EP1341279A3 - Dispositif photonique à grandes longueurs d'onde avec couche de puits quantique de GaAsSb - Google Patents

Dispositif photonique à grandes longueurs d'onde avec couche de puits quantique de GaAsSb Download PDF

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Publication number
EP1341279A3
EP1341279A3 EP02025120A EP02025120A EP1341279A3 EP 1341279 A3 EP1341279 A3 EP 1341279A3 EP 02025120 A EP02025120 A EP 02025120A EP 02025120 A EP02025120 A EP 02025120A EP 1341279 A3 EP1341279 A3 EP 1341279A3
Authority
EP
European Patent Office
Prior art keywords
well layer
quantum
long
layer material
photonic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02025120A
Other languages
German (de)
English (en)
Other versions
EP1341279A2 (fr
EP1341279B1 (fr
Inventor
Ying-Lan Chang
Scott W. Corzine
Russell D Dupuis
Min Soo Noh
Jae Hyun Ryou
Michael R.T. Tan
Ashish Tandon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
University of Texas System
Original Assignee
Agilent Technologies Inc
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Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of EP1341279A2 publication Critical patent/EP1341279A2/fr
Publication of EP1341279A3 publication Critical patent/EP1341279A3/fr
Application granted granted Critical
Publication of EP1341279B1 publication Critical patent/EP1341279B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3422—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers comprising type-II quantum wells or superlattices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34306—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
EP02025120A 2002-02-28 2002-11-08 Dispositif photonique à grandes longueurs d'onde avec couche de puits quantique de InGaAsSb Expired - Fee Related EP1341279B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87422 2002-02-28
US10/087,422 US6711195B2 (en) 2002-02-28 2002-02-28 Long-wavelength photonic device with GaAsSb quantum-well layer

Publications (3)

Publication Number Publication Date
EP1341279A2 EP1341279A2 (fr) 2003-09-03
EP1341279A3 true EP1341279A3 (fr) 2004-12-15
EP1341279B1 EP1341279B1 (fr) 2008-03-26

Family

ID=27733428

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02025120A Expired - Fee Related EP1341279B1 (fr) 2002-02-28 2002-11-08 Dispositif photonique à grandes longueurs d'onde avec couche de puits quantique de InGaAsSb

Country Status (4)

Country Link
US (1) US6711195B2 (fr)
EP (1) EP1341279B1 (fr)
JP (1) JP4663964B2 (fr)
DE (1) DE60225781T2 (fr)

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US6931044B2 (en) * 2003-02-18 2005-08-16 Agilent Technologies, Inc. Method and apparatus for improving temperature performance for GaAsSb/GaAs devices
US20050184303A1 (en) * 2004-02-25 2005-08-25 Ashish Tandon Strain compensating structure to reduce oxide-induced defects in semiconductor devices
US7781777B2 (en) * 2004-03-08 2010-08-24 Showa Denko K.K. Pn junction type group III nitride semiconductor light-emitting device
US7745814B2 (en) * 2004-12-09 2010-06-29 3M Innovative Properties Company Polychromatic LED's and related semiconductor devices
US7402831B2 (en) * 2004-12-09 2008-07-22 3M Innovative Properties Company Adapting short-wavelength LED's for polychromatic, broadband, or “white” emission
US7719015B2 (en) * 2004-12-09 2010-05-18 3M Innovative Properties Company Type II broadband or polychromatic LED's
US20070006801A1 (en) * 2005-07-09 2007-01-11 Stringfellow Gerald B Use of surfactants to control unintentional dopant in semiconductors
JP2007165501A (ja) * 2005-12-13 2007-06-28 Seiko Epson Corp 面発光型半導体レーザ及びその製造方法
DE102006035627A1 (de) * 2006-07-31 2008-02-07 Osram Opto Semiconductors Gmbh LED-Halbleiterkörper
DE102007025092A1 (de) * 2007-05-30 2008-12-04 Osram Opto Semiconductors Gmbh Lumineszenzdiodenchip
US8124959B2 (en) * 2007-06-28 2012-02-28 Intel Corporation High hole mobility semiconductor device
DE102007030062A1 (de) * 2007-06-29 2009-01-02 Osram Opto Semiconductors Gmbh Monolithisch integrierter Laserdiodenchip mit einem Aufbau als Mehrfachstrahl-Laserdiode
US20110096332A1 (en) * 2008-04-03 2011-04-28 Renato Bugge Method and device for gas analysis using an interferometric laser
JP5649157B2 (ja) * 2009-08-01 2015-01-07 住友電気工業株式会社 半導体素子およびその製造方法
FR2953335B1 (fr) * 2009-11-27 2012-04-27 Centre Nat Rech Scient Systeme d'emission laser, heterostructure et zone active a sous-puits quantiques couples, utilisation pour une emission laser a 1,55 micrometres
KR101248383B1 (ko) 2009-12-22 2013-03-28 우리이앤엘 주식회사 반도체 발광소자
JP2012080010A (ja) * 2010-10-05 2012-04-19 Sumitomo Electric Ind Ltd エピタキシャルウエハ、半導体素子、およびこれらの製造方法
JP5991018B2 (ja) * 2012-05-16 2016-09-14 ソニー株式会社 半導体装置
JP2012156562A (ja) * 2012-05-21 2012-08-16 Nec Corp 面発光レーザ
CN103077979A (zh) * 2013-01-07 2013-05-01 中国科学院上海微系统与信息技术研究所 一种GaAs衬底上扩展波长InGaAs探测器结构
KR102276422B1 (ko) * 2014-07-18 2021-07-12 삼성전자주식회사 투과형 고흡수 광 변조기 및 그 제조방법
CN106033866B (zh) 2015-03-20 2019-12-03 云晖科技有限公司 垂直腔面发射激光器
US10511143B2 (en) 2017-08-31 2019-12-17 Globalfoundries Inc. III-V lasers with on-chip integration
US11563307B2 (en) * 2018-10-01 2023-01-24 Mellanox Technologies, Ltd. High speed high bandwidth vertical-cavity surface-emitting laser
WO2021177591A1 (fr) * 2020-03-03 2021-09-10 한국과학기술원 Dispositif à microdiode électroluminescente ayant une meilleure efficacité dans une région à faible courant, son procédé de fabrication et dispositif d'affichage le comprenant
CN113345987B (zh) * 2021-04-16 2022-05-13 华灿光电(苏州）有限公司 红外发光二极管芯片及其制备方法

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EP0975073A1 (fr) * 1998-06-19 2000-01-26 Nec Corporation Laser à semi-conducteur
WO2001033677A2 (fr) * 1999-11-01 2001-05-10 Arizona Board Of Regents COUCHES ACTIVES DE TYPE I ET DE TYPE II, EN InGaNPAsSb, PSEUDOMORPHIQUES, A GRANDE LONGUEUR D'ONDE, DESTINEES A UN SYSTEME EN MATERIAU GAAS
EP1286440A2 (fr) * 2001-08-22 2003-02-26 The Furukawa Electric Co., Ltd. Laser à semiconducteur
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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
EP0975073A1 (fr) * 1998-06-19 2000-01-26 Nec Corporation Laser à semi-conducteur
WO2001033677A2 (fr) * 1999-11-01 2001-05-10 Arizona Board Of Regents COUCHES ACTIVES DE TYPE I ET DE TYPE II, EN InGaNPAsSb, PSEUDOMORPHIQUES, A GRANDE LONGUEUR D'ONDE, DESTINEES A UN SYSTEME EN MATERIAU GAAS
EP1286440A2 (fr) * 2001-08-22 2003-02-26 The Furukawa Electric Co., Ltd. Laser à semiconducteur
WO2003058779A1 (fr) * 2001-12-27 2003-07-17 Honeywell Internation Inc. Laser a cavite verticale et a emission par la surface exempt d'indium

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ANAN T ET AL: "Continuous-wave operation of 1.27-[mu]m GaAsSb/GaAs VCSELs", TECHNICAL DIGEST, 4TH PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 15-19 JULY 2001, vol. 2, 15 July 2001 (2001-07-15), PISCATAWAY, NJ, USA, pages 600 - 601, XP002298782, ISBN: 0-7803-6738-3 *
CHEN Z B ET AL: "Strain compensated GaAsP/GaAsSb/GaAs 1.3 /spl mu/m lasers grown on GaAs using MBE", CONFERENCE ON LASERS AND ELECTRO-OPTICS. (CLEO 2001). TECHNICAL DIGEST. POSTCONFERENCE EDITION. BALTIMORE, MD, MAY 6-11, 2001, TRENDS IN OPTICS AND PHOTONICS. (TOPS), US, WASHINGTON, WA : OSA, US, vol. VOL. 56, 6 May 2001 (2001-05-06), pages 209 - 209, XP010559743, ISBN: 1-55752-662-1 *
JOHNSON S R ET AL: "Long wavelength pseudomorphic InGaPAsSb type-I and type-II active layers grown on GaAs", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 18, no. 3, 10 October 1999 (1999-10-10), pages 1545 - 1548, XP002172052, ISSN: 1071-1023 *
YAMADA M ET AL: "LOW-THRESHOLD OPERATION OF 1.3-MUM GAASSB QUANTUM-WELL LASERS DIRECTLY GROWN ON GAAS SUBSTRATES", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 12, no. 7, July 2000 (2000-07-01), pages 774 - 776, XP000968667, ISSN: 1041-1135 *

Also Published As

Publication number Publication date
EP1341279A2 (fr) 2003-09-03
DE60225781D1 (de) 2008-05-08
US6711195B2 (en) 2004-03-23
JP4663964B2 (ja) 2011-04-06
JP2003258384A (ja) 2003-09-12
EP1341279B1 (fr) 2008-03-26
US20030161369A1 (en) 2003-08-28
DE60225781T2 (de) 2009-04-16

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