EP1334907A1 - Method and apparatus for low-cost packaging of bulk polysilicium - Google Patents
Method and apparatus for low-cost packaging of bulk polysilicium Download PDFInfo
- Publication number
- EP1334907A1 EP1334907A1 EP03001323A EP03001323A EP1334907A1 EP 1334907 A1 EP1334907 A1 EP 1334907A1 EP 03001323 A EP03001323 A EP 03001323A EP 03001323 A EP03001323 A EP 03001323A EP 1334907 A1 EP1334907 A1 EP 1334907A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- polysilicon
- plastic bag
- broken
- filling
- plastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000004806 packaging method and process Methods 0.000 title claims description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 65
- 229920005591 polysilicon Polymers 0.000 claims abstract description 65
- 238000011109 contamination Methods 0.000 claims abstract description 18
- 239000004033 plastic Substances 0.000 claims description 52
- 229920003023 plastic Polymers 0.000 claims description 52
- 238000003466 welding Methods 0.000 claims description 15
- 239000002985 plastic film Substances 0.000 claims description 12
- 229920006255 plastic film Polymers 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 238000005303 weighing Methods 0.000 claims description 10
- 239000012634 fragment Substances 0.000 claims description 8
- 230000001939 inductive effect Effects 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 210000003918 fraction a Anatomy 0.000 claims 1
- 230000001737 promoting effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000012856 packing Methods 0.000 abstract 5
- 239000008187 granular material Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 241001136792 Alle Species 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/28—Controlling escape of air or dust from containers or receptacles during filling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/30—Devices or methods for controlling or determining the quantity or quality or the material fed or filled
- B65B1/32—Devices or methods for controlling or determining the quantity or quality or the material fed or filled by weighing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Quality & Reliability (AREA)
- Basic Packing Technique (AREA)
- Containers And Plastic Fillers For Packaging (AREA)
Abstract
Description
Die Erfindung betrifft ein Verfahren und eine Vorrichtung zur kostengünstigen, kontaminationsarmen, Verpackung von Polysiliciumbruch.The invention relates to a method and an apparatus for inexpensive, low contamination, packaging of broken polysilicon.
Polysiliciumbruch wird beispielsweise mittels Siemensverfahren aus Trichlorsilan abgeschieden und danach kontaminationsfrei zerkleinert. Es wird in der Regel in der Solar- oder Halbleiterindustrie beispielsweise für die Herstellung von Solarzellen oder Reinstsilizium-Wafern verwendet. Für diese Anwendungen ist ein möglichst wenig kontaminierter Polysiliciumbruch erwünscht, daher wird das Material für den Transport zu den Anwendern verpackt. Allerdings erfolgt diese Verpackung bisher kontaminationsreich und personalintensiv manuell.Polysilicon fracture is used, for example, using the Siemens process deposited from trichlorosilane and then free of contamination crushed. It is usually used in the solar or semiconductor industry for example for the production of solar cells or high-purity silicon wafers. For these applications is as little contaminated polysilicon breakage as possible desired, so the material is for transportation too packaged for users. However, this packaging is done Previously rich in contamination and labor intensive manual.
Aufgabe der Erfindung ist es, ein Verfahren zur Verfügung zu stellen, welches eine kostengünstige kontaminationsarme Verpackung von hochreinem Polysiliciumbruch ermöglicht.The object of the invention is to provide a method provide an inexpensive low-contamination packaging of high-purity polysilicon fragments.
Die Aufgabe wird gelöst durch ein Verfahren, welches dadurch gekennzeichnet ist, dass der Polysiliciumbruch automatisch verpackt wird.The problem is solved by a method which thereby is marked that the polysilicon break automatically is packed.
Als Vorrichtung zur Durchführung des Verfahrens sind prinzipiell alle im Stand der Technik bekannten automatischen Verpakkungsmaschinen für stückiges Bruchgut geeignet.In principle, are as devices for carrying out the method all automatic packaging machines known in the prior art suitable for broken pieces.
Die Erfindung betrifft daher auch die Verwendung einer automatischen Verpackungsmaschine zur Verpacken von hochreinem Polysiliciumbruch.The invention therefore also relates to the use of an automatic Packaging machine for packaging high-purity polysilicon fragments.
Die erfindungsgemäße Verwendung einer automatischen Verpakkungsmaschine ermöglicht kostengünstig vollautomatisch ein Portionieren, Einfüllen und Verpacken von hochreinem Polysiliciumbruch. The use of an automatic packaging machine according to the invention enables inexpensive fully automatic Portioning, filling and packaging of high-purity polysilicon fragments.
Als automatische Verpackungsmaschine wird vorzugsweise eine Vorrichtung eingesetzt, umfassend
- ein Mittel zur Portionierung des Polysiliciumbruchs
- eine Abfüllvorrichtung, umfassend einen Kunststoffbeutel
- eine Verschweißvorrichtung für den mit Polysiliciumbruch gefüllten Kunststoffbeutel
- a means for portioning the polysilicon break
- a filling device comprising a plastic bag
- a sealing device for the plastic bag filled with broken polysilicon
Um die Gefahr einer Verunreinigung des Polysiliciumbruchs zu vermeiden, sind alle mit dem Polysiliciumbruch in Kontakt kommenden Teile der erfindungsgemäßen Vorrichtung besonders bevorzugt mit Silicium armiert oder mit einem hochverschleißfesten Kunststoff verkleidet. Zudem ist es besonders bevorzugt, um ein Durchstoßen der Verpackung zu minimieren, die erfindungsgemäße Vorrichtung derart auszugestalten, dass der Polysiliciumbruch durch zwei verschweißte Kunststoffbeutel verpackt ist.To reduce the risk of contamination of the polysilicon break avoid all are in contact with the polysilicon fracture Parts of the device according to the invention are particularly preferred reinforced with silicon or with a highly wear-resistant Plastic clad. It is also particularly preferred to minimize puncture of the packaging, the inventive To design the device so that the polysilicon break packed by two sealed plastic bags is.
Besonders bevorzugt umfasst eine erfindungsgemäße Verpackungsmaschine daher nach der Verschweißvorrichtung für den mit Polysiliciumbruch gefüllten Kunststoffbeutel nochmals eine Abfüllvorrichtung, umfassend einen Kunststoffbeutel sowie eine Verschweißvorrichtung für diesen Kunststoffbeutel, der einen mit Polysiliciumbruch gefüllten Kunststoffbeutel enthält.A packaging machine according to the invention particularly preferably comprises therefore after the welding device for the with polysilicon break filled plastic bag another filling device, comprising a plastic bag and one Welding device for this plastic bag, the one contains plastic bag filled with broken polysilicon.
Bevorzugt ermöglicht eine erfindungsgemäße Vorrichtung zudem auch vollautomatisch ein Transportieren des Polysiliciumbruchs und umfasst daher zusätzlich Mittel zur Förderung des Polysiliciumbruchs wie beispielsweise eine Förderrinne, ein Förderrohr, ein Förderband, oder ein Bürstenband.A device according to the invention preferably also enables the polysilicon break is also transported fully automatically and therefore also includes means to promote polysilicon breakage such as a conveyor trough, a conveyor pipe, a conveyor belt, or a brush belt.
Mittel zur Portionierung des Polysiliciumbruchs sind beispielsweise eine zeitgesteuerte Förderrinne oder eine Füllhöhenbestimmung eines Vorratsbehälters oder eine Wägevorrichtung für den Polysiliciumbruch.Means for portioning the polysilicon fraction are, for example a time-controlled conveyor trough or a level determination of a storage container or a weighing device for the polysilicon break.
Vorzugsweise formt die Abfüllvorrichtung den Kunststoffbeutel aus einer vorzugsweise hochreinen Kunststofffolie, beispielsweise mittels eines Füll- und Beutelformrohres. The filling device preferably forms the plastic bag from a preferably high-purity plastic film, for example by means of a filling and bag tube.
In einer insbesonders bevorzugten Ausführungsform umfasst die Vorrichtung zudem eine oberhalb der Abfüllvorrichtung für das Polysilicium und der Verschweißvorrichtung angebrachte Luftabsaugvorrichtung (Flowbox), die eine Partikelverunreinigung des Polysiliciumbruchs verhindert.In a particularly preferred embodiment, the Device also one above the filling device for the Polysilicon and the welding device attached air suction device (Flowbox), which is a particle contamination of the Polysilicon breakage prevented.
Figur 1 stellt eine besonders bevorzugte Ausführungsform der Erfindung dar:Figure 1 represents a particularly preferred embodiment of the Invention represents:
Diese erfindungsgemäße Vorrichtung umfasst
- eine Förderrinne (1) für den Polysiliciumbruch (2),
- eine Wägevorrichtung (3) für den Polysiliciumbruch (2), mit einem Trichter (4),
- Ablenkbleche (5),
- eine Abfüllvorrichtung (6), welche aus einer hochreinen Kunststofffolie (7) einen Kunststoffbeutel (8) formt,
- eine Verschweißvorrichtung (10) für den mit Polysiliciumbruch gefüllten Kunststoffbeutel (8),
- eine oberhalb von Förderrinne (1), Wägevorrichtung (3), Abfüllvorrichtung (6) und Verschweißvorrichtung (10) angebrachte Flowbox (11), die eine Partikelverunreinigung des Polysiliciumbruchs (2) verhindert,
- ein Förderband (12) für den verschweißten mit Polysiliciumbruch gefüllten Kunststoffbeutel (14),
- a conveyor trough (1) for the polysilicon break (2),
- a weighing device (3) for the polysilicon break (2), with a funnel (4),
- Baffles (5),
- a filling device (6) which forms a plastic bag (8) from a high-purity plastic film (7),
- a welding device (10) for the plastic bag (8) filled with broken polysilicon,
- a flow box (11) mounted above the conveyor trough (1), weighing device (3), filling device (6) and welding device (10), which prevents particle contamination of the polysilicon break (2),
- a conveyor belt (12) for the welded plastic bag (14) filled with broken polysilicon,
Vorzugsweise umfasst die erfindungsgemäße Vorrichtung im Anschluss an das Förderband (12) eine weitere Abfüllvorrichtung (15), welche aus einer hochreinen Kunststofffolie (16) einen Kunststoffbeutel (17) formt, eine Verschweißvorrichtung (18) für diesen Kunststoffbeutel (17), nachdem er mit dem verschweißten und mit Polysiliciumbruch gefüllten Kunststoffbeutel (14) gefüllt ist, sowie ein Förderband (19) für den in einer Doppelbeutelverpackung (21) befindlichen Polysiliciumbruch (2). The device according to the invention preferably subsequently comprises a further filling device on the conveyor belt (12) (15), which from a high-purity plastic film (16) Plastic bag (17) forms a welding device (18) for this plastic bag (17) after being welded to the and plastic bags filled with broken polysilicon (14) is filled, and a conveyor belt (19) for in one Double bag packaging (21) located polysilicon break (2).
Vorzugsweise umfasst die Abfüllvorrichtung (6), einen Deionisierer (9), der eine statische Aufladung und damit eine Partikelverunreinigung der Kunststofffolie (7) verhindert.The filling device (6) preferably comprises a deionizer (9), which is a static charge and thus a particle contamination the plastic film (7) prevented.
Vorzugsweise läuft das Förderband (12) und/oder das Förderband (19) durch einen magnetisch induktiven Detektor (13) bzw. (20).The conveyor belt (12) and / or the conveyor belt preferably runs (19) by a magnetic inductive detector (13) or (20).
Vorzugsweise handelt es sich bei der Kunststofffolie (7, 16) um eine PE-Folie. Die Kunststofffolie hat vorzugsweise eine Stärke von > 200µm, besonders bevorzugt eine Stärke von 290 bis 350 µm.The plastic film (7, 16) is preferably around a PE film. The plastic film preferably has one Thickness of> 200 µm, particularly preferably a thickness of 290 up to 350 µm.
Vorzugsweise handelt es sich bei dem hochverschleißfesten Kunststoff um Polyurethan.It is preferably the highly wear-resistant one Plastic around polyurethane.
Die erfindungsgemäße Vorrichtung ermöglicht eine kontaminationsarme Verpackung ohne Humankontakt. Sie ermöglicht ferner eine gleichbleibende Qualität des verpackten Produktes.The device according to the invention enables low-contamination Packaging without human contact. It also enables a consistent quality of the packaged product.
Die mit dem Verpackungsgut Polysiliciumbruch verbundenen besonderen Problemstellungen wie Kontaminationsfreiheit, Nachzerkleinerung, Staubentwicklung werden durch die genannten Ausgestaltungen in der erfindungsgemäßen Vorrichtung gelöst (Siliciumarmierung, Deionisierung der Luft, konstruktionsbedingte geringe Wurfhöhen, Absaugungen, Metalldetektoren usw.).The special ones associated with the polysilicon fragments Problems such as freedom from contamination, re-crushing, Dust generation are mentioned by the Embodiments solved in the device according to the invention (Silicon armouring, deionization of the air, design-related low throwing heights, suction, metal detectors, etc.).
Eine konkrete Ausführungsform des erfindungsgemäßen Verfahrens wird anhand der Vorrichtung gemäß Fig. 1 erläutert.A concrete embodiment of the method according to the invention is explained using the device according to FIG. 1.
Der Polysiliciumbruch (2) wird auf einer siliciumarmierten Förderrinne (1) in eine Wägevorrichtung (3) transportiert, wobei die Wägevorrichtung den Füllgrad eines Trichters (4) mit Polysiliciumbruch (2) regelt und sich der Polysiliciumbruch (2) aus dem Trichter (4) in einen Kunststoffbeutel (8) entleert, wenn sich eine vorgegebene Abfüllmenge Polysiliciumbruch (2) im Trichter (4) befindet, wobei die Fallhöhe des Siliciums mit Ablenkblechen (5) minimiert wird, so dass eine ungewünschte Nachzerkleinerung des Siliciums nicht stattfindet und der Kunststoffbeutel (8) nach dem Befüllen mittels einer Verschweißvorrichtung (10) verschweißt und der so erhaltene mit Polysiliciumbruch gefüllte Kunststoffbeutel (14) über ein Förderband (12) durch einen magnetisch induktiven Detektor (13) geführt wird, um mögliche Metallkontamination zu detektieren.The polysilicon break (2) is on a silicon armored Conveyor trough (1) transported in a weighing device (3), wherein the weighing device with the filling level of a funnel (4) Polysilicon break (2) regulates itself and the polysilicon break (2) emptied from the funnel (4) into a plastic bag (8), if there is a predetermined filling quantity of broken polysilicon (2) located in the funnel (4), the drop height of the silicon is minimized with baffles (5), so that an undesired Post-comminution of the silicon does not take place and the plastic bag (8) after filling by means of a Welding device (10) welded and the so obtained plastic bag (14) filled with broken polysilicon via a Conveyor belt (12) through a magnetic inductive detector (13) is carried out in order to detect possible metal contamination.
Die Kunststofffolie (7) wird in der Abfüllvorrichtung (6) vorzugsweise dadurch zu einem Kunststoffbeutel (8) geformt, dass die Folie (7) über eine sog. Schulter gezogen wird. Die Schulter ist, um die Folienoberfläche nicht zu kontaminieren, wiederum aus hochverschleißfestem Kunststoff ausgeführt. Die benachbarten Enden der zu einem Schlauch geformten Kunststofffolie werden verschweißt, der Schlauch wird unten durch eine Verschweißvorrichtung zugeschweißt, so dass ein von oben befüllbarer hochreiner Kunststoffbeutel vorliegt, der vorzugsweise während des Befüllens mit dem Polysiliciumbruch durch weiteres kontinuierliches Verschweißen der einen Schlauch bildenden Kunststofffolie verlängert wird.The plastic film (7) is preferred in the filling device (6) formed into a plastic bag (8) in that the film (7) is pulled over a shoulder. The shoulder is, in order not to contaminate the film surface, again made of highly wear-resistant plastic. The neighboring ones Ends of the plastic film formed into a tube are welded, the hose is covered by a Welding device welded shut so that a fillable from above high purity plastic bag is present, which is preferred during the filling with the polysilicon break through further continuous welding of those forming a tube Plastic film is extended.
Nachdem der Beutel befüllt ist, verschweißen vorzugsweise zwei Formbacken den Kunststoffbeutel.After the bag is filled, preferably two seal Mold bake the plastic bag.
Besonders bevorzugt wird der Einfachbeutel in einem weiteren Kunststoffbeutel verpackt. Dies erfolgt dadurch, dass ein zweiter Kunststoffbeutel analog dem ersten Kunststoffbeutel erzeugt wird und der Einfachbeutel in den zweiten Beutel eingebracht wird und verschweißt wird. Vorzugsweise bremst eine mechanisch-pneumatische Produktbremse den Fall des ersten Kunststoffbeutels beim Einbringen in den zweiten Kunststoffbeutel.The single bag is particularly preferred in another Packed in a plastic bag. This is done by a second plastic bag analogous to the first plastic bag is generated and the single bag is introduced into the second bag and is welded. Preferably one brakes mechanical-pneumatic product brake the case of the first Plastic bag when inserted in the second plastic bag.
Der derart verpackte Polysiliciumbruch kann nochmals über Förderbänder durch einen magnetisch induktiven Detektor geführt werden, um mögliche Metallkontamination zu detektieren.The polysilicon fragments packaged in this way can be transported again via conveyor belts guided by a magnetic inductive detector in order to detect possible metal contamination.
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10204176 | 2002-02-01 | ||
DE10204176A DE10204176A1 (en) | 2002-02-01 | 2002-02-01 | Device and method for the automatic, low-contamination packaging of broken polysilicon |
Publications (2)
Publication Number | Publication Date |
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EP1334907A1 true EP1334907A1 (en) | 2003-08-13 |
EP1334907B1 EP1334907B1 (en) | 2004-04-14 |
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Application Number | Title | Priority Date | Filing Date |
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EP03001323A Expired - Lifetime EP1334907B1 (en) | 2002-02-01 | 2003-01-23 | Method and apparatus for low-cost packaging of bulk polysilicium |
Country Status (4)
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US (1) | US7013620B2 (en) |
EP (1) | EP1334907B1 (en) |
JP (1) | JP3906161B2 (en) |
DE (2) | DE10204176A1 (en) |
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- 2003-01-23 DE DE50300005T patent/DE50300005D1/en not_active Expired - Lifetime
- 2003-01-30 JP JP2003022749A patent/JP3906161B2/en not_active Expired - Fee Related
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EP1842595A1 (en) * | 2006-04-06 | 2007-10-10 | Wacker Chemie AG | Method and device for comminuting and sorting polysilicon |
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US8833042B2 (en) | 2007-06-13 | 2014-09-16 | Wacker Chemie Ag | Method and device for packaging polycrystalline bulk silicon |
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US10377636B2 (en) | 2014-06-03 | 2019-08-13 | Shin-Etsu Chemical Co., Ltd. | Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon mass |
CN105292596A (en) * | 2014-06-16 | 2016-02-03 | 新特能源股份有限公司 | Polycrystalline silicon bagging metering control system |
WO2016046058A1 (en) * | 2014-09-23 | 2016-03-31 | Wacker Chemie Ag | Rounded polysilicon fragments and production thereof |
CN112839901A (en) * | 2018-10-31 | 2021-05-25 | 株式会社德山 | Method for preventing contamination of polycrystalline silicon |
Also Published As
Publication number | Publication date |
---|---|
DE10204176A1 (en) | 2003-08-14 |
EP1334907B1 (en) | 2004-04-14 |
US20050034430A1 (en) | 2005-02-17 |
US7013620B2 (en) | 2006-03-21 |
DE50300005D1 (en) | 2004-05-19 |
JP2003237722A (en) | 2003-08-27 |
JP3906161B2 (en) | 2007-04-18 |
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