EP1475188A3 - Dispositif pour la finition de surfaces planes - Google Patents
Dispositif pour la finition de surfaces planes Download PDFInfo
- Publication number
- EP1475188A3 EP1475188A3 EP04010040A EP04010040A EP1475188A3 EP 1475188 A3 EP1475188 A3 EP 1475188A3 EP 04010040 A EP04010040 A EP 04010040A EP 04010040 A EP04010040 A EP 04010040A EP 1475188 A3 EP1475188 A3 EP 1475188A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- working surface
- tool
- plane surfaces
- honing machine
- spindle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000003754 machining Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10322360 | 2003-05-09 | ||
DE10322360A DE10322360A1 (de) | 2003-05-09 | 2003-05-09 | Vorrichtung zum Feinbearbeiten von ebenen Flächen |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1475188A2 EP1475188A2 (fr) | 2004-11-10 |
EP1475188A3 true EP1475188A3 (fr) | 2005-12-21 |
Family
ID=32981333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04010040A Withdrawn EP1475188A3 (fr) | 2003-05-09 | 2004-04-28 | Dispositif pour la finition de surfaces planes |
Country Status (3)
Country | Link |
---|---|
US (1) | US7014540B2 (fr) |
EP (1) | EP1475188A3 (fr) |
DE (1) | DE10322360A1 (fr) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0504228D0 (en) * | 2005-03-01 | 2005-04-06 | Westwind Air Bearings Ltd | Machining spindles |
US7785173B2 (en) * | 2005-07-05 | 2010-08-31 | Supfina Machine Co. | Superfinishing machine and method |
IT1391211B1 (it) * | 2008-08-05 | 2011-11-18 | Zanetti | Testa di taglio e sbordatura da montare su banchi da taglio di lastre in vetro |
US8133093B2 (en) * | 2008-10-10 | 2012-03-13 | Strasbaugh, Inc. | Grinding apparatus having an extendable wheel mount |
EP2486602B1 (fr) * | 2009-10-08 | 2013-01-16 | Komax Holding AG | Dispositif et procédé d'enlèvement de couche des modules solaires |
TWM421860U (en) * | 2011-02-18 | 2012-02-01 | Green Energy Technology Inc | Position adjusting mechanism for grinding wheel |
US9120194B2 (en) * | 2011-07-21 | 2015-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for wafer grinding |
US9393669B2 (en) | 2011-10-21 | 2016-07-19 | Strasbaugh | Systems and methods of processing substrates |
TW201323149A (zh) * | 2011-10-21 | 2013-06-16 | Strasbaugh | 晶圓研磨之系統與方法 |
US9570311B2 (en) * | 2012-02-10 | 2017-02-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Modular grinding apparatuses and methods for wafer thinning |
US9610669B2 (en) * | 2012-10-01 | 2017-04-04 | Strasbaugh | Methods and systems for use in grind spindle alignment |
US9457446B2 (en) | 2012-10-01 | 2016-10-04 | Strasbaugh | Methods and systems for use in grind shape control adaptation |
JP6210935B2 (ja) | 2013-11-13 | 2017-10-11 | 東京エレクトロン株式会社 | 研磨洗浄機構、基板処理装置及び基板処理方法 |
US10183374B2 (en) * | 2014-08-26 | 2019-01-22 | Ebara Corporation | Buffing apparatus, and substrate processing apparatus |
JP2016087748A (ja) * | 2014-11-06 | 2016-05-23 | 株式会社ディスコ | 研削装置 |
JP6309466B2 (ja) * | 2015-01-22 | 2018-04-11 | 光洋機械工業株式会社 | 両頭平面研削装置 |
JP2018001290A (ja) * | 2016-06-28 | 2018-01-11 | 株式会社ディスコ | 加工装置 |
CN108247476A (zh) * | 2018-01-31 | 2018-07-06 | 广东豪特曼智能机器有限公司 | 手机3d陶瓷后盖专用立式磨床及其磨削方法 |
CN113400164B (zh) * | 2021-06-21 | 2022-01-18 | 泰州市博世特精密铸造有限公司 | 一种铸造容器内部自动化打磨装备 |
DE102021132468B3 (de) | 2021-12-09 | 2023-02-23 | Erwin Junker Maschinenfabrik Gmbh | Verfahren und vorrichtung zum schleifen von planseiten eines schwer zerspanbare beschichtungen aufweisenden rotationssymmetrischen werkstückes |
CN114851021B (zh) * | 2022-04-14 | 2024-01-12 | 宝应县嘉永电器有限公司 | 一种塑料接线盒表面精加工处理设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999039873A1 (fr) * | 1998-02-04 | 1999-08-12 | Koennemann Ronny | Broche de ponçage |
US6179695B1 (en) * | 1996-05-10 | 2001-01-30 | Canon Kabushiki Kaisha | Chemical mechanical polishing apparatus and method |
DE20208944U1 (de) * | 2002-06-10 | 2002-08-29 | Kadia Produktion Gmbh & Co | Maschine zur Feinstbearbeitung durch Honen |
WO2003022518A2 (fr) * | 2001-09-10 | 2003-03-20 | Oriol, Inc. | Outil de polissage chimico-mecanique, appareil et procede correspondants |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1652135B1 (de) * | 1967-08-25 | 1971-07-08 | Peter Nagel | Honwerkzeug |
US3634973A (en) * | 1969-08-27 | 1972-01-18 | Extrude Hone Corp | Apparatus for abrading by extrusion and abrading medium |
CH553621A (fr) * | 1972-10-23 | 1974-09-13 | Tatar Alexander | Procede pour l'affutage de forets a quatre faces et machine d'affutage pour la mise en oeuvre de ce procede. |
US4044508A (en) * | 1976-03-26 | 1977-08-30 | Richard Frederick | Adjustable honing template |
US4811521A (en) * | 1986-11-05 | 1989-03-14 | Kabushiki Kaisha Nisshin Seisakusho | Truing device for hones |
DE4208615C1 (en) * | 1992-03-18 | 1993-08-12 | Gmn Georg Mueller Nuernberg Ag, 8500 Nuernberg, De | Grinding spindle with concentric pot-shaped sliding discs - has inner disc protrusions extending radially between axial protrusions on outer disc |
GB9714427D0 (en) * | 1997-07-10 | 1997-09-10 | Western Atlas Uk Ltd | Machine tools |
JP4249827B2 (ja) * | 1998-12-04 | 2009-04-08 | 株式会社ディスコ | 半導体ウェーハの製造方法 |
-
2003
- 2003-05-09 DE DE10322360A patent/DE10322360A1/de not_active Ceased
-
2004
- 2004-04-28 EP EP04010040A patent/EP1475188A3/fr not_active Withdrawn
- 2004-05-07 US US10/842,049 patent/US7014540B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6179695B1 (en) * | 1996-05-10 | 2001-01-30 | Canon Kabushiki Kaisha | Chemical mechanical polishing apparatus and method |
WO1999039873A1 (fr) * | 1998-02-04 | 1999-08-12 | Koennemann Ronny | Broche de ponçage |
WO2003022518A2 (fr) * | 2001-09-10 | 2003-03-20 | Oriol, Inc. | Outil de polissage chimico-mecanique, appareil et procede correspondants |
DE20208944U1 (de) * | 2002-06-10 | 2002-08-29 | Kadia Produktion Gmbh & Co | Maschine zur Feinstbearbeitung durch Honen |
Also Published As
Publication number | Publication date |
---|---|
US20050020198A1 (en) | 2005-01-27 |
EP1475188A2 (fr) | 2004-11-10 |
US7014540B2 (en) | 2006-03-21 |
DE10322360A1 (de) | 2004-11-25 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7B 24B 47/10 B Ipc: 7B 24B 27/00 B Ipc: 7B 24B 7/04 B Ipc: 7B 24B 7/16 B Ipc: 7B 24D 7/14 A |
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17P | Request for examination filed |
Effective date: 20060621 |
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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR |
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17Q | First examination report despatched |
Effective date: 20100503 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20111110 |