EP1381824A1 - Vermessen von mikrogalvanisch hergestellten bauteilen durch schnittbauteile über lackstege - Google Patents
Vermessen von mikrogalvanisch hergestellten bauteilen durch schnittbauteile über lackstegeInfo
- Publication number
- EP1381824A1 EP1381824A1 EP02729860A EP02729860A EP1381824A1 EP 1381824 A1 EP1381824 A1 EP 1381824A1 EP 02729860 A EP02729860 A EP 02729860A EP 02729860 A EP02729860 A EP 02729860A EP 1381824 A1 EP1381824 A1 EP 1381824A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- component
- photoresist
- components
- micro
- interrupted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M65/00—Testing fuel-injection apparatus, e.g. testing injection timing ; Cleaning of fuel-injection apparatus
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M51/00—Fuel-injection apparatus characterised by being operated electrically
- F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
- F02M51/061—Injectors peculiar thereto with means directly operating the valve needle using electromagnetic operating means
- F02M51/0625—Injectors peculiar thereto with means directly operating the valve needle using electromagnetic operating means characterised by arrangement of mobile armatures
- F02M51/0664—Injectors peculiar thereto with means directly operating the valve needle using electromagnetic operating means characterised by arrangement of mobile armatures having a cylindrically or partly cylindrically shaped armature, e.g. entering the winding; having a plate-shaped or undulated armature entering the winding
- F02M51/0671—Injectors peculiar thereto with means directly operating the valve needle using electromagnetic operating means characterised by arrangement of mobile armatures having a cylindrically or partly cylindrically shaped armature, e.g. entering the winding; having a plate-shaped or undulated armature entering the winding the armature having an elongated valve body attached thereto
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/166—Selection of particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/168—Assembling; Disassembling; Manufacturing; Adjusting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
- F02M61/1853—Orifice plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/90—Selection of particular materials
- F02M2200/9038—Coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/90—Selection of particular materials
- F02M2200/9046—Multi-layered materials
Definitions
- the invention is based on a method for measuring micro-electroplated components according to the preamble of the main claim.
- the method according to the invention for measuring micro-electroplated components with the characterizing features of the main claim has the advantage that the concrete dimensions of the internal structure of the component can be checked and measured in a simple manner, so that information on the structure and contouring can be obtained in an advantageous manner of the component are quickly, safely and reliably accessible.
- photoresist areas or webs are selectively installed in only a few selected components, which are otherwise arranged, for example, in very large numbers on a wafer or panel, during microgalvanic production of the components, as a result of which the structure of these selected components is interrupted as desired. After the photoresist has been removed, the inner structures of the respective component are exposed in a simple manner and can therefore be measured very easily in a contactless and non-destructive manner.
- angles, voids, back spaces and offsets of the opening structure of the component and the layer thicknesses of the component can be measured without contact.
- identical or multi-layer components of identical construction can be produced completely by galvanic metal deposition together with the components having the interrupting photoresist regions without the desired opening structure. If the components are to be remeasured only on a random basis, it makes sense to set up a ratio of interrupted components to complete components of the same type on a wafer of 3 to 5: 1000. This is sufficient to make an assessment of the dimensional accuracy and the quality of the manufactured components on the entire wafer.
- FIG. 1 shows a partially illustrated injection valve with a micro-electroplated component in the form of a perforated disk
- FIG. 2 shows a micro-electroplated perforated disk in a plan view
- FIG. 3 shows the perforated disk shown in FIG. 2 with an inner photoresist area, so that the actual perforated disk is interrupted
- 4 shows a section of the interrupted perforated disk in the area of a lacquer edge according to arrows IV in FIG. 3
- FIG. 5 shows a schematic measurement and evaluation arrangement.
- Description of the embodiment 1 shows a valve in the form of an injection valve for fuel injection systems of mixed-compression spark-ignition internal combustion engines, which has a perforated disk 23, which represents an embodiment of a microelectrically manufactured component which it can be measured according to the invention.
- the perforated disk 23, which will be described in more detail below is not intended exclusively for use on injection valves; Similar components can rather z. B. in painting nozzles, inhalers, in inkjet printers or in freeze-drying processes, for spraying or injecting liquids, such as. As beverages, for atomizing medication.
- the perforated disks 23 produced by means of multilayer electroplating are generally suitable.
- the perforated disks 23 themselves, in turn, represent only one embodiment of a micro-electroplated component.
- micro-electroplated components with shapes, contours, proportions and uses completely different from those described can also be produced and measured in accordance with the invention.
- the injection valve partially shown in FIG. 1 has a tubular valve seat support 1, in which a longitudinal opening 3 is formed concentrically with a valve longitudinal axis 2.
- a longitudinal opening 3 is formed concentrically with a valve longitudinal axis 2.
- a z. B. tubular valve needle 5 arranged at its downstream end 6 with a z. B. spherical valve closing body 7, on the circumference of which, for example, five flats 8 are provided for the fuel to flow past, is firmly connected.
- the injection valve is actuated in a known manner, for example electromagnetically.
- a schematically indicated electromagnetic circuit with a magnet coil 10, an armature 11 and a core 12 is used for the axial movement of the valve needle 5 and thus for opening against the spring force of a return spring (not shown) or closing the injection valve.
- the armature 11 is connected to the valve closing body 7 opposite end of the valve needle 5 by z. B. a weld produced by a laser connected and aligned to the core 12.
- a guide opening 15 of a valve seat body 16 is used to guide the valve closing body 7 during the axial movement and is tightly mounted in the longitudinal opening 3 in the longitudinal opening 3 in the downstream end of the valve seat carrier 1 by welding.
- the valve seat body 16 is with a z. B. pot-shaped perforated disc carrier 21 concentrically and firmly connected, which thus rests at least with an outer ring portion 22 directly on the valve seat body 16.
- a micro-electroplated component, here the perforated disk 23, is arranged upstream of a through opening 20 in the perforated disk carrier 21 such that it completely covers the through opening 20.
- the valve seat body 16 and the perforated disk carrier 21 are connected, for example, by a circumferential and sealed first weld seam 25 formed by a laser.
- the perforated disk carrier 21 is connected to the wall of the longitudinal opening 3 in the valve seat carrier 1, for example by a circumferential and tight second weld seam 30.
- the perforated disk 23 is clamped, for example, in a cylindrical outlet opening 31 of the valve seat body 16 which follows downstream of a valve seat surface 29 which tapers in the shape of a truncated cone.
- the perforated disks 23 shown in FIGS. 2 to 4 are built up in several metallic functional levels by means of galvanic deposition (multilayer electroplating). Due to the deep lithographic, galvanotechnical production, there are special features in the contouring, such as. B.
- FIG. 2 shows an exemplary embodiment of a perforated disk 23 in a plan view, such as can be produced side by side on a wafer or blank, for example.
- the perforated disk 23 is designed as a flat, circular component which has several, for example three, axially successive functional levels or layers. Starting from a lower functional level 35, for example, two further functional levels 36 and 37 are built on top of it, wherein several functional levels can also be generated in a single electroplating step by means of so-called lateral overgrowth.
- the upper functional level 37 has a rectangular inlet opening 40 with the largest possible circumference. With z. B.
- outlet openings 42 are provided in the lower functional level 35.
- the outlet openings 42 lie in a projection of all functional levels 35, 36, 37 into one plane with an offset outside the inlet opening 40.
- the offset can be of different sizes in different directions.
- a channel 41 (cavity) is formed in the middle functional level 36, which represents a cavity.
- the channel 41 which has a circular contour, is of such a size that it completely covers the inlet opening 40 and the outlet openings 42 in the projection.
- FIGS. 3 and 4 show the perforated disk with the same contour as the perforated disk 23 shown in FIG. 2, but in an easily measurable form according to the invention as an interrupted perforated disk 23 x .
- the starting point for the process is a flat and stable carrier plate, which, for. B. of metal (titanium, copper), silicon, glass or ceramic.
- the carrier plate is optionally first electroplated with at least one auxiliary layer.
- This is, for example, an electroplating start layer (e.g. Cu), which is required for electrical conduction for later micro-electroplating.
- the electroplating start layer can also serve as a sacrificial layer in order to enable the perforated disk structures to be easily separated later by etching.
- the auxiliary layer typically CrCu or CrCuCr
- a photoresist photoresist
- the thickness of the photoresist should correspond to the thickness of the metal layer which is to be realized in the subsequent electroplating process, that is to say the thickness of the lower layer or functional plane 35 of the perforated disk 23.
- the metal structure to be realized should be inverted in the photoresist with the aid of a photolithographic mask be transmitted.
- One possibility is to expose the photoresist directly over the mask using UV exposure (UV depth lithography).
- the negative structure ultimately created in the photoresist for the later functional level of the perforated disk 23 is galvanically filled with metal (eg Ni, NiCo) (metal deposition). Due to the electroplating, the metal fits closely to the contour of the negative structure, so that the specified contours are reproduced in it in true-to-form form.
- the steps from the optional application of the auxiliary layer must be repeated in accordance with the number of desired layers.
- two functional levels are generated in one electroplating step (lateral overgrowth).
- For the layers of a perforated disk 23 can also different metals are used, but can only be used in a new electroplating step.
- the perforated disks 23 are separated. For this purpose, the sacrificial layer is etched away, as a result of which the perforated disks 23 lift off from the carrier plate.
- the electroplating starting layers are then removed by etching and the remaining photoresist is removed from the metal structures.
- micro-electroplated components such as perforated disks 23, are produced in very large numbers (e.g. up to> 1000 pieces) on a wafer or panel. After the perforated disks 23 have been separated from the carrier plate, they are available for their respective intended use. However, the inner opening structure of such a micro-electroplated component is then no longer accessible. For testing and measuring purposes, however, a very simple and inexpensive way of measuring the components should be created, at least on a random basis.
- Perforated disks 23, as shown in FIG. 2 have hitherto only been able to be checked and measured using destructive manufacturing processes. For this purpose, the components selected for re-measurement have to be embedded and ground in a complex manner. Grinding the completely manufactured components can disadvantageously produce burrs that can falsify the measurement result. There is also an increased risk of deformation of the components to be measured when embedding and grinding.
- photoresist areas 45 which are also used as lacquer bars or, are therefore deliberately used directly in the micro-galvanic production of the components, here the perforated disks 23, in only a few selected components 23 ⁇ on the wafer (for example in 3 to 5 of 1000 components) Paint cores can be characterized, built-in.
- the installation of targeted photoresist areas 45 is carried out from the start via specially shaped masks on the selected components 23 ', so that the metal structure to be built grows along this photoresist area 45 starting from the lower functional level 35.
- the selected components 23 ⁇ are thus produced in their overall structure in an interrupted manner (FIG. 3). After the photoresist region 45 has been removed, the inner structures of the respective component 23 'are exposed in a simple manner.
- the photoresist region 45 makes sense to lay the photoresist region 45 in such a way that it cuts the opening structures that are to be measured after production.
- the photoresist region 45 is installed in the perforated disk 23 ′ shown in FIG. 3 in such a way that it simultaneously intersects the functional levels 35, 36, 37 in the region of the inlet opening 40, the channel 41 and the outlet openings 42.
- FIG. 4 shows a section of the interrupted perforated disk 23 'in the region of a lacquer edge 46 according to arrows IV in FIG. 3. This view therefore does not illustrate a section in the sense of cutting through the perforated disk 23 ⁇ , but a side view of the perforated disk part produced in this way from the start ,
- the opening contour which is exposed in a simple manner, can be measured very easily and non-destructively.
- Typical dimensions of a perforated disk 23 that can be measured are, for example, the layer thickness a, the height h of the channel 41, the offset x of the inlet opening 40 and outlet openings 42, the so-called rear space z, that is to say the flow area of the channel 41 protruding beyond the outlet openings 42 , and the entrance flank angle 47 of the Inlet opening 40 and the exit flank angle 48 of the outlet openings 42.
- the components present after the separation are sorted into complete components 23 and interrupted components 23 '.
- the interrupted components 23 ' are fed to a measuring device 50.
- a schematic measurement and evaluation arrangement is indicated in FIG. 5.
- the contactless measurement of the components 23 ' which e.g. are clamped on a workpiece carrier, not shown, can be done with various measuring devices 50. Scanning electron microscopes, profile projectors with incident light, optical recording devices such as CCD cameras or infrared cameras, microscopes with path measuring systems or microfocus measuring systems with laser scanning (UBM) are suitable.
- the recorded measured values are processed and evaluated, for example, in an evaluation unit 51, whereby an assessment of the dimensional accuracy and the quality of the manufactured components 23 is possible.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Automation & Control Theory (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10118274 | 2001-04-12 | ||
DE10118274A DE10118274A1 (de) | 2001-04-12 | 2001-04-12 | Verfahren zum Vermessen von mikrogalvanisch hergestellten Bauteilen |
PCT/DE2002/001289 WO2002084212A1 (de) | 2001-04-12 | 2002-04-09 | Vermessen von mikrogalvanisch hergestellten bauteilen durch schnittbauteile über lackstege |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1381824A1 true EP1381824A1 (de) | 2004-01-21 |
EP1381824B1 EP1381824B1 (de) | 2005-04-06 |
Family
ID=7681351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02729860A Expired - Lifetime EP1381824B1 (de) | 2001-04-12 | 2002-04-09 | Vermessen von mikrogalvanisch hergestellten bauteilen durch schnittbauteile über lackstege |
Country Status (5)
Country | Link |
---|---|
US (1) | US6854347B2 (de) |
EP (1) | EP1381824B1 (de) |
JP (1) | JP4154240B2 (de) |
DE (2) | DE10118274A1 (de) |
WO (1) | WO2002084212A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2947190B1 (fr) * | 2009-06-25 | 2011-09-02 | Gloster Europe | Procede de controle d'un injecteur de brumisation |
KR101842646B1 (ko) * | 2016-11-29 | 2018-05-15 | 동명대학교산학협력단 | 은도금 작업의 관리시스템 |
DE102018203065A1 (de) * | 2018-03-01 | 2019-09-05 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Injektors |
CN111474822B (zh) * | 2020-05-19 | 2021-09-17 | 中国科学院光电技术研究所 | 一种基于三维光刻胶掩膜快速修正光学基底均匀性的方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1161821A1 (ru) * | 1984-01-02 | 1985-06-15 | Всесоюзный Ордена Трудового Красного Знамени Научно-Исследовательский Институт Горной Геомеханики И Маркшейдерского Дела | Устройство дл измерени деформаций |
DE19607288A1 (de) | 1995-03-29 | 1996-10-02 | Bosch Gmbh Robert | Verfahren zur Herstellung einer Lochscheibe |
-
2001
- 2001-04-12 DE DE10118274A patent/DE10118274A1/de not_active Withdrawn
-
2002
- 2002-04-09 DE DE50202720T patent/DE50202720D1/de not_active Expired - Fee Related
- 2002-04-09 EP EP02729860A patent/EP1381824B1/de not_active Expired - Lifetime
- 2002-04-09 WO PCT/DE2002/001289 patent/WO2002084212A1/de active IP Right Grant
- 2002-04-09 JP JP2002581920A patent/JP4154240B2/ja not_active Expired - Fee Related
- 2002-04-09 US US10/297,981 patent/US6854347B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO02084212A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP1381824B1 (de) | 2005-04-06 |
DE10118274A1 (de) | 2002-10-17 |
DE50202720D1 (de) | 2005-05-12 |
WO2002084212A1 (de) | 2002-10-24 |
US6854347B2 (en) | 2005-02-15 |
US20040026373A1 (en) | 2004-02-12 |
JP2004518827A (ja) | 2004-06-24 |
JP4154240B2 (ja) | 2008-09-24 |
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