ATE388328T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE388328T1
ATE388328T1 AT03786101T AT03786101T ATE388328T1 AT E388328 T1 ATE388328 T1 AT E388328T1 AT 03786101 T AT03786101 T AT 03786101T AT 03786101 T AT03786101 T AT 03786101T AT E388328 T1 ATE388328 T1 AT E388328T1
Authority
AT
Austria
Prior art keywords
pumping mechanism
drive shaft
vacuum pump
molecular
regenerative
Prior art date
Application number
AT03786101T
Other languages
English (en)
Inventor
Nigel Paul Schofield
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE388328(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE388328T1 publication Critical patent/ATE388328T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
AT03786101T 2002-12-17 2003-12-09 Vakuumpumpe ATE388328T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement

Publications (1)

Publication Number Publication Date
ATE388328T1 true ATE388328T1 (de) 2008-03-15

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03786101T ATE388328T1 (de) 2002-12-17 2003-12-09 Vakuumpumpe

Country Status (9)

Country Link
US (1) US20060140794A1 (de)
EP (1) EP1576292B1 (de)
JP (1) JP2006509952A (de)
AT (1) ATE388328T1 (de)
AU (1) AU2003295101A1 (de)
DE (1) DE60319585T2 (de)
GB (1) GB0229356D0 (de)
TW (1) TW200417690A (de)
WO (1) WO2004055376A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009055888A1 (de) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
CN102834620B (zh) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 排气泵
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202015007985U1 (de) 2015-11-19 2017-02-21 Leybold Gmbh Vorrichtung zum Speichern kinetischer Energie
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
DE60101368T2 (de) * 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Also Published As

Publication number Publication date
EP1576292B1 (de) 2008-03-05
WO2004055376A2 (en) 2004-07-01
DE60319585D1 (de) 2008-04-17
AU2003295101A1 (en) 2004-07-09
GB0229356D0 (en) 2003-01-22
US20060140794A1 (en) 2006-06-29
JP2006509952A (ja) 2006-03-23
EP1576292A2 (de) 2005-09-21
TW200417690A (en) 2004-09-16
WO2004055376A3 (en) 2004-08-05
DE60319585T2 (de) 2009-03-26

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Legal Events

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