EP1565905B1 - Procede et dispositif de refroidissement de transducteurs d'ultrasons - Google Patents

Procede et dispositif de refroidissement de transducteurs d'ultrasons Download PDF

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Publication number
EP1565905B1
EP1565905B1 EP03767582A EP03767582A EP1565905B1 EP 1565905 B1 EP1565905 B1 EP 1565905B1 EP 03767582 A EP03767582 A EP 03767582A EP 03767582 A EP03767582 A EP 03767582A EP 1565905 B1 EP1565905 B1 EP 1565905B1
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EP
European Patent Office
Prior art keywords
flow
cooling fluid
transducer
cooling
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP03767582A
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German (de)
English (en)
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EP1565905A2 (fr
Inventor
Harald Hielscher
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Dr Hielscher GmbH
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Dr Hielscher GmbH
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    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004Mounting transducers, e.g. provided with mechanical moving or orienting device
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile

Definitions

  • the invention relates to a method and a device for cooling of ultrasonic transducers with the features mentioned in the preambles of claims 1 and 6.
  • a cooling system for a high-frequency ultrasound transducer is known, which is based on the principle of heat conduction.
  • a heat sink in the form of a heat sink.
  • the heat sink is in turn connected by means of a thermally conductive resin to a housing. The heat is first transferred from the converter into the heat sink and from there via the resin into the surrounding housing, where the heat is ultimately dissipated to the surrounding air.
  • This type of cooling is insufficient for high performance and not applicable for high amplitudes of several micrometers, because it is a high energy input into the resin.
  • WO 0008630 A1 an arrangement for heat dissipation, in particular for ultrasonic transducer high power known.
  • the heat dissipation is based on the combination of heat conduction and convection.
  • the surface of the transducer body is provided with a vibration-absorbing layer, which reduces the mechanical friction losses during heat transfer.
  • a layer of thermally conductive material Above it is a layer of thermally conductive material.
  • a cooling body is arranged, from which the heat can be dissipated by means of a coolant by convection.
  • the disadvantage of this arrangement is that the temperature gradients created by the layer transitions cause a reduction in the efficiency of heat dissipation.
  • the maximum possible common contact surface between the transducer and cooling device is limited to the transducer surface, whereby the continuous operation of high-power ultrasound transducers can be ensured only by supplying large amounts of coolant, resulting in a low cost of the process results.
  • this object is achieved by a method having the features mentioned in claim 1 and a device having the features mentioned in claim 6.
  • the inventive method for cooling of ultrasonic transducers is characterized in that the body of the ultrasonic transducer flows through a introduced under pressure cooling fluid and / or flows around. In this way, it is advantageously achieved that the heat generated in the transducers is dissipated directly by convection. No heat transfer via cooling elements is required. By flowing through the transducer body, a large common contact surface between transducers and coolant is realized. The achieved heat dissipation is much more effective than in the known methods, so that can be ensured with the inventive compositions of the continuous operation of ultrasonic transducers high performance.
  • the flow through the body of the ultrasonic transducer from the inside to the outside, wherein the liquid pressure is built up in the interior and the cooling liquid flows through the housing, or from the outside to the inside, wherein the pressure is built up in the outdoor area and the cooling liquid flows over the inner area, is realized.
  • the flow takes place in such a way that pressure is built up to prevent cavitation both in the interior and in the exterior, wherein a pressure gradient between the interior and exterior is required for the flow of the cooling liquid.
  • the body of the ultrasonic transducer is flowed around in the interior and / or in the outer area, since in this way heat is removed from the converter surface by convection.
  • the interior is in this case in particular the cavity between the tension rod and transducer body, the outside area, in particular the space between the transducer body and housing.
  • the cooling liquid is an electrically non-conductive liquid, as this electrical short circuits are avoided.
  • the pressure of the cooling liquid is dimensioned such that the cavitation is reducible or avoidable.
  • the pressure is preferably set in a range from 200 to 2000 kPa (2 to 20 bar). Particularly preferred 500 kPa (5 bar) are provided. This will be advantageous achieved that the risk of damage to the device is significantly reduced by cavitation and that an additional power input by cavitation generation is reduced or avoided.
  • At least one flow channel is slit-shaped, as a result, a large common contact surface between the converter body and the cooling liquid can be realized. This leads to a higher efficiency in heat dissipation.
  • the device comprises a arranged in a cavity of the at least two transducer body tension rod having at least two openings and at least one guide channel through which the introduced under pressure cooling liquid can be flowed.
  • the cooling liquid can be supplied via the at least one guide channel and can be discharged via the at least one throughflow channel. It is furthermore preferably provided that the cooling fluid can be supplied via the at least one flow channel and can be discharged via the at least one guide channel in the tension rod. In this way, a particularly easy-to-handle and realizable possibility of the flow through the transducer body from the inside to the outside or from the outside to the inside is given.
  • the device comprises a liquid-tight housing.
  • the housing serves on the one hand to protect the active elements of the transducer and also offers a particularly favorable possibility of receiving and guiding the coolant.
  • the device comprises a flange which is connected to the housing and / or a horn and / or an end mass. Through the flange a particularly easy to be realized mounting option of the housing is achieved. Furthermore, a particularly favorable possibility of connection with a sonotrode is given by the horn.
  • the device has at least one connection device for a coolant line, through which the cooling fluid can be discharged into the cavity of the transducer body and / or can be discharged from the cavity.
  • the device has at least one connection device for a coolant line, through which the cooling liquid in the at least one guide channel is flowable and / or discharged from the at least one guide channel.
  • the device has at least one connection device for a coolant line through which the coolant can flow into the housing and / or can be discharged from the housing.
  • At least one of the at least two transducer body is at least partially flowed around on the inner surface and / or at least partially on the outer surface of the cooling liquid.
  • the transducer bodies have no through-flow channels.
  • the converter bodies are merely flowed around, with the interior space being connected to the outside space by a connecting channel.
  • FIG. 1 is shown schematically the longitudinal section of an ultrasonic transducer with an embodiment of the device according to the invention for cooling the ultrasonic transducer.
  • the ultrasonic transducer is composed of cylindrical transducer bodies 5, 6, each having piezoelectric packages 4 arranged on the front side between two transducer bodies 5, 6, some of the transducer bodies 5, 6 being designed as common transducer bodies 6, on the front sides of which in each case a piezoelectric package 4 is arranged.
  • a piezo package 4 forms with one of the transducer body 5 and half of the common transducer body 6 or with each half of two common transducer body 6 a ⁇ / 2 oscillator.
  • the transducer bodies 5, 6 have flow-through channels 7 in the radial direction.
  • Transducer body 5, 6 and 4 piezo packages are alternately lined up on a tension rod 3 with end threads.
  • the tension rod 3 has a guide channel 13 for cooling liquid, wherein at one end of a connecting device for a coolant line 1 is attached, which forms the inlet 1 for the cooling liquid.
  • the tension rod has an outlet opening for the coolant flowing out of the guide channel into the cavity 11 of the transducer body.
  • the opposite end mass 10 is connected to a horn 8, which is the connection option with a sonotrode and serves to transmit the mechanical vibrations generated by the transducer.
  • the device is provided with a liquid-tight housing 12 for receiving the cooling liquid, which is connected to a flange 9, which offers a possibility for mounting in an external plant.
  • the flange 9 is connected to the horn 8.
  • the flange 9 has a connection device for a coolant line 2, which forms the outlet 2 for the cooling liquid from the housing 12.
  • the coolant line for the inlet 1 is guided through the housing 12.
  • the cooling liquid is introduced via the inlet 1 under pressure into the guide channel 13 of the tension rod 3. Via the guide channel 13, the cooling liquid is supplied to the cavity 11 of the transducer body, where the transducer body are flowed through by the cooling liquid to ultimately flow through the flow channels 7 of the transducer body 5, 6.
  • the heat generated by the transducers is transferred in this way directly by convection to the cooling liquid.
  • the exiting from the flow channels 7 cooling liquid is collected in the housing 12 and discharged via the outlet 2 from the device. In this way, a more effective cooling of the ultrasonic transducer is achieved than in the known methods. With the aid of the means according to the invention, the continuous operation of high-power ultrasonic transducers is also ensured.
  • circular holes can be attached to the ends of the flow channels.
  • the diameter of the bores is expediently greater than the width of the slots.
  • FIG. 2 shows schematically the longitudinal section of the structure of an ultrasonic transducer with a further embodiment of the device according to the invention for cooling the ultrasonic transducer, which substantially the in FIG. 1 shown corresponds.
  • two inlets 1 for the cooling liquid present which are each arranged radially and are guided from the outside through the housing 12 and the end masses 10 into the cavity 11 between the tension rod 3 and transducer body 5, 6.
  • the connection means 1 for the connection of the cooling liquid lines to the cavity 11 are thus arranged at the opposite ends of the transducer. In this way, the cooling liquid is introduced from the opposite ends under pressure into the cavity 11 and discharged through the flow channels 7. This results in a more uniform heat dissipation over the entire length of the device as in FIG. 1 , It is thus an even more effective cooling of the ultrasonic transducer as with in FIG. 1 achieved embodiment shown.
  • FIG. 3 shows a further embodiment of the invention, in which the transducer body 5, 6 have no flow channels 7.
  • the inner space 11 is connected to the outer space 14 via a connecting channel 15.
  • the cooling liquid is supplied via the inlet 1, passes through the guide channel 13 into the interior 11, flows around and cools the transducer body 5, 6, leaves the interior 11 via the connection channel 15 and is discharged via the exterior space 14 and the outlet 2 dissipated.
  • the inside of the transducer body 5, 6 is cooled.
  • it is possible in a second variant only to cool the outside of the transducer body 5, 6, 17 is supplied via the housing inlet 1a and a ring line 17 cooling liquid.
  • the over the housing inlet 1a supplied coolant is uniformly supplied and distributed through the ring line 17 and now flows around the outside of the converter 5, 6 or at least here forms a coolant film and is discharged via the outlet 2.
  • a gas pressure is generated in the present embodiment via the gas pressure port 6 in the housing 12, which is 6 bar in this embodiment.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Surgical Instruments (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Claims (10)

  1. Procédé de refroidissement de transducteurs d'ultrasons par dissipation de la chaleur générée par la puissance dissipée, caractérisé en ce que
    - le corps du transducteur d'ultrasons est parcouru et/ou entouré d'un liquide de refroidissement,
    - une pression est générée dans le liquide de refroidissement et ajustée dans la plage de 200 à 2000 kPa, la pression étant dimensionnée de telle manière que la cavitation soit réduite ou évitée, et
    - la pression est générée par le dimensionnement de canaux d'écoulement et/ou par pression de gaz.
  2. Procédé selon la revendication 1, caractérisé en ce que la pression du liquide de refroidissement s'élève de préférence à 500 kPA.
  3. Procédé selon la revendication 1 ou 2, caractérisé en ce que l'écoulement à travers le corps du transducteur d'ultrasons est réalisé de la zone intérieure à la zone extérieure ou de la zone extérieure à la zone intérieure.
  4. Procédé selon l'une des revendications 1 à 3, caractérisé en ce que le corps du transducteur d'ultrasons est entouré par le liquide de refroidissement dans la zone intérieure et/ou dans la zone extérieure.
  5. Procédé selon l'une de revendications 1 à 4, caractérisé en ce que le liquide de refroidissement est un liquide électriquement non conducteur.
  6. Dispositif de refroidissement de transducteurs d'ultrasons, consistant en au moins un paquet (4) piézo-électrique et au moins deux corps (5) transducteurs cylindriques qui forment, avec le paquet (4) piézo-électrique, un oscillateur λ/2 ; dans lequel, dans le cas d'accouplements de transducteurs, respectivement deux corps transducteurs peuvent être associés pour former un corps (6) transducteur commun, caractérisé en ce que les corps (5, 6) transducteurs sont entourés d'un espace (11) intérieur et d'un espace (14) extérieur, et qu'au moins l'un des deux corps (5, 6) transducteurs comprend au moins un canal (7) d'écoulement à travers lequel peut s'écouler un liquide de refroidissement injecté sous pression, et/ou qu'au moins un canal (15) de liaison est disposé entre l'espace (11) intérieur et l'espace (14) extérieur, la pression étant dimensionnée de telle manière que la cavitation soit réduite ou évitée et que la pression soit ajustée dans la plage de 200 à 2000 kPA et s'élève de préférence à 500 kPA.
  7. Dispositif selon la revendication 6, caractérisé en ce qu'au moins un canal (7) d'écoulement est réalisé en forme de fente, et que le dispositif comprend une barre (3) de tension disposée dans une cavité (11) formée par au moins deux corps (5, 6) transducteurs et ayant au moins une ouverture et au moins un canal (13) de guidage à travers lequel peut s'écouler le liquide de refroidissement injecté sous pression, et que le liquide de refroidissement peut être amené par l'au moins un canal (13) de guidage et être dissipé par l'au moins un canal (7) d'écoulement, et que le liquide de refroidissement peut être amené par l'au moins un canal (7) d'écoulement et être dissipé par l'au moins un canal (13) de guidage situé dans la barre (3) de tension.
  8. Dispositif selon l'une des revendications 6 ou 7, caractérisé en ce que le dispositif comprend un boîtier (12) étanche aux liquides et une bride reliée au boîtier (12) et à un cornet (8), et que le dispositif comprend respectivement au moins un dispositif (1, 2) de raccordement pour une conduite de liquide de refroidissement à travers laquelle le liquide de refroidissement peut s'écouler dans la cavité (11) et/ou être dissipé de la cavité (11), ou que le dispositif comprend respectivement au moins un dispositif (1, 2) de raccordement pour une conduite de liquide de refroidissement à travers laquelle le liquide de refroidissement peut s'écouler dans l'au moins un canal (13) de guidage et/ou être dissipé de l'au moins un canal (13) de guidage, ou que le dispositif comprend au moins un dispositif (1a, 2) de raccordement pour une conduite de liquide de refroidissement à travers laquelle le liquide de refroidissement peut s'écouler dans le boîtier (12) et/ou être dissipé du boîtier (12).
  9. Dispositif selon l'une des revendications 6 à 8, caractérisé en ce que l'au moins un des au moins deux corps (5, 6) transducteurs peut être entouré du liquide de refroidissement au moins en partie à la zone intérieure et/ou au moins en partie à la zone extérieure.
  10. Dispositif selon l'une des revendications 6 à 9, caractérisé en ce que les canaux (7) d'écoulement comprennent des ouvertures à leurs extrémités dont le diamètre est supérieur à la largeur des canaux (7) d'écoulement.
EP03767582A 2002-11-20 2003-11-19 Procede et dispositif de refroidissement de transducteurs d'ultrasons Expired - Lifetime EP1565905B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10254894 2002-11-20
DE10254894A DE10254894B3 (de) 2002-11-20 2002-11-20 Vorrichtung zur Kühlung von Ultraschallwandlern
PCT/EP2003/013003 WO2004047073A2 (fr) 2002-11-20 2003-11-19 Procede et dispositif de refroidissement de transducteurs d'ultrasons

Publications (2)

Publication Number Publication Date
EP1565905A2 EP1565905A2 (fr) 2005-08-24
EP1565905B1 true EP1565905B1 (fr) 2011-10-05

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EP03767582A Expired - Lifetime EP1565905B1 (fr) 2002-11-20 2003-11-19 Procede et dispositif de refroidissement de transducteurs d'ultrasons

Country Status (9)

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US (1) US8004158B2 (fr)
EP (1) EP1565905B1 (fr)
JP (1) JP4739759B2 (fr)
KR (1) KR101248716B1 (fr)
CN (1) CN1739137A (fr)
AT (1) ATE527651T1 (fr)
AU (1) AU2003292052A1 (fr)
DE (1) DE10254894B3 (fr)
WO (1) WO2004047073A2 (fr)

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TW202337051A (zh) 2019-09-12 2023-09-16 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
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DE19837262A1 (de) 1998-08-17 2000-03-09 Kari Richter Ultraschall-Applikator
DE10027264C5 (de) * 2000-05-31 2004-10-28 Dr. Hielscher Gmbh Ultraschallwandler
DE10254894B3 (de) * 2002-11-20 2004-05-27 Dr. Hielscher Gmbh Vorrichtung zur Kühlung von Ultraschallwandlern

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US20060126884A1 (en) 2006-06-15
ATE527651T1 (de) 2011-10-15
KR101248716B1 (ko) 2013-03-28
WO2004047073A2 (fr) 2004-06-03
EP1565905A2 (fr) 2005-08-24
DE10254894B3 (de) 2004-05-27
KR20050075035A (ko) 2005-07-19
CN1739137A (zh) 2006-02-22
JP4739759B2 (ja) 2011-08-03
WO2004047073A3 (fr) 2004-09-10
US8004158B2 (en) 2011-08-23
AU2003292052A1 (en) 2004-06-15

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