EP1403903A3 - Pompe ionique de type Orbitron. - Google Patents

Pompe ionique de type Orbitron. Download PDF

Info

Publication number
EP1403903A3
EP1403903A3 EP03015579A EP03015579A EP1403903A3 EP 1403903 A3 EP1403903 A3 EP 1403903A3 EP 03015579 A EP03015579 A EP 03015579A EP 03015579 A EP03015579 A EP 03015579A EP 1403903 A3 EP1403903 A3 EP 1403903A3
Authority
EP
European Patent Office
Prior art keywords
field
electron source
pump chamber
orbitron
evacuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03015579A
Other languages
German (de)
English (en)
Other versions
EP1403903A2 (fr
Inventor
Hans Wilfried Peter Dr. Koops
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koops Hans Wp Dr
Original Assignee
Nawotec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nawotec GmbH filed Critical Nawotec GmbH
Publication of EP1403903A2 publication Critical patent/EP1403903A2/fr
Publication of EP1403903A3 publication Critical patent/EP1403903A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Particle Accelerators (AREA)
  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP03015579A 2002-09-05 2003-07-11 Pompe ionique de type Orbitron. Withdrawn EP1403903A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10241549 2002-09-05
DE2002141549 DE10241549B4 (de) 2002-09-05 2002-09-05 Orbitron-Pumpe

Publications (2)

Publication Number Publication Date
EP1403903A2 EP1403903A2 (fr) 2004-03-31
EP1403903A3 true EP1403903A3 (fr) 2005-05-11

Family

ID=31724503

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03015579A Withdrawn EP1403903A3 (fr) 2002-09-05 2003-07-11 Pompe ionique de type Orbitron.

Country Status (2)

Country Link
EP (1) EP1403903A3 (fr)
DE (1) DE10241549B4 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009042417B4 (de) 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-Ionengetterpumpe
EP2413343B1 (fr) 2010-07-26 2015-11-04 Hans W.P. Dr. Koops Dispositif de génération de rayonnements THz avec faisceaux à électrons libres
US9388916B2 (en) 2011-11-30 2016-07-12 Massachusetts Institute Of Technology Single-use, permanently-sealable microvalve
CN102691640B (zh) * 2012-05-29 2015-12-02 储琦 一种抽气系统及工艺
CN104100492B (zh) * 2014-07-17 2017-07-25 储继国 高真空电弧泵及其抽气机组
DE102015001440A1 (de) 2015-02-09 2016-08-11 Hans Wilfried Peter Koops Miniaturisierte Röntgenröhre mit Kathode und Anode aus Koops-GranMat und mit Verzögerer

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244969A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron orbiting tubes for ion measurement and gettering pumps
US3339106A (en) * 1965-05-28 1967-08-29 Canadian Patents Dev Ionization vacuum pump of the orbitron type having a porous annular grid electrode
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
WO1996039582A1 (fr) * 1995-06-06 1996-12-12 Color Planar Displays, Inc. Dispositif de maintien du vide pour enceintes a vide pousse
US6107745A (en) * 1997-06-27 2000-08-22 Pixtech S.A. Ion pumping of a flat microtip screen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371853A (en) * 1966-06-17 1968-03-05 Wisconsin Alumni Res Found Orbitron vacuum pump with getter vaporization by resistance heating
US3449660A (en) * 1966-08-10 1969-06-10 Wisconsin Alumni Res Found Orbitron electronic vacuum gauge having second anode for collecting scattered electrons

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244969A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron orbiting tubes for ion measurement and gettering pumps
US3339106A (en) * 1965-05-28 1967-08-29 Canadian Patents Dev Ionization vacuum pump of the orbitron type having a porous annular grid electrode
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
WO1996039582A1 (fr) * 1995-06-06 1996-12-12 Color Planar Displays, Inc. Dispositif de maintien du vide pour enceintes a vide pousse
US6107745A (en) * 1997-06-27 2000-08-22 Pixtech S.A. Ion pumping of a flat microtip screen

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
D. TEMPLE: "recent progress in field emitter array development for high performance applications", MATERIALS SCIENCE AND ENGINEERING, vol. r24, 1999, pages 185 - 239, XP002320281 *
HELY H ET AL: "ENTWICKLUNG EINER KLEINEN DIFFERENTIELL GEPUMPTEN FELDEMISSIONS-ELEKTRONENQUELLE DEVELOPMENT OF A SMALL DIFFERENTIALLY PUMPED FIELD-EMISSION SOURCE", OPTIK, WISSENSCHAFTLICHE VERLAG GMBH.STUTTGART, DE, vol. 49, no. 1, 1977, pages 127 - 132, XP008042918, ISSN: 0030-4026 *
R.BAPTIST ET AL.: "bayard-alpert vacuum gauge with microtips", JOURNAL VACUUM SCIENCE TECHNOLOGY, vol. b14, no. 3, 1996, XP002320282 *

Also Published As

Publication number Publication date
DE10241549A1 (de) 2004-03-18
DE10241549B4 (de) 2004-07-22
EP1403903A2 (fr) 2004-03-31

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