EP1481451A2 - Laserdiode mit einem verstärkungsteil, der einen variierenden brechungsindex aufweist - Google Patents

Laserdiode mit einem verstärkungsteil, der einen variierenden brechungsindex aufweist

Info

Publication number
EP1481451A2
EP1481451A2 EP03717938A EP03717938A EP1481451A2 EP 1481451 A2 EP1481451 A2 EP 1481451A2 EP 03717938 A EP03717938 A EP 03717938A EP 03717938 A EP03717938 A EP 03717938A EP 1481451 A2 EP1481451 A2 EP 1481451A2
Authority
EP
European Patent Office
Prior art keywords
stripe section
laser diode
pumped stripe
pumped
index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP03717938A
Other languages
English (en)
French (fr)
Other versions
EP1481451A4 (de
Inventor
Jeffrey E. Ungar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quintessence Photonics Corp
Original Assignee
Quintessence Photonics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quintessence Photonics Corp filed Critical Quintessence Photonics Corp
Publication of EP1481451A2 publication Critical patent/EP1481451A2/de
Publication of EP1481451A4 publication Critical patent/EP1481451A4/de
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/04Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042Electrical excitation ; Circuits therefor
    • H01S5/0425Electrodes, e.g. characterised by the structure
    • H01S5/04254Electrodes, e.g. characterised by the structure characterised by the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00Functional characteristics
    • H01S2301/18Semiconductor lasers with special structural design for influencing the near- or far-field
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/0607Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
    • H01S5/0612Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by temperature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1053Comprising an active region having a varying composition or cross-section in a specific direction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1053Comprising an active region having a varying composition or cross-section in a specific direction
    • H01S5/106Comprising an active region having a varying composition or cross-section in a specific direction varying thickness along the optical axis
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/204Strongly index guided structures

Definitions

  • the subject matter disclosed generally relates to the field of semiconductor lasers.
  • laser diodes are commonly used as a light source in fiber optic communication systems. It is sometimes desirable to use very high powered laser diodes.
  • Erbium-doped fiber optic amplifiers and Raman fiberoptic amplifiers require pumping by a high powered laser. The pumping laser must emit a beam of high optical quality in order to be efficiently coupled to the fiber core. Because of efficiency, compactness and other factors it is desirable to pump the amplifier with a laser diode.
  • laser diodes with high quality beams typically have an upper power limit of approximately 0.5 watt, whereas fiber optic amplifiers may require 2 watts or more.
  • the power of a laser diode 1 can be increased by widening the pumped stripe 2 of the diode 1. Widening the pumped stripe 2 reduces the optical power density and resultant heat within the diode 1. It has been found that at high power densities, the light generated in a widened laser diode will "self-focus" into filaments across the length of stripe 2. This self-focus effect creates an output beam with intensity spikes as shown in Fig. 1. The quality of such an output is unacceptable for most photonic applications. It would be desirable to provide a high powered laser diode that emits a high quality laser beam.
  • a laser diode that has a pumped stripe section with a varying index of refraction.
  • FIG. 1 is an illustration of a laser diode of the prior art
  • Figure 2 is an illustration showing a laser diode
  • Figure 3 is an illustration showing an embodiment of different layers of the laser diode
  • Figure 4 is an illustration of an alternate embodiment of the laser diode
  • FIG. 5 is an illustration of an alternate embodiment of the laser diode
  • Figure 6 is an illustration of an alternate embodiment of the laser diode.
  • a high powered laser diode that includes a pumped stripe section with index of refraction that varies monotonically in the direction perpendicular to the direction of emission.
  • the varying index of refraction can reduce the self-focusing phenomenon found in high powered laser diodes in the prior art, thereby providing a high quality output beam.
  • the index of refraction can vary from one side of the amplifier section to the other side of the amplifier section.
  • the index can be varied by varying a structural characteristic of the amplifier section such as the composition, doping, or thickness of the layers within the laser diode.
  • a thermal gradient can be created across the amplifier section to vary the index of refraction.
  • the thermal gradient can be created by integrating a heating element along one side of the amplifier section or by creating unequal current flow through the amplifier section.
  • Figure 2 shows a laser diode 10.
  • the laser diode 10 includes a pumped stripe section 12.
  • the pumped stripe section 12 has a first side 14 and a second side 16 that are separated by a width W.
  • the pumped stripe section 12 is constructed to generate stimulated light emission that is emitted from the diode 10 along an optical axis O p .
  • the laser diode 10 may be constructed with a relatively wide pumped stripe section 12 that can emit a high quality light beam with up to 5 watts of power.
  • the laser diode 10 may have reflective surfaces 18 that create feedback for the stimulated light.
  • the laser diode 10 may contain a separate distributed feedback section (not shown) that is coupled to the pumped stripe section 12. Stimulated light emission may be generated in the feedback section and further amplified in the pumped stripe section 12.
  • the laser diode 10 may further have non-pumped sections 20 outside of the pumped stripe section 12.
  • the index of refraction n may vary across the stripe 12 from the first side 14 to the second side 16.
  • the index of refraction can be varied by varying a structural characteristic of the pumped stripe section 12.
  • the pumped stripe section 12 may be doped in a manner that creates a varying index of refraction.
  • the thickness of one or more layers within the pumped stripe section may be varied to vary the index of refraction.
  • the varying index reduces the self- focusing effects that may occur in a high powered laser.
  • the result is a high powered high quality laser beam.
  • a linear gradient of the index is shown, it is to be understood that the index of refraction may have non-linear variation across the pumped stripe section 12.
  • FIG. 3 shows the different layers 30, 32, 34, 36, 38, 40, 42, 44 and 46 of an embodiment of the semiconductor laser 10. It is to be understood that the embodiment shown and described is merely exemplary and that other layers, materials and compositions may be used.
  • the laser 10 may include a lower cladding 32 formed on a substrate 30.
  • the substrate 30 may be an n-doped Indium Phosphide (InP) or Gallium Arsenide (GaAs) material.
  • the cladding 32 may be an n-doped InP or GaAs material.
  • the laser 10 may further have a multi-quantum well active layer 36 located between confinement layers 34 and 38.
  • Confinement layer 34 may be a n — doped InGaAsP or Al y Ga ⁇ y As material.
  • Confinement layer 38 may be a p-doped InGaAsP or Al y Ga 1-y As material.
  • Layers 40, 42 and 44 may be upper cladding that includes p-doped material.
  • layer 40 may be p-doped InGaAsP or Al x Ga ⁇ -x As.
  • Layer 42 may be p-doped InGaAsP or Al z Ga 1-z As material.
  • Layer 44 may be p-doped InP or Al x Ga ⁇ _ x As material.
  • Layer 46 may be an electrical contact layer containing p - doped InGaAs or GaAs material.
  • the layers 34, 36 and 38 create a PN junction that will generate stimulated light emission in response to a flow of electrical current.
  • Cladding layers 32, 40, 42 and 44 form a waveguide that guides the light.
  • Current flows through the pumped stripe section 12 from contact layer 46. The current causes stimulated emission of light within the pumped stripe section 12.
  • the semiconductor laser 10 can be constructed by initially forming layers 32, 34, 36 and 38 on the substrate 30. The remaining layers 40, 42, 44 and 46 can then be sequentially formed onto layer 38. All the layers can be formed with known epitaxial semiconductor fabrication processes. Although a laser diode 10 with layers 30, 32, 34, 36, 38, 40, 42, 44 and 46 are shown and described, it is to be understood that this embodiment is exemplary only and that the diode 10 may have a different construction.
  • Figure 4 shows a different embodiment of a laser diode with a heating element 50 located adjacent to the first side 14 of the pumped stripe section 12.
  • the heating element 50 may be an electrically resistive strip connected to a source of power 52.
  • the heating element 50 may generate heat that flows into the pumped stripe section 12. Offsetting the heating element 50 adjacent to one side of the diode will create a thermal gradient across the pumped stripe section 12. The thermal gradient will vary the index of refraction from the first side 14 to the second side 16.
  • Figure 5 shows an alternate embodiment wherein the contact layer (not shown) is separated from the remaining layers by a layer of dielectric 54.
  • the layer of dielectric 54 has a plurality of offset openings 56. Current only flows through the dielectric openings 56.
  • the openings 56 may be located adjacent to the first side 14 of the pumped stripe section 12. The flow of current from the first side 14 will create a resultant thermal gradient across the pumped stripe section 12. The thermal gradient will vary the index of refraction from the first side 14 to the second side 16 of the pumped stripe section 12.
  • Figure 6 shows another embodiment wherein the openings 54R located adjacent to the second side 16 have a larger effective area than the openings 54L located adjacent to the first side 14 and openings 54C in the center of the pumped stripe section 12.
  • the openings 54C in the center may have an effective area greater than the effective area of the opening 54L.
  • the difference in effective areas will create an uneven flow of current through the pumped stripe section 12. This uneven current flow will cause a thermal gradient and varying index of refraction from the second side 16 to the first side 14 of the pumped stripe section 12.

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Lasers (AREA)
EP03717938A 2002-03-04 2003-03-04 Laserdiode mit einem verstärkungsteil, der einen variierenden brechungsindex aufweist Ceased EP1481451A4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US36175002P 2002-03-04 2002-03-04
US361750P 2002-03-04
US379027 2003-03-03
US10/379,027 US7269195B2 (en) 2002-03-04 2003-03-03 Laser diode with an amplification section that has a varying index of refraction
PCT/US2003/006875 WO2003077387A2 (en) 2002-03-04 2003-03-04 A laser diode with an amplification section that has a varying index of refraction

Publications (2)

Publication Number Publication Date
EP1481451A2 true EP1481451A2 (de) 2004-12-01
EP1481451A4 EP1481451A4 (de) 2005-10-05

Family

ID=27807939

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03717938A Ceased EP1481451A4 (de) 2002-03-04 2003-03-04 Laserdiode mit einem verstärkungsteil, der einen variierenden brechungsindex aufweist

Country Status (8)

Country Link
US (1) US7269195B2 (de)
EP (1) EP1481451A4 (de)
JP (1) JP2005527108A (de)
KR (1) KR20040101270A (de)
CN (1) CN100409512C (de)
AU (1) AU2003222255A1 (de)
CA (1) CA2477987A1 (de)
WO (1) WO2003077387A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010020625B4 (de) 2010-05-14 2024-02-22 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines kantenemittierenden Halbleiterlasers
EP3304660B1 (de) * 2015-06-05 2022-10-26 The Government of the United States of America as represented by the Secretary of the Navy Interbandkaskadenlaser mit topkontakt mit geringem füllfaktor für reduzierten verlust
JP6572803B2 (ja) * 2016-03-09 2019-09-11 三菱電機株式会社 半導体レーザ装置
RU2627192C1 (ru) * 2016-09-07 2017-08-03 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Нижегородский государственный университет им. Н.И. Лобачевского" Способ получения лазерного излучения с малой расходимостью и диодный лазер для его осуществления
FR3061360A1 (fr) * 2016-12-22 2018-06-29 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif electroluminescent

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249142A (en) * 1978-11-30 1981-02-03 Xerox Corporation Enhancement of lowest order mode operation in nonplanar DH injection lasers
US4433417A (en) * 1981-05-29 1984-02-21 Xerox Corporation Nonplanar substrate injection lasers grown in vapor phase epitaxy
JPS6396988A (ja) * 1986-10-14 1988-04-27 Sony Corp 半導体レ−ザ
US4965806A (en) * 1989-06-15 1990-10-23 The United States Of America As Represented By The United States Department Of Energy Semiconductor laser devices having lateral refractive index tailoring
DE19717545A1 (de) * 1997-02-27 1998-09-03 Deutsche Telekom Ag Optoelektronisches Bauelement mit räumlich einstellbarer Temperaturverteilung
WO1999066614A1 (en) * 1998-06-18 1999-12-23 University College Cork A semi-conductor device and a method for varying current density in an active region of a junction of the semi-conductor device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4694459A (en) * 1985-05-31 1987-09-15 Xerox Corporation Hybrid gain/index guided semiconductor lasers and array lasers
US4791648A (en) * 1987-02-04 1988-12-13 Amoco Corporation Laser having a substantially planar waveguide
US5337328A (en) 1992-05-08 1994-08-09 Sdl, Inc. Semiconductor laser with broad-area intra-cavity angled grating
JPH10506724A (ja) * 1994-10-03 1998-06-30 エスディーエル インク. チューニング可能な青色レーザダイオード
US6122299A (en) * 1997-12-31 2000-09-19 Sdl, Inc. Angled distributed reflector optical device with enhanced light confinement
US6389199B1 (en) * 1999-02-19 2002-05-14 Corning Incorporated Tunable optical add/drop multiplexer
US6421363B1 (en) 1998-03-17 2002-07-16 Marek A. Osinski Semiconductor lasers and amplifiers with grating-induced anisotropic waveguide
US6556611B1 (en) 1999-05-10 2003-04-29 Princeton Lightwave, Inc. Wide stripe distributed bragg reflector lasers with improved angular and spectral characteristics

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249142A (en) * 1978-11-30 1981-02-03 Xerox Corporation Enhancement of lowest order mode operation in nonplanar DH injection lasers
US4433417A (en) * 1981-05-29 1984-02-21 Xerox Corporation Nonplanar substrate injection lasers grown in vapor phase epitaxy
JPS6396988A (ja) * 1986-10-14 1988-04-27 Sony Corp 半導体レ−ザ
US4965806A (en) * 1989-06-15 1990-10-23 The United States Of America As Represented By The United States Department Of Energy Semiconductor laser devices having lateral refractive index tailoring
DE19717545A1 (de) * 1997-02-27 1998-09-03 Deutsche Telekom Ag Optoelektronisches Bauelement mit räumlich einstellbarer Temperaturverteilung
WO1999066614A1 (en) * 1998-06-18 1999-12-23 University College Cork A semi-conductor device and a method for varying current density in an active region of a junction of the semi-conductor device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
LINDSEY C ET AL: "TAILORED-GAIN BROAD-AREA SEMICONDUCTOR LASER WITH SINGLE-LOBED DIFFRACTION-LIMITED FAR-FIELD PATTERN" ELECTRONICS LETTERS, IEE STEVENAGE, GB, vol. 21, no. 16, 1 August 1985 (1985-08-01), pages 671-673, XP000709787 ISSN: 0013-5194 *
MCINERNEY J ET AL: "High brightness semiconductor lasers with reduced filamentation" LEOS '99. IEEE LASERS AND ELECTRO-OPTICS SOCIETY 1999 12TH ANNUAL MEETING SAN FRANCISCO, CA, USA 8-11 NOV. 1999, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 8 November 1999 (1999-11-08), pages 78-79, XP010361308 ISBN: 0-7803-5634-9 *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 335 (E-656), 9 September 1988 (1988-09-09) & JP 63 096988 A (SONY CORP), 27 April 1988 (1988-04-27) *
See also references of WO03077387A2 *

Also Published As

Publication number Publication date
WO2003077387A2 (en) 2003-09-18
CN100409512C (zh) 2008-08-06
CN1669193A (zh) 2005-09-14
EP1481451A4 (de) 2005-10-05
AU2003222255A1 (en) 2003-09-22
JP2005527108A (ja) 2005-09-08
US7269195B2 (en) 2007-09-11
US20030231681A1 (en) 2003-12-18
KR20040101270A (ko) 2004-12-02
WO2003077387A3 (en) 2004-01-29
CA2477987A1 (en) 2003-09-18

Similar Documents

Publication Publication Date Title
US6167073A (en) High power laterally antiguided semiconductor light source with reduced transverse optical confinement
US6445724B2 (en) Master oscillator vertical emission laser
JP2008135786A (ja) 高出力半導体レーザダイオード
US20030086654A1 (en) Semiconductor optical device with improved efficiency and output beam characteristics
US6594297B1 (en) Laser apparatus in which surface-emitting semiconductor is excited with semiconduct laser element and high-order oscillation modes are suppressed
US6798815B2 (en) High power semiconductor laser diode and method for making such a diode
US20010012307A1 (en) Laser apparatus including surface-emitting semiconductor excited with semiconductor laser element, and directly modulated
US20190131770A1 (en) Semiconductor laser device, semiconductor laser module, and laser light source system for welding
Salet et al. 1.1-W continuous-wave 1480-nm semiconductor lasers with distributed electrodes for mode shaping
Huang et al. High-brightness slab-coupled optical waveguide laser arrays
US7269195B2 (en) Laser diode with an amplification section that has a varying index of refraction
US7646797B1 (en) Use of current channeling in multiple node laser systems and methods thereof
JP3037111B2 (ja) 半導体レーザおよび複合半導体レーザ
JP2967757B2 (ja) 半導体レーザ装置及びその製造方法
JP2000357841A (ja) 半導体レーザ素子、半導体レーザモジュール、希土類添加光ファイバ増幅器、およびファイバレーザ
EP1481450B1 (de) Verstimmte dfb-laserdiode
US6782025B2 (en) High power distributed feedback ridge waveguide laser
US6711199B2 (en) Laser diode with an internal mirror
JP3408247B2 (ja) 半導体レーザ素子
CA2398833A1 (en) High power distributed feedback ridge waveguide laser
JP2001358405A (ja) 半導体レーザ装置及びその製造方法
JP2683092B2 (ja) 半導体レーザ素子
JPH07106694A (ja) 半導体レーザー
Scifres et al. GaAs/GaAIAs Lasers-State Of The Art

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20040922

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE SI TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

A4 Supplementary search report drawn up and despatched

Effective date: 20050824

17Q First examination report despatched

Effective date: 20051122

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED

18R Application refused

Effective date: 20090102