EP1334907B1 - Method and apparatus for low-cost packaging of bulk polysilicium - Google Patents

Method and apparatus for low-cost packaging of bulk polysilicium Download PDF

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Publication number
EP1334907B1
EP1334907B1 EP03001323A EP03001323A EP1334907B1 EP 1334907 B1 EP1334907 B1 EP 1334907B1 EP 03001323 A EP03001323 A EP 03001323A EP 03001323 A EP03001323 A EP 03001323A EP 1334907 B1 EP1334907 B1 EP 1334907B1
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EP
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Prior art keywords
plastic bag
polysilicon fragments
polysilicon
plastic
filled
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Expired - Lifetime
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EP03001323A
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German (de)
French (fr)
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EP1334907A1 (en
Inventor
Rainer Hölzlwimmer
Axel Frauenknecht
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Wacker Chemie AG
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Wacker Chemie AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/28—Controlling escape of air or dust from containers or receptacles during filling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
    • B65B1/32—Devices or methods for controlling or determining the quantity or quality or the material fed or filled by weighing

Definitions

  • the invention relates to a method and an apparatus for inexpensive, low contamination, packaging of broken polysilicon.
  • Polysilicon fracture is used, for example, using the Siemens process deposited from trichlorosilane and then free of contamination crushed. It is usually used in the solar or semiconductor industry for example for the production of solar cells or high-purity silicon wafers. For these applications is as little contaminated polysilicon breakage as possible desired, so the material is for transportation too packaged for users. However, this packaging is done Previously rich in contamination and labor intensive manual.
  • the object of the invention is to provide a method provide an inexpensive low-contamination packaging of high-purity polysilicon fragments.
  • the problem is solved by a method which thereby is marked that the polysilicon break automatically is packed.
  • an automatic packaging machine is used Device used according to claim 1.
  • the inventive To reduce the risk of contamination of the polysilicon break avoid all are in contact with the polysilicon fracture Parts of the device according to the invention reinforced with silicon or with a highly wear-resistant Plastic clad. It is also particularly preferred to minimize puncture of the packaging, the inventive To design the device so that the polysilicon break packed by two sealed plastic bags is.
  • a packaging machine particularly preferably comprises therefore after the welding device for the with polysilicon break filled plastic bag another filling device, comprising a plastic bag and one Welding device for this plastic bag, the one contains plastic bag filled with broken polysilicon.
  • a device according to the invention preferably also enables the polysilicon break is also transported fully automatically and therefore also includes means to promote polysilicon breakage such as a conveyor trough, a conveyor pipe, a conveyor belt, or a brush belt.
  • Means for portioning the polysilicon fraction are, for example a time-controlled conveyor trough or a level determination of a storage container or a weighing device for the polysilicon break.
  • the filling device preferably forms the plastic bag from a preferably high-purity plastic film, for example by means of a filling and bag tube.
  • the Device also one above the filling device for the Polysilicon and the welding device attached air suction device (Flowbox), which is a particle contamination of the Polysilicon breakage prevented.
  • Flowbox air suction device
  • Figure 1 represents a particularly preferred embodiment of the Invention represents:
  • the device according to the invention preferably subsequently comprises a further filling device on the conveyor belt (12) (15), which from a high-purity plastic film (16) Plastic bag (17) forms a welding device (18) for this plastic bag (17) after being welded to the and plastic bags filled with broken polysilicon (14) is filled, and a conveyor belt (19) for in one Double bag packaging (21) located polysilicon break (2).
  • the filling device (6) preferably comprises a deionizer (9), which is a static charge and thus a particle contamination the plastic film (7) prevented.
  • the conveyor belt (12) and / or the conveyor belt preferably runs (19) by a magnetic inductive detector (13) or (20).
  • the plastic film (7, 16) is preferably around a PE film.
  • the plastic film preferably has one Thickness of> 200 ⁇ m, particularly preferably a thickness of 290 up to 350 ⁇ m.
  • the device according to the invention enables low-contamination Packaging without human contact. It also enables a consistent quality of the packaged product.
  • the polysilicon break (2) is on a silicon armored Conveyor trough (1) transported in a weighing device (3), wherein the weighing device with the filling level of a funnel (4) Polysilicon break (2) regulates itself and the polysilicon break (2) emptied from the funnel (4) into a plastic bag (8), if there is a predetermined filling quantity of broken polysilicon (2) located in the funnel (4), the drop height of the silicon is minimized with baffles (5), so that an undesired Post-comminution of the silicon does not take place and the plastic bag (8) after filling by means of a Welding device (10) welded and the so obtained plastic bag (14) filled with broken polysilicon via a Conveyor belt (12) through a magnetic inductive detector (13) is carried out in order to detect possible metal contamination.
  • the plastic film (7) is preferred in the filling device (6) formed into a plastic bag (8) in that the film (7) is pulled over a shoulder.
  • the shoulder is, in order not to contaminate the film surface, again made of highly wear-resistant plastic.
  • the neighboring ones Ends of the plastic film formed into a tube are welded, the hose is covered by a Welding device welded shut so that a fillable from above high purity plastic bag is present, which is preferred during the filling with the polysilicon break through further continuous welding of those forming a tube Plastic film is extended.
  • the single bag is particularly preferred in another Packed in a plastic bag. This is done by a second plastic bag analogous to the first plastic bag is generated and the single bag is introduced into the second bag and is welded. Preferably one brakes mechanical-pneumatic product brake the case of the first Plastic bag when inserted in the second plastic bag.
  • the polysilicon fragments packaged in this way can be transported again via conveyor belts guided by a magnetic inductive detector in order to detect possible metal contamination.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Quality & Reliability (AREA)
  • Basic Packing Technique (AREA)
  • Containers And Plastic Fillers For Packaging (AREA)

Description

Die Erfindung betrifft ein Verfahren und eine Vorrichtung zur kostengünstigen, kontaminationsarmen, Verpackung von Polysiliciumbruch.The invention relates to a method and an apparatus for inexpensive, low contamination, packaging of broken polysilicon.

Polysiliciumbruch wird beispielsweise mittels Siemensverfahren aus Trichlorsilan abgeschieden und danach kontaminationsfrei zerkleinert. Es wird in der Regel in der Solar- oder Halbleiterindustrie beispielsweise für die Herstellung von Solarzellen oder Reinstsilizium-Wafern verwendet. Für diese Anwendungen ist ein möglichst wenig kontaminierter Polysiliciumbruch erwünscht, daher wird das Material für den Transport zu den Anwendern verpackt. Allerdings erfolgt diese Verpackung bisher kontaminationsreich und personalintensiv manuell.Polysilicon fracture is used, for example, using the Siemens process deposited from trichlorosilane and then free of contamination crushed. It is usually used in the solar or semiconductor industry for example for the production of solar cells or high-purity silicon wafers. For these applications is as little contaminated polysilicon breakage as possible desired, so the material is for transportation too packaged for users. However, this packaging is done Previously rich in contamination and labor intensive manual.

Aufgabe der Erfindung ist es, ein Verfahren zur Verfügung zu stellen, welches eine kostengünstige kontaminationsarme Verpackung von hochreinem Polysiliciumbruch ermöglicht.The object of the invention is to provide a method provide an inexpensive low-contamination packaging of high-purity polysilicon fragments.

Die Aufgabe wird gelöst durch ein Verfahren, welches dadurch gekennzeichnet ist, dass der Polysiliciumbruch automatisch verpackt wird.The problem is solved by a method which thereby is marked that the polysilicon break automatically is packed.

Als Vorrichtung zur Durchführung des Verfahrens sind prinzipiell alle im Stand der Technik bekannten automatischen Verpakkungsmaschinen für stückiges Bruchgut geeignet. In principle, are as devices for carrying out the method all automatic packaging machines known in the prior art suitable for broken pieces.

Als automatische Verpackungsmaschine wird erfindungsgemäß eine Vorrichtung gemäß dem Anspruch 1 eingesetzt.According to the invention, an automatic packaging machine is used Device used according to claim 1.

Um die Gefahr einer Verunreinigung des Polysiliciumbruchs zu vermeiden, sind alle mit dem Polysiliciumbruch in Kontakt kommenden Teile der erfindungsgemäßen Vorrichtung mit Silicium armiert oder mit einem hochverschleißfesten Kunststoff verkleidet. Zudem ist es besonders bevorzugt, um ein Durchstoßen der Verpackung zu minimieren, die erfindungsgemäße Vorrichtung derart auszugestalten, dass der Polysiliciumbruch durch zwei verschweißte Kunststoffbeutel verpackt ist.To reduce the risk of contamination of the polysilicon break avoid all are in contact with the polysilicon fracture Parts of the device according to the invention reinforced with silicon or with a highly wear-resistant Plastic clad. It is also particularly preferred to minimize puncture of the packaging, the inventive To design the device so that the polysilicon break packed by two sealed plastic bags is.

Besonders bevorzugt umfasst eine erfindungsgemäße Verpackungsmaschine daher nach der Verschweißvorrichtung für den mit Polysiliciumbruch gefüllten Kunststoffbeutel nochmals eine Abfüllvorrichtung, umfassend einen Kunststoffbeutel sowie eine Verschweißvorrichtung für diesen Kunststoffbeutel, der einen mit Polysiliciumbruch gefüllten Kunststoffbeutel enthält.A packaging machine according to the invention particularly preferably comprises therefore after the welding device for the with polysilicon break filled plastic bag another filling device, comprising a plastic bag and one Welding device for this plastic bag, the one contains plastic bag filled with broken polysilicon.

Bevorzugt ermöglicht eine erfindungsgemäße Vorrichtung zudem auch vollautomatisch ein Transportieren des Polysiliciumbruchs und umfasst daher zusätzlich Mittel zur Förderung des Polysiliciumbruchs wie beispielsweise eine Förderrinne, ein Förderrohr, ein Förderband, oder ein Bürstenband.A device according to the invention preferably also enables the polysilicon break is also transported fully automatically and therefore also includes means to promote polysilicon breakage such as a conveyor trough, a conveyor pipe, a conveyor belt, or a brush belt.

Mittel zur Portionierung des Polysiliciumbruchs sind beispielsweise eine zeitgesteuerte Förderrinne oder eine Füllhöhenbestimmung eines Vorratsbehälters oder eine Wägevorrichtung für den Polysiliciumbruch.Means for portioning the polysilicon fraction are, for example a time-controlled conveyor trough or a level determination of a storage container or a weighing device for the polysilicon break.

Vorzugsweise formt die Abfüllvorrichtung den Kunststoffbeutel aus einer vorzugsweise hochreinen Kunststofffolie, beispielsweise mittels eines Füll- und Beutelformrohres. The filling device preferably forms the plastic bag from a preferably high-purity plastic film, for example by means of a filling and bag tube.

In einer insbesonders bevorzugten Ausführungsform umfasst die Vorrichtung zudem eine oberhalb der Abfüllvorrichtung für das Polysilicium und der Verschweißvorrichtung angebrachte Luftabsaugvorrichtung (Flowbox), die eine Partikelverunreinigung des Polysiliciumbruchs verhindert.In a particularly preferred embodiment, the Device also one above the filling device for the Polysilicon and the welding device attached air suction device (Flowbox), which is a particle contamination of the Polysilicon breakage prevented.

Figur 1 stellt eine besonders bevorzugte Ausführungsform der Erfindung dar:Figure 1 represents a particularly preferred embodiment of the Invention represents:

Diese erfindungsgemäße Vorrichtung umfasst

  • eine Förderrinne (1) für den Polysiliciumbruch (2),
  • eine Wägevorrichtung (3) für den Polysiliciumbruch (2), mit einem Trichter (4),
  • Ablenkbleche (5),
  • eine Abfüllvorrichtung (6), welche aus einer hochreinen Kunststofffolie (7) einen Kunststoffbeutel (8) formt,
  • eine Verschweißvorrichtung (10) für den mit Polysiliciumbruch gefüllten Kunststoffbeutel (8),
  • eine oberhalb von Förderrinne (1), Wägevorrichtung (3), Abfüllvorrichtung (6) und Verschweißvorrichtung (10) angebrachte Flowbox (11), die eine Partikelverunreinigung des Polysiliciumbruchs (2) verhindert,
  • ein Förderband (12) für den verschweißten mit Polysiliciumbruch gefüllten Kunststoffbeutel (14),
wobei alle Bauteile, die mit dem Polysiliciumbruch (2) in Kontakt kommen, mit Silicium armiert oder mit einem hochverschleißfestem Kunststoff verkleidet sind.This device according to the invention comprises
  • a conveyor trough (1) for the polysilicon break (2),
  • a weighing device (3) for the polysilicon break (2), with a funnel (4),
  • Baffles (5),
  • a filling device (6) which forms a plastic bag (8) from a high-purity plastic film (7),
  • a welding device (10) for the plastic bag (8) filled with broken polysilicon,
  • a flow box (11) mounted above the conveyor trough (1), weighing device (3), filling device (6) and welding device (10), which prevents particle contamination of the polysilicon break (2),
  • a conveyor belt (12) for the welded plastic bag (14) filled with broken polysilicon,
All components that come into contact with the polysilicon break (2) are reinforced with silicon or clad with a highly wear-resistant plastic.

Vorzugsweise umfasst die erfindungsgemäße Vorrichtung im Anschluss an das Förderband (12) eine weitere Abfüllvorrichtung (15), welche aus einer hochreinen Kunststofffolie (16) einen Kunststoffbeutel (17) formt, eine Verschweißvorrichtung (18) für diesen Kunststoffbeutel (17), nachdem er mit dem verschweißten und mit Polysiliciumbruch gefüllten Kunststoffbeutel (14) gefüllt ist, sowie ein Förderband (19) für den in einer Doppelbeutelverpackung (21) befindlichen Polysiliciumbruch (2). The device according to the invention preferably subsequently comprises a further filling device on the conveyor belt (12) (15), which from a high-purity plastic film (16) Plastic bag (17) forms a welding device (18) for this plastic bag (17) after being welded to the and plastic bags filled with broken polysilicon (14) is filled, and a conveyor belt (19) for in one Double bag packaging (21) located polysilicon break (2).

Vorzugsweise umfasst die Abfüllvorrichtung (6), einen Deionisierer (9), der eine statische Aufladung und damit eine Partikelverunreinigung der Kunststofffolie (7) verhindert.The filling device (6) preferably comprises a deionizer (9), which is a static charge and thus a particle contamination the plastic film (7) prevented.

Vorzugsweise läuft das Förderband (12) und/oder das Förderband (19) durch einen magnetisch induktiven Detektor (13) bzw. (20).The conveyor belt (12) and / or the conveyor belt preferably runs (19) by a magnetic inductive detector (13) or (20).

Vorzugsweise handelt es sich bei der Kunststofffolie (7, 16) um eine PE-Folie. Die Kunststofffolie hat vorzugsweise eine Stärke von > 200µm, besonders bevorzugt eine Stärke von 290 bis 350 µm.The plastic film (7, 16) is preferably around a PE film. The plastic film preferably has one Thickness of> 200 µm, particularly preferably a thickness of 290 up to 350 µm.

Vorzugsweise handelt es sich bei dem hochverschleißfesten Kunststoff um Polyurethan.It is preferably the highly wear-resistant one Plastic around polyurethane.

Die erfindungsgemäße Vorrichtung ermöglicht eine kontaminationsarme Verpackung ohne Humankontakt. Sie ermöglicht ferner eine gleichbleibende Qualität des verpackten Produktes.The device according to the invention enables low-contamination Packaging without human contact. It also enables a consistent quality of the packaged product.

Die mit dem Verpackungsgut Polysiliciumbruch verbundenen besonderen Problemstellungen wie Kontaminationsfreiheit, Nachzerkleinerung, Staubentwicklung werden durch die genannten Ausgestaltungen in der erfindungsgemäßen Vorrichtung gelöst (Siliciumarmierung, Deionisierung der Luft, konstruktionsbedingte geringe Wurfhöhen, Absaugungen, Metalldetektoren usw.).The special ones associated with the polysilicon fragments Problems such as freedom from contamination, re-crushing, Dust generation are mentioned by the Embodiments solved in the device according to the invention (Silicon armouring, deionization of the air, design-related low throwing heights, suction, metal detectors, etc.).

Eine konkrete Ausführungsform des erfindungsgemäßen Verfahrens wird anhand der Vorrichtung gemäß Fig. 1 erläutert.A concrete embodiment of the method according to the invention is explained using the device according to FIG. 1.

Der Polysiliciumbruch (2) wird auf einer siliciumarmierten Förderrinne (1) in eine Wägevorrichtung (3) transportiert, wobei die Wägevorrichtung den Füllgrad eines Trichters (4) mit Polysiliciumbruch (2) regelt und sich der Polysiliciumbruch (2) aus dem Trichter (4) in einen Kunststoffbeutel (8) entleert, wenn sich eine vorgegebene Abfüllmenge Polysiliciumbruch (2) im Trichter (4) befindet, wobei die Fallhöhe des Siliciums mit Ablenkblechen (5) minimiert wird, so dass eine ungewünschte Nachzerkleinerung des Siliciums nicht stattfindet und der Kunststoffbeutel (8) nach dem Befüllen mittels einer Verschweißvorrichtung (10) verschweißt und der so erhaltene mit Polysiliciumbruch gefüllte Kunststoffbeutel (14) über ein Förderband (12) durch einen magnetisch induktiven Detektor (13) geführt wird, um mögliche Metallkontamination zu detektieren.The polysilicon break (2) is on a silicon armored Conveyor trough (1) transported in a weighing device (3), wherein the weighing device with the filling level of a funnel (4) Polysilicon break (2) regulates itself and the polysilicon break (2) emptied from the funnel (4) into a plastic bag (8), if there is a predetermined filling quantity of broken polysilicon (2) located in the funnel (4), the drop height of the silicon is minimized with baffles (5), so that an undesired Post-comminution of the silicon does not take place and the plastic bag (8) after filling by means of a Welding device (10) welded and the so obtained plastic bag (14) filled with broken polysilicon via a Conveyor belt (12) through a magnetic inductive detector (13) is carried out in order to detect possible metal contamination.

Die Kunststofffolie (7) wird in der Abfüllvorrichtung (6) vorzugsweise dadurch zu einem Kunststoffbeutel (8) geformt, dass die Folie (7) über eine sog. Schulter gezogen wird. Die Schulter ist, um die Folienoberfläche nicht zu kontaminieren, wiederum aus hochverschleißfestem Kunststoff ausgeführt. Die benachbarten Enden der zu einem Schlauch geformten Kunststofffolie werden verschweißt, der Schlauch wird unten durch eine Verschweißvorrichtung zugeschweißt, so dass ein von oben befüllbarer hochreiner Kunststoffbeutel vorliegt, der vorzugsweise während des Befüllens mit dem Polysiliciumbruch durch weiteres kontinuierliches Verschweißen der einen Schlauch bildenden Kunststofffolie verlängert wird.The plastic film (7) is preferred in the filling device (6) formed into a plastic bag (8) in that the film (7) is pulled over a shoulder. The shoulder is, in order not to contaminate the film surface, again made of highly wear-resistant plastic. The neighboring ones Ends of the plastic film formed into a tube are welded, the hose is covered by a Welding device welded shut so that a fillable from above high purity plastic bag is present, which is preferred during the filling with the polysilicon break through further continuous welding of those forming a tube Plastic film is extended.

Nachdem der Beutel befüllt ist, verschweißen vorzugsweise zwei Formbacken den Kunststoffbeutel.After the bag is filled, preferably two seal Mold bake the plastic bag.

Besonders bevorzugt wird der Einfachbeutel in einem weiteren Kunststoffbeutel verpackt. Dies erfolgt dadurch, dass ein zweiter Kunststoffbeutel analog dem ersten Kunststoffbeutel erzeugt wird und der Einfachbeutel in den zweiten Beutel eingebracht wird und verschweißt wird. Vorzugsweise bremst eine mechanisch-pneumatische Produktbremse den Fall des ersten Kunststoffbeutels beim Einbringen in den zweiten Kunststoffbeutel.The single bag is particularly preferred in another Packed in a plastic bag. This is done by a second plastic bag analogous to the first plastic bag is generated and the single bag is introduced into the second bag and is welded. Preferably one brakes mechanical-pneumatic product brake the case of the first Plastic bag when inserted in the second plastic bag.

Der derart verpackte Polysiliciumbruch kann nochmals über Förderbänder durch einen magnetisch induktiven Detektor geführt werden, um mögliche Metallkontamination zu detektieren.The polysilicon fragments packaged in this way can be transported again via conveyor belts guided by a magnetic inductive detector in order to detect possible metal contamination.

Claims (12)

  1. Apparatus for the cost-effective, fully automatic portioning, filling and packaging of high purity polysilicon fragments (2), comprising
    a means of portioning the polysilicon fragments (2), a filling device, comprising a plastic bag (8), a welding device (10) for the plastic bag filled with polysilicon fragments,
    characterized in that all the parts of the apparatus that come into contact with the polysilicon fragments are sheathed with silicon or are clad with a highly wear-resistant plastic.
  2. Apparatus according to Claim 1, characterized in that it additionally further comprises a means of conveying the polysilicon fragments.
  3. Apparatus according to Claim 1 or 2, characterized in that, after the welding device for the plastic bag filled with polysilicon fragments, it again contains a filling device, comprising a plastic bag, and a welding device for this plastic bag, containing a plastic bag filled with polysilicon fragments.
  4. Apparatus according to one or more of Claims 1 to 3, characterized in that it comprises an air extraction device fitted above the filling device for the polysilicon and the welding device.
  5. Apparatus according to Claim 2 for transporting, weighing, portioning, filling and packaging high purity polysilicon fragments, comprising
    a conveyor channel (1) for the polysilicon fragments (2),
    a weighing device (3) for the polysilicon fragments (2), which is connected to a hopper (4),
    deflection plates (5),
    a flowbox (11) which is fitted above the conveyor channel (1), weighing device (3), filling device (6) and welding device (10) and which prevents contamination of the polysilicon fragments (2) by particles,
    a conveyor belt (12) for the welded plastic bag (14) filled with polysilicon fragments,
    all the components which come into contact with the polysilicon fragments (2) being sheathed with silicon or clad with a highly wear-resistant plastic.
  6. Apparatus according to Claim 5, characterized in that it further comprises a further filling device (15) which forms a bag (17) from a highly pure plastic film (16), a welding device (18) for this plastic bag (17) after it has been filled with the welded plastic bag (14) filled with polysilicon fragments, and a conveyor belt (19).
  7. Apparatus according to one of Claims 2 to 6, characterized in that it comprises a conveyor device having a detector for a welded plastic bag filled with polysilicon fragments.
  8. Apparatus according to Claims 5 to 7, characterized in that the plastic film (7, 16) is a PE film.
  9. Apparatus according to one of Claims 1 to 8, characterized in that the highly wear-resistant plastic is polyurethane.
  10. Process for the low-contamination packaging of polysilicon fragments, characterized in that polysilicon fragments (2) are transported into a weighing device (3) on a silicon-sheathed conveyor channel (1), the weighing device controlling the filling level of a hopper (4) with polysilicon fragments (2) and the polysilicon fragments (2) being emptied from the hopper (4) into a plastic bag (8) when there is a predefined filling quantity of polysilicon fragments (2) in the hopper (4), all the parts of the apparatus that come into contact with the polysilicon fragments being sheathed with silicon or being clad with a highly wear-resistant plastic, and the drop height of the silicon being minimized by deflection plates (5), so that undesired recomminution of the silicon does not take place, and the plastic bag (8), after being filled, being welded by means of a welding device (10), and the plastic bag (14) obtained in this way and filled with polysilicon fragments being conveyed as a single bag by conveyor belts (12) through a magnetically inductive detector (13) in order to detect possible metal contamination.
  11. Process according to Claim 10, characterized in that the single bag is packaged in a further plastic bag.
  12. Process according to Claim 11, characterized in that the packaging in a further plastic bag is carried out by a second plastic bag (17) being produced in a manner analogous to the first plastic bag (8), and the single bag being introduced into the second plastic bag and welded.
EP03001323A 2002-02-01 2003-01-23 Method and apparatus for low-cost packaging of bulk polysilicium Expired - Lifetime EP1334907B1 (en)

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DE10204176 2002-02-01
DE10204176A DE10204176A1 (en) 2002-02-01 2002-02-01 Device and method for the automatic, low-contamination packaging of broken polysilicon

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EP1334907A1 EP1334907A1 (en) 2003-08-13
EP1334907B1 true EP1334907B1 (en) 2004-04-14

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WO2007115937A2 (en) 2006-04-06 2007-10-18 Wacker Chemie Ag Device and method for the flexible classification of polycrystalline silicon fragments
DE102007027110A1 (en) 2007-06-13 2008-12-18 Wacker Chemie Ag Method and apparatus for packaging polycrystalline silicon breakage
US8074905B2 (en) 2006-04-06 2011-12-13 Wacker Chemie Ag Method and device for comminuting and sorting polysilicon
DE102011003875A1 (en) 2011-02-09 2012-08-09 Wacker Chemie Ag Method and device for dosing and packaging polysilicon fragments as well as dosing and packaging unit
EP2559620A2 (en) 2011-08-18 2013-02-20 Wacker Chemie AG Method for packaging polycrystalline silicon
DE102012222249A1 (en) 2012-12-04 2014-06-05 Wacker Chemie Ag Packaging of polysilicon
DE102014217179A1 (en) 2014-08-28 2016-03-03 Wacker Chemie Ag Plastic substrates with silicon coating
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