JP5514048B2 - Polysilicon packaging - Google Patents

Description

The present invention relates to a novel package of polysilicon used as a raw material for manufacturing semiconductors.
More specifically, a new polysilicon packaging that can reliably prevent rubbing between the surface of the polysilicon and the inner surface of the film due to vibration during transportation, and effectively prevent the generation of resin powder, that is, contamination of the polysilicon. The present invention relates to a novel package of polysilicon that can prevent the above-described problem at a higher level.

  High-purity rod-like polysilicon is produced mainly by the Siemens method, and is used as a raw material for producing a silicon single crystal used as a material for semiconductor devices and the like. The Siemens method is a method for producing polysilicon by vapor phase growth, in which a high-purity silicon seed is produced by energizing and heating a high-purity silicon seed and reacting a silane-based gas with hydrogen on the seed surface. It is.

Polysilicon produced by the Siemens method has a rod-like shape and is packed and packed in the form of a cut rod cut into a predetermined length or a crushed lump (hereinafter referred to as nugget). And transported to a single crystal manufacturing plant.
The diameter of the cut rod is generally about 100 to 150 mm, and the length is generally about 50 to 400 mm. The nugget is generally about 5 to 120 mm in equivalent diameter.

The polysilicon is subjected to an etching process for removing impurities on the surface, if necessary, and then packed with a polyethylene film to prevent contamination, and further packed in a transport case. Is done.
Conventionally, it has been pointed out that in the transportation, the polyethylene film is scraped by rubbing between the polysilicon of the contents and the polyethylene film, and the polysilicon is contaminated by the generated polyethylene powder. Some countermeasures have already been proposed for such problems.

For example, it has an inner bag that contains massive polysilicon and an outer bag that accommodates the inner basket, and the outer bag is sealed with the massive polysilicon contained in the inner basket, and the inner basket is interposed. A container has been proposed that prevents the polysilicon packaging bag from being damaged by preventing the contact between the polysilicon and the polysilicon packaging bag (see Patent Document 1).
In addition, by storing polysilicon in a packaging bag made of polyethylene film, sealing the bag opening in a vacuumed state in the bag, by firmly fixing the polysilicon as the contents to the packaging bag, A method for eliminating rubbing and preventing the generation of resin powder has also been proposed (see Patent Document 2).

Japanese Utility Model Publication No. 5-94187 Japanese Patent No. 3496021

However, in the storage container described in Patent Document 1, although the bag can be prevented from being broken by interposing the inner basket, scraping of the inner basket is generated due to rubbing between the bulk polysilicon and the inner basket, and the generated resin scrap causes Polysilicon may be contaminated.
In addition, the method described in Patent Document 2 has a cut corner or nugget that is a content having sharp corners, which can completely prevent pinholes from opening or tearing. It is difficult to avoid.

In such a case, in the method of tightly fixing by vacuum, there is a concern that the inside of the packaging bag cannot be maintained in a vacuum state, and the packaging bag and polysilicon cannot be tightly fixed. Also, when the degree of vacuum in the film bag is high, if pinholes or tears occur during transportation, the inside is under reduced pressure, so outside air may be sucked into the bag and contaminate the polysilicon. In order to prevent the bag from being torn, it is sufficient to increase the thickness of the packaging bag to maintain the strength. The
It is a problem to be solved by the present invention to provide a novel package that solves these problems. Accordingly, the object of the present invention is to provide a novel package that solves the above problems in the packaging of polysilicon. There is.

The packaging body of the present invention, which is a means for solving the above-mentioned problems, is characterized in that a packaging bag containing polysilicon is fastened with a fastening film from the outside and the packaging bag is tightly fixed to the polysilicon surface. Is.
In the present invention, as a result of intensive studies by the present inventors to solve the above-mentioned problems, the inside of the packaging bag is secured by fastening the packaging bag containing polysilicon from the outside using a fastening film. By finding that a packaging body can be obtained that can tightly fix the packaging bag to the polysilicon surface even under atmospheric pressure, and can reliably prevent rubbing between the polysilicon and the packaging bag due to vibration during transportation. Is.

Moreover, according to the said package, even if a pinhole or a tear arises in a packaging bag, it can maintain a contact | adherence fixed state, Furthermore, since the inside of a packaging bag is atmospheric pressure, external air is sucked in in a bag. Thus, the present inventors have found that the contamination of polysilicon can be prevented to a higher degree and have completed the present invention.
That is, according to the present invention, there is provided a polysilicon packaging body characterized in that a packaging bag containing polysilicon is fastened with a fastening film from the outside and the packaging bag is tightly fixed to the polysilicon surface. Is done.

  And, in the packaging body of the present invention, when cutting the fastening film, the cutting tool and the packaging body are in direct contact with each other to prevent the packaging body from being damaged and to improve workability. It is preferable that an inclusion for separating the packaging bag and the fastening film is present at least partly between the packaging bag and the fastening film.

Further, when the content polysilicon is a cut rod, a fastening film is provided so as to wind at least a part of the body of the cut rod, and the inclusion goes directly to the circumference of the peripheral wall of the cut rod. It is constituted by a plate-like body or sheet arranged in a direction, and is provided so that the width of the fastening film is the same as that of the fastening film or a length that is exposed from the fastening film exists. This is preferable.
Furthermore, it is preferable that the tightening film is a stretch film or a shrink film because the polysilicon and the packaging bag can be more firmly adhered and fixed.

According to the packaging body of the present invention, since the packaging bag containing the polysilicon is fastened by the fastening film from the outside and the packaging bag is tightly fixed to the polysilicon surface, The surface and the inner surface of the film can be reliably prevented from being rubbed, and the generation of resin powder can be effectively prevented.
Further, in the present invention, when an inclusion for separating the packaging bag and the fastening film is present in a part between the polysilicon packaging bag and the fastening film, the polysilicon packaging bag is taken out from the fastening film. At this time, it is possible to reduce a risk that a blade for cutting the fastening film directly contacts the polysilicon to contaminate the polysilicon.

The front view of the package of this invention in case the inclusion between a packaging bag and a fastening film is plate shape. The side view of the package of FIG. The front view of the package of this invention in case the inclusion between a packaging bag and a fastening film is a sheet form. The side view of the package of FIG.

1 Polysilicon Cut Rod 2 Packaging Bag 3 Tightening Film 4 Inclusion (Plate)
5 Inclusions (sheet form)

In the present invention, the polysilicon to be packaged is polysilicon that has been vapor-grown by the Siemens method, and the form of the cut rod, the form of the nugget, and the like are not particularly limited. Also, the size is not particularly limited, but the size described above is preferably handled.
The polysilicon may or may not be etched or washed. However, the polysilicon is a package for preventing contamination of polysilicon requiring high purity. The effect of the present invention is more exhibited in the case of the one.

Hereinafter, the packaging body of the present invention will be described with reference to the accompanying drawings showing an embodiment of the case where a polysilicon cut rod is used as a packaging object.
The packaging body of the present invention, as shown in FIGS. 1 to 4, fastens the packaging bag 2 containing the polysilicon 1 with the fastening film 3 from the outside to tightly fix the packaging bag to the polysilicon surface. It is characterized by that.

The packaging bag 2 for storing the polysilicon is in direct contact with the cut rod 1, and in order to avoid mixing of impurities, the packaging bag made of a resin film with no additive is preferred. As the packaging bag made of the additive-free resin film, a packaging bag made of a polyethylene film, which is a general-purpose resin and easily available, is preferable.
In addition, the shape of the packaging bag is not particularly limited as long as the target polysilicon can be accommodated and sealed. For example, a gusset bag conventionally used for packaging polysilicon is generally used. Further, when the polysilicon is a cut rod, it is preferable to use a cylindrical packaging bag having a size close to the diameter of the cut rod because it is easy to work when tightening with the tightening film 3 described later.

  In the present invention, the fastening film 3 is for tightly fixing the polysilicon surface and the packaging bag by fastening the cut rod 2 from the outside of the packaging bag. Therefore, it is preferable to use a film that can maintain tension during transportation. Examples of the film having such characteristics include a stretch film and a shrink film.

As the stretch film, a known film is used without particular limitation. Moreover, as a material of a stretch film, polyvinyl chloride, polyethylene, etc. are common.
Stretch film uses the property that when stretched film is stretched, it tries to shrink to return to the state before stretching, so it is wound when tightening the cut rod using it. In that case, the film is wound a plurality of times from the outside of the polysilicon packaging bag in a slightly stretched state. This multiple winding is performed so as to maintain a strength capable of withstanding vibration.

In that case, as described later, it is preferable to wind 50% or more, preferably 80% or more of the entire length of the cut rod with the tightening film, so that a wide film corresponding to the width is used. Is preferred.
In addition, instead of such a wide film, a narrow stretch film can also be used. In this case, while overlapping a part of the narrow film so that a gait (leg bond) or bandage is wrapped around the foot Wound from one end to the other end of a predetermined width (50% or more of the total length).

The end of the stretch film after being wound in this way does not require special treatment.
In other words, many stretch films usually have self-adhesive properties, and the stretch film and the stretch film adhere to each other by wrapping multiple times, so no special treatment is required, but the ends of the stretch film are heat-sealed May be adhered by.

As the shrink film, a known film can be used without any particular limitation. For example, there are polyvinyl chloride, polyethylene, polypropylene, multilayer polyolefin, polystyrene, polyethylene terephthalate, and the like. Among them, a material having high sealing strength, a large shrinkage rate, and elasticity is preferable. However, a material having a heat quantity required for contraction lower than the melting point of the polysilicon packaging bag is selected.
For example, when a polysilicon cut rod is fastened using a shrink film, the cut rod packaging bag cylinder is inserted after inserting the cut rod as it is in the packaging bag into the tubular shrink film. Shrink on the circumference of the peripheral wall.

In the present invention, the cut rod 1 is inserted into the packaging bag 2 from the opening, and the opening is sealed by heat sealing or the like, whereby the cut rod 1 is accommodated in the packaging bag 2.
At the time of the sealing, it is desirable to adjust the amount of air in the packaging bag so as to decrease in advance. That is, if there is too much air in the sealed bag, the surface of the polysilicon cut rod and the packaging bag are fixed when the surface of the cut rod and the packaging bag are firmly fixed by fastening with the fastening film 3. There is air between them, and it cannot be fixed firmly. Therefore, the amount of air in the packaging bag is preferably as small as possible.
As a method of reducing the air, after inserting the polysilicon cut rod into the packaging bag, the air may be pushed out by pushing the packaging bag from the outside, or a nozzle is inserted into the packaging bag to remove the air in the packaging bag. You may suck it out. In the latter case, when the inside of the packaging bag is depressurized as a result of sucking out air, it is preferable to return the inside of the packaging bag to atmospheric pressure before sealing.

  In the present invention, the winding method for fastening the packaging bag is preferably a method of winding the cut rod 1 from the outside of the packaging bag 2 with the tightening film 3. In particular, when the polysilicon is a cut rod, as shown in the figure, the periphery of the body of the cut rod is wound around with the tightening film 3, so that the surface of the cut rod and the packaging bag can be more firmly adhered and fixed. This is preferable. Further, in this case, the tightening film 3 may be wound around a part of the cut rod 1, but in order to perform the fastening more reliably, 50% or more of the total length of the cut rod 1, preferably, It is preferable to perform fastening so that 80% or more is wound with the fastening film 3.

In the present invention, the packaging bag can tightly fix the polysilicon surface and the packaging bag by fastening the cut rod 2 from the outside of the packaging bag with the fastening film 3, thereby achieving the intended purpose. can do.
On the other hand, it is necessary to unpack the packaging bag after it is transported to a single crystal manufacturing process or the like as a transport destination. However, at the time of taking out, there is a concern that the packaging bag may be damaged, and further, the blade may touch and contaminate the internal cut rod.

In order to cope with the concern, it is preferable to sandwich an inclusion that separates the packaging bag and the fastening film between at least a part between the packaging bag 2 and the fastening film 3.
The inclusions 4 and 5 may be any material that can prevent the cutting tool from coming into contact with the packaging bag when the fastening film 3 is cut with the cutting tool. There is no particular limitation as long as it can be achieved. For example, materials such as resin, paper, and wood that are light and easy to handle are preferred, and the shape is generally plate-like or sheet-like, but other structures having functions as described later are also available. Can be used.

As for the inclusions 4 and 5, FIGS. 1 and 2 show a plate-like form, and FIGS. 3 and 4 show a sheet-like form. In the form of FIG. 2, a groove is provided on the back surface of the plate-like body. With such a structure, the fastening film can be cut by sliding the edge of the cutter in alignment with the groove, and the cutting operation can be performed more efficiently.
Moreover, in order to make it easy to confirm the position of the inclusion 4, it is preferable to color the inclusion partially or entirely. As a result, the tightening film can be cut without error.

In the present invention, the inclusions 4 and 5 may be present in at least a part between the packaging bag 2 and the fastening film 3. For example, in the case of the cut rod shown in the figure, when the fastening film 3 is wound around the body portion, it is preferably arranged in a direction perpendicular to the circumference of the cylindrical peripheral wall of the cut rod.
In this case, since the inclusions 4 and 5 are for protecting the packaging bag, the inclusions are longer than the length of the fastening film 3 to be cut, and both ends of the inclusions are provided at positions protruding from the fastening film. preferable.

According to the packaging body of the present invention, since the packaging bag containing the polysilicon is fastened by the fastening film from the outside and the packaging bag is tightly fixed to the polysilicon surface, The surface and the inner surface of the film can be reliably prevented from being rubbed, and the generation of resin powder can be effectively prevented.
Therefore, high purity single crystal silicon can be manufactured by transporting this package to a single crystal manufacturing plant and unpacking it.

Claims (6)

  A polysilicon packaging body characterized in that a packaging bag containing polysilicon is fastened from the outside with a fastening film, and the packaging bag is tightly fixed to the polysilicon surface.   The package according to claim 1, wherein an inclusion separating the packaging bag and the fastening film is present at least partly between the packaging bag and the fastening film.   Package according to claim 1 or 2, wherein the polysilicon is in the form of a cut rod.   The package according to claim 3, wherein the inclusion is a plate-like body arranged in a direction perpendicular to the circumference of the cylindrical peripheral wall of the cut rod.   The package according to claim 3, wherein the inclusion is a sheet arranged in a direction perpendicular to the circumference of the cylindrical peripheral wall of the cut rod.   The package according to any one of claims 1 to 5, wherein the fastening film is a stretch film or a shrink film.

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