EP1287398A1 - Microscope a systeme de mise au point automatique - Google Patents

Microscope a systeme de mise au point automatique

Info

Publication number
EP1287398A1
EP1287398A1 EP02732489A EP02732489A EP1287398A1 EP 1287398 A1 EP1287398 A1 EP 1287398A1 EP 02732489 A EP02732489 A EP 02732489A EP 02732489 A EP02732489 A EP 02732489A EP 1287398 A1 EP1287398 A1 EP 1287398A1
Authority
EP
European Patent Office
Prior art keywords
diaphragm
diaphragms
light
observation object
receiving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02732489A
Other languages
German (de)
English (en)
Inventor
Norbert Czarnetzki
Thomas SCHERÜBL
Stefan Mack
Toshiro Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microelectronic Systems GmbH
Original Assignee
Carl Zeiss Microelectronic Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microelectronic Systems GmbH filed Critical Carl Zeiss Microelectronic Systems GmbH
Publication of EP1287398A1 publication Critical patent/EP1287398A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged

Definitions

  • the invention relates to a microscope with an autofocusing device, comprising an illumination source, an optical imaging device, via which the illuminating light in the form of an illuminated field is directed onto an observation object, and a receiving device which receives light influenced by the observation object in the form of an image field corresponding to the illuminated field , and a device for changing the distance between the imaging device and the observation object.
  • the light incident on the observation object from the illumination source is more or less strongly reflected by the observation object and imaged on the receiving device via the imaging device, so that information about the observation object or the object area under investigation can be obtained from the image.
  • a section plane is selected from the topography of the object surface in which the object or a selected object area is to be depicted sharply. If deviations occur in the direction of the optical axis when the observation object is positioned relative to the imaging device, the distance between the observation object and the imaging device is corrected using an adjusting device until the focus position is reached.
  • Autofocusing devices using triangulation processes allow a relatively large capture range, their resolution in the direction of the z-axis is limited to orders of magnitude of approximately 300 nm and is therefore unsuitable for wafer inspection, since resolutions of approximately 50 nm are used there a capture range of several ⁇ m are required.
  • Autofocusing devices which are used for example in CD players, have a relatively large capture range and also a high z-resolution, but can only be used if the surface to be measured has very good reflection properties.
  • a laser beam is usually used for autofocusing.
  • the wavelength spectrum of the main optical system differs greatly from that of the autofocusing system, this results in systematic focusing errors that depend, among other things, on the material properties and the microstructure, for example a surface coating, of the object to be examined.
  • the main optical system is operated in a different wavelength range than the autofocusing system, separate system components must be provided for the latter. This, in turn, is associated with a beam guidance that is at least sectionally separated.
  • the main system must also be specially designed for the separate wavelength of the auto focusing system.
  • the object of the invention is to create a microscope of the type mentioned at the outset which, with a simple structural design, enables high precision of the focusing on an observation object to be examined.
  • This object is achieved for a microscope according to the preamble of claim 1 by in the beam path between a device for structuring the illuminating light is arranged in the illumination source and the imaging device or in an optically conjugate position with it, which has two or more diaphragms axially spaced apart in the direction of the beam path.
  • a first diaphragm and a second diaphragm are arranged such that a plane lying between them coincides with the imaging of the observation object or in a desired position .
  • Observation object section in the image field is focused on the receiving device.
  • a device cooperating with the receiving device for evaluating the light intensities of the partial area of the image field influenced by the diaphragms is provided, the evaluation device generating an actuating signal as a function of the evaluated intensities for actuating the adjusting device for focusing the plane lying between the diaphragms.
  • the autofocusing device uses all components of the main optical system, in particular its illumination source, its optical imaging device and its receiving device, which enables a simple construction. Since the same illumination source is used for both the main optical system and the auto-focusing system, the systematic errors explained above are avoided.
  • the diaphragms arranged at intervals from one another in the direction of the beam path act only on a small section of the image field, while the majority of the image field remains usable for the microscope images.
  • the light intensities measured in the partial areas of the image field assigned to the diaphragms depend on the actual distance between the observation object and the optical imaging device in the direction of the z-axis. Since the diaphragm 'in the direction of the beam path are positioned differently to one another, the result for each diaphragm as a function of z-position of the observed object, one of the respective aperture associated Intensticianscharakte-' roxid.
  • the actual position of the observation object can thus be inferred and any deviation from a target position can thus be determined. It is also possible in this way to determine the direction in which the actual position of the observation object deviates from the desired position along the z-axis and must therefore be refocused. This information can then be used to correct the position of the observation object in relation to the target position, i.e. be precisely focused.
  • Autofocusing device can be realized at a high measuring speed resolutions along the z-axis in the order of 50 nm with a capture range of several microns.
  • the control signal can be generated, for example, directly on the basis of that for the individual diaphragms certain light intensities take place, the sizes of which are related to each other ' .
  • variables derived from the light intensity can also be used to generate the control signal.
  • the evaluation device for generating the actuating signal is designed, for example, in such a way that a comparison value is generated from the detected light intensities or from contrast values derived therefrom and the infeed direction for the setting device is then derived from this comparison value.
  • the control signal or control input signal for the control device can be obtained particularly easily. If necessary, the comparison value is related to a target value.
  • control signal or control input signal can be normalized for the one-piece device.
  • the diaphragms are preferably designed and arranged in such a way that a high-contrast light structure is generated on the receiving device when the observation object for the diaphragm in question is in a specific z position.
  • the consequence of this is that if the observation object deviates from the target position for the individual diaphragms, the contrast values are clearly different be generated. This allows the deviation of the observation object from the target position to be determined particularly precisely.
  • each diaphragm when viewed in the direction of the optical axis, overlap at least partially, each diaphragm being designed to be partially translucent and the diaphragms have different optical structuring patterns. Accordingly, the diaphragms located one behind the other in the beam path generate combined intensities on the receiving device. Due to the different structuring patterns, however, the individual apertures can be analyzed by analyzing the measured intensities. assign characteristic quantities which of depend on the focus position of the observation object. The control signal for a possible position correction is then generated from this information to be assigned to the individual diaphragms. '
  • the diaphragms can be provided with lattice structures that differ from one another, the lattice lines of different diaphragms running transversely to one another and / or having different distances.
  • the 'lattice structures are different by at least one geometrical criterion with each other in pairs.
  • a third diaphragm is arranged between the first diaphragm and the second diaphragm in such a way that the imaging of the third diaphragm simultaneously with the imaging of the observation object or observation object section located in a desired position in the image field on the reception area. direction is focused.
  • a maximum of the contrast value results in a contrast evaluation for the third aperture in this position.
  • a maximum of the intensity or brightness is also determined in this position. This provides additional information which can be used to confirm the "correct" positioning of the observation object in the target position. This is particularly advantageous if the further apertures in the target position only have low contrast values or brightness. have values. This also offers the advantage of a larger catch area and there is also the possibility of standardization.
  • a large number of diaphragms can be provided in the direction of the beam path in order to achieve a large capture area. Restrictions only result from the required area of the image field for the autofocusing system or . the transmission properties of the diaphragms used, provided that these are arranged to overlap one another in the direction of the beam path. A large capture range can be achieved by a larger number of extrafocal and intrafocal apertures. For practical purposes, however, it has proven to be cheap and sufficient to provide three diaphragms, the structure remaining relatively simple.
  • the first aperture and the second aperture each have a plurality of individual pinholes, which are arranged such that their images are separated in 'the receiving device. Each image is assigned a separate, light-sensitive area on the receiving device. This results in an arrangement of several groups, each confocal beam paths offset in the axial direction.
  • Such an arrangement is particularly suitable for the immediate evaluation of the intensities or confocal brightnesses.
  • individual characteristic intensity or brightness values can first be determined for all diaphragms and then compared with one another to generate the actuating signal.
  • the hole patterns shown in the image field can, however, also be used to determine contrast values for the diaphragms, in which case a confocal relationship between the single-hole diaphragms and the light-sensitive areas on the receiving device, for example the pixels of a CCD matrix, is not absolutely necessary.
  • the first diaphragm and the second diaphragm can also each be formed with a plurality of strip-shaped individual diaphragm openings whose imaginary longitudinal directions intersect at a common point that lies on the optical axis of the optical imaging device.
  • the individual aperture openings are arranged in such a way that their images on the receiving device are separated from one another, each image being assigned its own light-sensitive area on the receiving device.
  • devices are provided for moving the observation object in a direction transverse to the optical axis of the imaging device, and the structuring patterns formed on the diaphragms are repeated in the direction of movement of the observation object.
  • the light falling through a diaphragm or its intensity for the points mentioned is first measured in a first position of the observation object and the intensities thus obtained are recorded.
  • the observation object is then shifted in a plane perpendicular to the z-axis in such a way that the light reflected by the points mentioned lies in the area of influence of another aperture.
  • the corresponding intensities are recorded in association with the points mentioned and related to each other for the individual points.
  • Such a measurement is preferably carried out for each aperture. With a larger number of apertures, however, the measurement can also be limited to a selected number of specifically selected apertures.
  • TDI time delayed integration
  • the structuring patterns are repeated n times on each of the diaphragms in the direction of movement of the observation object.
  • the individual intensity values of the n successive measurements can be electronically related to one another and processed to form the measurement result. Above all, this enables a high measuring speed to be achieved.
  • FIG. 1 shows a schematic illustration of an exemplary embodiment of a microscope with autofocusing according to the invention in a state focused on an observation object
  • FIG. 2 shows the microscope from FIG. 1 in a defocused state
  • 3a, b show an example of the arrangement of a plurality of diaphragms in the beam path of the microscope, with a showing a side view of the beam path and b a view in the direction of the beam path
  • FIG. 4 is a diagram illustrating the diaphragm from FIG. 3 caused contrast values depending. a distance of the observation object to be examined from an optical imaging device in the direction of the optical axis or in the z direction,
  • FIGS. 1 and 2 shows another example of the arrangement of diaphragms in the beam path of the microscope according to FIGS. 1 and 2, with a showing a side view of the beam path and b a view in the direction of the beam path,
  • FIGS. 6a, b a third example of the arrangement of diaphragms in the beam path of a microscope according to FIGS. 1 and 2, where a shows a side view of the beam path and b shows a view in the direction of the beam path,
  • FIGS. 7a, b a fourth example of the arrangement of diaphragms in the beam path of a microscope according to FIGS. 1 and 2, with a showing a side view of the beam path and b a view in the direction of the beam path, and in
  • FIG. 8a, b show a schematic illustration to illustrate autofocusing methods, in which the observation object to be examined is recorded several times for the purpose of autofocusing and is shifted between the recordings.
  • 1 shows an example of a microscope 1 with autofocusing, in which the main optical system and the autofocusing system use the same optical components. In Fig. 1, however, only the beam path of the autofocusing system that is of interest here is shown.
  • the microscope 1 comprises a central illumination source 2 which, for example, emits light in the visible range. Furthermore, an optical imaging device 3 is provided, which includes, among other things, an observation objective. Light from the illumination source 2 in the form of a luminous field is directed onto an observation object 4 to be examined. The shape of the light field is predetermined by a light field diaphragm 5 arranged between the illumination source 2 and the observation objective of the optical imaging device 3.
  • the microscope 1 also comprises a receiving device 6, influenced by the observed object in the form of a light corresponding to the luminous field image field receives'.
  • the receiving device 6 is designed here as a CCD matrix with which the intensity of the incident light is determined.
  • 1 shows a state of the microscope 1 focused on the observation object 4, in which the light field plane L, in which the light field diaphragm 5 is arranged, is sharply imaged on the plane E of the receiving device 6. In this state, the surface of the object under observation 4 is in the desired position, which is indicated here by level 0.
  • the light reflected by the observation object 4 is collected by the optical imaging device .3 and directed to the receiving device 6 via a deflection device 7 with a partially transparent layer 8.
  • This device 9 here comprises three diaphragms 10, 11 and 12. These diaphragms 10-, 11 and 12 are arranged in the area of the light field, so that they influence a partial area of the image field that strikes the receiving device 6.
  • the individual diaphragms 10, 11 and 12 are offset from one another in the direction of the optical axis of the microscope 1.
  • a first diaphragm 10 is located in an extrafocal position in front of the luminous field plane L.
  • a second diaphragm 11, on the other hand, is shifted towards the intrafocal side with respect to the luminous field plane L.
  • the two diaphragms 10 and 11 are arranged such that a 'is imaged sharply between these lying plane, here the luminous field level L to the receiving device 6, when, the observation object 4 in the nominal position, "ie, here with its surface located at level O.
  • a third diaphragm 12 is provided in the luminous field plane L, which is thus between the first diaphragm 10 and the second diaphragm 11, for example in the middle.
  • the individual diaphragms 10, 11 and 12 are designed such that they only cover a small part of the image area. of the impact. The majority of the image field remains usable for microscope imaging.
  • a high-contrast light structure is generated on the observation object 4 by each of the diaphragms 10, 11 and 12 when the respective diaphragm is in optical conjugation with the observation object 4.
  • the contrast of the light structure on the observation object 4 and thus on the receiving device 6 changes.
  • the corresponding light intensities are detected on the receiving device 6 in association with the respective aperture and processed in an evaluation device 13.
  • the evaluated intensity 'a Stellsignal- is in the evaluation device 13 in response generates s, which serves as a control input to an actuator 14 by means of the observation object 4 can be moved along the z-axis, means to this with respect to the imaging to focus or to correct deviations from the target position while scanning the observation object 4.
  • the dependence of the contrast on the receiving device 6 with respect to the individual diaphragms 10, 11 and 12 on the position of the observation object 4 in the z direction for the arrangement of the diaphragms 10, 11 and 12 shown in detail in FIG. 3 is shown in FIG the contrast value curves Kio, K u and K ⁇ 2 assigned to the diaphragms. Since the diaphragms 10, 11 and 12 are arranged offset from one another in the direction of the optical axis, the contrast value curves have Kio, K ⁇ and K i2 depending on the position of the observation object 4 shifted maxima.
  • the diaphragms are designed in such a way that the contrast of the respectively associated light structure decreases significantly, for example by 50%, if the observation object 4 to be examined is in a z-position which lies between those positions of the observation object 4 in which adjacent diaphragms are present the receiving device 6 can be focused. High sensitivity can be achieved through steep contrast functions.
  • the light structure of the third, central diaphragm 12 is imaged in a focused manner on the receiving device 6.
  • the associated contrast value curve K i2 accordingly has a maximum at the associated z position.
  • the light structures of the first and second diaphragms 10 and 11 are imaged defocused on the receiving device, so that the contrast value of the associated contrast value curves K 10 and K 12 is relatively low.
  • the corresponding contrast values are approximately the same size.
  • Fig. 2 shows the case of a deviation in which the second, infrafocal
  • Aperture 11 depicted sharply on the receiving device 6 becomes.
  • the diaphragms 10 and 12 are then imaged defocused on the receiving device 6, the image of the first diaphragm 10 which is further away being defocused more than the image of the middle, third diaphragm 12.
  • the contrast value Kn of the second diaphragm 11 a maximum against which the contrast values of the Kio or K ⁇ 2 of the other apertures 10 and 12 drop.
  • This change in the contrast values will be used for autofocus tion '.
  • the aim of the autofocusing is to maximize the contrast value K X2 of the middle, third aperture 12, since in this state the observation object 4 assumes its target position.
  • the control values K i0 or Kn of the extrafocal and intrafocal diaphragms 10 and 11 generate an actuating signal or control input signal s which, in addition to the size of the deviation, also contains information about the direction in which the correction must be made along the z-axis.
  • the difference between the contrast values Kio and Kn of the first and second diaphragms 10 and 11 is formed.
  • the deviation of this difference from a predetermined target value then results in the directional information sought for the corrective one. Movement of the setting device 14 in order to bring the observation object 4 into the desired position.
  • the. Receiving device 6 evaluates the measured intensities of several pixels for each aperture 10, 11 or 12.
  • the capture range can be increased by increasing the 'The number of spaced-apart extrafocal and intrafocal aperture, for example, doubled or tripled.
  • control input signal which include the differences and / or quotients of the contrast values of the extrafocal and intrafocal diaphragms, and additionally or alternatively take intensity values into account, for example in order to achieve, among other things, a normalization of the determined values.
  • each aperture 10 'or 11' has a sufficiently high transmission so that the light from the illumination source 2 is not weakened too much by the aperture arrangement.
  • each diaphragm 10 'or 11' has an optical structuring pattern which differs from the other diaphragm and which is noticeable in the image field when the light influenced by these diaphragms is analyzed.
  • Each of the screens 10 'or 11 'a separate contrast value can be assigned.
  • each of the panels 10 'and 11' is provided with a lattice structure.
  • the apertures 10 'and 11' are arranged so that the directions of their grid lines intersect.
  • a separate contrast value can then be assigned to the receiving device 6 by determining the contrast in a first direction and in a second direction transversely thereto, with which a control input signal s for determining the analog signal analogous to the procedure described in connection with FIG Direction of the position correction of the observation object 4 along the z-axis can be obtained.
  • FIG. A third example of an autofocusing device on the basis of structured multilevel lighting is shown in FIG. Instead of contrast patterns, there are a large number of small, arbitrarily shaped single-hole apertures on the extra- and intrafocal apertures 20 and 21.
  • the size dimension of the single-hole apertures 22 and 23 corresponds approximately to the Airy diameter in the observation object space multiplied by the magnification ration scale for the image between the light field diaphragm 5 and the observation object 4.
  • each individual hole aperture 22 or 23 is assigned a separate, light-sensitive area on the receiving device 6.
  • the individual perforated diaphragms 22 and 23 are each arranged in a cell shape, so that each perforated diaphragm corresponds to one or more pixels on the receiving device 6, which is preferably designed as a CCD matrix.
  • the pixels are selectively read out for the single-hole diaphragms 22 and 23, respectively.
  • the receiving device 6 thus detects the confocal intensity for each aperture 20 or 21 and each pin aperture 22 or 23.
  • the control input signal for the. Autofocusing is generated with the values for the confocal intensity of the two diaphragms 20 and 21 here, analogous to the procedure described above.
  • the imaging device 3 works with a plurality of observation objectives with different imaging properties, it may be necessary (depending on the imaging properties) when using the above-described diaphragms 20 and 21 with single-hole diaphragms for evaluation the receiving device 6 different light-sensitive areas are analyzed.
  • the image of the strip-shaped individual aperture opening on the receiving device 6 thus shifts along the imaginary longitudinal direction, so that the same light-sensitive area on the receiving device 6 is always present for each strip-shaped individual aperture opening 22 'or 23' in the range of the possible imaging scales of the observation objectives used is covered.
  • control input signal s is, as it were, generated from averaging the intensities over the areas considered overall for autofocusing.
  • the focusing accuracy can be further improved by analyzing light from the same areas of the observation object 4 through the various diaphragms.
  • a multiple measurement is carried out, the observation object 4 to be examined being shifted in a direction B within the XY plane perpendicular to the optical axis of the imaging device 3.
  • the feed of the observation object 4 to be set here corresponds to the offset of the diaphragms 20 and 21 in the feed direction B.
  • a two-dimensional CCD matrix can be used as the receiving device 6, which is exposed after the observation object 4 has been shifted step by step.
  • the evaluation device 13 the measured intensities of the different recordings are evaluated with respect to identical locations on the observation object 4, and a direction-indicating control signal for the setting device 14 is generated therefrom.
  • a TDI line camera can be used as the receiving device 6, with which the observation object 4 is recorded while in motion, as is customary when this type of camera is used.
  • the autofocus method described above can be carried out analogously with the TDI Line scan can be performed.
  • the intensity is measured n times at each observation location with the TDI line camera.
  • the captured signal is electronically summed up in the camera. For this reason, structuring patterns must be repeated n times on each of the diaphragms.
  • a first diaphragm 20 ′′ is arranged in front of and a second diaphragm 21 ′′ behind the light field diaphragm 5.
  • the n structuring patterns are designed as rows of holes, with each column Sp being assigned to a single observation location.
  • the n-structuring patterns are each divided in half onto the diaphragms 20 "and 21".
  • the complementary aperture means that the receiver signal for a column Sp of the diaphragm structures, ie a column of the TDI line camera, results from the sum of n measurements with the pinhole and n measurements with a complementary pinhole at the same observation object point. - Apart from a constant, this value is the difference between a corresponding value of a pinhole on the screen 20 "and a ' same pinhole on the screen 21", as the following mathematical analysis shows.
  • Ip_i ntra the intensity on the receiver through a pinhole in the axial aperture plane 20 ′′
  • I 0 the intensity on the receiving device 6 without diaphragms in the beam path, and z the axial position of the observation object 4.
  • Ip_intra (z) + I n _extra (z) Ip_intra (z) - Ip_extra (z) + const.
  • I p _extra (z) Ip_extra (z) - Ip_intra (z) + const.
  • the method presented here thus supplies a control input signal s as a detector signal, with which the direction of the auto-focusing can be controlled. Only measured values from the same observation object point are included in the signal.

Abstract

La présente invention concerne un microscope comprenant une source d'éclairage (2), un système de représentation optique (3), qui permet de diriger de la lumière issue de la source d'éclairage (2), sous forme de champ lumineux, sur un objet à observer (4), un système de réception (6), qui reçoit la lumière influencée par l'objet à observer (4), sous forme d'un champ d'image correspondant au champ lumineux, ainsi qu'un système (14), qui permet de régler la distance entre le système de représentation (3) et l'objet à observer (4). De plus, un système (9) permet de structurer la lumière d'éclairage sur la trajectoire du faisceau, entre la source d'éclairage (2) et le système de représentation (3), au moyen d'au moins deux diaphragmes (10, 11, 12), placés axialement à distance les uns des autres en direction de la trajectoire du faisceau. Ces diaphragmes (10, 11) sont montés de façon qu'un plan (L) se trouvant entre eux est mis au point avec l'objet à observer (4) dans le champ d'image sur le système de réception (6). Un système d'évaluation (13) produit, en fonction des intensités, un signal de réglage (s) permettant d'actionner le système de réglage (14).
EP02732489A 2001-03-16 2002-03-15 Microscope a systeme de mise au point automatique Withdrawn EP1287398A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10112639A DE10112639A1 (de) 2001-03-16 2001-03-16 Mikroskop mit Autofokussiereinrichtung
DE10112639 2001-03-16
PCT/EP2002/002878 WO2002075424A1 (fr) 2001-03-16 2002-03-15 Microscope a systeme de mise au point automatique

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EP1287398A1 true EP1287398A1 (fr) 2003-03-05

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EP02732489A Withdrawn EP1287398A1 (fr) 2001-03-16 2002-03-15 Microscope a systeme de mise au point automatique

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US (1) US20040021936A1 (fr)
EP (1) EP1287398A1 (fr)
JP (1) JP2004522191A (fr)
DE (1) DE10112639A1 (fr)
WO (1) WO2002075424A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10362244B4 (de) * 2003-04-29 2014-06-26 Carl Zeiss Microscopy Gmbh Verfahren zur Bestimmung der Fokusposition und der Verkippung der Fokusebene bei der Abbildung einer Probe
DE10335565A1 (de) * 2003-07-31 2005-05-19 Infineon Technologies Ag Verfahren zur Überprüfung von periodischen Strukturen auf Lithographiemasken
DE102005050338A1 (de) 2005-10-20 2007-05-03 Siemens Ag Verfahren zum Überprüfen eines Ventils
DE102006027836B4 (de) * 2006-06-16 2020-02-20 Carl Zeiss Microscopy Gmbh Mikroskop mit Autofokuseinrichtung
EP2067021A2 (fr) * 2006-09-14 2009-06-10 Oxford Gene Technology IP Limited Appareil permettant de former l'image de molécules simples
DE102007055530A1 (de) 2007-11-21 2009-05-28 Carl Zeiss Ag Laserstrahlbearbeitung
US9229209B2 (en) 2008-01-21 2016-01-05 Carl Zeiss Smt Gmbh Autofocus device and autofocusing method for an imaging device
EP2110696B1 (fr) * 2008-04-15 2013-10-16 Sensovation AG Procédé et appareil d'autofocus
WO2010067256A1 (fr) * 2008-12-09 2010-06-17 Koninklijke Philips Electronics N.V. Mise au point automatique pour système de microscope
WO2010103389A1 (fr) 2009-03-11 2010-09-16 Sensovation Ag Procédé d'autofocus et système d'autofocus
JP5395507B2 (ja) * 2009-05-21 2014-01-22 キヤノン株式会社 三次元形状測定装置、三次元形状測定方法及びコンピュータプログラム
US8304704B2 (en) 2009-07-27 2012-11-06 Sensovation Ag Method and apparatus for autofocus using a light source pattern and means for masking the light source pattern
DE102010041484A1 (de) * 2010-09-27 2012-03-29 Carl Zeiss Microimaging Gmbh Autofokussierverfahren und Autofokussiervorrichtung
US9488819B2 (en) 2012-08-31 2016-11-08 Nanotronics Imaging, Inc. Automatic microscopic focus system and method for analysis of transparent or low contrast specimens
DE102013103971A1 (de) 2013-04-19 2014-11-06 Sensovation Ag Verfahren zum Erzeugen eines aus mehreren Teilbildern zusammengesetzten Gesamtbilds eines Objekts
US10007102B2 (en) 2013-12-23 2018-06-26 Sakura Finetek U.S.A., Inc. Microscope with slide clamping assembly
EP3121637B1 (fr) * 2015-07-24 2021-09-01 Leica Instruments (Singapore) Pte. Ltd. Microscope et procêdê de gênêration d'une image combinêe à partir de plusieurs images individuelles d'un objet
US11280803B2 (en) 2016-11-22 2022-03-22 Sakura Finetek U.S.A., Inc. Slide management system
FR3076912A1 (fr) * 2018-01-16 2019-07-19 Francois Perraut Dispositif d’eclairage de microscope permettant d’effectuer la mise au point de l’image d’un objet
US10247910B1 (en) 2018-03-14 2019-04-02 Nanotronics Imaging, Inc. Systems, devices and methods for automatic microscopic focus
US10146041B1 (en) 2018-05-01 2018-12-04 Nanotronics Imaging, Inc. Systems, devices and methods for automatic microscope focus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125741A (en) * 1962-01-12 1964-03-17 Permanent recording electron responsive chemical
GB1148909A (en) * 1965-04-19 1969-04-16 Sumitomo Chemical Co Process for production of novel phenylhydrazone and phenylhydrazine derivatives
US4133788A (en) * 1978-01-23 1979-01-09 Borg-Warner Corporation Polymer latex which is cross-linked with a dialkyl tin diacrylate in the preparation of grafted copolymers
DE3125741A1 (de) * 1981-06-30 1983-01-13 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur scharfeinstellung eines mikroskops auf strukturlose und reflektierende flaechen, insbesondere von hochreflektierenden siliziumscheiben
JPS58153327A (ja) * 1982-03-08 1983-09-12 Toshiba Corp パタ−ン検査装置
DD263603A1 (de) * 1987-09-02 1989-01-04 Zeiss Jena Veb Carl Verfahren und einrichtung zum automatischen fokussieren an koordinatenmessgeraeten mit optoelektronischer strukturorterkennung
DE4133788A1 (de) * 1991-10-11 1993-04-15 Leica Ag Verfahren zur autofokussierung von mikroskopen und autofokussystem fuer mikroskope
US5485209A (en) * 1992-04-03 1996-01-16 Canon Kabushiki Kaisha Pupil divisional type focusing position detection apparatus for electronic cameras
US5608529A (en) * 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
JP3462006B2 (ja) * 1996-05-20 2003-11-05 株式会社ミツトヨ オートフォーカス装置
JP2971823B2 (ja) * 1996-11-11 1999-11-08 株式会社ミツトヨ フォーカス検出ユニット及びそれを備えた顕微鏡
JP3615412B2 (ja) * 1999-03-02 2005-02-02 株式会社ミツトヨ フォーカス検出ユニットおよびそれを備えた光学式測定機

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO02075424A1 *

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US20040021936A1 (en) 2004-02-05
DE10112639A1 (de) 2002-09-19
WO2002075424A1 (fr) 2002-09-26

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