EP1257693B1 - Composite copper foil and manufacturing method thereof - Google Patents

Composite copper foil and manufacturing method thereof Download PDF

Info

Publication number
EP1257693B1
EP1257693B1 EP01923548A EP01923548A EP1257693B1 EP 1257693 B1 EP1257693 B1 EP 1257693B1 EP 01923548 A EP01923548 A EP 01923548A EP 01923548 A EP01923548 A EP 01923548A EP 1257693 B1 EP1257693 B1 EP 1257693B1
Authority
EP
European Patent Office
Prior art keywords
foil
carrier
release layer
copper foil
anyone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01923548A
Other languages
German (de)
French (fr)
Other versions
EP1257693A1 (en
Inventor
Raymond Gales
René LANNERS
Michel Streel
Akitoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Circuit Foil Luxemburg SARL
Original Assignee
Circuit Foil Luxembourg Trading SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Circuit Foil Luxembourg Trading SARL filed Critical Circuit Foil Luxembourg Trading SARL
Publication of EP1257693A1 publication Critical patent/EP1257693A1/en
Application granted granted Critical
Publication of EP1257693B1 publication Critical patent/EP1257693B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611Smooth layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • H05K3/025Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12431Foil or filament smaller than 6 mils
    • Y10T428/12438Composite
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12472Microscopic interfacial wave or roughness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771Transition metal-base component
    • Y10T428/12806Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826Group VIB metal-base component
    • Y10T428/12847Cr-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771Transition metal-base component
    • Y10T428/12861Group VIII or IB metal-base component
    • Y10T428/12903Cu-base component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12993Surface feature [e.g., rough, mirror]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Definitions

  • the present invention relates to a composite copper foil and to a manufacturing method thereof.
  • the composite copper foil may be used namely in the manufacture of printed circuit boards.
  • Such a composite copper foil is disclosed in US Pat. 3,998,601. It comprises a thin copper foil-hereinafter called thin functional foil-mounted on a carrier foil, wherein the carrier foil is provided with an intermediate, very thin release layer which permits clean and easy separation of the thin functional foil.
  • the carrier foil when produced by conventional electrolytic techniques, will have a smooth cathode side (also known as shiny side) formed in contact with a rotating titanium cathode drum and an opposite, rough electrolyte side (also known as matte side).
  • the surface of the thin functional foil conforms to that of the carrier foil, since the release layer is very thin.
  • US Pat. 3,998,601 further suggests that the thin functional foil should be deposited on the electrolyte side of the carrier foil to obtain a surface having a satin finish, or on its cathode side to obtain a surface having a mirror-like finish.
  • the thin functional foil is in practice always electrodeposited on the cathode side after deposition of the release layer.
  • the surface roughness is given by the Rz parameter, which is for the cathode side: 1.5 ⁇ m ⁇ Rz ⁇ 3.5 ⁇ m. Since the thin functional foil surface conforms to that of the cathode side, its surface roughness is substantially equivalent to that of the cathode side.
  • Such a composite copper foil has proved very advantageous for the manufacture of PCB's. Indeed, during lamination of the composite copper foil on a resinous insulating substrate the thin functional foil is effectively protected by the carrier foil against resin bleed-trough and surface damages. Hence, after release of the carrier foil there is provided a copper clad laminate having a very smooth surface.
  • circuit patterns may only be obtained by applying very high density circuit pattern photo-definition and chemical etching processes to ultra-smooth and defect free surfaces.
  • known composite copper foils do not provide a functional foil surface which is sufficiently free of defects for these increased miniaturization requirements.
  • cathode drums generally exhibit surface flaws which are responsible for the presence of striae on the cathode side of the carrier foil and consequently also on the surface of the thin functional foil formed thereon. Until now these striae have not been considered as problematic for the manufacture of circuit patterns, but this is no longer true when facing future miniaturization specifications.
  • One way to improve the surface quality of functional foil could be to form the cathode side of the carrier foil on a cathode drum having an ultra-smooth surface roughness, in particular free of surface flaws. But the actual technique does not allow the manufacture of ultra-smooth cathode drums at reasonable costs. Furthermore, such an ultra-smooth cathode drum would be easily damaged, and the maintenance of such an ultra-smooth cathode drum would be very expensive.
  • the object of the present invention is to provide a composite copper foil having a thin functional foil with an ultra-smooth, high quality surface at reasonable costs. According to the present invention, this object is achieved by a composite copper foil according to claim 1.
  • the front side of the functional foil of the present invention is formed on an ultra-smooth electrolyte side and not on a shiny cathode side of an electrodeposited carrier foil.
  • the thin functional foil As the thin functional foil is deposited over the release layer on the electrolyte side of the carrier foil, its front side conforms to the surface of the electrolyte side of the carrier foil and therefore has a surface roughness Rz substantially equivalent to that of the electrolyte side.
  • the electrolyte side of the carrier foil As the electrolyte side of the carrier foil is not formed on a cathode, it is free of "cathode induced" surface flaws. It follows that the front side of the thin functional foil, which is a mirror of the electrolyte side of the carrier foil, is also completely free of surface flaws, as e.g. striae.
  • a first advantage of the surface free of defects of this thin functional foil is that photo-definition of circuit patterns can be improved.
  • Another advantage is the homogeneity of chemical etching: the more homogeneous the surface, the more homogeneous the etching.
  • the new front side of the functional foil provides optimal conditions during process steps of PCB manufacture, and namely the copper plating step.
  • the functional foil As the functional foil is thin, its back side has a surface roughness substantially equivalent to that of the front side, namely Rz ⁇ 3.5 ⁇ m. Hence, the back side has a surface roughness which lends itself very welt to a uniform, fine nodular surface treatment.
  • a carrier foil is very advantageous, since it provides a support for the thin functional foil, and proves very efficient for protecting the ultra-smooth surface during handling and lamination.
  • the carrier foil predominantly consists of equiaxed crystals, at least in the vicinity of the interface with the release layer. Such a crystal structure favors the formation of an ultra-smooth electrolyte side.
  • the carrier foil may be formed by electrodeposition of a metal or alloy, advantageously inexpensive, such as iron or brass. However, the carrier foil is preferably an electrodeposited copper foil.
  • the carrier foil may have a thickness between 18 ⁇ m and 105 ⁇ m.
  • the thin functional foil predominantly consists of equiaxed crystals, whereby it conforms to the underlying ultra-smooth and homogeneous surface more easily.
  • the thin functional foil front side may have a surface roughness parameter Rz less than or equal to 3.5 ⁇ m.
  • the thin functional foil has a thickness between 2 and 13 ⁇ m.
  • Such a thin functional foil having an equiaxed structure allows very rapid, fine and homogeneous etching.
  • this structure facilitates the formation of sharp and rectangularly shaped conducting elements. In other words, the number of conducting elements per surface unit may be increased, the size of the conducting elements and the space between them (pitch) reduced, thereby enabling the formation of very high density circuit patterns.
  • a 3 or 5 ⁇ m thick functional foil may be directly drilled by laser means.
  • the release layer and the carrier foil may be peeled off simultaneously.
  • the release layer may be an electrodeposited, chromium based layer. Preferably, its thickness is lower than 1.5 ⁇ m, more preferably the release layer is about 0.1 ⁇ m thick.
  • the electrolyte side and the front side are both ultra-smooth and homogeneous, homogeneous adhesion between the carrier foil and the functional foil is obtained.
  • the thickness of the chromium layer is adjusted in such a way that the peel strength necessary to peel off simultaneously the release layer and the carrier foil is between 30 and 150 N/m. This warrants a sufficient adhesion between the carrier foil and the thin functional foil to provide an optimal protection of the front surface of the thin functional foil during lamination and the different PCB manufacturing process steps, together with an easy peel-off of the carrier foil.
  • a method for manufacturing a composite copper foil comprising the following steps:
  • the electrodeposition of the carrier foil is carried out so as to form an electrolyte side with a surface roughness Rz less than or equal to 3.5 ⁇ m.
  • the method of the invention allows the manufacture of a thin functional foil having an ultra-smooth, very homogeneous surface, which is completely free of surface defects, such as striae.
  • the electrodeposition of the carrier foil may be carried out from an electrolyte solution comprising 70 to 110 g/l of copper (as copper sulfate), 80 to 120 g/l of sulfuric acid, as well as 1 to 10 ppm of a carrier agent, 1 to 10 ppm of a leveling agent and 0.1 to 2 ppm of a brightener agent.
  • the leveling agent may be an organic compound containing a nitrogen atom or an oxygen atom chosen from: polyethylene imine, poly(propylene glycol-b-ethylene glycol-b-propylene glycol) bis (2-aminopropyl ether), N-allylthiourea.
  • the brightener agent may be a sulfured compound chosen from: 2-mercaptobenzimidazol, 3-3'-thiodipropionic acid, sodium 3-mercapto 1-propanesulfonate, thio diglycolic acid, thiolactic acid.
  • equiaxed crystals are predominantly formed in the carrier foil, at least in the vicinity of the interface with the release layer, so as to favor the formation of a carrier foil having an ultra-smooth, uniform and defect free electrolyte side. This may be achieved when operating under controlled electrolysis parameters and when using the above mentioned electrolyte solution.
  • the thin functional foil which is also preferably electrodeposited under controlled conditions, may also consist of equiaxed crystals.
  • a surface treatment is performed on the back side of the thin functional foil in order to enhance its bonding to a future resin layer or substrate.
  • This surface treatment may comprise the formation of fine copper nodules on tne back side in order to leave a smooth and regular impression of the etched copper in the resin. It follows that adhesion is sufficiently high for thin conducting elements, etching speed is high, conducting elements show fine and sharp outlines, and the fine nodular impression is ideal for sequential build-up.
  • a passivation treatment may be applied to the back side of the thin functional foil, preferably after the surface treatment. Both sides of the functional foil are subsequently protected, the front side being protected by the carrier foil, and the back side by a passivation layer.
  • a resin layer is formed on the back side of the thin functional foil.
  • the composite copper foil may therefore be directly used in the manufacture of copper clad laminates, printed circuit boards, and multi-layer printed circuit boards, namely by sequential build-up.
  • Fig.1 shows a view, obtained by Scanning Electron Microscopy (magnification: 1000X), of a composite copper foil 10 in accordance with the invention.
  • An understanding of this composite copper foil 10 and of its characteristics will be made clear by the description of the different manufacturing steps of a preferred embodiment of the method in accordance with the invention.
  • a carrier foil 12 is formed by electrodeposition of copper from an electrolyte solution onto a rotating titanium cathode drum.
  • the electrolyte solution is circulated between the cathode drum and a closely spaced anode.
  • the carrier foil 12 has a cathode side formed in contact with the drum and an opposite electrolyte side formed in the electrolyte solution.
  • the electrodeposition of the carrier foil 12 is carried out so as to form an electrolyte side having a surface roughness Rz less than or equal to 3.5 ⁇ m (Rz ⁇ 3.5 ⁇ m).
  • the roughness Rz was measured according to DIN 4768.
  • the parameters of electrodeposition are adjusted to grow a carrier foil 12 with a thickness between 18 and 105 ⁇ m, e.g. of 35 ⁇ m or 70 ⁇ m.
  • a very thin release layer 14 is formed on the electrolyte side of the carrier foil 12.
  • a thin functional foil 16 is formed by electrodeposition of copper on the release layer 14.
  • the thin functional foil 16 has a front side in contact with the release layer 14 and an opposite back side.
  • the parameters of electrodeposition are adjusted to grow a functional foil 16 with a thickness between 2 and 13 ⁇ m.
  • the functional foil 16 may be grown to a thickness of 3, 5, 9 or 12 ⁇ m.
  • the electrodeposition of the carrier foil 12 is carried out so as to obtain a carrier foil 12 with an electrolyte side having a surface roughness Rz less than or equal to 3.5 ⁇ m.
  • the surface roughness of the electrolyte side is large, in particular larger than that of the cathode side and the functional copper foil is formed on the cathode side.
  • the release layer which is a very thin layer, conforms to the cathode side surface.
  • the front side of the functional foil which is formed over the release layer, conforms to that of the cathode side.
  • the cathode side in the conventional practice, is used for the formation of the functional foil because it has a lower surface roughness than the electrolyte side. Indeed, an even surface is desirable for a fine and sharp photo-chemical etching of circuit patterns. Since the cathode side is formed in contact with the cathode drum, its surface roughness depends on that of the cathode drum. The surface roughness of the cathode side can therefore not be lower than that of the cathode drum surface, and a conventional cathode side may be too rough to form a functional foil having an ultra-smooth front side thereon. Moreover, a cathode drums generally exhibits surface flaws which are responsible for the presence of striae on the cathode side (see Fig.2 - magnification 1000X) and consequently also on the front side of the thin functional foil.
  • a carrier foil having an electrolyte side with a surface roughness Rz ⁇ 3.5 ⁇ m there is provided a high quality support surface for the formation of the functional foil 16. It follows that the front side of the functional foil 16 formed on this electrolyte side is also of high quality: ultra-smooth, homogeneous, and free of defects. Furthermore, as the functional foil 16 is thin, the surface roughness of the back side is approximately equivalent to that of the front side.
  • the electrodeposition operating parameters and the electrolyte composition should be controlled so as to obtain a very fine grained electrodeposited carrier foil 12, preferably with equiaxed grains.
  • Equiaxed grains or crystals having an aspect ratio of the grain nearly equal to one, are preferred to columnar crystals as they promote the formation of a smooth, homogeneous surface. Therefore, it is preferable to have equiaxed crystals at least in the vicinity of the interface with the release layer 14, as they form the surface supporting the thin functional foil 16.
  • Such a carrier foil may be obtained by carrying out the electrodeposition at step a) from an electrolyte solution comprising 70 to 110 g/l of copper (as copper sulfate ) and 80 to 120 g/l of sulfuric acid together with three kinds of organic additives so as to predominantly form equiaxed crystals in the carrier foil 12.
  • the electrolyte solution also comprises:
  • the operating current density should be in the range of about 5 to 80 A/dm 2 .
  • the operating temperature should be in the range of 30 to 70°C.
  • Fig.3 shows a S.E.M.-view (magnification 1000X) of the electrolyte side of the carrier foil 12 obtained under the operating conditions described above.
  • the difference with Fig.2 is striking: there are no striae and the surface is homogeneous and smooth.
  • a very thin release layer is formed on the electrolyte side of the carrier foil.
  • This very thin release layer 14 is preferably a chromium based layer with a thickness of about 0.1 ⁇ m. It will be understood that this thickness of 0.1 ⁇ m is not measured but calculated from the weight of chromium deposited per unit surface and from the chromium density.
  • Such a release layer is typically formed in a chromium bath containing 180 to 300 g/l of chromic acid (calculated as CrO 3 ) and 1.8 to 3 g/l of sulfuric acid (H 2 SO 4 ).
  • the electrical current density should be in the range of 5 to 40 A/dm 2 and the bath temperature in the range of 18 to 60°C.
  • the release layer 14 permits an easy separation of the carrier foil 12, leaving a clean and defect-free front side. It shall be observed that the adhesion provided by the release layer 14 should be sufficient to prevent the carrier foil 12 from peeling off during the many PCB process steps that the composite copper foil 10 may go through. Such PCB process steps are various: coating with insulating resin, sizing the composite copper foil 10 from roll into sheets, register holes punching, lay-up and lamination, trimming, through holes drilling using the carrier foil 12 as "drill bit entry".
  • the peel strength necessary to peel off the carrier foil 12 is homogeneous and relatively low over the whole interface, as compared to a release layer having the same thickness exhibiting a rough interface with the functional foil.
  • This is particularly advantageous for lamination, where the peel strength conventionally increases, due to the thermal treatment needed to adhere the functional foil 16 to a resinous substrate. Therefore, the peel strength will be lower than in the conventional technique, even with polymers having high glass transition temperatures.
  • the chromium layer thickness should be adjusted in such a way that the peel strength needed to peel off the carrier layer be in the range of 30 to 150 N/m.
  • the thin functional foil 16 is formed on the release layer 14 by electrodeposition of copper from an electrolyte solution.
  • the electrodeposition is advantageously controlled so as to obtain an equiaxed crystal structure in order to promote the formation of an ultra-smooth surface. It is believed that, since the functional copper foil 16 grows as an epitaxial layer (i.e. deposited over another copper layer-the chromium based release layer 14 being generally too thin to impose its structure), the structure is imposed by the carrier foil 12. Therefore, an equiaxed structure in the functional foil 16 may be obtained from an electrolyte solution comprising 30 to 110 g/l of copper (as copper sulfate) and 30 to 120 g/l of sulfuric acid. The operating electric current density should be in the range of 5 to 60 A/dm 2 . The temperature should be in the range of 30 to 70°C.
  • Fig.4 shows a S.E.M.-view (magnification 2000X) of a front side of a functional foil obtained in the conventional technique
  • Fig.5 shows a S.E.M.-view (magnification 2000X) of the front side of the functional foil 16, which was formed on the electrolyte side shown in Fig.3.
  • the surface quality of the front side of the functional foil 16 is clearly better than that of the conventional front side of Fig.4.
  • the front side shown in Fig.5 is free of striae. Furthermore, this surface is uniform with a low surface roughness (Rz ⁇ 3.5 ⁇ m).
  • the back side is approximately as smooth as the front side (Rz ⁇ 3.5 ⁇ m).
  • the functional foil 16 is thin, and has two ultra-smooth surfaces. Such a functional foil 16 enables very rapid and homogeneous etching, and the formation of very high density circuit patterns. Furthermore, the equiaxed structure favorizes the formation of sharp and rectangularly shaped conducting elements.
  • a surface treatment is advantageously performed on the back side of the functional foil 16. This consists in forming fine copper nodules on the back side, whereby the bonding, i.e. adhesion, of the functional foil 16 to a resinous substrate can be enhanced.
  • Fig.6 the surface of a conventionally treated back side is shown. The nodules are coarse, and induce long etching durations as well as rough nodular impressions in the resinous substrate (see Fig.8). Conducting elements would be poorly defined and sequential build up hindered. A very fine nodular treatment has been developed for this smooth back side, as can be seen in Fig.7.
  • the fine copper nodules warrant a regular surface and a fine nodular impression after etching, as shown in Fig.9. Consequently, adhesion is sufficiently high for thin conducting elements, etching speed is high, conducting elements show fine and sharp outlines, and the fine nodular impression is ideal for sequential build-up.
  • a zinc and chrome based passivation layer is formed on the surface treated back side. Both sides of the functional foil 16 are now protected; the front side by the carrier foil 12 and the back side by the passivation layer.
  • a similar passivation treatment may also be applied to the electrode side of the carrier foil in order to avoid a blue window frame oxidation.
  • a resinous layer 18 is formed on the back side of the thin functional foil 16.
  • the composite copper foil 10 may thereby be used directly in the manufacture of PCB, namely in the manufacture of multi-layer PCB by sequential build-up, where the composite copper foil 10 can be directly laminated on a core board.
  • the composite copper foil 10 may be used in many PCB manufacturing processes, namely in multilayer PCB manufacturing by sequential build-up.
  • the thin functional foil 16 is 3 or 5 ⁇ m thick, it may be directly drilled by a laser beam, for micro-via holes drilling for example.
  • the formation of the thin functional foil on the release layer has been described by means of electrodeposition of copper.
  • the formation of the thin functionnal foil shall not be limited to this method.
  • copper may be deposited on the release layer by a PVD or CVD process followed by an electrodeposition in order to increase the thickness of the thin functional foil.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)

Description

Field of the invention
The present invention relates to a composite copper foil and to a manufacturing method thereof. The composite copper foil may be used namely in the manufacture of printed circuit boards.
Background of the invention
Such a composite copper foil is disclosed in US Pat. 3,998,601. It comprises a thin copper foil-hereinafter called thin functional foil-mounted on a carrier foil, wherein the carrier foil is provided with an intermediate, very thin release layer which permits clean and easy separation of the thin functional foil. The carrier foil, when produced by conventional electrolytic techniques, will have a smooth cathode side (also known as shiny side) formed in contact with a rotating titanium cathode drum and an opposite, rough electrolyte side (also known as matte side). The surface of the thin functional foil conforms to that of the carrier foil, since the release layer is very thin. US Pat. 3,998,601 further suggests that the thin functional foil should be deposited on the electrolyte side of the carrier foil to obtain a surface having a satin finish, or on its cathode side to obtain a surface having a mirror-like finish.
For the manufacture of printed circuit boards (PCB), a low surface roughness, i.e. a mirror-like surface finish, is preferred. Therefore, the thin functional foil is in practice always electrodeposited on the cathode side after deposition of the release layer. Typically the surface roughness is given by the Rz parameter, which is for the cathode side: 1.5 µm ≤ Rz ≤ 3.5 µm. Since the thin functional foil surface conforms to that of the cathode side, its surface roughness is substantially equivalent to that of the cathode side.
Such a composite copper foil has proved very advantageous for the manufacture of PCB's. Indeed, during lamination of the composite copper foil on a resinous insulating substrate the thin functional foil is effectively protected by the carrier foil against resin bleed-trough and surface damages. Hence, after release of the carrier foil there is provided a copper clad laminate having a very smooth surface.
With regard to actual and future miniaturization requirements, it is desirable to increase the number of conducting elements per surface unit and to reduce the size of the conducting elements and the space between them (pitch). Such circuit patterns may only be obtained by applying very high density circuit pattern photo-definition and chemical etching processes to ultra-smooth and defect free surfaces. It will be appreciated that known composite copper foils do not provide a functional foil surface which is sufficiently free of defects for these increased miniaturization requirements. Indeed, cathode drums generally exhibit surface flaws which are responsible for the presence of striae on the cathode side of the carrier foil and consequently also on the surface of the thin functional foil formed thereon. Until now these striae have not been considered as problematic for the manufacture of circuit patterns, but this is no longer true when facing future miniaturization specifications.
One way to improve the surface quality of functional foil could be to form the cathode side of the carrier foil on a cathode drum having an ultra-smooth surface roughness, in particular free of surface flaws. But the actual technique does not allow the manufacture of ultra-smooth cathode drums at reasonable costs. Furthermore, such an ultra-smooth cathode drum would be easily damaged, and the maintenance of such an ultra-smooth cathode drum would be very expensive.
Object of the invention
The object of the present invention is to provide a composite copper foil having a thin functional foil with an ultra-smooth, high quality surface at reasonable costs. According to the present invention, this object is achieved by a composite copper foil according to claim 1.
Summary of the invention
Contrary to the conventional technique for obtaining a functional foil with a smooth surface, the front side of the functional foil of the present invention is formed on an ultra-smooth electrolyte side and not on a shiny cathode side of an electrodeposited carrier foil.
As the thin functional foil is deposited over the release layer on the electrolyte side of the carrier foil, its front side conforms to the surface of the electrolyte side of the carrier foil and therefore has a surface roughness Rz substantially equivalent to that of the electrolyte side. As the electrolyte side of the carrier foil is not formed on a cathode, it is free of "cathode induced" surface flaws. It follows that the front side of the thin functional foil, which is a mirror of the electrolyte side of the carrier foil, is also completely free of surface flaws, as e.g. striae.
A first advantage of the surface free of defects of this thin functional foil is that photo-definition of circuit patterns can be improved. Another advantage is the homogeneity of chemical etching: the more homogeneous the surface, the more homogeneous the etching. Moreover, the new front side of the functional foil provides optimal conditions during process steps of PCB manufacture, and namely the copper plating step.
As the functional foil is thin, its back side has a surface roughness substantially equivalent to that of the front side, namely Rz ≤ 3.5 µm. Hence, the back side has a surface roughness which lends itself very welt to a uniform, fine nodular surface treatment.
Furthermore, the presence of a carrier foil is very advantageous, since it provides a support for the thin functional foil, and proves very efficient for protecting the ultra-smooth surface during handling and lamination.
Advantageously, the carrier foil predominantly consists of equiaxed crystals, at least in the vicinity of the interface with the release layer. Such a crystal structure favors the formation of an ultra-smooth electrolyte side. The carrier foil may be formed by electrodeposition of a metal or alloy, advantageously inexpensive, such as iron or brass. However, the carrier foil is preferably an electrodeposited copper foil. The carrier foil may have a thickness between 18 µm and 105 µm.
Advantageously, the thin functional foil predominantly consists of equiaxed crystals, whereby it conforms to the underlying ultra-smooth and homogeneous surface more easily. The thin functional foil front side may have a surface roughness parameter Rz less than or equal to 3.5 µm. Preferably, the thin functional foil has a thickness between 2 and 13 µm. Such a thin functional foil having an equiaxed structure, allows very rapid, fine and homogeneous etching. Moreover, this structure facilitates the formation of sharp and rectangularly shaped conducting elements. In other words, the number of conducting elements per surface unit may be increased, the size of the conducting elements and the space between them (pitch) reduced, thereby enabling the formation of very high density circuit patterns. Furthermore a 3 or 5 µm thick functional foil may be directly drilled by laser means.
The release layer and the carrier foil may be peeled off simultaneously. The release layer may be an electrodeposited, chromium based layer. Preferably, its thickness is lower than 1.5 µm, more preferably the release layer is about 0.1 µm thick. As the electrolyte side and the front side are both ultra-smooth and homogeneous, homogeneous adhesion between the carrier foil and the functional foil is obtained. Advantageously the thickness of the chromium layer is adjusted in such a way that the peel strength necessary to peel off simultaneously the release layer and the carrier foil is between 30 and 150 N/m. This warrants a sufficient adhesion between the carrier foil and the thin functional foil to provide an optimal protection of the front surface of the thin functional foil during lamination and the different PCB manufacturing process steps, together with an easy peel-off of the carrier foil.
According to another aspect of the invention, there is provided a method for manufacturing a composite copper foil, comprising the following steps:
  • (a) forming a carrier foil by electrodeposition onto a cathode, the carrier foil having a cathode side formed in contact with said cathode and an opposite electrolyte side;
  • (b) forming a very thin release layer on the electrolyte side of the carrier foil; and
  • (c) forming a thin functional foil by deposition of copper on the release layer, the thin functional foil having a front side facing the release layer and an opposite back side.
  • According to an important aspect of the invention, the electrodeposition of the carrier foil is carried out so as to form an electrolyte side with a surface roughness Rz less than or equal to 3.5 µm. The method of the invention allows the manufacture of a thin functional foil having an ultra-smooth, very homogeneous surface, which is completely free of surface defects, such as striae.
    The electrodeposition of the carrier foil may be carried out from an electrolyte solution comprising 70 to 110 g/l of copper (as copper sulfate), 80 to 120 g/l of sulfuric acid, as well as 1 to 10 ppm of a carrier agent, 1 to 10 ppm of a leveling agent and 0.1 to 2 ppm of a brightener agent.
    The carrier agent may be a high molecular weight polymer soluble in the acid chosen from: gelatin (Mw= 2 000 to 100 000), polyacrylamide (Mw= 500 000 to 12 000 000), polyethylene glycol (Mw= 400 to 10 000), polyethylene glycol monomethyl ether (Mw= 300 to 5 000), polyethylene glycol dimethyl ether (Mw= 250 to 3 000), hydroxy ethyl cellulose (Mw= 10 000 to 100 000). The leveling agent may be an organic compound containing a nitrogen atom or an oxygen atom chosen from: polyethylene imine, poly(propylene glycol-b-ethylene glycol-b-propylene glycol) bis (2-aminopropyl ether), N-allylthiourea. The brightener agent may be a sulfured compound chosen from: 2-mercaptobenzimidazol, 3-3'-thiodipropionic acid, sodium 3-mercapto 1-propanesulfonate, thio diglycolic acid, thiolactic acid.
    Preferably, equiaxed crystals are predominantly formed in the carrier foil, at least in the vicinity of the interface with the release layer, so as to favor the formation of a carrier foil having an ultra-smooth, uniform and defect free electrolyte side. This may be achieved when operating under controlled electrolysis parameters and when using the above mentioned electrolyte solution. The thin functional foil, which is also preferably electrodeposited under controlled conditions, may also consist of equiaxed crystals.
    Advantageously, at a further step (d) a surface treatment is performed on the back side of the thin functional foil in order to enhance its bonding to a future resin layer or substrate. This surface treatment may comprise the formation of fine copper nodules on tne back side in order to leave a smooth and regular impression of the etched copper in the resin. It follows that adhesion is sufficiently high for thin conducting elements, etching speed is high, conducting elements show fine and sharp outlines, and the fine nodular impression is ideal for sequential build-up.
    At a further step (e) a passivation treatment may be applied to the back side of the thin functional foil, preferably after the surface treatment. Both sides of the functional foil are subsequently protected, the front side being protected by the carrier foil, and the back side by a passivation layer.
    Advantageously, at a further step (f), a resin layer is formed on the back side of the thin functional foil. The composite copper foil may therefore be directly used in the manufacture of copper clad laminates, printed circuit boards, and multi-layer printed circuit boards, namely by sequential build-up.
    Brief description of the drawings
    The present invention will be more apparent from the following description of a not limiting embodiment with reference to the attached drawings, wherein
    Fig.1:
    is a cross-sectional S.E.M.-view of a composite copper foil of the invention;
    Fig.2:
    is a S.E.M.-view of the cathode side of a conventional carrier foil;
    Fig.3:
    is a S.E.M.-view of the electrolyte side of the carrier foil of the composite copper foil shown in Fig.1;
    Fig.4:
    is a S.E.M.-view of the front side of a conventional functional foil;
    Fig.5:
    is a S.E.M.-view of the front side of the functional foil of the composite copper foil shown in Fig.1;
    Fig.6:
    is a S.E.M.-view of a back side treated with a conventional nodular surface treatment;
    Fig.7:
    is a S.E.M.-view of the back side of the composite copper foil of Fig.1 treated with a fine nodular surface treatment;
    Fig.8:
    is a S.E.M.-view of the impression in a resin of the conventionally treated back side of Fig.6;
    Fig.9:
    is a S.E.M.-view of the impression in a resin of the back side of Fig.7 treated with a fine nodular surface treatment.
    Detailed description of a preferred embodiment
    Fig.1 shows a view, obtained by Scanning Electron Microscopy (magnification: 1000X), of a composite copper foil 10 in accordance with the invention. An understanding of this composite copper foil 10 and of its characteristics will be made clear by the description of the different manufacturing steps of a preferred embodiment of the method in accordance with the invention.
    At a first manufacturing step (a) a carrier foil 12 is formed by electrodeposition of copper from an electrolyte solution onto a rotating titanium cathode drum. The electrolyte solution is circulated between the cathode drum and a closely spaced anode. Hence, the carrier foil 12 has a cathode side formed in contact with the drum and an opposite electrolyte side formed in the electrolyte solution. The electrodeposition of the carrier foil 12 is carried out so as to form an electrolyte side having a surface roughness Rz less than or equal to 3.5 µm (Rz ≤ 3.5 µm). The roughness Rz was measured according to DIN 4768. Preferably, the parameters of electrodeposition are adjusted to grow a carrier foil 12 with a thickness between 18 and 105 µm, e.g. of 35 µm or 70 µm.
    At a second step b), a very thin release layer 14 is formed on the electrolyte side of the carrier foil 12.
    At a third step c), a thin functional foil 16 is formed by electrodeposition of copper on the release layer 14. The thin functional foil 16 has a front side in contact with the release layer 14 and an opposite back side. Preferably, the parameters of electrodeposition are adjusted to grow a functional foil 16 with a thickness between 2 and 13 µm. For example, the functional foil 16 may be grown to a thickness of 3, 5, 9 or 12 µm.
    As mentioned at step (a) the electrodeposition of the carrier foil 12 is carried out so as to obtain a carrier foil 12 with an electrolyte side having a surface roughness Rz less than or equal to 3.5 µm. As a matter of fact, in the conventional technique, the surface roughness of the electrolyte side is large, in particular larger than that of the cathode side and the functional copper foil is formed on the cathode side. The release layer, which is a very thin layer, conforms to the cathode side surface. As a consequence, the front side of the functional foil, which is formed over the release layer, conforms to that of the cathode side. It will be clearly understood that the cathode side, in the conventional practice, is used for the formation of the functional foil because it has a lower surface roughness than the electrolyte side. Indeed, an even surface is desirable for a fine and sharp photo-chemical etching of circuit patterns. Since the cathode side is formed in contact with the cathode drum, its surface roughness depends on that of the cathode drum. The surface roughness of the cathode side can therefore not be lower than that of the cathode drum surface, and a conventional cathode side may be too rough to form a functional foil having an ultra-smooth front side thereon. Moreover, a cathode drums generally exhibits surface flaws which are responsible for the presence of striae on the cathode side (see Fig.2 - magnification 1000X) and consequently also on the front side of the thin functional foil.
    By forming, according to the present method, a carrier foil having an electrolyte side with a surface roughness Rz ≤ 3.5 µm, there is provided a high quality support surface for the formation of the functional foil 16. It follows that the front side of the functional foil 16 formed on this electrolyte side is also of high quality: ultra-smooth, homogeneous, and free of defects. Furthermore, as the functional foil 16 is thin, the surface roughness of the back side is approximately equivalent to that of the front side.
    The electrodeposition operating parameters and the electrolyte composition should be controlled so as to obtain a very fine grained electrodeposited carrier foil 12, preferably with equiaxed grains. Equiaxed grains or crystals, having an aspect ratio of the grain nearly equal to one, are preferred to columnar crystals as they promote the formation of a smooth, homogeneous surface. Therefore, it is preferable to have equiaxed crystals at least in the vicinity of the interface with the release layer 14, as they form the surface supporting the thin functional foil 16.
    Such a carrier foil may be obtained by carrying out the electrodeposition at step a) from an electrolyte solution comprising 70 to 110 g/l of copper (as copper sulfate ) and 80 to 120 g/l of sulfuric acid together with three kinds of organic additives so as to predominantly form equiaxed crystals in the carrier foil 12. Hence, the electrolyte solution also comprises:
  • 1) 1 to 10 ppm of a carrier agent, which is a high molecular weight polymer soluble in the acid chosen from: Gelatin (Mw= 2 000 to 100 000), Polyacrylamide (Mw= 500 000 to 12 000 000), polyethylene glycol (Mw= 400 to 10 000), polyethylene glycol monomethyl ether (Mw= 300 to 5 000), polyethylene glycol dimethyl ether (Mw= 250 to 3 000), Hydroxy ethyl cellulose (Mw= 10 000 to 100 000); and
  • 2) 1 to 10 ppm of a leveling agent, which is an organic compound containing a nitrogen atom or an oxygen atom chosen from: polyethylene imine, poly(propylene glycol-b-ethylene glycol-b-propylene glycol) bis (2-aminopropyl ether), N-Allylthiourea; and
  • 3) 0.1 to 2 ppm of a brightener agent, which is a sulfured compound chosen from: 2-mercaptobenzimidazol, 3-3'-thiodipropionic acid, sodium 3-mercapto 1-propanesulfonate, thio diglycolic acid, thiolactic acid.
  • When using the above mentioned electrolyte solution, the operating current density should be in the range of about 5 to 80 A/dm2. The operating temperature should be in the range of 30 to 70°C.
    Fig.3 shows a S.E.M.-view (magnification 1000X) of the electrolyte side of the carrier foil 12 obtained under the operating conditions described above. The difference with Fig.2 is striking: there are no striae and the surface is homogeneous and smooth.
    Then, in accordance with step (b), a very thin release layer is formed on the electrolyte side of the carrier foil. This very thin release layer 14 is preferably a chromium based layer with a thickness of about 0.1 µm. It will be understood that this thickness of 0.1 µm is not measured but calculated from the weight of chromium deposited per unit surface and from the chromium density. Such a release layer is typically formed in a chromium bath containing 180 to 300 g/l of chromic acid (calculated as CrO3) and 1.8 to 3 g/l of sulfuric acid (H2SO4). The electrical current density should be in the range of 5 to 40 A/dm2 and the bath temperature in the range of 18 to 60°C.
    The release layer 14 permits an easy separation of the carrier foil 12, leaving a clean and defect-free front side. It shall be observed that the adhesion provided by the release layer 14 should be sufficient to prevent the carrier foil 12 from peeling off during the many PCB process steps that the composite copper foil 10 may go through. Such PCB process steps are various: coating with insulating resin, sizing the composite copper foil 10 from roll into sheets, register holes punching, lay-up and lamination, trimming, through holes drilling using the carrier foil 12 as "drill bit entry".
    It shall be noted that since the interface between the release layer 14 and the functional foil 16 is ultra-smooth and homogeneous, the peel strength necessary to peel off the carrier foil 12 is homogeneous and relatively low over the whole interface, as compared to a release layer having the same thickness exhibiting a rough interface with the functional foil. This is particularly advantageous for lamination, where the peel strength conventionally increases, due to the thermal treatment needed to adhere the functional foil 16 to a resinous substrate. Therefore, the peel strength will be lower than in the conventional technique, even with polymers having high glass transition temperatures. The chromium layer thickness should be adjusted in such a way that the peel strength needed to peel off the carrier layer be in the range of 30 to 150 N/m.
    At next step (c) the thin functional foil 16 is formed on the release layer 14 by electrodeposition of copper from an electrolyte solution. Here again, the electrodeposition is advantageously controlled so as to obtain an equiaxed crystal structure in order to promote the formation of an ultra-smooth surface. It is believed that, since the functional copper foil 16 grows as an epitaxial layer (i.e. deposited over another copper layer-the chromium based release layer 14 being generally too thin to impose its structure), the structure is imposed by the carrier foil 12. Therefore, an equiaxed structure in the functional foil 16 may be obtained from an electrolyte solution comprising 30 to 110 g/l of copper (as copper sulfate) and 30 to 120 g/l of sulfuric acid. The operating electric current density should be in the range of 5 to 60 A/dm2. The temperature should be in the range of 30 to 70°C.
    Fig.4 shows a S.E.M.-view (magnification 2000X) of a front side of a functional foil obtained in the conventional technique, whereas Fig.5 shows a S.E.M.-view (magnification 2000X) of the front side of the functional foil 16, which was formed on the electrolyte side shown in Fig.3. The surface quality of the front side of the functional foil 16 is clearly better than that of the conventional front side of Fig.4. As can be seen, the front side shown in Fig.5 is free of striae. Furthermore, this surface is uniform with a low surface roughness (Rz ≤ 3.5 µm). As explained, the back side is approximately as smooth as the front side (Rz ≤ 3.5 µm). It follows that the functional foil 16 is thin, and has two ultra-smooth surfaces. Such a functional foil 16 enables very rapid and homogeneous etching, and the formation of very high density circuit patterns. Furthermore, the equiaxed structure favorizes the formation of sharp and rectangularly shaped conducting elements.
    At a further manufacturing step (d) a surface treatment is advantageously performed on the back side of the functional foil 16. This consists in forming fine copper nodules on the back side, whereby the bonding, i.e. adhesion, of the functional foil 16 to a resinous substrate can be enhanced. In Fig.6, the surface of a conventionally treated back side is shown. The nodules are coarse, and induce long etching durations as well as rough nodular impressions in the resinous substrate (see Fig.8). Conducting elements would be poorly defined and sequential build up hindered. A very fine nodular treatment has been developed for this smooth back side, as can be seen in Fig.7. The fine copper nodules warrant a regular surface and a fine nodular impression after etching, as shown in Fig.9. Consequently, adhesion is sufficiently high for thin conducting elements, etching speed is high, conducting elements show fine and sharp outlines, and the fine nodular impression is ideal for sequential build-up.
    At another manufacturing step (e), a zinc and chrome based passivation layer is formed on the surface treated back side. Both sides of the functional foil 16 are now protected; the front side by the carrier foil 12 and the back side by the passivation layer. A similar passivation treatment may also be applied to the electrode side of the carrier foil in order to avoid a blue window frame oxidation.
    Finally, at a further manufacturing step (f), a resinous layer 18 is formed on the back side of the thin functional foil 16. The composite copper foil 10 may thereby be used directly in the manufacture of PCB, namely in the manufacture of multi-layer PCB by sequential build-up, where the composite copper foil 10 can be directly laminated on a core board. The composite copper foil 10 may be used in many PCB manufacturing processes, namely in multilayer PCB manufacturing by sequential build-up. When the thin functional foil 16 is 3 or 5 µm thick, it may be directly drilled by a laser beam, for micro-via holes drilling for example.
    It shall be noted that the formation of the thin functional foil on the release layer has been described by means of electrodeposition of copper. However, the formation of the thin functinal foil shall not be limited to this method. For example, copper may be deposited on the release layer by a PVD or CVD process followed by an electrodeposition in order to increase the thickness of the thin functional foil.

    Claims (26)

    1. A composite copper foil (10) comprising:
      a carrier foil (12) formed by electrodeposition onto a cathode, said carrier foil (12) having a cathode side formed in contact with said cathode and an electrolyte side, opposite said cathode side;
      a very thin release layer (14) on the electrolyte side of said carrier foil (12); and
      a thin functional foil (16) formed by deposition of copper and having a front side in contact with said release layer (14) and an opposite back side;
      characterized in that
      said electrolyte side of said carrier foil (12) has a surface roughness Rz less than or equal to 3.5 µm.
    2. The composite copper foil as claimed in claim 1, characterized in that said carrier foil (12) predominantly consists of equiaxed crystals, at least in the vicinity of the interface with said release layer (14).
    3. The composite copper foil as claimed in claim 1 or 2, characterized in that said thin functional foil (16) predominantly consists of equiaxed crystals.
    4. The composite copper foil as claimed in anyone of the preceding claims, characterized in that said carrier foil (12) is an electrodeposited copper foil and has a thickness between 18 µm and 105 µm.
    5. The composite copper foil as claimed in anyone of the preceding claims, characterized in that said front side of said thin functional foil (16) has a surface roughness Rz less than or equal to 3.5 µm.
    6. The composite copper foil as claimed in claim 5, characterized in that said back side of said thin functional foil (16) has a surface roughness Rz less than or equal to 3.5 µm.
    7. The composite copper foil as claimed in anyone of the preceding claims, characterized in that said thin functional foil (16) is electrodeposited and has a thickness between 2 and 13 µm.
    8. The composite copper foil as claimed in anyone of the preceding claims, characterized in that said release layer (14) and said carrier foil (12) can be peeled off simultaneously.
    9. The composite copper foil as claimed in anyone of the preceding claims, characterized in that said release layer (14) is an electrodeposited, chromium based layer.
    10. The composite copper foil as claimed in claim 9, characterized in that said release layer (14) has a thickness lower than 1.5 µm, preferably of 0.1 µm.
    11. The composite copper foil as claimed in claim 9 or 10, characterized in that the thickness of said chromium based layer is adjusted in such a way that the peel strength necessary to peel off simultaneously said release layer (14) and said carrier foil (12) is between 30 and 150 N/m.
    12. The composite copper foil as claimed in anyone of the preceding claims, characterized by fine copper nodules on said back side of said thin functional foil.
    13. The composite copper foil as claimed in anyone of the preceding claims, characterized by a resin layer (18) on said back side of said thin functional copper foil (16).
    14. A method for manufacturing a composite copper foil (10), comprising the following steps:
      (a) forming a carrier foil (12) by electrodeposition onto a cathode, the carrier foil (12) having a cathode side formed in contact with said cathode and an opposite electrolyte side;
      (b) forming a very thin release layer (14) on said electrolyte side of said carrier foil (12); and
      (c) forming a thin functional foil (16) by deposition of copper, said thin functional foil (16) having a front side in contact with said release layer (14) and an opposite back side;
      characterized in that
      said electrodeposition of said carrier foil (12) is carried out so as to form an electrolyte side with a surface roughness Rz less than or equal to 3.5 µm.
    15. The method as claimed in claim 14, characterized in that the electrodeposition of step (a) is carried out from an electrolyte solution comprising 70 to 110 g/l of copper (as copper sulfate), 80 to 120 g/l of sulfuric acid, as well as 1 to 10 ppm of a carrier agent, 1 to 10 ppm of a leveling agent and 0.1 to 2 ppm of a brightener agent;
      said carrier agent being a high molecular weight polymer soluble in the acid chosen from: gelatin (Mw= 2 000 to 100 000), polyacrylamide (Mw= 500 000 to 12 000 000), polyethylene glycol (Mw= 400 to 10 000), polyethylene glycol monomethyl ether (Mw= 300 to 5 000), polyethylene glycol dimethyl ether (Mw= 250 to 3 000), hydroxy ethyl cellulose (Mw= 10 000 to 100 000);
      said leveling agent being an organic compound containing a nitrogen atom or an oxygen atom chosen from: polyethylene imine, poly(propylene glycol-b-ethylene glycol-b-propylene glycol) bis (2-aminopropyl ether), N-allylthiourea; and
      said brightener agent being a sulfured compound chosen from: 2-mercaptobenzimidazol, 3-3'-thiodipropionic acid, sodium 3-mercapto 1-propanesulfonate, thio diglycolic acid, thiolactic acid.
    16. The method as claimed in claim 14 or 15, characterized in that said electrodeposition of step (a) is carried out so as to form predominantly equiaxed crystals in said carrier foil (12), at least in the vicinity of the interface with said release layer (14).
    17. The method as claimed in anyone of claims 14 to 16, characterized in that said carrier foil (12) is an electrodeposited copper foil and has a thickness between 18 µm and 105 µm.
    18. The method as claimed in anyone of claims 14 to 17, characterized in that said thin functional foil (16) is electrodeposited and has a thickness between 2 and 13 µm.
    19. The method as claimed in claim 14 to 18, characterized in that said deposition of step (c) is carried out so as to form predominantly equiaxed crystals in said thin functional foil (16).
    20. The method as claimed in anyone of claims 14 to 19, characterized in that said release layer (14) is an electrodeposited, chromium based layer.
    21. The method as claimed in claim 20, characterized in that said release layer has a thickness lower than 1.5 µm, preferably of 0.1 µm.
    22. The method as claimed in anyone of claims 14 to 21, characterized by a further step (d) wherein a surface treatment is applied on said back side of said thin functional foil (16) in order to enhance its surface bond.
    23. The method as claimed in claim 22, characterized in that said surface treatment comprises forming ultra fine nodules on the back side of said thin functional foil (16).
    24. The method as claimed in claim 22 or 23, characterized by a further step (e) wherein a passivation layer is formed on the surface treated back side of said thin functional foil (16).
    25. The method as claimed in claim 24, characterized by a further step (f) wherein a resin layer (18) is formed over said passivation layer on said back side of said thin functional foil (16).
    26. Use of the composite foil as claimed in anyone of claims 1 to 13 in the manufacture of copper clad laminates, printed circuit boards, and multi-layer printed circuit boards, namely by sequential build-up.
    EP01923548A 2000-02-24 2001-01-18 Composite copper foil and manufacturing method thereof Expired - Lifetime EP1257693B1 (en)

    Applications Claiming Priority (3)

    Application Number Priority Date Filing Date Title
    LU90532 2000-02-24
    LU90532A LU90532B1 (en) 2000-02-24 2000-02-24 Comosite copper foil and manufacturing method thereof
    PCT/EP2001/000544 WO2001063016A1 (en) 2000-02-24 2001-01-18 Composite copper foil and manufacturing method thereof

    Publications (2)

    Publication Number Publication Date
    EP1257693A1 EP1257693A1 (en) 2002-11-20
    EP1257693B1 true EP1257693B1 (en) 2003-11-19

    Family

    ID=19731872

    Family Applications (1)

    Application Number Title Priority Date Filing Date
    EP01923548A Expired - Lifetime EP1257693B1 (en) 2000-02-24 2001-01-18 Composite copper foil and manufacturing method thereof

    Country Status (13)

    Country Link
    US (1) US7153590B2 (en)
    EP (1) EP1257693B1 (en)
    JP (1) JP2003524078A (en)
    KR (1) KR100729005B1 (en)
    CN (1) CN1263898C (en)
    AU (1) AU2001250300A1 (en)
    BR (1) BR0108935A (en)
    CA (1) CA2397984C (en)
    DE (1) DE60101259T2 (en)
    LU (1) LU90532B1 (en)
    RU (1) RU2250934C2 (en)
    TW (1) TW573078B (en)
    WO (1) WO2001063016A1 (en)

    Families Citing this family (34)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    JP2004169181A (en) * 2002-10-31 2004-06-17 Furukawa Techno Research Kk Ultrathin copper foil with carrier and method for manufacturing the same, and printed wiring board using ultrathin copper foil with carrier
    JP3954958B2 (en) * 2002-11-26 2007-08-08 古河テクノリサーチ株式会社 Copper foil with resistive layer and circuit board material with resistive layer
    KR100729061B1 (en) * 2003-07-29 2007-06-14 닛코킨조쿠 가부시키가이샤 Copper electrolytic solution containing polymer having dialkylamino group of specified structure and organic sulfur compound as additive and electrolytic copper foil produced therewith
    KR100767942B1 (en) 2003-10-17 2007-10-17 닛코킨조쿠 가부시키가이샤 Plating solution for electroless copper plating
    JP4087369B2 (en) * 2003-11-11 2008-05-21 古河サーキットフォイル株式会社 Ultra-thin copper foil with carrier and printed wiring board
    US20050158574A1 (en) * 2003-11-11 2005-07-21 Furukawa Circuit Foil Co., Ltd. Ultra-thin copper foil with carrier and printed wiring board using ultra-thin copper foil with carrier
    JP4796351B2 (en) * 2004-08-06 2011-10-19 福田金属箔粉工業株式会社 Method for producing electrolytic copper foil
    JP2007146289A (en) * 2005-10-31 2007-06-14 Mitsui Mining & Smelting Co Ltd Method for manufacture of electrolytic copper foil, electrolytic copper foil manufactured by the method, surface-treated copper foil manufactured using the electrolytic copper foil, and copper-clad laminate manufactured using the electrolytic copper foil or surface-treated copper foil
    US7913381B2 (en) 2006-10-26 2011-03-29 Carestream Health, Inc. Metal substrate having electronic devices formed thereon
    AU2007202071A1 (en) * 2006-12-26 2008-07-10 Jx Nippon Mining & Metals Corporation Method for producing sheet-form electrolytic copper from halide solution
    EP2302103A4 (en) * 2008-06-12 2014-05-28 Furukawa Electric Co Ltd Electrolytic copper coating and method of manufacture therefor, and copper electrolyte for manufacturing electrolytic copper coatings
    TWI513388B (en) * 2008-09-05 2015-12-11 Furukawa Electric Co Ltd A very thin copper foil with a carrier, and a laminated plate or printed circuit board with copper foil
    JP5407273B2 (en) * 2008-10-24 2014-02-05 ソニー株式会社 Negative electrode current collector, negative electrode and secondary battery
    JP5379528B2 (en) * 2009-03-24 2013-12-25 三井金属鉱業株式会社 Electrolytic copper foil with carrier foil, method for producing electrolytic copper foil with carrier foil, and copper-clad laminate obtained using the electrolytic copper foil with carrier foil
    EP2547731B1 (en) 2010-03-18 2014-07-30 Basf Se Composition for metal electroplating comprising leveling agent
    EP2615196A1 (en) * 2010-10-06 2013-07-17 Furukawa Electric Co., Ltd. Copper foil and manufacturing method therefor, copper foil with carrier and manufacturing method therefor, printed circuit board, and multilayer printed circuit board
    CN102363891B (en) * 2011-11-18 2013-09-25 山东金宝电子股份有限公司 Double photoelectrolysis copper foil replacing rolled copper foil and used for production of flexible copper clad laminate, and production process of double photoelectrolysis copper foil
    CN104047041B (en) * 2013-03-15 2017-04-26 深圳市九和咏精密电路有限公司 Preparation method for printed circuit board
    WO2014162875A1 (en) * 2013-04-02 2014-10-09 株式会社Adeka Additive for copper electroplating bath, copper electroplating bath containing said additive, and copper electroplating method using said copper electroplating bath
    CN103397354B (en) * 2013-08-08 2016-10-26 上海新阳半导体材料股份有限公司 A kind of additive in cavity after reducing silicon through hole technology copper facing annealing
    CN105101627B (en) * 2014-05-09 2019-03-01 Jx日矿日石金属株式会社 Copper foil with carrier and its manufacturing method, printing distributing board and its manufacturing method, laminate, e-machine
    KR101852671B1 (en) * 2015-01-21 2018-06-04 제이엑스금속주식회사 Copper foil with carrier, laminate, printed circuit board and method of manufacturing printed circuit board
    JP6099778B1 (en) * 2015-01-21 2017-03-22 Jx金属株式会社 A copper foil with a carrier, a laminate, a printed wiring board, a printed wiring board manufacturing method, and an electronic device manufacturing method.
    JP6650923B2 (en) * 2015-03-24 2020-02-19 三井金属鉱業株式会社 Ultra-thin copper foil with carrier, method for producing the same, copper-clad laminate and printed wiring board
    TWI576470B (en) * 2015-07-28 2017-04-01 聚和國際股份有限公司 Electroplating additive
    KR101992840B1 (en) 2017-06-20 2019-06-27 케이씨에프테크놀로지스 주식회사 Copper foil with minimized bagginess and tear, electrode comprisng the same, secondary battery comprising the same and method for manufacturing the same
    JP7122675B2 (en) * 2017-10-23 2022-08-22 パナソニックIpマネジメント株式会社 Thin-film metal foil with metal substrate, metal-clad transparent substrate material, laminate for see-through electrode, see-through electrode material, and device
    CN110042444B (en) * 2019-05-10 2022-03-08 九江德福科技股份有限公司 Additive formula for improving surface uniformity of copper foil
    CN110093637A (en) * 2019-06-11 2019-08-06 九江德福科技股份有限公司 For flexibility coat copper plate, the electrolytic copper foil of flexible printed-circuit board and preparation method
    CN111005041B (en) * 2019-12-30 2021-10-26 中国科学院青海盐湖研究所 Composite multi-layer structure porous copper foil and preparation method and system thereof
    CN114178710A (en) * 2020-08-24 2022-03-15 奥特斯(中国)有限公司 Component carrier and method for producing the same
    LU500134B1 (en) * 2021-05-07 2022-11-08 Circuit Foil Luxembourg Method for producing an electrodeposited copper foil and copper foil obtained therewith
    CN114703515B (en) * 2022-04-14 2024-05-03 中国科学院金属研究所 Copper foil, preparation method thereof, circuit board and current collector
    CN115087198B (en) * 2022-08-11 2022-12-20 广州方邦电子股份有限公司 Support for metal foil, metal foil and use thereof

    Family Cites Families (21)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    US3998601A (en) * 1973-12-03 1976-12-21 Yates Industries, Inc. Thin foil
    US4088544A (en) * 1976-04-19 1978-05-09 Hutkin Irving J Composite and method for making thin copper foil
    GB8333753D0 (en) * 1983-12-19 1984-01-25 Thorpe J E Dielectric boards
    US5262247A (en) * 1989-05-17 1993-11-16 Fukuda Kinzoku Hakufun Kogyo Kabushiki Kaisha Thin copper foil for printed wiring board
    DE69025500T2 (en) * 1989-06-23 1996-10-31 Meiko Electronics Co Ltd Process for producing a copper-clad laminate
    US4976826A (en) * 1990-02-16 1990-12-11 Furukawa Circuit Foil Co., Ltd. Method of making electrodeposited copper foil
    US5431803A (en) * 1990-05-30 1995-07-11 Gould Electronics Inc. Electrodeposited copper foil and process for making same
    JP3081026B2 (en) * 1991-07-18 2000-08-28 古河サーキットフォイル株式会社 Electrolytic copper foil for printed wiring boards
    DE4126502C1 (en) * 1991-08-07 1993-02-11 Schering Ag Berlin Und Bergkamen, 1000 Berlin, De
    JPH0853789A (en) * 1994-08-09 1996-02-27 Furukawa Circuit Foil Kk Production of elelctrolytic copper foil
    JP3559598B2 (en) * 1994-12-26 2004-09-02 日立化成工業株式会社 Metal foil for printed wiring board, method for manufacturing the same, and method for manufacturing wiring board using the metal foil
    JP3313277B2 (en) * 1995-09-22 2002-08-12 古河サーキットフォイル株式会社 Electrodeposited copper foil for fine pattern and its manufacturing method
    JP3281783B2 (en) * 1995-12-06 2002-05-13 三井金属鉱業株式会社 Copper foil for printed wiring board, method for producing the same, and electrolytic apparatus
    TW432124B (en) * 1996-05-13 2001-05-01 Mitsui Mining & Amp Smelting C Electrolytic copper foil with high post heat tensile strength and its manufacturing method
    JPH1036991A (en) * 1996-07-19 1998-02-10 Japan Energy Corp Production of electrolytic copper foil
    US5863410A (en) * 1997-06-23 1999-01-26 Circuit Foil Usa, Inc. Process for the manufacture of high quality very low profile copper foil and copper foil produced thereby
    US6270889B1 (en) * 1998-01-19 2001-08-07 Mitsui Mining & Smelting Co., Ltd. Making and using an ultra-thin copper foil
    KR20000071383A (en) * 1999-02-26 2000-11-25 마쯔노고오지 Wiring Layer Transfer Composite and Metal and Apparatus for Producing Same
    JP2000269637A (en) * 1999-03-18 2000-09-29 Furukawa Circuit Foil Kk Copper foil for high-density ultrafine wiring board
    JP3670179B2 (en) * 1999-11-11 2005-07-13 三井金属鉱業株式会社 Electrolytic copper foil with carrier foil and copper-clad laminate using the electrolytic copper foil with carrier foil
    US6346335B1 (en) * 2000-03-10 2002-02-12 Olin Corporation Copper foil composite including a release layer

    Also Published As

    Publication number Publication date
    TW573078B (en) 2004-01-21
    AU2001250300A1 (en) 2001-09-03
    US7153590B2 (en) 2006-12-26
    KR20020081698A (en) 2002-10-30
    JP2003524078A (en) 2003-08-12
    RU2250934C2 (en) 2005-04-27
    EP1257693A1 (en) 2002-11-20
    LU90532B1 (en) 2001-08-27
    BR0108935A (en) 2002-12-24
    CA2397984C (en) 2011-08-02
    RU2002123341A (en) 2004-03-20
    US20030012975A1 (en) 2003-01-16
    CN1404535A (en) 2003-03-19
    WO2001063016A1 (en) 2001-08-30
    DE60101259D1 (en) 2003-12-24
    CN1263898C (en) 2006-07-12
    DE60101259T2 (en) 2004-11-18
    CA2397984A1 (en) 2001-08-30
    KR100729005B1 (en) 2007-06-14

    Similar Documents

    Publication Publication Date Title
    EP1257693B1 (en) Composite copper foil and manufacturing method thereof
    KR101129471B1 (en) Surface treatment copper foil and circuit board
    KR100821017B1 (en) Composite foil and its manufacturing process
    US20050158574A1 (en) Ultra-thin copper foil with carrier and printed wiring board using ultra-thin copper foil with carrier
    EP1182278A2 (en) Manufacturing method of electrodeposited copper foil and electrodeposited copper foil
    EP0996319B1 (en) Composite material used in making printed wiring boards
    EP1511366A2 (en) Method of producing ultra-thin copper foil with carrier, ultra-thin copper foil with carrier produced by the same, printed circuit board, multilayer printed circuit board and chip on film circuit board
    JP2002292788A (en) Composite copper foil and method for manufacturing the same
    EP1152069B1 (en) Electrolytic copper foil with carrier foil and copper-clad laminate using the electrolytic copper foil with carrier foil
    US20020015833A1 (en) Manufacturing method of electrodeposited copper foil and electrodeposited copper foil
    JP4959052B2 (en) Improved method of forming conductive traces and printed circuit manufactured thereby
    KR100595381B1 (en) Composite copper foil, process for preparing the same, and copper-clad laminate and printed wiring board using the same
    KR100435298B1 (en) Electrolytic copper foil
    US6372113B2 (en) Copper foil and copper clad laminates for fabrication of multi-layer printed circuit boards and process for producing same
    US6544664B1 (en) Copper foil for printed wiring board
    EP0495468B1 (en) Method of producing treated copper foil, products thereof and electrolyte useful in such method
    JP2005288856A (en) Electrolytic copper foil with carrier foil and method for manufacturing the same and copper-clad laminated sheet using electrolytic copper foil with carrier foil
    JP3238278B2 (en) Manufacturing method of electrolytic copper foil
    KR100684812B1 (en) Novel composite foil, process for producing the same and copper-clad laminate
    EP0996318B1 (en) Novel composite foil, process for producing the same and copper-clad laminate
    KR101315364B1 (en) Surface treated copper foil and fabrication method thereof

    Legal Events

    Date Code Title Description
    PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

    Free format text: ORIGINAL CODE: 0009012

    17P Request for examination filed

    Effective date: 20020725

    AK Designated contracting states

    Kind code of ref document: A1

    Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

    AX Request for extension of the european patent

    Free format text: AL;LT;LV;MK;RO;SI

    GRAH Despatch of communication of intention to grant a patent

    Free format text: ORIGINAL CODE: EPIDOS IGRA

    GRAS Grant fee paid

    Free format text: ORIGINAL CODE: EPIDOSNIGR3

    GRAA (expected) grant

    Free format text: ORIGINAL CODE: 0009210

    AK Designated contracting states

    Kind code of ref document: B1

    Designated state(s): DE FR GB LU

    REG Reference to a national code

    Ref country code: GB

    Ref legal event code: FG4D

    RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

    Owner name: CIRCUIT FOIL LUXEMBOURG S.A.R.L.

    REF Corresponds to:

    Ref document number: 60101259

    Country of ref document: DE

    Date of ref document: 20031224

    Kind code of ref document: P

    REG Reference to a national code

    Ref country code: IE

    Ref legal event code: FG4D

    LTIE Lt: invalidation of european patent or patent extension

    Effective date: 20031119

    ET Fr: translation filed
    PLBE No opposition filed within time limit

    Free format text: ORIGINAL CODE: 0009261

    STAA Information on the status of an ep patent application or granted ep patent

    Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

    REG Reference to a national code

    Ref country code: IE

    Ref legal event code: MM4A

    26N No opposition filed

    Effective date: 20040820

    REG Reference to a national code

    Ref country code: FR

    Ref legal event code: PLFP

    Year of fee payment: 16

    REG Reference to a national code

    Ref country code: FR

    Ref legal event code: PLFP

    Year of fee payment: 17

    REG Reference to a national code

    Ref country code: FR

    Ref legal event code: PLFP

    Year of fee payment: 18

    PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

    Ref country code: FR

    Payment date: 20191217

    Year of fee payment: 20

    PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

    Ref country code: DE

    Payment date: 20191217

    Year of fee payment: 20

    Ref country code: GB

    Payment date: 20191218

    Year of fee payment: 20

    PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

    Ref country code: LU

    Payment date: 20200121

    Year of fee payment: 20

    REG Reference to a national code

    Ref country code: DE

    Ref legal event code: R071

    Ref document number: 60101259

    Country of ref document: DE

    REG Reference to a national code

    Ref country code: GB

    Ref legal event code: PE20

    Expiry date: 20210117

    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: GB

    Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

    Effective date: 20210117