EP1516224B1 - Erweiterungselektrodenkonfiguration für elektrisch gesteuerte lichtmodulatoren - Google Patents

Erweiterungselektrodenkonfiguration für elektrisch gesteuerte lichtmodulatoren Download PDF

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EP1516224B1
EP1516224B1 EP02743283A EP02743283A EP1516224B1 EP 1516224 B1 EP1516224 B1 EP 1516224B1 EP 02743283 A EP02743283 A EP 02743283A EP 02743283 A EP02743283 A EP 02743283A EP 1516224 B1 EP1516224 B1 EP 1516224B1
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electrode structure
enhancement
signal
cell
layer
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EP1516224A1 (de
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Marcus Schorpp
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Nokia Oyj
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/20—Nature, e.g. e-beam addressed
    • G03H2225/24—Having movable pixels, e.g. microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/30—Modulation
    • G03H2225/32—Phase only

Definitions

  • the present invention relates to electrically controlled light modulator devices according to the preamble of the appended claim 1.
  • Document WO 01/48531 discloses a display panel structure (see especially Figs 49 to 55) in the form of an array of cells each of which comprises two deformable dielectric layers, which meet at a common interface.
  • One of said dielectrics can be air ; the other is preferably polymer material acting as a relief forming gel.
  • a support electrode structure is arranged on one side (below) of said dielectric layers and a second electrode structure, a signal electrode structure on the other side (above) of said layers, there being means for providing signals to the signal electrodes in order to create electric fields through the two dielectric layers and to further create surface reliefs on the gel surface at the interface of said two dielectrics.
  • the periodical, sinusoidally varying reliefs created on the gel surface in each of the cells allows under the effect of light from a light source to create images on the display panel, which are viewable by the naked eye.
  • FIG. 1 illustrates schematically the general principle of physics, which can be observed in connection with dielectric substances and which is also utilized in the aforementioned optical display device.
  • Dielectric substance can be defined as a substance in which an electric field may be maintained with zero or near zero power dissipation, that is the electrical conductivity of the substance is zero or near zero.
  • This ponderomotive force F is proportional to the square of the electric field E at that point. In the case of an interface between air and polymer, the ponderomotive force F acts onto the polymer surface into the direction of the air.
  • the electric field generated between a support electrode and a signal electrode and penetrating through the interface of the two dielectrics within a light modulator cell is inhomogeneous over the polymer surface; the electric field is strongest directly under a signal electrode and weakest in the middle between two adjacent signal electrodes.
  • This situation is valid for any practical dimensions of the light modulator cells and corresponding devices. Therefore, the force acting onto the polymer surface is inhomogeneous as well and a deformation of the polymer surface causing the surface to deviate from a flat plane can be observed.
  • An optimum situation would be such that maximum ponderomotive force is reached directly under the center part of a signal electrode and correspondingly no force is applied in the middle between two adjacent signal electrodes.
  • Figure 2 clarifies the aforementioned prior art solution by showing two adjacent pixels (cells) L,R in a possible pixel line of a display panel or corresponding light modulator device.
  • Each pixel comprises several strip like signal electrodes 10 arranged parallel respect to each other on a substrate 11, which may be for example glass.
  • Figure 2 shows an end view of the signal electrodes 10 thus revealing only the width and mutual distance between the electrodes 10.
  • a dielectric and viscoelastic gel material 12 for example polymer, is applied onto a support electrode 14 and facing the signal electrodes 10.
  • a gap 13 for example an air gap, is left between the surface of the viscoelastic layer 12 and the signal electrodes 10.
  • the usually transparent support electrode 14 providing AC or DC potential is preferably made of indium tin oxide (ITO), as is known in the art, on the surface of a transparent front plate 15.
  • the front plate 15 may be for example glass.
  • the light may enter the structure depicted in Fig. 2 either through the front plate 15 or through the substrate 11.
  • the device can be designed to operate either in transmissive or reflective mode depending on the light transmitting or reflecting properties of the various elements of the device.
  • Fig. 2 the left pixel L is switched on by providing suitable voltage to the respective signal electrodes 10, whereas the right pixel R is switched off, that is no signal is fed to the signal electrodes 10 belonging to said pixel R.
  • Arrows 16 marked for the left pixel L illustrate schematically the ponderomotive forces acting on the surface of the gel layer 12.
  • the power consumption and thickness of the display devices should also be further reduced.
  • the manufacturing technology of the display devices should be simple in order to allow lower prices.
  • the displays should also be fast enough to be able to display video or similar fast changing image content without degration of the image quality.
  • the aforementioned requirements also apply on other light modulator devices than display panels.
  • Other applications which may be based on the use of electrically controlled deformation of dielectric and viscoelastic transparent materials include, but are not limited to, electrically controlled diffractive or refractive lenses, or electrically reconfigurable optical waveguide couplers.
  • the main purpose of the present invention is to present a novel electrode configuration for light modulator cells based on the use of dielectric and viscoelastic materials to facilitate enhanced and active deformation of viscoelastic material in order to, among other things, increase the diffraction efficiency of the light modulator cells, shorten the response time required to switch a cell (pixel) or corresponding primary optical unit between on and off states, and to reduce the voltage levels required for a defined diffraction amplitude, that is for a certain height of a gel relief. Therefore, the current invention aims to the manufacturing of light modulators with better optical contrast, higher switching speed and smaller power consumption than what can be provided by devices of prior art. The invention also allows the use of softer polymers once more increasing the diffraction amplitude of the gel relief with the named advantages.
  • the electrically controlled light modulator device is primarily characterized in what will be presented in the characterizing part of the independent claim 1.
  • the basic idea of the invention is to utilize active fieldshaping enhancement electrode structure located in the proximity and in addition to the signal electrode structure of a cell in order to affect the electric field between the signal electrode structure and the support electrode structure and through the viscoelastic layer in a manner that the deformation amplitude of the viscoelastic layer in the cell is increased.
  • the invention has the following two principal emdodiments: An in-plane-type enhancement electrode configuration and a sandwich-type enhancement electrode configuration.
  • the signal electrode structures and the enhancement electrode structures are located side by side substantially in a single common plane facing the opposite support electrode structure.
  • This embodiment of the invention describes a quite strict configuration but on the other hand it is easy to manufacture.
  • the signal electrode structure and the enhancement electrode structure are located in different layers, that is in different planes respect to each other and respect to the opposite support electrode structure.
  • a conductor plated glass substrate is used, where the whole conductor layer is utilized as an enhancement electrode.
  • a thin dielectric insulation layer is further disposed and the signal electrodes are lithographically generated onto said dielectric insulation layer.
  • the concept of a cell corresponds closely to a single pixel of a display.
  • the invention is not limited to display devices, but can be applied broadly also to other type of light modulators. Therefore, the term cell is mainly used in the following description.
  • Figures 3-5 illustrate schematically a single sub-cell cell structure used for the numerical computer simulations.
  • the sub-cell comprises one signal electrode 10 plus half the spacing to the next adjacent signal electrode on each side. Therefore, a complete cell comprises in this example case all together three adjacent signal electrodes in a manner similar than presented in Fig. 2 .
  • a practical cell (or pixel) can comprise also more than two sub-cells, for example, 5 or more sub-cells.
  • the numerical simulations were decided to be performed using half-sub-cells instead complete sub-cells for the obvious reasons that this significantly increases simulation speed and reduces computer memory requirements without losing any relevant information due to the center symmetry of the sub-cell.
  • Figs 3-5 are simplified and show only the basic parts of the light modulator structure: support electrodes 14, polymer gel layer 12, air gap 13, signal electrode 10 and substrate material 11.
  • Figure 3 corresponds in general manner to the solution of prior art ( Fig. 2 ), disclosed for example in WO 01/48531 , and without the use of any active field enhancement electrodes. It can be seen that in this case when the signal electrode 10 is energized, the electric field illustrated with arrow-ended field lines spreads out from the area directly below the narrow signal electrode 10 due to the peripheral field (edge) effects, which take place in the area between the adjacent signal electrodes 10.
  • Figure 4 shows the effect of a sandwich-type enhancement electrode 40 in a situation where the cell is switched on, that is the signal electrode 10 is energized.
  • the enhancement electrode 40 arranged near to the signal electrode 10 changes the electric field between the signal electrode 10 and the support electrode 14. With the location and the potential of the enhancement electrode 40 chosen correctly, the electric field is altered in such a way that the electric field is concentrated directly below the signal electrode 10 and the peripheral effects outside the aforementioned area are reduced. This significantly increases the amplitude of the deformation of the gel layer 12 compared to the situation illustrated in Fig. 3 .
  • the enhancement electrode plane above the signal electrode plane is separated by a thin dielectric insulator layer 41, which maybe, for example, an Al 2 O 3 or SiO 2 layer.
  • Figures 6a and 6b show schematically an in-plane-type enhancement electrode configuration in on and off states, respectively.
  • the in-plane-type configuration of the enhancement electrodes increases the efficiency of deformation nearly equally compared to the sandwich-type configuration shown in Figs. 4 and 5 .
  • the enhancement electrodes 50 are arranged parallel on both sides of the signal electrode 10 in a common plane.
  • an active enhancement electrode 50 is located in between every two adjacent signal electrodes 10.
  • a thin dielectric insulator layer 51 since without such insulation said electrodes 10,50 would face directly the air of the air gap 13 and thus experience a low break-through voltage.
  • the enhancement electrodes 40,50 do not need to be on ground potential. Simulations have showed that for the sandwich- and in-plane-type enhancement electrode configurations, a slightly negative potential is optimum for the enhancement electrodes 40,50 when the support electrode 14 is on ground potential and the signal electrodes 10 run at some tens to hundreds of volts.
  • a defined minimum deformation (diffraction) amplitude for the polymer layer 12 is necessary. This minimum diffraction amplitude depends on several parameters of which one is the signal electrode 10 voltage. Since the invention creates significantly larger diffraction amplitudes at the same signal electrode voltage, the voltage may now be reduced to produce the same minimum diffraction amplitude needed for a working light modulator cell. Hence, because smaller voltage amplitudes can be created faster than large ones (limiting parameter V/ ⁇ s), increased switch-on speed of the light modulator can be observed together with smaller power consumption.
  • the effect of the enhancement electrodes 40,50 can be understood best through the concept of electric field concentration. Due to the electric field concentration, only the polymer 12 in areas of strong electric field, that is directly below signal electrode 10 is drawn towards the air gap 13. At the same time the force onto the polymer 12 surface in the adjacent areas, that is areas not below the signal electrode 10, is reduced. Since the polymer material 12 is substantially incompressible, a polymer flow from the aforementioned areas of weak electric field to the areas of strong electric field takes place, and correspondingly significantly higher polymer layer 12 deformation amplitude can be seen. Without the enhancement electrodes 40,50, the electric field dynamics are much smaller; the polymer 12 remains under stress also at the sub-cell sides, hindering it from flowing freely to the area below the signal electrode 10.
  • Figure 7 shows horizontal (E x -field, Graph A) and vertical (Ey -field, Graph B) electric fields 250 nm above the polymer-air interface 12,13 of an in-plane enhancement electrode implementation shown schematically in Figs 6a,6b .
  • the distance between the enhancement electrode 50 and the signal electrode 10 is 2 ⁇ m.
  • Figure 7 corresponds therefore to half of a sub-cell presented in Figs 6a,6b .
  • the horizontal E x -field shown in Graph A is a magnitude smaller than the vertical Ey-field shown in Graph B.
  • Fig. 7 also includes electric fields corresponding a prior art situation, in other words without the enhancement electrodes.
  • the enhancement electrodes 50 reduce significantly or remove almost completely the electric field beside the signal electrodes 10 and therefore allow the upward movement of the polymer 12 in the area directly below the signal electrodes 10. A higher deformation amplitude is resulted.
  • Figure 8 shows the displacement of the polymer 12 surface in manner similar than Fig 7 .
  • Graph A in Fig. 8 describes the situation with in-plane-type enhancement electrodes 50 activated and Graph B in Fig. 8 corresponds to the prior art situation without enhancement electrodes.
  • the displacement in y-axis in both figures is given in micrometers.
  • a slightly more negative potential for the enhancement electrodes 50 relative to the support electrode 14 improves performance. Other parameters are similar in both simulations.
  • FIG. 8 the use of enhancement electrodes according to the invention clearly provides a much higher deformation amplitude.
  • a very important feature of the invention is that it provides possibility to use active off switching instead of relying only on then natural relaxation of the polymer layer 12 after deactivation of the signal electrodes 10. This is a major difference compared to any prior art solutions, because it allows the use of softer polymer materials in the deformable layer 12 instead of typical harder polymers in order to produce larger diffraction amplitudes or, alternatively, lower signal voltages for similar, "standard” diffraction amplitudes.
  • the "soft” polymer relaxes much slower than a "hard” polymer, and in order to prevent degradation of the response times of the system, active off switching is necessary.
  • One parameter describing the aforementioned softness/hardness of a polymer is the elastic modulus of the material.
  • the basic idea behind the active off switching according to the invention is the following: when the signal electrode 10 is switched off, the enhancement electrodes 40,50 are switched on for a short period of time until the polymer layer 12 just flattens out. This becomes possible because the electric field created by the enhancement electrodes especially in the in-plane-type configuration are located there, where the signal electrodes 10 create a polymer valley region. In other words, during on switching the polymer 12 beside the signal electrodes 10 was drawn to the area directly below the signal electrodes 10 in order to generate the diffraction peak. Naturally, this leaves a valley in the polymer layer 12 beside the signal electrodes 10, and for example in Fig. 6 directly under the in-plane-type enhancement electrodes 50.
  • the enhancement electrodes 50 are provided for a short time with a suitable (high) voltage, this pulls actively the missing polymer back to fill up that valley, which results in an actively flattened polymer surface; the optical cell (pixel) is switched off much faster than through its natural slow relaxation due to the internal forces of the polymer.
  • Fig. 5 Active off switching in the case of the sandwich-type enhancement electrode configuration is illustrated in Fig. 5 , where the pulling of the polymer layer 12 upwards beside the signal electrode 10 is somewhat exaggerated for demonstration purposes.
  • the invention proposes a novel and inventive use of active enhancement electrodes, which provide at least the following significant benefits over prior art:
  • Suitable dielectric and viscoelastic materials 12 include, for example, silicone gel, oil, various polymer materials or other viscous substances that have a tendency to deform when placed in a presence of an electric field, and said materials relax towards their original form or shape after the aforementioned effect ceases.
  • the transparent electrode structures may be made of indium tin oxide (ITO), as is known in the art, or other methods for creating substantially transparent electrode structures on any substantially transparent substrate material can also be employed without departing from the scope of the present invention. If the device is designed to be used in reflection, or the electrode structures are designed to be small enough to cause only minor light blockage, it is also possble to use non-transparent electrode systems for the various electrodes.
  • ITO indium tin oxide
  • the support electrode structure, the signal electrode structure and also the enhancement electrode structure may be each composed of one or more separate electrode zones.
  • Optimization parameters that may be selected according to the specific application, for a given signal electrode structure, include for example the number and width of the enhancement electrodes 40,50, the distance between the enhancement electrodes 40,50 and the signal electrodes 10.
  • the enhancement electrode 40,50 voltage also is a parameter for optimization depending on voltage applied to the signal electrodes 10 and support electrodes 14.
  • the sandwich-type implementation shown schematically in Figs 4 and 5 may use a conductor plated glass substrate 11, where the whole conductor layer is used as an enhancement electrode 40.
  • a thin dielectric insulation layer 41 is disposed onto the enhancement electrode layer 40.
  • the signal electrodes 10 are lithographically generated. No further insulation layers are needed to prevent electric break-through between said electrodes. Optimization parameters here include the thickness of the dielectric insulation layer 11, and as above, the voltage level of the enhancement electrode 40.
  • the signal 10 and enhancement electrodes 50 may be lithographically generated on a conductor plated glass substrate 11.
  • a dielectric insulation layer 51 is disposed onto the electrodes 10,50. Only small openings through the dielectric insulation layer 51 need to be arranged for contacting electrically said electrodes 10,50.
  • Figure 9 corresponds to a sandwich-type configuration and Fig. 10 to an in-plane-type configuration.
  • a typical number of sub-cells per pixel/cell depends on the application. For example, in case of a micro display one pixel (cell) could have dimensions 200 ⁇ m x 200 ⁇ m. This would lead to a construction with 5 - 50 sub-cells per pixel.
  • the signal, support and enhancement electrode voltages depend on the mechanical dimensions of the cells as well as on the properties of the material of the viscoelastic layer. Table 2 gives certain voltage levels that can be regarded as target voltages for a micro display application. Table 1. Typical dimensions. Dimensions Abbreviation Typical Size Sandwich Typical Size In-Plane Airgap d air 3...5 ⁇ m 3... ⁇ m Polymer thickness d polymer 5...25 ⁇ m 5...25 ⁇ m opglass d glass 1mm 1 mm Substrate d substrate 2.3mm 2.3mm Signal electrode width W sig 2...20 ⁇ m 2...20 ⁇ m Enhancement electrode width W enh Pixel width 3...5 ⁇ m Electrode distance W sp X 2 ⁇ m Table 2. Typical voltages. Signal name Voltage OFF Voltage ON Signal 0 V 10...15 V Enhancement -60...-80 V -40...-20 V Support -80 V -80 V
  • the electrically controlled light modulator and the various applications utilizing the same may be used for many types of optical switching purposes.
  • the devices according to the invention can be used, for example, in display panels, electrically controlled lens elements or electrically reconfigurable optical couplers.
  • the last mentioned devices might be used to switch or divide optical signal between several alternative targets, said targets being for example optical waveguides.

Claims (12)

  1. Lichtmodulierende Vorrichtung, umfassend wenigstens eine Zelle, wobei die Zelle umfasst:
    - zwei verformbare dielektrische Schichten (12, 13), die an einer Grenzfläche zusammentreffen, wobei wenigstens eine der Schichten eine viskoelastische Schicht (12) bestehend aus einem viskoelastischen Reliefbildungsmaterial ist,
    - eine erste Trägerelektrodenstruktur (14), die auf einer Seite der dielektrischen Schichten (12, 13) angeordnet ist,
    - eine zweite Signalelektrodenstruktur (10), die auf der anderen Seite der dielektrischen Schichten (12, 13) und gegenüber der Trägerelektrodenstruktur (14) angeordnet ist,
    - Signalmittel zum Anlegen einer Signalspannung zwischen der Trägerelektrodenstruktur (14) und der Signalelektrodenstruktur (10), um ein elektrisches Feld zu erzeugen, das durch die beiden verformbaren dielektrischen Schichten (12, 13) hindurch geht, um ein Oberflächenrelief auf der viskoelastischen Schicht (12) zu erzeugen,
    - eine dritte Verstärkungselektrodenstruktur (40, 50), die in der Nähe der ersten Signalelektrodenstruktur (10) angeordnet ist, und
    - Verstärkungssignalmittel zum Anlegen einer Verstärkungssignalspannung zwischen der Verstärkungselektrodenstruktur (40, 50) und der Signalelektrodenstruktur (10), um die Verformungsamplitude der viskoselastischen Schicht durch lokales Konzentrieren des elektrischen Feldes, das durch die beiden verformbaren dielektrischen Schichten (12, 13) hindurch geht, zu verstärken,
    dadurch gekennzeichnet, dass das Verstärkungssignalmittel ferner so ausgelegt ist, dass es während des Abflachens des Oberflächenreliefs eine gepulste Verstärkungssignalspannung zwischen der Verstärkungselektrodenstruktur (40, 50) und der Signalelektrodenstruktur (10) anlegt, um die Relaxation der viskoelastischen Schicht (12) zu verstärken.
  2. Lichtmodulierende Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass innerhalb einer Zelle die Verstärkungselektrodenstruktur (50) und die Signalelektrodenstruktur (10) im Wesentlichen in einer einzigen gemeinsamen Ebene angeordnet sind.
  3. Lichtmodulierende Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, dass sich innerhalb einer Zelle ein Bereich der Signalelektrodenstruktur zwischen wenigstens zwei Bereichen der Verstärkungselektrodenstruktur befindet.
  4. Lichtmodulierende Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass innerhalb einer Zelle die Verstärkungselektrodenstruktur (40) und die Signalelektrodenstruktur (10) in im Wesentlichen verschiedenen Ebenen in Bezug aufeinander und in Bezug auf die Trägerelektrodenstruktur (14) angeordnet sind.
  5. Lichtmodulierende Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Verstärkungselektrodenstruktur (40, 50) lichtundurchlässig ist.
  6. Lichtmodulierende Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Verstärkungselektrodenstruktur (40, 50) eine optisch transparente Struktur ist, die aus Indiumzinnoxid gebildet ist.
  7. Lichtmodulierende Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine elektrisch isolierende Schicht (41, 51) auf einer oder beiden Seiten der Verstärkungselektrodenstruktur (40, 50) angeordnet ist.
  8. Lichtmodulierende Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Material der viskoelastischen Reliefbildungsschicht (12) aus der folgenden Gruppe ausgewählt ist: Polymer, Silikonverbindung, Öl.
  9. Lichtmodulierende Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Mehrzahl von Zellen so angeordnet ist, dass sie eine Anzeigevorrichtung bildet.
  10. Verfahren zum Modulieren von Licht durch Erzeugen und Abflachen eines Reliefs in einer Schicht (12) aus viskoelastischem Material,
    durch Verwenden einer Zelle, wobei die Zelle eine Trägerelektrodenstruktur (14), eine Signalelektrodenstruktur (10) gegenüber der Trägerelektrodenstruktur (14), eine Verstärkungselektrodenstruktur (40, 50), die in der Nähe der Signalelektrodenstruktur (10) angeordnet ist, und eine Grenzfläche zwischen einer ersten verformbaren dielektrischen Schicht (12) und einer zweiten verformbaren dielektrischen Schicht (13) umfasst, wobei die ersten und zweiten Schichten (12, 13) zwischen der Trägerelektrodenstruktur (14) und der Signalelektrodenstruktur (10) angeordnet sind, und die erste dielektrische Schicht (12) aus einem viskoelastischen Reliefbildungsmaterial besteht,
    wobei das Verfahren ein Anlegen einer Signalspannung zwischen der Signalelektrodenstruktur (10) und der Trägerelektrodenstruktur (14) umfasst, um ein elektrisches Feld zu erzeugen, das durch die Schichten (12, 13) hindurch geht, um ein Oberflächenrelief auf der viskoelastischen Schicht (12) zu bilden, dadurch gekennzeichnet, dass das Verfahren ferner ein Anlegen einer gepulste Verstärkungsspannung zwischen der Verstärkungselektrodenstruktur (40, 50) und der Signalelektrodenstruktur (10) während des Abflachens des Reliefs umfasst, um die Relaxation der ersten Schicht (12) zu verstärken.
  11. Verfahren nach Anspruch 10, dadurch gekennzeichnet, dass die Signalelektrodenstruktur (10) und die Verstärkungselektrodenstruktur (40, 50) in derselben Ebene sind.
  12. Verfahren nach Anspruch 10 oder 11, dadurch gekennzeichnet, dass die Verstärkungselektrodenstruktur (40, 50) lichtundurchlässig sind.
EP02743283A 2002-06-13 2002-06-13 Erweiterungselektrodenkonfiguration für elektrisch gesteuerte lichtmodulatoren Expired - Lifetime EP1516224B1 (de)

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PCT/FI2002/000512 WO2003107087A1 (en) 2002-06-13 2002-06-13 Enhancement electrode configuration for electrically controlled light modulators

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AU (1) AU2002345104A1 (de)
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US20060152790A1 (en) 2006-07-13
US7375870B2 (en) 2008-05-20
EP1516224A1 (de) 2005-03-23
AU2002345104A1 (en) 2003-12-31

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