JP7115920B2 - Cover and its use - Google Patents

Description

The present invention relates to a coating and its use.

High purity single crystal silicon wafers are required for the formation of high density integrated electronic circuits. A single crystal silicon wafer is usually obtained by cutting a single crystal silicon rod manufactured by the CZ method (Czochralski method). Polycrystalline silicon, also called polysilicon, is used as a raw material for manufacturing the single-crystal silicon rod derived from the CZ method. A polycrystalline silicon rod is formed by bringing a silane raw material gas such as trichlorosilane or monosilane into contact with a silicon core wire of heated polycrystalline silicon by a CVD (Chemical Vapor Deposition) method, thereby forming polycrystalline silicon on the surface of the silicon core wire. is produced by the so-called Siemens method, in which the vapor phase growth (precipitation) of The polycrystalline silicon rod is crushed and used as a raw material for the single crystal silicon rod derived from the CZ method.

The crushed polycrystalline silicon is packed in a resin packaging bag such as plastic for storage and transportation. The crushed polycrystalline silicon has sharp edges and may pierce the packaging bag during filling. Holes in the packaging bag cause contamination, making it impossible to maintain the high purity required for polycrystalline silicon products.

As a conventional technique for protecting a packaging bag during filling of polycrystalline silicon, Patent Document 1 discloses a technique for filling a suspended molded bag with polycrystalline silicon using a filling device. , discloses a suspended energy absorber made of a low-pollution, non-metallic material.

Japanese Patent Publication No. 2010-528955

The prior art described above is for protecting the packaging bag when the packaging bag is filled with polycrystalline silicon as a product. When polycrystalline silicon is filled with a device, a large amount of polycrystalline silicon is dropped from a higher place than when filled manually, so the packaging bag is more likely to be damaged. When the conventional energy absorber is used, the contact between the polycrystalline silicon and the inner wall of the packaging bag is alleviated. However, when the energy absorber movably suspended in the packaging bag and the polycrystalline silicon put into the bag come into intense contact with each other, plastic particles are generated, which is one of the causes of product contamination.

When polycrystalline silicon is filled into a packaging bag, fine powder is blown up by impact during filling and contact between polycrystalline silicon particles. If the floating fine powder adheres to the upper part of the inner wall of the packaging bag, it causes a sealing failure due to the powder getting caught when the packaging bag is heat-sealed after filling. Although the energy absorber according to the prior art is suspended inside the packaging bag, it does not tightly cover the inner wall of the packaging bag, and cannot prevent the soaring fine powder from adhering to the upper part of the inner wall of the packaging bag.

An object of one aspect of the present invention is to provide a covering for protecting a packaging bag during filling of polycrystalline silicon and preventing fine powder from adhering to the upper inner wall of the packaging bag.

In order to solve the above problems, a covering according to an aspect of the present invention is a covering for covering at least a partial region of an inner wall of a packaging bag that is continuous from an opening of the packaging bag for packaging polycrystalline silicon. In a state of being arranged in the opening, the tip of the upper portion of the cover is folded outward to be hooked to the upper end of the packaging bag, and the folding covers the peripheral edge of the opening. It is characterized in that the tip of the lower portion of the cover is folded outward.

The coating according to one aspect of the present invention preferably has a wall thickness of 100 μm or more.

The covering according to one aspect of the present invention is preferably made of the same material as the packaging bag.

The covering according to one aspect of the present invention is preferably an inflation tube.

In the covering according to one aspect of the present invention, the polycrystalline silicon is preferably crushed polycrystalline silicon rods.

In order to solve the above-described problems, a method for manufacturing a polycrystalline silicon packaging bag according to one aspect of the present invention is provided, in a state in which the covering according to one aspect of the present invention is attached to the packaging bag, through the opening. It is characterized by being filled with polycrystalline silicon.

Preferably, the method for manufacturing a polycrystalline silicon packaging bag according to an aspect of the present invention further includes removing the cover from the packaging bag before sealing the packaging bag.

In order to solve the above-described problems, a polycrystalline silicon filling method according to an aspect of the present invention is a state in which the covering according to an aspect of the present invention is attached to the packaging bag, and the polycrystalline silicon is packaged. It is characterized by manual filling of the bag.

ADVANTAGE OF THE INVENTION According to one aspect of the present invention, it is possible to provide a covering for protecting a packaging bag during filling of polycrystalline silicon and preventing fine powder from adhering to the upper inner wall of the packaging bag.

1 is a perspective view showing a covering according to Embodiment 1 of the present invention; FIG. Fig. 2 is an end view showing a state in which the covering according to Embodiment 1 of the present invention is attached to the packaging bag; (a) to (c) are enlarged views showing a part of FIG. A method of filling polycrystalline silicon using the covering according to Embodiment 1 of the present invention, comprising: attaching the covering (a), filling polycrystalline silicon (b), removing the covering (c), and packaging It is an end view showing (d) at the time of bag sealing. FIG. 5 is a perspective view showing a covering according to Embodiment 2 of the present invention;

[Embodiment 1]
One embodiment of the invention is described below with reference to FIGS.

(Overview)
As shown in FIGS. 1 and 2 , the covering 100 according to this embodiment includes an upper folded portion 1 , a lower folded portion 2 , and an outer wall surface 3 . A gap 1b is formed between the upper cuff 1 and the outer wall surface 3 of the cover 100. As shown in FIG. The cover 100 is formed in a cylindrical shape and has an opening 10 penetrating vertically. Here, regarding the "top" and "bottom" of the cover 100, when the cover 100 is attached to the packaging bag 200, the side facing the bottom of the packaging bag 200 is "bottom", and the opposite side is "up". defined as

As shown in FIG. 2, the covering 100 in this embodiment is used by being attached (arranged) to a packaging bag 200 for packaging a product 300 made of polycrystalline silicon. When the covering body 100 is attached to the packaging bag 200, the covering body 100 covers at least a part of the inner wall surface 202 of the packaging bag that extends from the opening 210 of the packaging bag. It is attached by hooking so as to cover the upper end (peripheral edge of packaging bag opening 210). The partial area preferably includes an area from the upper end 201 of the packaging bag to the sealing position 203 . The seal position 203 indicates a position where a seal is formed when the packaging bag 200 is sealed after the packaging bag 200 is filled with the products 300 . Here, the seal is preferably formed by crimping overlapping films in the packaging bag 200 . Examples of such a sealing method include heat sealing by heat welding. According to the above configuration, the inner wall surface 202 of the packaging bag is protected from the product 300 when the packaging bag 200 is filled with the product 300 . Also, fine powder 302 derived from the product 300 can be prevented from adhering to the seal position 203 on the inner wall surface 202 of the packaging bag.

(structure)
The cover 100 is formed using a packaging bag 200. As shown in FIG. Therefore, the material of the cover 100 is the same low-density polyethylene resin film as the packaging bag 200 . For example, the packaging bag 200 is cut in parallel with the opening so that the length from the opening to the bottom of the packaging bag 200 is approximately half, and the opened top and bottom ends are folded outward to form the cover 100. is formed. When the covering 100 is made of the same material as the packaging bag 200 , the scraping fine powder generated when the covering 100 and the product 300 come into contact is made of the same material as the packaging bag 200 . Therefore, it is possible to reduce the possibility of contamination by shaving fine powder made of materials other than the packaging bag 200, and to reduce the contamination of the product 300, which is polycrystalline silicon. The product 300 may be a crushed polycrystalline silicon rod. Since the crushed polycrystalline silicon rod has an irregular shape and many sharp protrusions, the contact between the product 300 and the inner wall surface 202 of the packaging bag tends to damage the packaging bag 200 . Therefore, there is a high possibility that the shaving fine powder is generated, and the effect of reducing contamination of the product 300 by forming the cover 100 from the same material as the packaging bag 200 is remarkable. The cover 100 may be formed using an inflation tube made of the same material as the packaging bag 200 . Moreover, the material of the cover 100 is not limited to this, and may be formed of, for example, a highly plastic plastic film. Specifically, films made of low-density polyethylene, polypropylene, polyvinyl chloride, or the like can be exemplified.

When formed from the packaging bag 200 , the covering 100 has the same wall thickness as the packaging bag 200 . Here, the wall thickness indicates the thickness of the film. With such a wall thickness, by attaching the cover 100 to the packaging bag 200, the portion where the cover 100 covers the packaging bag 200 is in the same state as when the packaging bag 200 is doubled. Therefore, the self-standing stability of the packaging bag 200 is improved. The wall thickness of the covering 100 in this embodiment is 250 μm, which is the same as the wall thickness of the packaging bag 200, but is not limited to this. It is preferable that the wall thickness of the cover 100 is at least such that the self-standing stability of the packaging bag 200 is improved. Specifically, the wall thickness of the covering 100 is preferably 100 μm or more, more preferably 150 μm or more, more preferably 200 μm or more, and more preferably 250 μm or more. Also, if the wall thickness is too thick, the covering body 100 lacks flexibility and becomes difficult to handle.

It is preferable that each of the upper folded portion 1 and the lower folded portion 2 is stably maintained in a folded state even after the folded portion is formed. Therefore, the width of each fold of the upper fold 1 and the lower fold 2 is preferably 0.5 cm or more, more preferably 0.8 cm or more, and particularly preferably 1 cm or more. The cover 100 is attached to the upper end of the packaging bag 200 by hooking it with the upper folded back 1 . In order to stably maintain the attached state in this manner, the folded width of the upper folded portion 1 is preferably 1.5 cm or more, more preferably 2 cm or more, more preferably 3 cm or more, and most preferably 4 cm or more.

The size of the cover 100 is formed according to the size of the packaging bag 200 . As shown in FIG. 2, it is preferable that the cover 100 be fitted in the opening 210 of the packaging bag. According to the above configuration, the cover 100 tightly covers the upper inner wall of the packaging bag 200 when the packaging bag 200 is filled with the product 300, and the product 300 contacts the upper inner wall surface 202 of the packaging bag 200. prevent scratches. By suppressing the generation of shaving fines resulting from damage to the packaging bag 200, the possibility of contamination of the product is reduced. It is preferable that the folded lower end 2 b of the cover 100 is above the upper surface 301 of the product and below the sealing position 203 . According to the above configuration, since the folded lower end 2b and the upper surface 301 of the product do not come into contact with each other, the cover 100 does not come into contact with the filled product 300 after filling, and the possibility of contamination of the product is reduced. Further, when the packaging bag 200 is filled with the product 300, the fine powder 302 originating from the product 300 rises up and adheres to the upper inner wall surface 202 of the packaging bag. This fine powder 302 causes a sealing failure due to powder entrapment when the packaging bag is sealed. If the cover 100 is of a size that fits well in the opening 210 of the packaging bag, the fine powder 302 adheres to the cover 100 and is prevented from adhering to the sealing position 203 on the inner wall surface 202 of the packaging bag. Therefore, a good seal can be obtained because the seal position 203 is free from scratches and adhesion of fine powder.

More preferably, the opening 10 of the cover 100 has a size that allows the hand holding the product 300 to pass therethrough. As a result, even when the covering 100 is attached to the packaging bag 200 and the product 300 is manually filled, the movement of the hand is not hindered.

(wrap around)
The upper fold 1 and the lower fold 2 will be described in detail with reference to FIG. The upper folded portion 1 is formed by folding outward the tip of the upper portion of the cover 100 before forming the upper folded portion 1 . The lower folded portion 2 is formed by folding outward the tip of the lower portion of the cover 100 before forming the lower folded portion 1 . As shown in FIG. 3, the upper folded portion 1 forms a gap 1b between itself and the outer wall surface 3, so that the cover 100 is hooked on the upper portion of the packaging bag 200 by the upper folded portion 1 and stably attached. be. In addition, since the upper end portion 1a of the cover 100 is disposed outside the packaging bag 200 by the upper folded portion 1, contact between the upper end portion 1a and the product 300 is suppressed. At the same time, since the packaging bag upper end 201 is covered with the cover 100, contact between the packaging bag upper end 201 and the product 300 is suppressed. Similarly, the lower cuff 2 prevents contact between the lower end 2a of the cover 100 and the product 300. FIG.

Since the upper end portion 1a, the lower end portion 2a, and the upper end portion 201 of the packaging bag are formed by being cut with a metal blade or the like, a small amount of metal contamination remains. Since the polycrystalline silicon product requires very high purity, unacceptable contamination may occur in the product 300 due to contact between the cut end with trace metal contamination remaining and the product 300 . According to the above configuration, as shown in (a) of FIG. 3, the cover 100 and the cut ends of the packaging bag 200 are arranged at positions that do not come into contact with the product, thereby suppressing the possibility of contamination of the product 300. be able to.

The upper fold 1 and the lower fold 2 in this embodiment are formed by one fold. However, the number of turns is not limited, and the number of turns may be 2, 3, 4, or 5 or more. Also, the number of folds may be different between the upper fold 1 and the lower fold 2 . By increasing the number of folds, it becomes easier to maintain the folded state, and the upper end portion 1a and/or the lower end portion 2a are less likely to come into contact with the product 300. FIG.

As shown in FIG. 3(b), the inner wall surface 202 of the packaging bag and the outer wall surface 3 of the cover 100 do not come into direct contact with each other due to the lower fold 2. As shown in FIG. When the cover 100 is formed, the outer wall surface exposed to the outside is more likely to be contaminated than the inner wall surface in a tubular plastic film or the like. According to the above configuration, the outer wall surface 3, which is likely to be contaminated, is less likely to come into contact with the inner wall surface 202 of the packaging bag. Therefore, it is possible to reduce the possibility of contamination of the packaging bag 200 and further reduce the possibility of contamination of the product 300 . In addition, when the cover 100 is formed of an inflation tube, the inner wall surface of the inflation tube is stored without being exposed to the outside until it is opened for use, so the possibility of contamination is low. Therefore, forming the cover 100 from an inflation tube is particularly preferable from the viewpoint of reducing the possibility of contamination of the product 300 .

Further, as shown in FIG. 3(c), the lower end of the cover 100 becomes a folded lower end 2b due to the lower folding 2, and is no longer a free end 2c. Since the free end 2c is likely to swing, the product 300 may contact the lower end 2a, which may be contaminated with metal, when the product 300 is filled. Moreover, when the product 300 is manually filled, the free end 2c comes into contact with the hand, resulting in poor operability. Since the lower end of the cover 100 becomes the lower folded end 2b due to the lower folding 2, the folded lower end 2b is less likely to swing than the free end 2c, and the possibility of contact with the product or hands is reduced. That is, the lower cuff 2 reduces the possibility of contamination of the product 300 and improves operability during manual filling.

(how to use)
A method of using the covering 100 will be described below with reference to FIG. As shown in (a) of FIG. 4 , the covering 100 is attached to the packaging bag 200 before the packaging bag 200 is filled with the product 300 . The cover 100 is attached to the packaging bag 200 by hooking the upper cuff 1 so as to cover the upper end of the packaging bag 200 . Thereby, the packaging bag 400 including the cover 100 and the packaging bag 200 is formed.

Next, as shown in (b) of FIG. 4, the packaging bag 400 is manually filled with the product 300 . Manual filling reduces contact between the product 300 and the packaging bag 400 , reducing the possibility of damage to the packaging bag 400 and contamination of the product 300 by shavings and the like originating from the packaging bag 400 .

The packaging bag 400 including the cover 100 is configured so that the fine powder 302 generated when the product 300 is filled does not adhere to the seal position 203 on the inner wall surface 202 of the packaging bag. Therefore, the sealing failure of the packaging bag 200 caused by the entrapment of powder when the packaging bag 200 is sealed is reduced.

Then, as shown in (c) of FIG. 4, after the product 300 is filled, the cover 100 is removed from the packaging bag 200 before the packaging bag 200 is sealed. Thereafter, as shown in (d) of FIG. 4, the packaging bag 200 is sealed by heat sealing or the like.

The covering 100 may be used only once and discarded, or may be used repeatedly. Since the cover 100 is made of a relatively inexpensive material such as a plastic film, it can be easily replaced.

[Embodiment 2]
Another embodiment of the invention is described below with reference to FIG. For convenience of description, members having the same functions as those of the members described in the above embodiments are denoted by the same reference numerals, and description thereof will not be repeated.

A covering 500 according to the present embodiment differs from that of the first embodiment in that it is made of hard reinforced plastic.

The material is not limited to reinforced plastic. It is preferable to use a material having such rigidity that the shape of the covering body 500 is not changed by its own weight after the structure of the covering body 500 is formed. Moreover, it is preferable that the packaging bag 200 is light enough to prevent the packaging bag 200 from collapsing when the cover 500 is attached to the packaging bag 200 . Specific examples of preferred materials include fiber-reinforced plastics, high-density polyethylene, and polyethylene terephthalate.

According to the above configuration, the packaging bag 200 fitted with the cover 500 can obtain high self-standing stability. Moreover, since the shape of the opening 510 is fixed, the packaging bag 200 can be stably filled with the product 300 . Furthermore, the strength of the cover 500 is improved, and the packaging bag 200 can be protected from contact with the product 300 more reliably.

In this embodiment, the shape having these folds is formed during manufacture.

Although the opening 510 is formed in a substantially rectangular shape, it is not limited to this, and may be formed in a substantially polygonal shape other than a substantially rectangular shape, or in a substantially circular shape.

〔summary〕
In order to solve the above problems, the covering 100 according to aspect 1 of the present invention is a packaging bag 200 for packaging polycrystalline silicon. A cover 100 for covering a part of the area, wherein the tip of the upper part of the cover 100 is folded outward (upper fold 1) when placed in the opening 210 so that the packaging bag 200 and the periphery of the opening 210 is covered by the folded back (upper folded back 1), and the tip of the lower part of the cover 100 is folded outward (lower folded back 2). is characterized by

According to the above configuration, by covering a certain area of the upper part of the inner wall surface 202 of the polycrystalline silicon packaging bag, contact between the product 300 and the inner wall surface 202 of the packaging bag is prevented when the product 300 made of polycrystalline silicon is filled. Also, the fine powder 302 generated when the product 300 is filled is prevented from adhering to the seal position 203 on the inner wall surface 202 of the packaging bag, and defects caused by powder entrapment during sealing can be reduced. The cover 100 can be hooked to the upper end of the packaging bag 200 by the upper fold 1, and the upper end 1a, which may be contaminated, does not come into contact with the product 300. As shown in FIG. The lower cuff 2 ensures that the potentially contaminated lower edge 2a also does not come into contact with the product 300. FIG. In addition, the outer wall surface 3 of the covering 100, which may be contaminated, is less likely to come into contact with the inner wall surface 202 of the packaging bag. Furthermore, the lower end of the cover 100 is not the free end 2c, so that it is less likely to get caught on the hand when filling the product 300 manually.

The coating 100 according to aspect 2 of the present invention preferably has a wall thickness of 100 μm or more. According to the above configuration, since the covering 100 has a wall thickness equal to or greater than a certain value, the self-supporting stability of the packaging bag 200 when attached to the packaging bag 200 is enhanced.

It is preferable that the covering 100 according to the third aspect of the present invention is made of the same material as the packaging bag 200 . According to the above configuration, the possibility of contamination with contaminants derived from materials other than the material of the packaging bag 200 can be reduced.

The covering 100 according to aspect 4 of the present invention is preferably an inflation tube. After the inflation tube is manufactured in a tubular shape, it is subjected to gusset processing on both sides, and then flattened by being compressed and stored. When using an inflation tube, the cover 100 can be formed after opening it to form a tube-like object. According to the above configuration, the inner wall surface of the inflation tube is not exposed to the outside air until it is opened when the cover 100 is formed, and the inner wall surface is kept clean. Therefore, contamination of the product 300 can be prevented.

In the coating 100 according to aspect 5 of the present invention, the polycrystalline silicon (product 300) is preferably crushed polycrystalline silicon rods. The crushed polycrystalline silicon rod has an irregular shape and many sharp protrusions. Therefore, when the product 300 is filled, the packaging bag 200 is easily damaged due to contact between the product 300 and the inner wall of the packaging bag. In addition, due to the sharp protrusions, fine powder 302 is particularly likely to be generated due to contact between polycrystalline silicon during filling of product 300 . According to the above configuration, the effect of protecting the inner wall surface 202 of the packaging bag and the effect of preventing adhesion of the fine powder 302 to the inner wall surface 202 of the packaging bag by the cover 100 can be exhibited more effectively.

In order to solve the above problems, a method for manufacturing a polycrystalline silicon packaging bag according to aspect 6 of the present invention is a state in which the covering according to one aspect of the present invention is attached to the packaging bag, and is removed from the opening through the opening. It is characterized by being filled with polycrystalline silicon. According to the above configuration, the packaging bag 200 can be protected by the cover 100 when the product 300 is filled.

The method for manufacturing a polycrystalline silicon packaging bag according to aspect 7 of the present invention preferably further includes the step of removing the covering from the packaging bag before sealing the packaging bag. According to the above configuration, the fine powder 302 generated when the product 300 is filled is prevented from adhering to the sealing position 203 on the inner wall surface 202 of the packaging bag, and defects due to powder entrapment when sealing the packaging bag 200 can be reduced. .

In order to solve the above-described problems, a polycrystalline silicon filling method according to aspect 8 of the present invention is a state in which the covering according to one aspect of the present invention is attached to the packaging bag, and the polycrystalline silicon is packaged. It is characterized by manual filling of the bag. According to the above configuration, even if the packaging bag 200 is filled with the product 300, even if a hand is inserted into the packaging bag opening 210, the lower end of the cover 100 is folded outward to form the folded lower end 2b. It is possible to suppress catching on.

The present invention is not limited to the above-described embodiments, but can be modified in various ways within the scope of the claims, and can be obtained by appropriately combining technical means disclosed in different embodiments. is also included in the technical scope of the present invention.

1,501 upper folded portion 1a upper end portion 1b void 2,502 lower folded portion 2a lower end portion 2b folded lower end portion 2c free end 3 outer wall surface 10,510 opening portion 100,500 covering body 200,400 packaging bag 201 packaging bag upper end portion 202 packaging bag Inner wall surface 203 Seal position 210 Packaging bag opening 300 Product 301 Upper surface of product 302 Fine powder

Claims (8)

A covering for covering at least a partial region of the inner wall of the packaging bag that is connected to the opening of the packaging bag for packaging polycrystalline silicon,
In the state of being arranged in the opening, the tip of the upper part of the cover is folded outward and hooked to the upper end of the packaging bag, and the folded back covers the periphery of the opening, A cover, wherein the tip of the lower part of the cover is folded outward. 2. The covering according to claim 1, characterized in that the wall thickness is between 100 [mu]m and 1000 [mu]m. 3. The cover according to claim 1, wherein the cover is made of the same material as the packaging bag. Cover according to any one of claims 1 to 3, characterized in that it is formed by an inflation tube. The covering according to any one of claims 1 to 4, characterized in that said polycrystalline silicon is crushed polycrystalline silicon rods. A method for manufacturing a polycrystalline silicon packaging bag, wherein the packaging bag is filled with the polycrystalline silicon in a state in which the covering according to any one of claims 1 to 5 is attached to the packaging bag. . 7. The method of manufacturing a polycrystalline silicon packaging bag according to claim 6, further comprising the step of removing said cover from said packaging bag before sealing said packaging bag. The polycrystalline silicon is manually filled into the packaging bag with the covering according to any one of claims 1 to 5 attached to the packaging bag. filling method.

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