EP1475188A3 - Vorrichtung zum feinarbeiten von ebenen flächen - Google Patents

Vorrichtung zum feinarbeiten von ebenen flächen Download PDF

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Publication number
EP1475188A3
EP1475188A3 EP04010040A EP04010040A EP1475188A3 EP 1475188 A3 EP1475188 A3 EP 1475188A3 EP 04010040 A EP04010040 A EP 04010040A EP 04010040 A EP04010040 A EP 04010040A EP 1475188 A3 EP1475188 A3 EP 1475188A3
Authority
EP
European Patent Office
Prior art keywords
working surface
tool
plane surfaces
honing machine
spindle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04010040A
Other languages
English (en)
French (fr)
Other versions
EP1475188A2 (de
Inventor
Peter Nagel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kadia Produktion GmbH and Co
Original Assignee
Kadia Produktion GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kadia Produktion GmbH and Co filed Critical Kadia Produktion GmbH and Co
Publication of EP1475188A2 publication Critical patent/EP1475188A2/de
Publication of EP1475188A3 publication Critical patent/EP1475188A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Eine Vorrichtung zur Feinbearbeitung von Planflächen, insbesondere zum Plan-Finishen, weist ein Werkzeug (13) auf, das eine äußere und eine innere Arbeitsfläche (36, 44) hat. Diese sind nach Art von Topfscheiben, die ineinander passen, ausgebildet und zusammen drehbar, jedoch unabhängig voneinander axial zustellbar. Dies geschieht bezüglich der äußeren Arbeitsfläche (36) mittels des Spindelantriebs einer Honmaschine, der vorzugsweise als Linearmotor ausgebildet ist, während die innere Arbeitsfläche (44) über den Zustellantrieb (28) der Honmaschine zugestellt wird, der im Inneren der Spindel und des Werkzeugs verläuft.
EP04010040A 2003-05-09 2004-04-28 Vorrichtung zum feinarbeiten von ebenen flächen Withdrawn EP1475188A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10322360A DE10322360A1 (de) 2003-05-09 2003-05-09 Vorrichtung zum Feinbearbeiten von ebenen Flächen
DE10322360 2003-05-09

Publications (2)

Publication Number Publication Date
EP1475188A2 EP1475188A2 (de) 2004-11-10
EP1475188A3 true EP1475188A3 (de) 2005-12-21

Family

ID=32981333

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04010040A Withdrawn EP1475188A3 (de) 2003-05-09 2004-04-28 Vorrichtung zum feinarbeiten von ebenen flächen

Country Status (3)

Country Link
US (1) US7014540B2 (de)
EP (1) EP1475188A3 (de)
DE (1) DE10322360A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0504228D0 (en) * 2005-03-01 2005-04-06 Westwind Air Bearings Ltd Machining spindles
US7785173B2 (en) * 2005-07-05 2010-08-31 Supfina Machine Co. Superfinishing machine and method
IT1391211B1 (it) * 2008-08-05 2011-11-18 Zanetti Testa di taglio e sbordatura da montare su banchi da taglio di lastre in vetro
US8133093B2 (en) * 2008-10-10 2012-03-13 Strasbaugh, Inc. Grinding apparatus having an extendable wheel mount
EP2486602B1 (de) * 2009-10-08 2013-01-16 Komax Holding AG Vorrichtung und Verfahren zum Entschichten von Solarmodulen
TWM421860U (en) * 2011-02-18 2012-02-01 Green Energy Technology Inc Position adjusting mechanism for grinding wheel
US9120194B2 (en) * 2011-07-21 2015-09-01 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus for wafer grinding
US9393669B2 (en) 2011-10-21 2016-07-19 Strasbaugh Systems and methods of processing substrates
TW201323149A (zh) * 2011-10-21 2013-06-16 Strasbaugh 晶圓研磨之系統與方法
US9570311B2 (en) * 2012-02-10 2017-02-14 Taiwan Semiconductor Manufacturing Company, Ltd. Modular grinding apparatuses and methods for wafer thinning
US9610669B2 (en) * 2012-10-01 2017-04-04 Strasbaugh Methods and systems for use in grind spindle alignment
US9457446B2 (en) 2012-10-01 2016-10-04 Strasbaugh Methods and systems for use in grind shape control adaptation
JP6210935B2 (ja) 2013-11-13 2017-10-11 東京エレクトロン株式会社 研磨洗浄機構、基板処理装置及び基板処理方法
US10183374B2 (en) * 2014-08-26 2019-01-22 Ebara Corporation Buffing apparatus, and substrate processing apparatus
JP2016087748A (ja) * 2014-11-06 2016-05-23 株式会社ディスコ 研削装置
JP6309466B2 (ja) * 2015-01-22 2018-04-11 光洋機械工業株式会社 両頭平面研削装置
JP2018001290A (ja) * 2016-06-28 2018-01-11 株式会社ディスコ 加工装置
CN108247476A (zh) * 2018-01-31 2018-07-06 广东豪特曼智能机器有限公司 手机3d陶瓷后盖专用立式磨床及其磨削方法
CN113400164B (zh) * 2021-06-21 2022-01-18 泰州市博世特精密铸造有限公司 一种铸造容器内部自动化打磨装备
DE102021132468B3 (de) 2021-12-09 2023-02-23 Erwin Junker Maschinenfabrik Gmbh Verfahren und vorrichtung zum schleifen von planseiten eines schwer zerspanbare beschichtungen aufweisenden rotationssymmetrischen werkstückes
CN114851021B (zh) * 2022-04-14 2024-01-12 宝应县嘉永电器有限公司 一种塑料接线盒表面精加工处理设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999039873A1 (de) * 1998-02-04 1999-08-12 Koennemann Ronny Schleifspindel
US6179695B1 (en) * 1996-05-10 2001-01-30 Canon Kabushiki Kaisha Chemical mechanical polishing apparatus and method
DE20208944U1 (de) * 2002-06-10 2002-08-29 KADIA Produktion GmbH + Co., 72622 Nürtingen Maschine zur Feinstbearbeitung durch Honen
WO2003022518A2 (en) * 2001-09-10 2003-03-20 Oriol, Inc. Chemical mechanical polishing tool, apparatus and method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1652135B1 (de) * 1967-08-25 1971-07-08 Peter Nagel Honwerkzeug
US3634973A (en) * 1969-08-27 1972-01-18 Extrude Hone Corp Apparatus for abrading by extrusion and abrading medium
CH553621A (fr) * 1972-10-23 1974-09-13 Tatar Alexander Procede pour l'affutage de forets a quatre faces et machine d'affutage pour la mise en oeuvre de ce procede.
US4044508A (en) * 1976-03-26 1977-08-30 Richard Frederick Adjustable honing template
US4811521A (en) * 1986-11-05 1989-03-14 Kabushiki Kaisha Nisshin Seisakusho Truing device for hones
DE4208615C1 (en) * 1992-03-18 1993-08-12 Gmn Georg Mueller Nuernberg Ag, 8500 Nuernberg, De Grinding spindle with concentric pot-shaped sliding discs - has inner disc protrusions extending radially between axial protrusions on outer disc
GB9714427D0 (en) * 1997-07-10 1997-09-10 Western Atlas Uk Ltd Machine tools
JP4249827B2 (ja) * 1998-12-04 2009-04-08 株式会社ディスコ 半導体ウェーハの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6179695B1 (en) * 1996-05-10 2001-01-30 Canon Kabushiki Kaisha Chemical mechanical polishing apparatus and method
WO1999039873A1 (de) * 1998-02-04 1999-08-12 Koennemann Ronny Schleifspindel
WO2003022518A2 (en) * 2001-09-10 2003-03-20 Oriol, Inc. Chemical mechanical polishing tool, apparatus and method
DE20208944U1 (de) * 2002-06-10 2002-08-29 KADIA Produktion GmbH + Co., 72622 Nürtingen Maschine zur Feinstbearbeitung durch Honen

Also Published As

Publication number Publication date
US20050020198A1 (en) 2005-01-27
US7014540B2 (en) 2006-03-21
DE10322360A1 (de) 2004-11-25
EP1475188A2 (de) 2004-11-10

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