EP1396758A3 - Système de pompage différentiel et appareil d'exposition - Google Patents

Système de pompage différentiel et appareil d'exposition Download PDF

Info

Publication number
EP1396758A3
EP1396758A3 EP03255177A EP03255177A EP1396758A3 EP 1396758 A3 EP1396758 A3 EP 1396758A3 EP 03255177 A EP03255177 A EP 03255177A EP 03255177 A EP03255177 A EP 03255177A EP 1396758 A3 EP1396758 A3 EP 1396758A3
Authority
EP
European Patent Office
Prior art keywords
chamber
pumping system
differential pumping
pulsed light
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03255177A
Other languages
German (de)
English (en)
Other versions
EP1396758A2 (fr
EP1396758B1 (fr
Inventor
Nobuaki Canon Kabushiki Kaisha Ohgushi
Akira Canon Kabushiki Kaisha Miyake
Takayuki Canon Kabushiki Kaisha Hasegawa
Jun Canon Kabushiki Kaisha Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP1396758A2 publication Critical patent/EP1396758A2/fr
Publication of EP1396758A3 publication Critical patent/EP1396758A3/fr
Application granted granted Critical
Publication of EP1396758B1 publication Critical patent/EP1396758B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70041—Production of exposure light, i.e. light sources by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • G21K1/043—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP03255177A 2002-09-03 2003-08-21 Système de pompage différentiel et appareil d'exposition Expired - Lifetime EP1396758B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002258087 2002-09-03
JP2002258087 2002-09-03
JP2003107771A JP4235480B2 (ja) 2002-09-03 2003-04-11 差動排気システム及び露光装置
JP2003107771 2003-04-11

Publications (3)

Publication Number Publication Date
EP1396758A2 EP1396758A2 (fr) 2004-03-10
EP1396758A3 true EP1396758A3 (fr) 2008-09-24
EP1396758B1 EP1396758B1 (fr) 2010-10-20

Family

ID=31719903

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03255177A Expired - Lifetime EP1396758B1 (fr) 2002-09-03 2003-08-21 Système de pompage différentiel et appareil d'exposition

Country Status (4)

Country Link
US (1) US6891172B2 (fr)
EP (1) EP1396758B1 (fr)
JP (1) JP4235480B2 (fr)
DE (1) DE60334592D1 (fr)

Families Citing this family (27)

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US7598509B2 (en) * 2004-11-01 2009-10-06 Cymer, Inc. Laser produced plasma EUV light source
JP3703447B2 (ja) * 2002-09-06 2005-10-05 キヤノン株式会社 差動排気システム及び露光装置
US7109503B1 (en) * 2005-02-25 2006-09-19 Cymer, Inc. Systems for protecting internal components of an EUV light source from plasma-generated debris
DE102005015274B4 (de) * 2005-03-31 2012-02-23 Xtreme Technologies Gmbh Strahlungsquelle zur Erzeugung kurzwelliger Strahlung
US7397056B2 (en) * 2005-07-06 2008-07-08 Asml Netherlands B.V. Lithographic apparatus, contaminant trap, and device manufacturing method
US7453077B2 (en) * 2005-11-05 2008-11-18 Cymer, Inc. EUV light source
US7262423B2 (en) * 2005-12-02 2007-08-28 Asml Netherlands B.V. Radiation system and lithographic apparatus
JP4904809B2 (ja) * 2005-12-28 2012-03-28 ウシオ電機株式会社 極端紫外光光源装置
US20080090396A1 (en) * 2006-10-06 2008-04-17 Semiconductor Energy Laboratory Co., Ltd. Light exposure apparatus and method for making semiconductor device formed using the same
JP5386799B2 (ja) * 2007-07-06 2014-01-15 株式会社ニコン Ｅｕｖ光源、ｅｕｖ露光装置、ｅｕｖ光放射方法、ｅｕｖ露光方法および電子デバイスの製造方法
US8901521B2 (en) * 2007-08-23 2014-12-02 Asml Netherlands B.V. Module and method for producing extreme ultraviolet radiation
KR20100102682A (ko) * 2007-12-27 2010-09-24 에이에스엠엘 네델란즈 비.브이. 극자외 방사선 소스 및 극자외 방사선을 생성하는 방법
JP5495547B2 (ja) * 2008-12-25 2014-05-21 キヤノン株式会社 処理装置、およびデバイス製造方法
JP5534910B2 (ja) * 2009-04-23 2014-07-02 ギガフォトン株式会社 極端紫外光源装置
DE102011087851A1 (de) * 2010-12-22 2012-06-28 Carl Zeiss Smt Gmbh Verschlusseinrichtung für eine Lithographievorrichtung und Lithographievorrichtung
DE102011090083A1 (de) 2011-02-28 2012-08-30 Carl Zeiss Smt Gmbh Vorrichtung zur Unterdrückung von mit einem Lichtbündel längs eines Strahlengangs mitgeführten Festkörperanteilen
JP5544663B2 (ja) * 2011-05-09 2014-07-09 レーザーテック株式会社 Ｅｕｖマスク検査装置、ｅｕｖマスク検査方法
DE102011079450A1 (de) 2011-07-20 2013-01-24 Carl Zeiss Smt Gmbh Optische Anordnung mit Degradationsunterdrückung
DE102011089779B4 (de) 2011-12-23 2019-09-05 Carl Zeiss Smt Gmbh Vorrichtung zur Unterdrückung von mit einem Lichtbündel längs eines Strahlengangs mitgeführten Fremdkörperanteilen
JP6374493B2 (ja) * 2013-06-18 2018-08-15 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ方法
US9735534B2 (en) * 2013-12-17 2017-08-15 Kla-Tencor Corporation Sub 200nm laser pumped homonuclear excimer lasers
NL2015391A (en) * 2014-10-13 2016-08-30 Asml Netherlands Bv A Radiation Source.
US9426872B1 (en) * 2015-08-12 2016-08-23 Asml Netherlands B.V. System and method for controlling source laser firing in an LPP EUV light source
US10021773B2 (en) 2015-11-16 2018-07-10 Kla-Tencor Corporation Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
CN106842776B (zh) * 2017-04-04 2022-05-13 吴卫军 变径束光筒
US10877190B2 (en) * 2018-08-17 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Extreme ultraviolet radiation source
DE102021106289A1 (de) * 2020-05-07 2021-11-11 Taiwan Semiconductor Manufacturing Co., Ltd. System und verfahren zum ausführen von extrem-ultraviolett-photolithografieprozessen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0083399A2 (fr) * 1981-12-31 1983-07-13 International Business Machines Corporation Appareil pour exposer un microcircuit wafer aux radiations électromagnétiques
EP0373504A1 (fr) * 1988-12-08 1990-06-20 Fujitsu Limited Dispositif d'irradiation par radiation de synchrotron
US5343270A (en) * 1990-10-30 1994-08-30 Nikon Corporation Projection exposure apparatus
US20020090054A1 (en) * 2001-01-10 2002-07-11 Michael Sogard Apparatus and method for containing debris from laser plasma radiation sources
EP1349010A1 (fr) * 2002-03-28 2003-10-01 ASML Netherlands B.V. Appareil lithographique et méthode de fabrication d'un dispositif

Family Cites Families (12)

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US4837794A (en) * 1984-10-12 1989-06-06 Maxwell Laboratories Inc. Filter apparatus for use with an x-ray source
US4860328A (en) * 1987-08-25 1989-08-22 Hampshire Instruments, Inc. Target positioning for minimum debris
JP3127511B2 (ja) 1991-09-19 2001-01-29 株式会社日立製作所 露光装置および半導体装置の製造方法
JP2862477B2 (ja) 1993-06-29 1999-03-03 キヤノン株式会社 露光装置及び該露光装置を用いてデバイスを製造する方法
JP2691865B2 (ja) 1994-03-18 1997-12-17 株式会社ソルテック 極紫外線縮小投影露光装置
JPH08179514A (ja) 1994-12-22 1996-07-12 Canon Inc 露光装置および露光方法
US6815700B2 (en) * 1997-05-12 2004-11-09 Cymer, Inc. Plasma focus light source with improved pulse power system
IL122269A (en) * 1997-11-20 2001-03-19 Digident Ltd Scanning apparatus
US6459472B1 (en) * 1998-05-15 2002-10-01 Asml Netherlands B.V. Lithographic device
TW508980B (en) * 1999-12-23 2002-11-01 Koninkl Philips Electronics Nv Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit
EP1349008A1 (fr) 2002-03-28 2003-10-01 ASML Netherlands B.V. Appareil lithographique et méthode de fabrication d'un dispositif
JP3703447B2 (ja) * 2002-09-06 2005-10-05 キヤノン株式会社 差動排気システム及び露光装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0083399A2 (fr) * 1981-12-31 1983-07-13 International Business Machines Corporation Appareil pour exposer un microcircuit wafer aux radiations électromagnétiques
EP0373504A1 (fr) * 1988-12-08 1990-06-20 Fujitsu Limited Dispositif d'irradiation par radiation de synchrotron
US5343270A (en) * 1990-10-30 1994-08-30 Nikon Corporation Projection exposure apparatus
US20020090054A1 (en) * 2001-01-10 2002-07-11 Michael Sogard Apparatus and method for containing debris from laser plasma radiation sources
EP1349010A1 (fr) * 2002-03-28 2003-10-01 ASML Netherlands B.V. Appareil lithographique et méthode de fabrication d'un dispositif

Also Published As

Publication number Publication date
EP1396758A2 (fr) 2004-03-10
JP4235480B2 (ja) 2009-03-11
EP1396758B1 (fr) 2010-10-20
DE60334592D1 (de) 2010-12-02
JP2004153231A (ja) 2004-05-27
US20040046949A1 (en) 2004-03-11
US6891172B2 (en) 2005-05-10

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