WO2004055376A3 - Vacuum pumping arrangement - Google Patents

Vacuum pumping arrangement Download PDF

Info

Publication number
WO2004055376A3
WO2004055376A3 PCT/GB2003/005375 GB0305375W WO2004055376A3 WO 2004055376 A3 WO2004055376 A3 WO 2004055376A3 GB 0305375 W GB0305375 W GB 0305375W WO 2004055376 A3 WO2004055376 A3 WO 2004055376A3
Authority
WO
WIPO (PCT)
Prior art keywords
pumping mechanism
drive shaft
vacuum pumping
pumping arrangement
molecular
Prior art date
Application number
PCT/GB2003/005375
Other languages
French (fr)
Other versions
WO2004055376A2 (en
Inventor
Nigel Paul Schofield
Original Assignee
Boc Group Plc
Nigel Paul Schofield
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2004055376(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Boc Group Plc, Nigel Paul Schofield filed Critical Boc Group Plc
Priority to EP03786101A priority Critical patent/EP1576292B1/en
Priority to JP2004559873A priority patent/JP2006509952A/en
Priority to US10/536,779 priority patent/US20060140794A1/en
Priority to DE60319585T priority patent/DE60319585T2/en
Priority to AU2003295101A priority patent/AU2003295101A1/en
Publication of WO2004055376A2 publication Critical patent/WO2004055376A2/en
Publication of WO2004055376A3 publication Critical patent/WO2004055376A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Electrophonic Musical Instruments (AREA)

Abstract

A vacuum pumping arrangement comprises a drive shaft, a motor for driving said drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism. The drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism. The drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
PCT/GB2003/005375 2002-12-17 2003-12-09 Vacuum pumping arrangement WO2004055376A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP03786101A EP1576292B1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
JP2004559873A JP2006509952A (en) 2002-12-17 2003-12-09 Vacuum pump discharge device
US10/536,779 US20060140794A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
DE60319585T DE60319585T2 (en) 2002-12-17 2003-12-09 VACUUM PUMP
AU2003295101A AU2003295101A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0229356.1 2002-12-17
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement

Publications (2)

Publication Number Publication Date
WO2004055376A2 WO2004055376A2 (en) 2004-07-01
WO2004055376A3 true WO2004055376A3 (en) 2004-08-05

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/005375 WO2004055376A2 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Country Status (9)

Country Link
US (1) US20060140794A1 (en)
EP (1) EP1576292B1 (en)
JP (1) JP2006509952A (en)
AT (1) ATE388328T1 (en)
AU (1) AU2003295101A1 (en)
DE (1) DE60319585T2 (en)
GB (1) GB0229356D0 (en)
TW (1) TW200417690A (en)
WO (1) WO2004055376A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102008035891A1 (en) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102009021620B4 (en) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump
DE102009021642B4 (en) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
DE102009055888A1 (en) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102010019940B4 (en) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vacuum pumping stage
CN102834620B (en) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 Exhaust pump
DE102011112691A1 (en) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh vacuum pump
DE102012003680A1 (en) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE202015007985U1 (en) 2015-11-19 2017-02-21 Leybold Gmbh Device for storing kinetic energy
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19913593A1 (en) * 1999-03-24 2000-10-05 Ilmvac Gmbh Controlled pump assembly with high vacuum, pilot pumps has control unit that switches on pilot pump based on pilot pressure, opens valve when pilot pressure exceeds upper threshold
DE10043783A1 (en) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Method and device for regulating the vacuum in a chamber
EP1234982A1 (en) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vacuum pump
US6446651B1 (en) * 1999-06-28 2002-09-10 Pfeiffer Vacuum Gmbh Multi-chamber vacuum system and a method of operating the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
JPH0646036B2 (en) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 Axial flow molecular pump
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (en) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (en) * 1998-09-10 2000-11-10 Cit Alcatel METHOD AND DEVICE FOR AVOIDING DEPOSITS IN A TURBOMOLECULAR PUMP WITH MAGNETIC OR GAS BEARING
DE19915983A1 (en) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19913593A1 (en) * 1999-03-24 2000-10-05 Ilmvac Gmbh Controlled pump assembly with high vacuum, pilot pumps has control unit that switches on pilot pump based on pilot pressure, opens valve when pilot pressure exceeds upper threshold
US6446651B1 (en) * 1999-06-28 2002-09-10 Pfeiffer Vacuum Gmbh Multi-chamber vacuum system and a method of operating the same
DE10043783A1 (en) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Method and device for regulating the vacuum in a chamber
EP1234982A1 (en) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vacuum pump

Also Published As

Publication number Publication date
DE60319585T2 (en) 2009-03-26
JP2006509952A (en) 2006-03-23
WO2004055376A2 (en) 2004-07-01
EP1576292B1 (en) 2008-03-05
GB0229356D0 (en) 2003-01-22
TW200417690A (en) 2004-09-16
AU2003295101A1 (en) 2004-07-09
ATE388328T1 (en) 2008-03-15
US20060140794A1 (en) 2006-06-29
EP1576292A2 (en) 2005-09-21
DE60319585D1 (en) 2008-04-17

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