EP1576292A2 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
EP1576292A2
EP1576292A2 EP03786101A EP03786101A EP1576292A2 EP 1576292 A2 EP1576292 A2 EP 1576292A2 EP 03786101 A EP03786101 A EP 03786101A EP 03786101 A EP03786101 A EP 03786101A EP 1576292 A2 EP1576292 A2 EP 1576292A2
Authority
EP
European Patent Office
Prior art keywords
pumping
drive shaft
pumping mechanism
regenerative
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03786101A
Other languages
English (en)
French (fr)
Other versions
EP1576292B1 (de
Inventor
Nigel Paul Schofield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1576292(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of EP1576292A2 publication Critical patent/EP1576292A2/de
Application granted granted Critical
Publication of EP1576292B1 publication Critical patent/EP1576292B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the present invention relates to a vacuum pumping arrangement
  • a molecular pump which may include: molecular drag pumping
  • turbomolecular pumping means If both pumping means are included the turbomolecular pumping means are connected in series with the molecular drag pumping means.
  • the pumping arrangement is capable of
  • the molecular pump and hence permit very low pressures to be achieved at the
  • regenerative pump which may be used as a backing pump, is typically
  • a lubricated bearing such as a lubricated rolling bearing because
  • the ' present' invention provides a vacuum pumping arrangement!
  • drive shaft is arranged for simultaneously driving said molecular pumping mechanism and said regenerative pumping mechanism and said drive shaft is
  • the present invention also provides a vacuum pumping arrangement
  • said regenerative pumping mechanism comprising a
  • stator comprising a plurality of circumferential pumping channels disposed
  • Figure 1 is a cross-sectional view of a vacuum pumping arrangement
  • Figure 2 is an enlarged cross-sectional view of a portion of a
  • Figure 3 is a diagram of a control system
  • Figure 4 is a schematic representation of a vacuum pumping system
  • FIG. 5 is a schematic representation of another vacuum pumping
  • turbomolecular pumping means 16 and molecular drag, or friction, pumping means 18.
  • molecular ' pumping mechanism may
  • the backing pump 14 comprises a regenerative pumping mechanism.
  • a further drag pumping mechanism 20 may be associated with
  • Drag pumping mechanism 20 comprises three drag pumping stages in series, whereas drag
  • pumping mechanism 18 comprises two drag pumping stages in parallel.
  • Vacuum pumping arrangement 10 comprises a housing, which is formed in three separate parts 22, 24, 26, and which houses the molecular
  • Parts 22 and 24 may form the inner surfaces of the
  • Part 26 may form the stator of the regenerative pumping mechanism
  • Part 26 defines a counter-sunk recess 28 which receives a lubricated
  • bearing 30 for supporting a drive shaft 32, the bearing 30 being at a first end portion of the drive shaft associated with regenerative pumping mechanism
  • Bearing 30 may be a rolling bearing such as a ball bearing and may be
  • aiTangement 10 distal from the inlet of the pumping arrangement.
  • the pumping aiTangement may be in fluid connection with a semiconductor
  • Drive shaft 32 is driven by motor 34 which as shown is supported by
  • the motor may be supported at any convenient position in the vacuum pumping arrangement.
  • Motor 34 is adapted to be able to drive simultaneously the regenerative pumping
  • a molecular pumping mechanism requires relatively less power for operation, and therefore, a motor selected for powering a regenerative motor
  • pumping mechanism is also generally suitable for powering a molecular
  • motor 34 is shown in Figure 3 and includes a pressure gauge 35 for measuring pressure in a chamber 33, and a controller 37 connected to the pressure gauge
  • Regenerative pumping mechanism 14 comprises a stator comprising a stator
  • mechanism 14 comprises three pumping stages, and for each stage, a circumferential array of rotor blades 38 extends substantially orthogonally
  • C between rotor blades 38 and stator 26 is closely controlled, and preferably kept to no more than 200 microns or less, and preferably less than 80 microns,
  • bearing 30 may act as a pivot about which some radial movement may take place.
  • the rotor may act as a pivot about which some radial movement may take place.
  • the bearing 30 is substantially axially aligned with the
  • stator 26 of the stator 26 does not cause significant seepage. As shown, the stator 26 of the stator 26 of the stator 26 of the stator 26
  • regenerative pumping mechanism 14 defines the recess for the bearing 30 and
  • the rotor body 36 is, as it will be appreciated, adjacent the stator 26.
  • drag cylinders 46 which together form rotors of drag pumping mechanism 20.
  • the drag cylinders 46 are made from carbon fibre reinforced material which is
  • the drag pumping mechanism 20 shown schematically is a Hoi week type drag pumping mechanism in which stator portions 48 define a spiral
  • the molecular pumping mechanism 12 is driven at a distal end of drive shaft 32 from the regenerative pumping mechanism 14. A back up
  • bearing may be provided to resist extreme radial movement of the drive shaft
  • the lubricant free bearing is
  • a magnetic bearing 54 provided between rotor body 52 and a cylindrical
  • a passive magnetic bearing is
  • the drive shaft may move about 0.1 mm.
  • active magnetic bearing may be adopted.
  • active magnetic bearing In an active magnetic bearing,
  • electro magnets are used rather than permanent magnets in passive magnetic bearings. Further provided is a detection means for detecting radial
  • Figures 6 to 8 show an active magnetic bearing.
  • a circumferential array of angled rotor blades 58 extend radially outwardly from rotor body 52. At approximately half way along the rotor blades 58 at a radially intermediate portion of the array, a cylindrical support
  • Drag pumping mechanism 18 comprises two drag stages in parallel with a single drag cylinder 62, which may be made from carbon fibre
  • Each of the stages is comprised of stator portions 64
  • An outlet 68 is provided to exhaust gas from the drag
  • inlet 70 of pump arrangement 10 is
  • turbomolecular pumping means 16 which urges molecules into the molecular
  • Regenerative pumping mechanism 14 is required to exhaust gas at approximately atmospheric pressure. Accordingly, the gas resistance to
  • moving part being a cylinder rotated about axis A does not suffer significantly
  • molecular pumping mechanism is significantly less powerful than motor 34
  • a typical turbomolecular pumping means is evacuated to relatively low
  • turbomolecular pumping means are associated with the same drive shaft
  • the vacuum pumping aiTangement forms part of a vacuum
  • turbomolecular pumping system which comprises additional evacuation means to evacuate at least the turbomolecular pumping means 16 prior to start up to a predetermined' pressure:-'
  • additional evacuation means to evacuate at least the turbomolecular pumping means 16 prior to start up to a predetermined' pressure:-'
  • 1 the turbomolecular pumping ⁇ means ⁇ is
  • vacuum pumping arrangement is evacuated prior to start up, as shown in
  • the evacuation means may be provided by an additional
  • pumping means associated with the system such as the pump for the load lock
  • Figure 4 shows the aiTangement of a semiconductor processing
  • load lock pump 74 in which the load lock pump 74 is, in normal use, used to evacuate pressure from load lock chamber 76.
  • a valve 78 is provided between load
  • Load lock pump 74 is connected to
  • valve 80 the exhaust of pumping arrangement 10 via valve 80.
  • a further valve 82 is
  • valve 78 and valve 82 are closed whilst valve 80 is opened.
  • pump 74 is operated to evacuate gas from aiTangement 10 and therefore from
  • turbomolecular pumping means 16 16.
  • valves 82 and 82 are normally closed and actuated.
  • Arrangement 10 is operated to evacuate pressure from vacuum chamber 84.
  • vacuum pumping arrangement 10 can be started up as described with reference to Figure 5.
  • the additional evacuation means
  • valve S8 comprises a high pressure nitrogen supply which is connected to an ejector pump 90 via valve S8.
  • Valve 88 is opened so that high pressure nitrogen is ejected to- evacuate aiTangement ' 10 and therefore- turbomolecular pumping
  • Nitrogen is a relatively inert gas and does not contaminate the
  • the pumping arrangement 10 may be evacuated prior to start
  • Figure 6 shows a vacuum pumping aiTangement 100 comprising an
  • molecular pumping mechanism is disc-shaped and the overall size of the aiTangement 100 is reduced as compared with the first embodiment.
  • the turbomolecular pumping means 12 comprises two turbomolecular pumping stages 16.
  • a stator 92 extends radially inwardly from housing part 22 between the two turbo stages 16.
  • molecular drag pumping mechanism -20 has-been omitted. • • --

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03786101A 2002-12-17 2003-12-09 Vakuumpumpe Revoked EP1576292B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0229356 2002-12-17
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement
PCT/GB2003/005375 WO2004055376A2 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Publications (2)

Publication Number Publication Date
EP1576292A2 true EP1576292A2 (de) 2005-09-21
EP1576292B1 EP1576292B1 (de) 2008-03-05

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03786101A Revoked EP1576292B1 (de) 2002-12-17 2003-12-09 Vakuumpumpe

Country Status (9)

Country Link
US (1) US20060140794A1 (de)
EP (1) EP1576292B1 (de)
JP (1) JP2006509952A (de)
AT (1) ATE388328T1 (de)
AU (1) AU2003295101A1 (de)
DE (1) DE60319585T2 (de)
GB (1) GB0229356D0 (de)
TW (1) TW200417690A (de)
WO (1) WO2004055376A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021642A1 (de) 2009-05-16 2010-11-18 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009055888A1 (de) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
EP2623791B1 (de) * 2010-09-28 2019-12-04 Edwards Japan Limited Absaugpumpe
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202015007985U1 (de) * 2015-11-19 2017-02-21 Leybold Gmbh Vorrichtung zum Speichern kinetischer Energie
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
EP1234982B1 (de) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vakuumpumpe
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2004055376A2 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009021642A1 (de) 2009-05-16 2010-11-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2253851A2 (de) 2009-05-16 2010-11-24 Pfeiffer Vacuum GmbH Vakuumpumpe
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
GB0229356D0 (en) 2003-01-22
US20060140794A1 (en) 2006-06-29
EP1576292B1 (de) 2008-03-05
DE60319585D1 (de) 2008-04-17
ATE388328T1 (de) 2008-03-15
AU2003295101A1 (en) 2004-07-09
DE60319585T2 (de) 2009-03-26
JP2006509952A (ja) 2006-03-23
WO2004055376A2 (en) 2004-07-01
WO2004055376A3 (en) 2004-08-05
TW200417690A (en) 2004-09-16

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