization through the first short circuit line 258a still, for example, about 800 mbar, after the pressure equalization by the second shorting line 258b, for example, about 600 mbar, after the pressure equalization by the third shorting line 258c, for example about 400 mbar and after pressure equalization by the fourth Short circuit line 258d, for example, about 200 mbar.

The vacuum pump must be in the area of the fifth Luftabführstutzens 256e So receiving chamber 126 so only on about 200 mbar pump off the target vacuum pressure of 10 mbar.

Due to the multi-stage evacuation, the vacuum pump has significantly less Gas from the receiving chambers 126 pump.

It also stands for the generation of the vacuum in a receiving chamber 126 a much longer period (using 16 chambers in serving as a vacuum chamber chamber level 128, for example, the fivefold workpiece cycle time) for vacuum generation.

Furthermore, the pressure difference and thus the leak rate over the surface seal 178 between in the circumferential direction 187 of the chamber drum 112th successive receiving chambers 126 through the multi-stage evacuation reduced.

Otherwise, the fourth embodiment of a treatment device is correct 100 in terms of structure and function with the first embodiment, to the above description in this respect reference is made.

Claims (37)

Treatment device for treating workpieces (102) or groups of workpieces, which are transported from an entrance to an exit of the treatment device (100),
comprising a housing (104) and receiving chambers (126) rotating relative to the housing (104) for receiving the workpieces (102) or groups of workpieces,
wherein the receiving chambers (126) are arranged in at least two different chamber levels (128) and a first chamber level, which is first passed through by the workpieces (102) or workpiece groups, an outlet opening (142) in the housing (104) and a second chamber level ( 128), which after the first chamber level is passed through by the workpieces (102) or workpiece groups, is assigned an access opening (138),
and at least one transfer device (148) which moves the workpieces (102) or groups of workpieces from the exit opening (142) to the access opening (138). Treatment device according to claim 1, characterized in that the workpieces (102) or groups of workpieces are movable by means of the transfer device (148) in a defined spatial position from the outlet opening (142) to the access opening (138). Treatment apparatus according to one of claims 1 or 2, characterized in that the workpieces (102) or groups of workpieces in the first chamber plane (128) and / or in the second chamber plane (128) at an angle of at least about 90 °, preferably at least about 180 °, in particular of at least approximately 270 °, about an axis of rotation (114) of the treatment device (100) are moved. Treatment apparatus according to one of Claims 1 to 3, characterized in that the workpieces (102) or groups of workpieces in the first chamber plane (128a) and / or in the second chamber plane (128b) are inclined by an angle of less than 360 ° about an axis of rotation (114 ) of the treatment device (100) are moved. Treatment device according to one of claims 1 to 4, characterized in that all the receiving chambers (126) of the same chamber level (128) rotate synchronously with each other. Treatment device according to Claim 5, characterized in that all the receiving chambers (126) of the same chamber plane (128) are rigidly connected to one another. Treatment device according to one of claims 1 to 6, characterized in that at least two receiving chambers (126) of different chamber levels (128) rotate synchronously with each other. Treatment device according to claim 7, characterized in that at least two receiving chambers (126) of different chamber levels (128) are rigidly connected to each other. Treatment device according to one of claims 1 to 8, characterized in that all the receiving chambers (126) of all chamber levels (128) rotate synchronously with each other. Treatment device according to claim 9, characterized in that all receiving chambers (126) of all chamber levels (128) are rigidly connected to each other. Treatment apparatus according to one of claims 1 to 10, characterized in that the treatment device (100) comprises a chamber drum (112) which is rotatable about a rotation axis (114) of the chamber drum (112) and at least one bottom wall (116, 120) transverse to the axis of rotation (114) and at least two partitions (124) oriented transversely of the bottom wall (116, 120). A treatment device according to claim 11, characterized in that the chamber drum (112) comprises at least two bottom walls (116, 120) and at least one top wall (122) oriented transversely to the axis of rotation (114). Treatment device according to one of claims 1 to 12, characterized in that the chamber drum (112) is provided at its periphery with a surface seal (178). Treatment device according to claim 13, characterized in that the material of the surface seal (178) comprises a plastic with low sliding friction, preferably a fluoropolymer or a fluoropolymer compound. Treatment device according to one of claims 13 or 14, characterized in that the surface seal (178) is provided with compensating recesses (192), wherein the compensating recesses (192) each comprise at least one compensating area (194, 196) whose width changes when the temperature changes Surface seal (178) and / or upon application of the surface seal (178) changed with a mechanical tension. Treatment apparatus according to claim 15, characterized in that at least some of the compensating recesses (192) each have at least one compensating area (194) which has a longitudinal, preferably substantially perpendicular, direction to the circumferential direction (187) of the chamber drum (112). Treatment device according to one of claims 15 or 16, characterized in that at least some of the compensating recesses (192) each have at least one compensation area (196) which has a longitudinal direction substantially parallel to the circumferential direction (187) of the chamber drum (112). Treatment device according to one of claims 15 to 17, characterized in that at least some of the compensating recesses (192) each comprise at least two compensating regions (194, 196). Treatment apparatus according to claim 18, characterized in that at least some of the compensating recesses (192) each comprise at least two compensating regions (194, 196) which have transverse, preferably substantially perpendicular, longitudinal directions aligned with each other. Treatment device according to one of Claims 15 to 19, characterized in that the compensation recesses (192) each comprise at least one compensating region (194, 196) whose width is in the assembled state of the surface seal (178) when the temperature of the surface seal (178) changes. changed so that the different thermal expansions of the surface seal (178) and the chamber drum (112) at least partially, preferably substantially completely, are compensated. Treatment device according to one of claims 15 to 20, characterized in that at least some of the compensating recesses (192) each have a central region (193) into which at least two compensating regions (194, 196) open. Treatment device according to claim 21, characterized in that at least some of the compensating recesses (192) comprise a central region (193) into which at least two compensating regions (194, 196) open, which have transverse, preferably substantially perpendicular, longitudinal directions aligned with each other. Treatment device according to one of Claims 15 to 22, characterized in that the surface seal (178) has, in addition to the compensating recesses (192), access openings (180) which, in the assembled state of the surface seal (178), provide access to receiving chambers (126) of the chamber drum (112 ) enable. A treatment device according to claim 23, characterized in that the surface seal (178) comprises webs (186, 188) separating the access openings (180) and at least some of the compensating recesses (192) are located in intersections (190) of the webs (186, 188) are. Treatment device according to one of claims 13 to 24, characterized in that the surface seal (178) in the assembled state surrounds the chamber drum (112) in an annular manner. Treatment device according to one of claims 13 to 25, characterized in that the surface seal (178) is integrally formed. Treatment device according to one of claims 1 to 26, characterized in that the receiving chambers (126) can be removed from the housing (104). Treatment device according to claim 27, characterized in that a plurality of receiving chambers (126) form components of a chamber drum (112) which can be removed as a whole from the housing (104). Treatment device according to one of claims 1 to 28, characterized in that at least one of the receiving chambers (126) is provided with a workpiece holder (226, 246) by means of which the workpiece (102) within the receiving chamber (126) relative to the receiving chamber (126 ) is rotatable. Treatment apparatus according to claim 29, characterized in that the workpiece (102) is rotatable by means of the workpiece holder (246) about an axis of rotation (244) oriented substantially parallel to the axis of rotation (114) of the receiving chambers (126) of the treatment device (100). A treatment device according to claim 29, characterized in that the workpiece (102) by means of the workpiece holder (226) about a rotational axis (228) aligned transversely, preferably substantially perpendicular, to the axis of rotation (114) of the receiving chambers (126) of the treatment device (114). is rotatable. A treatment device according to any one of claims 1 to 31, characterized in that at least one of the receiving chambers (126) is provided with a turning device which comprises means for picking up a rotational movement from an inner wall of the housing (104) of the treating device (100). Treatment apparatus according to one of claims 1 to 32, characterized in that at least one of the receiving chambers (126) is provided with a rotating device which comprises a rotary shaft (230) guided through a wall (118) of the receiving chamber (126). Treatment device according to one of claims 1 to 33, characterized in that at least one chamber level (128) of the treatment device (100) is designed as a vacuum lock. Treatment apparatus according to Claim 34, characterized in that the receiving chambers (126) of the chamber level (128) designed as a vacuum lock are evacuated during their movement from an access opening (138) of this chamber level to an outlet opening (142) of this chamber level in a plurality of discrete stages. Treatment device according to one of claims 34 or 35, characterized in that the receiving chambers (126) of the chamber plane (128) designed as a vacuum lock ventilate during its movement from an exit opening (142) of this chamber level to an access opening (138) of this chamber level in a plurality of discrete stages become. Treatment device according to one of Claims 34 to 36, characterized in that in each case at least one of the receiving chambers (126) of the chamber level (128) designed as a vacuum lock, which moves on the way from the access opening (138) of this chamber plane (128) to the outlet opening (128). 142) of this chamber level, with a respective other receiving chamber (126) of this chamber level (128) is gas-technically connected, which is on the way from the outlet opening (142) of this chamber level to the access opening (138) of this chamber level (128).

Images