EP1252444A1 - Systeme d'entrainement de pompe a vis - Google Patents
Systeme d'entrainement de pompe a visInfo
- Publication number
- EP1252444A1 EP1252444A1 EP01909614A EP01909614A EP1252444A1 EP 1252444 A1 EP1252444 A1 EP 1252444A1 EP 01909614 A EP01909614 A EP 01909614A EP 01909614 A EP01909614 A EP 01909614A EP 1252444 A1 EP1252444 A1 EP 1252444A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gear
- gears
- rotors
- screw pump
- driving gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/19—Gearing
- Y10T74/19023—Plural power paths to and/or from gearing
- Y10T74/19074—Single drive plural driven
- Y10T74/19079—Parallel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/19—Gearing
- Y10T74/19023—Plural power paths to and/or from gearing
- Y10T74/19074—Single drive plural driven
- Y10T74/19079—Parallel
- Y10T74/19088—Bevel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/19—Gearing
- Y10T74/19642—Directly cooperating gears
- Y10T74/19647—Parallel axes or shafts
Definitions
- the invention relates to a dry-compressing screw pump with two externally toothed and counter-rotating displacement rotor rotors for conveying and compressing gases, a gear wheel for driving and synchronizing the rotors being arranged on each of the rotors.
- Dry-compressing pumps are becoming increasingly important, especially in vacuum technology, because due to increasing obligations regarding environmental protection regulations and increasing operating and disposal costs as well as increased requirements for the purity of the pumped medium, the well-known wet-running vacuum systems such as liquid ring machines and rotary vane pumps are increasingly being replaced by dry-compressing pumps.
- These dry compacting machines include screw pumps, claw pumps, diaphragm pumps, piston pumps, scroll machines and Roots pumps. What these machines have in common, however, is that they cannot yet satisfactorily meet today's requirements in terms of reliability and robustness, as well as size and weight, and at the same time a low price level.
- the desired spindle rotor speeds are modern Spindle vacuum pumps, i.e. screw pumps, mostly well above the nominal speed of the asynchronous motors usually used for driving due to their robustness, so that either a frequency converter or an upstream gear transmission is required to increase the speed.
- these increased rotor speeds which are usually well above 3,000 revolutions per minute (around 10,000 rpm)
- contact-free rolling of the two displacement spindles in the pump work space is essential.
- the screw pump defined at the outset is characterized in that the tooth diameter of the two gear wheels for the two displacement spindle rotors - hereinafter also referred to as "rotors" - is smaller than the center distance of the two rotors that a driving gear wheel in the two gear wheels the rotors engages and meshes with them and that this toothing of the driving gear with the driven gears is designed like a crown gear.
- the peripheral speeds of the gear wheels for the rotors can be significantly reduced and the specific tooth flank load can be increased, so that the noise level and the dynamic factor are reduced. Furthermore, the desired increase in speed from the drive gear to the spindle rotors can be achieved very easily via the ratio of the diameter and number of teeth of this drive gear to the gears of the rotors.
- the solution according to the invention enables the motor axis to be arranged in the same direction as the two spindle rotor axes or at right angles to it. This favors both the installation space of the entire screw pump with motor and cooling by the motor air flow and can be adapted to the respective structural conditions.
- the driving gear is larger than the two gear wheels fixed to the spindle rotor.
- the toothing diameter of the two gear wheels for the rotors is smaller than the center distance of the two rotors, so that the driving gear wheel engages in these two gear wheels and can have a corresponding size.
- the gears attached to the two positive displacement pump rotors can be acted upon jointly by the driving gear with a larger number of teeth by a factor of the desired increase in speed, so that the two spindle rotors are driven in opposite directions with increased speed and synchronized with one another become.
- the screw pump can be operated at a higher speed, which increases the compression capacity, the delivery rate and thus the volumetric efficiency.
- a more than proportionally higher pumping speed is achieved from the same machine size, so that the specific costs - based on the volume flow - decrease accordingly.
- the factor for increasing the speed can be the already mentioned value of 1, 5 to 4 or possibly even outside these limits compared to the standard speeds for direct drive.
- the known increase in the number of digits via frequency converters, which are generally relatively expensive, can advantageously be avoided.
- the driving gear wheel can be attached directly to the shaft of a drive motor. This also helps to simplify the entire drive.
- a lubricant can be supplied on the inside of the driving gearwheel to lubricate the toothing engagements. Due to the arrangement and assignment of the gears according to the invention, the lubrication situation can be significantly more favorable by applying lubricant to the inside diameter of the toothing side of the driving, in particular crown gear-like gear, which is distributed favorably by the centrifugal force on the tooth flank interventions, which also means a further one Noise reduction is made possible.
- the driving gearwheel and / or the gearwheels fixed to the spindle rotor can be designed like a crown gear.
- the crown gear-like toothing or design of the gearwheel (s) had already been mentioned. This can refer to either the driving gear or the gears firmly connected to the spindle rotor or all gears.
- the joint attack of the driving gearwheel on the two gearwheels of the rotors can be realized as space-saving as possible.
- An expedient embodiment can consist in the fact that the driving gear has one or two crown gears arranged like a crown gear, which mesh with rotor-fixed gears designed as spur gears. This results in relatively simple gearwheels on the rotors, on the end teeth of which the crown gear-like gear rings of the driving gearwheel can engage, in which the driving gearwheel is inserted, for example, with its gear rings in the space between the two driven gearwheels.
- the crown gear-like driving gear as internal and external toothed ring gear has a rotor-fixed gear of one rotor shaft designed as a spur gear via its internal teeth and the other rotor-fixed gear of the second rotor shaft designed as a spur gear in opposite directions via its external toothing synchronized and drives at increased speed.
- the crown gear-like drive gear can thus also be represented or understood as an internally and externally toothed ring gear which, with its two toothings, synchronizes a classic spur gear in the desired manner in opposite directions and drives it at an increased speed.
- Such a ring gear can be produced as a laminated core for reasons of cost and noise.
- a further embodiment of the invention can provide that the toothings of the crown-wheel-like gears are each arranged on a cone and the cone angle of the two toothings provided on the driving toothed wheel is relatively flat or pointed with respect to a radial plane between these two toothings.
- the rotor-fixed gears are not spur gears, but bevel gears with a relatively acute cone angle, which may improve the engagement conditions of the gears.
- gears connected to the rotors are designed as crown gears and the drive gear as a spur gear.
- This spur gear can then, for example, act simultaneously on the mutually facing areas of the crown gear-like sprockets, but the toothing on the driving spur gear can also be interrupted by an annular groove and limited to the meshing area.
- the driving gear has two crown gear-like gears - also in a somewhat conical arrangement - it is advantageously possible that the axis of rotation of the driving gear is arranged at right angles to the axes of rotation of the driven gears and rotors and that in particular, two sides facing away from one another, each having a toothed ring, engaging driving gear in the space between the two driven gears arranged in a common plane and meshing with these gears.
- a dry-compressing screw pump results, the drive of which is limited to fewer gearwheels and yet allows mechanical synchronization and at the same time an increase in the speed of the rotors in a simple manner. Furthermore, due to this simplification of the overall arrangement, a good balancing of the rotating parts before assembly is possible, so that the desired high rotor speeds can be realized more cheaply.
- FIG. 1 shows a partial side view of a dry-compressing screw pump according to the invention with two externally toothed and counter-rotating rotator rotors, which are shown only over part of their axial extent, with the synchronization and a desired speed increase of the two
- Displacement spindle rotors are made by a crown gear-like toothing, each with a crown gear on the rotors and a common meshing crown gear as the driving gear,
- FIG. 3 shows a representation corresponding to FIG. 1 of a modified embodiment, in which the toothing engagement acts only over part of the width of the toothing of the driving gearwheel, and that driving gear with its crown gear-like gear protrudes radially outside over the crown gear-like gears on the rotors,
- FIG. 4 a representation corresponding to FIG. 2 of the embodiment according to FIG. 3,
- FIGS. 1 and 3 shows a representation corresponding to FIGS. 1 and 3 of a modified embodiment, in which the ring gear of the crown gear-like driving gear is wider than the driven, rotor-fixed gear wheels and protrudes radially inwards with respect to these gear rings of the driven gear wheels,
- FIGS. 2 and 4 shows a representation corresponding to FIGS. 2 and 4
- the crown gear-like driving gearwheel being designed as an internally and externally toothed ring gear and with the internal toothing a rotor-fixed gearwheel designed as a spur gearwheel and with the external toothing the other rotor-fixed gearwheel designed as a spur gear Applied and drives gear,
- Spur gear meshes with two spaced ring gears the axis of rotation of the driving gear being arranged at right angles to that of the driven gears
- 9 a representation corresponding to FIG. 8 of a modified embodiment, in which the driving sprockets are arranged like a crown wheel on a common gear pointing away from each other and engage between the teeth of two rotor-fixed gear wheels designed as spur gear wheels, and
- FIG. 10 shows an advantageous embodiment of the invention modified in relation to FIG. 9, in which the two
- Sprockets of the driving gear are provided on individual ring parts which, when put together, result in the driving gear and enable adjustability in the axial and / or in the direction of rotation, and also
- FIGS. 8 and 9 show a representation corresponding to FIGS. 8 and 9, in which the crown gear-like toothings are arranged on truncated cones and the gears and ring gears are designed as bevel gears and the driving gear with two opposite ones
- a screw spindle pump designated as a whole by 10, shown in FIGS. 1 to 6 only with regard to the most important parts and in FIGS. 7 to 11 with regard to the drive toothing, has two externally toothed and counter-rotating positive-displacement spindle rotors 1 and 2 for conveying and compressing gases within one housing not shown.
- Each of the rotors 1 and 2 has a different design in the various exemplary embodiments, however Gear wheels 3 and 4, each provided with the same reference numbers, for driving and synchronizing the rotors 1 and 2.
- the toothing diameters of these two gear wheels 3 and 4 for the two displacement spindle rotors 1 and 2 are smaller than the center distance A of the two rotors 1 and 2 in all exemplary embodiments.
- a driving gear wheel 5 is provided in all exemplary embodiments, which drives the two gear wheels 3 and 4 the rotors 1 and 2 meshes or engages with their teeth in their teeth.
- a crown gear-like toothing or configuration of the gearwheel or gears which will be explained in more detail below, is provided.
- the driving gear 5 irrespective of its respective shape, is larger than the two gearwheels 3 and 4 fixed to the spindle rotor, so that, on the one hand, the number of teeth and the size of the driven gearwheels 3 and 4 correspond to each other in synchronization of the two rotors 1 and 2 and, on the other hand, due to the larger dimension of the driving gear 5 with a correspondingly higher number of teeth, an increase in the speed of the driven gears 3 and 4 compared to the speed of the driving gear 5 results.
- the driving gear 5 is expediently attached directly to the shaft 6 of a drive motor, not shown.
- a lubricant can be supplied on the inside of the driving gear 5 for lubricating the toothing engagements, so that the centrifugal force practically automatically leads to the teeth and engagement points of these teeth.
- driving gear 5 and driven gears 3 and 4 have a crown gear-like toothing with each other. This can be designed differently according to the various exemplary embodiments or can be defined within this description.
- the driving gear 5 and the spindle rotor-fixed, ie driven gears 3 and 4 are each formed like a crown gear or as crown gears.
- the shaft 6 of the drive motor can thus be arranged parallel to the rotor axes.
- the driving gear 5 can, however, also have one or, according to FIGS. 9 to 11, two parallel gear rings 7, which are arranged in a crown-wheel-like manner and are directed towards opposite sides and mesh with rotor-fixed gear wheels 3 and 4 designed as spur gears, as can be clearly seen in FIGS. 9 and 10 ,
- FIGS. 9 and 10 show similar exemplary embodiments, each with two crown gear-like ring gears 7, which mesh with rotor-fixed gears 3 and 4 designed as spur gears.
- FIG. 10 has the advantageous special feature that the two ring gears 7 of the driving gear 5 can be set and fixed relative to one another in the axial and / or in the rotational direction. This is achieved in that the one ring gear is arranged on a ring 10, which fits a shoulder 11 of the driving gear 5 and complements this shoulder 11 to a gear 5 according to FIG.
- the gear ratio between the driving gear 5 and the rotor-fixed gears 3 and 4 can be changed particularly easily by replacing or replacing the gears 3 and 4 with the same ring gears 7 without the axis positions of the drive and the pair of rotors having to be adapted. Only the distance between the two ring gears 7 on the drive wheel 5 can still be adjusted via the embodiment according to FIG. The rotor speed for different applications can thus be changed with little effort by changing the simple spur gears 3 and 4 while at the same time adjusting the distance between the ring gears 7.
- the washer 12 can also be made elastic.
- the crown gear-like drive gear 5 can also be represented or defined according to FIG. 7 as an internally and externally toothed ring gear which, via its internal toothing, has a rotor-fixed gear 3, formed as a spur gear, of one rotor shaft or one rotor 1 and via its external toothing the other, also designed as a spur gear rotor-fixed gear 4 of the second rotor shaft or the second rotor 2 synchronized in opposite directions and drives due to the different diameters at increased speed.
- a ring gear that forms the driving crown-wheel-like gear can be produced as a laminated core.
- FIG. 8 shows an embodiment in which the gears 3 and 4 connected to the rotors 1 and 2 are designed as crown gears, as in the embodiments according to FIGS. 1 to 6, but the drive gear 5 is designed as a spur gear, the teeth not covering the entire axial extent this drive gear 5 range, but are divided into two spaced ring gears 7.
- the drive shaft 6 runs at right angles to the axes of the rotors 1 and 2.
- FIG. 11 shows an embodiment in which the toothing of the teeth, which in this case are also regarded as similar to a crown gear
- Gearwheels 3, 4 and 5 are each arranged on a cone, analogous to the exemplary embodiment according to FIG. 9, two gear rings or toothings facing away from one another are provided on the driving gearwheel 5, the cone angles of which are relatively flat or opposite a radial diameter plane 8 arranged between these toothed rings or toothings is pointed.
- Toothed wheel 5 would be even more clearly recognizable if the recesses 9 on the front side, which are further inward in the radial direction with respect to the toothed rings, are somewhat deeper than in the illustration below
- axis of rotation or drive shaft 6 of the driving gear 5 in the exemplary embodiment according to FIGS. 1 to 7 parallel to the rotor axes, it is arranged at right angles to the axes of rotation of the driven gears 3 and 4 and the rotors 1 and 2 in the exemplary embodiments according to FIGS and assignment of the drive motor to the rotors can be specified or preselected as required.
- FIGS. 9 to 11 have in common that the driving gear 5, which has two toothed rings 7 facing away from each other, engages in the space between the two driven gear wheels 3 and 4 arranged in a common plane and meshes with them, which is either a Enlargement of the diameter of the driving gear 5 with the same space requirement or a reduction in the design allowed.
- the screw pump 10 is designed as a two-shaft displacement machine and has two externally toothed, counter-rotating displacement rotor rotors 1 and 2.
- crown gear-like gears 3 and 4 are arranged on the two oppositely rotating rotors 1 and 2 or rotor spindles in a matching plane, into which a larger crown gear-like Drive gear 5 engages in such a way that the two spindle rotors 1 and 2 are driven in opposite directions at increased speed, with crown gear similarity including an internally and externally toothed ring gear in conjunction with spur gears or bevel gears and the possibility that only the drive gear 5 or only the driven gears 3 and 4 are crown wheel-like.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Rotary Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Details And Applications Of Rotary Liquid Pumps (AREA)
- Reciprocating Pumps (AREA)
- Electromagnetic Pumps, Or The Like (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10004373A DE10004373B4 (de) | 2000-02-02 | 2000-02-02 | Trockenverdichtende Schraubenpumpe |
DE10004373 | 2000-02-02 | ||
PCT/EP2001/000320 WO2001057401A1 (fr) | 2000-02-02 | 2001-01-12 | Systeme d'entrainement de pompe a vis |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1252444A1 true EP1252444A1 (fr) | 2002-10-30 |
EP1252444B1 EP1252444B1 (fr) | 2007-08-15 |
Family
ID=7629466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01909614A Expired - Lifetime EP1252444B1 (fr) | 2000-02-02 | 2001-01-12 | Systeme d'entrainement de pompe a vis |
Country Status (10)
Country | Link |
---|---|
US (1) | US6666672B1 (fr) |
EP (1) | EP1252444B1 (fr) |
JP (1) | JP2003521637A (fr) |
KR (1) | KR100749729B1 (fr) |
AT (1) | ATE370333T1 (fr) |
AU (1) | AU3729301A (fr) |
CA (1) | CA2398263A1 (fr) |
DE (2) | DE10004373B4 (fr) |
ES (1) | ES2296732T3 (fr) |
WO (1) | WO2001057401A1 (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE20104660U1 (de) | 2001-03-16 | 2001-08-02 | Gardner Denver Wittig GmbH, 79650 Schopfheim | Schraubenverdichter |
US7131825B2 (en) * | 2004-01-30 | 2006-11-07 | Isothermal Systems Research, Inc. | Spindle-motor driven pump system |
DE112007001533A5 (de) * | 2006-07-03 | 2009-05-20 | Steffens, Ralf, Dr. Ing. | Antrieb für eine Schraubenspindelpumpe 1 |
US20080063554A1 (en) * | 2006-09-08 | 2008-03-13 | Gifford Thomas K | Precision flow gear pump |
DE102008019449A1 (de) | 2007-04-18 | 2008-10-23 | Alfavac Gmbh | Lagerung für eine Schraubenspindelpumpe |
EP2313657A1 (fr) | 2008-07-18 | 2011-04-27 | Ralf Steffens | Refroidissement d'une pompe à vis |
WO2011101064A2 (fr) | 2010-02-18 | 2011-08-25 | Ralf Steffens | Entraînement pour un compresseur à broches |
CA2825918C (fr) | 2011-02-15 | 2018-08-07 | Rotation Medical, Inc. | Procedes et appareil pour la distribution et le positionnement de materiaux en feuille |
DE102013211185A1 (de) | 2012-06-15 | 2013-12-19 | Ralf Steffens | Spindelverdichter-Gehäuse |
DE102013021902B4 (de) | 2013-12-26 | 2017-06-14 | HENKE Property UG (haftungsbeschränkt) | Schmelzepumpe zum Aufbau von Druck zwecks Durchdrücken von Kunststoffschmelze durch ein Werkzeug |
CA2945821C (fr) | 2014-05-09 | 2018-09-04 | Rotation Medical, Inc. | Systeme de pose d'implant medical pour un implant de type feuille |
CA2983341A1 (fr) | 2015-05-06 | 2016-11-10 | Rotation Medical, Inc. | Systeme de mise en place d'implant medical et procedes associes |
FR3038954B1 (fr) * | 2015-07-16 | 2017-07-21 | Airbus Helicopters | Boite de transmission de puissance et aeronef |
AU2016381936B2 (en) | 2015-12-31 | 2019-02-28 | Rotation Medical, Inc. | Medical implant delivery system and related methods |
WO2019113292A1 (fr) | 2017-12-07 | 2019-06-13 | Rotation Medical, Inc. | Système de pose d'implant médical et procédés associés |
DE102018210922A1 (de) * | 2018-07-03 | 2020-01-09 | Leybold Gmbh | Zwei- oder Mehrwellen-Vakuumpumpe |
WO2021022352A1 (fr) * | 2019-08-02 | 2021-02-11 | Rt Hamilton And Associates Limited | Pompe à vis à vide sèche refroidie |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1386792A (en) * | 1919-08-14 | 1921-08-09 | John T Needham | Rotary blower |
US1943515A (en) * | 1929-10-09 | 1934-01-16 | Alemite Corp | Grease dispensing apparatus |
US2937807A (en) | 1956-12-26 | 1960-05-24 | Heraeus Gmbh W C | High vacuum pumps |
US3779675A (en) * | 1972-07-31 | 1973-12-18 | Demag Drucklufttech | Drive system for a plurality of worm driven compressors |
JPH02153285A (ja) * | 1988-12-05 | 1990-06-12 | Ebara Corp | スクリュー流体機械 |
JP3086359B2 (ja) * | 1993-05-08 | 2000-09-11 | 石川島播磨重工業株式会社 | リショルム型過給機の潤滑装置 |
JPH08144977A (ja) * | 1994-11-24 | 1996-06-04 | Kashiyama Kogyo Kk | 複合ドライ真空ポンプ |
DE19522551C2 (de) * | 1995-06-21 | 2000-05-18 | Sterling Ind Consult Gmbh | Zweiwellen-Verdrängermaschine |
DE19839501A1 (de) * | 1998-08-29 | 2000-03-02 | Leybold Vakuum Gmbh | Trockenverdichtende Schraubenspindelpumpe |
-
2000
- 2000-02-02 DE DE10004373A patent/DE10004373B4/de not_active Expired - Fee Related
-
2001
- 2001-01-12 CA CA002398263A patent/CA2398263A1/fr not_active Abandoned
- 2001-01-12 ES ES01909614T patent/ES2296732T3/es not_active Expired - Lifetime
- 2001-01-12 WO PCT/EP2001/000320 patent/WO2001057401A1/fr active IP Right Grant
- 2001-01-12 JP JP2001556015A patent/JP2003521637A/ja active Pending
- 2001-01-12 AT AT01909614T patent/ATE370333T1/de not_active IP Right Cessation
- 2001-01-12 KR KR1020027009401A patent/KR100749729B1/ko not_active IP Right Cessation
- 2001-01-12 EP EP01909614A patent/EP1252444B1/fr not_active Expired - Lifetime
- 2001-01-12 AU AU37293/01A patent/AU3729301A/en not_active Abandoned
- 2001-01-12 DE DE50112863T patent/DE50112863D1/de not_active Expired - Lifetime
- 2001-01-12 US US10/181,998 patent/US6666672B1/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO0157401A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE10004373B4 (de) | 2007-12-20 |
KR20020071961A (ko) | 2002-09-13 |
AU3729301A (en) | 2001-08-14 |
ES2296732T3 (es) | 2008-05-01 |
DE50112863D1 (de) | 2007-09-27 |
DE10004373A1 (de) | 2001-08-09 |
ATE370333T1 (de) | 2007-09-15 |
US6666672B1 (en) | 2003-12-23 |
KR100749729B1 (ko) | 2007-08-17 |
EP1252444B1 (fr) | 2007-08-15 |
WO2001057401A1 (fr) | 2001-08-09 |
CA2398263A1 (fr) | 2001-08-09 |
JP2003521637A (ja) | 2003-07-15 |
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