EP1568655A4 - Mikromaschine und herstellungsverfahren dafür - Google Patents

Mikromaschine und herstellungsverfahren dafür

Info

Publication number
EP1568655A4
EP1568655A4 EP03774185A EP03774185A EP1568655A4 EP 1568655 A4 EP1568655 A4 EP 1568655A4 EP 03774185 A EP03774185 A EP 03774185A EP 03774185 A EP03774185 A EP 03774185A EP 1568655 A4 EP1568655 A4 EP 1568655A4
Authority
EP
European Patent Office
Prior art keywords
micromachine
producing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03774185A
Other languages
English (en)
French (fr)
Other versions
EP1568655A1 (de
EP1568655B1 (de
Inventor
Masahiro Tada
Takashi Kinoshita
Shun Mitarai
Yasuyuki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of EP1568655A1 publication Critical patent/EP1568655A1/de
Publication of EP1568655A4 publication Critical patent/EP1568655A4/de
Application granted granted Critical
Publication of EP1568655B1 publication Critical patent/EP1568655B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP03774185A 2002-12-03 2003-11-25 Mikromaschine und herstellungsverfahren dafür Expired - Lifetime EP1568655B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002350639 2002-12-03
JP2002350639A JP4007172B2 (ja) 2002-12-03 2002-12-03 マイクロマシンおよびその製造方法
PCT/JP2003/014976 WO2004050545A1 (ja) 2002-12-03 2003-11-25 マイクロマシンおよびその製造方法

Publications (3)

Publication Number Publication Date
EP1568655A1 EP1568655A1 (de) 2005-08-31
EP1568655A4 true EP1568655A4 (de) 2006-12-06
EP1568655B1 EP1568655B1 (de) 2008-07-09

Family

ID=32463111

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03774185A Expired - Lifetime EP1568655B1 (de) 2002-12-03 2003-11-25 Mikromaschine und herstellungsverfahren dafür

Country Status (8)

Country Link
US (1) US7212081B2 (de)
EP (1) EP1568655B1 (de)
JP (1) JP4007172B2 (de)
KR (1) KR20050084058A (de)
CN (1) CN100402411C (de)
DE (1) DE60322097D1 (de)
TW (1) TWI233422B (de)
WO (1) WO2004050545A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1585219A1 (de) * 2004-04-06 2005-10-12 Seiko Epson Corporation Nano-/Mikromechanische Vorrichtung des Mikroklappentyps und Verfahren zur Herstellung derselben
FR2875947B1 (fr) * 2004-09-30 2007-09-07 Tracit Technologies Nouvelle structure pour microelectronique et microsysteme et procede de realisation
FR2890490A1 (fr) * 2005-09-05 2007-03-09 St Microelectronics Sa Support de resonateur acoustique et circuit integre correspondant
EP1777816A1 (de) * 2005-10-18 2007-04-25 Seiko Epson Corporation MEMS-Resonator und Verfahren zur Erhöhung des Ausgangsstroms eines MEMS-Resonators
EP1976015B1 (de) * 2007-03-26 2014-09-10 Semiconductor Energy Laboratory Co., Ltd. Schaltelement, Herstellungsverfahren dafür und Anzeigevorrichtung mit Schaltelement
CN101212076B (zh) * 2007-12-21 2011-04-06 北京信息工程学院 微机械可调微波带通滤波器
JP5735099B2 (ja) * 2011-04-01 2015-06-17 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法ならびに携帯電話機
JP5908422B2 (ja) * 2013-03-19 2016-04-26 株式会社東芝 Ｍｅｍｓ装置及びその製造方法
WO2019054349A1 (ja) * 2017-09-13 2019-03-21 株式会社村田製作所 水晶振動素子およびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02231808A (ja) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd 圧電振動子の電極構造
WO2001061848A1 (en) * 2000-02-16 2001-08-23 Nokia Corporation A micromechanical tunable capacitor and an integrated tunable resonator
US20030141946A1 (en) * 2002-01-31 2003-07-31 Ruby Richard C. Film bulk acoustic resonator (FBAR) and the method of making the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3343901B2 (ja) * 1996-10-09 2002-11-11 横河電機株式会社 振動式トランスデューサとその製造方法
JPH10154820A (ja) * 1996-11-25 1998-06-09 Murata Mfg Co Ltd 振動素子の製造方法
JPH11340777A (ja) * 1998-05-25 1999-12-10 Matsushita Electric Ind Co Ltd 圧電振動素子
JP2000111347A (ja) * 1998-09-30 2000-04-18 Aisin Seiki Co Ltd 共振型マイクロマシン
US6441539B1 (en) * 1999-11-11 2002-08-27 Murata Manufacturing Co., Ltd. Piezoelectric resonator
US6635506B2 (en) 2001-11-07 2003-10-21 International Business Machines Corporation Method of fabricating micro-electromechanical switches on CMOS compatible substrates
JP4075503B2 (ja) * 2002-07-30 2008-04-16 ソニー株式会社 マイクロマシンおよびその製造方法
JP4007115B2 (ja) * 2002-08-09 2007-11-14 ソニー株式会社 マイクロマシンおよびその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02231808A (ja) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd 圧電振動子の電極構造
WO2001061848A1 (en) * 2000-02-16 2001-08-23 Nokia Corporation A micromechanical tunable capacitor and an integrated tunable resonator
US20030141946A1 (en) * 2002-01-31 2003-07-31 Ruby Richard C. Film bulk acoustic resonator (FBAR) and the method of making the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004050545A1 *

Also Published As

Publication number Publication date
EP1568655A1 (de) 2005-08-31
US7212081B2 (en) 2007-05-01
TW200505786A (en) 2005-02-16
US20060049895A1 (en) 2006-03-09
KR20050084058A (ko) 2005-08-26
CN1720193A (zh) 2006-01-11
WO2004050545A1 (ja) 2004-06-17
JP2004181567A (ja) 2004-07-02
TWI233422B (en) 2005-06-01
EP1568655B1 (de) 2008-07-09
JP4007172B2 (ja) 2007-11-14
DE60322097D1 (de) 2008-08-21
CN100402411C (zh) 2008-07-16

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