Classifications

• • G—PHYSICS
  • G05—CONTROLLING; REGULATING
  • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
  • G05D23/00—Control of temperature
  • G05D23/19—Control of temperature characterised by the use of electric means

Definitions

• U S Patent No 5,130,920 discloses an adaptive process control system especially for controlling the temperature of flowing liquids
• the system uses an adaptive process control system based upon the feed forward controller
• the control function is adapted by the feedback controller That is, the system exercises adaptive control on the feed forward control function based upon the feedback loop
• the feed forward controller alone or together with the feedback controller provides an output for controlling the process variable of interest
• the method for controlling the temperature of a flowing liquid in a process includes identifying process parameters in a controller
• the process parameters typically comprise a set point temperature and data corresponding to a specific heat and density of the liquid
• One or more sensors permit the controller to monitor the incoming temperature, outgoing temperature and flow rate of the liquid at the heater
• a theoretical power required for the heater to adjust the outgoing temperature of the liquid to be substantially equal to the set point temperature is determined
• a heater efficiency correction factor derived from information comprising the incoming liquid temperature and flow rate is also determined
• a calculated power is derived from information comprising the theoretical power and the heater efficiency correction factor
• a final power to be applied to the heater is derived from information comprising the calculated power and an error term
• the error term is substantially continuously derived by a control algorithm using information comprising a proportional term, an integral term and a derivative term
• the derivative term is derived from information comprising the difference between
• THEORETIC ⁇ L comprises determining how much power is required to heat the liquid from Trsj to T S ET
• Theoretical power is typically calculated by identifying the specific heat and density of the liquid being used and multiplying the flow rate, the density and the specific heat of the liquid by the difference between the incoming temperature and the set point temperature (T SET -T IN ) using the equation P TH ERO RE TIC AL - QFLOW PCP(TSET)
• the step of determining the heater efficiency comprises empirically deriving an equation defining heater efficiency for a given liquid, a given flow rate, a given temperature, or a combination thereof
• the step of determining the heater efficiency correction factor ( ) comprises the step of empirically deriving constants for a quadratic equation defining heater efficiency in terms of variables comprising flow rate (Q FLOW ) and temperature
• the temperature term is typically the difference between the incoming temperature and the set point temperature (T SET -T I ⁇ ), such as for )QFLOW
• the error term for calculating the final power is determined by using a control algorithm, such as Proportional Integral Derivative (PID) control
• PID Proportional Integral Derivative
• the proportional term is proportional to the difference between the set point temperature and the outgoing temperature of the liquid (T SET - T OUT )
• the integral term is the cumulative area under the curve between the outgoing temperature and the set point temperature for a given time interval
• the derivative term provides the slope or approach rate of the outgoing temperature toward the set point temperature
• the contribution from the integral term is not added to the cumulative area during time intervals where the incoming temperature is not within a predetermined range of the set point temperature
• the predetermined range is where the incoming temperature of the liquid is between 75% and 125% of the set point temperature
• the present invention is also directed to controlling the temperature of a flowing liquid to process microelectronic components, such as integrated circuits, components for flat panel displays, precursor components including silicon wafers, and various other electrical components
• the present invention is also directed to an apparatus for processing microelectronic components with a flowing liquid
• the apparatus includes a processing chamber or an immersion bath
• a controller has process parameters typically comprising a set point temperature and data corresponding to a specific heat and density of the liquid
• the liquid flows through a heater to the processing chamber or the immersion bath
• Process sensors are positioned to monitor an incoming temperature, an outgoing temperature and a flow rate of the liquid at a heater.
• the controller includes means for determining a theoretical power comprising multiplying the difference between the incoming temperature and the set point temperature by the flow rate, specific heat and density of the liquid; means for determining a heater efficiency correction factor derived from information comprising the incoming temperature and flow rate of the liquid and for adjusting the theoretical power with the heater efficiency correction factor to determine a calculated power; and means for calculating a final power derived from information comprising the calculated power and an error term.
• the error term is substantially continuously determined by a proportional term, an integral term and a derivative term.
• the derivative term is derived from information comprising the difference between the set point temperature and the outgoing temperature of the liquid (T SET - TO L T).
• a power controller is provided for applying the final power to the heater.
• An applicator in the process chamber or the immersion bath is positioned to apply the liquid to the microelectronic components.
• Figure 2 is a sample graph illustrating one mode of operation for the flowing liquid temperature control system of Figure 1.
• Figure 3 is a schematic illustration of a process utilizing the flowing liquid temperature control system of the present invention.
• Figure 4 is a sample graph illustrating a specific application of the present flowing liquid temperature control system.
• FIG. 1 is a schematic illustration of a flowing liquid temperature control system 20 in accordance with the present invention.
• a liquid flows through the inlet pipe 22 to a heater 24 that applies heat to the liquid at or near a control point 26 After heating, the liquid continues through the outlet pipe 28 to a process 30
• the incoming temperature of the liquid is measured ahead of the control point 26 by a temperature sensor 32
• the outgoing temperature of the liquid is measured by temperature sensor 34
• the temperature sensors 32, 34 are located within about 30 centimeters of the control point 26 so that the time delay between the temperature measurements is minimal and the temperature at the sensor 32 is substantially the same as the temperature of the liquid at the control point 26
• Suitable temperature sensors are available from Omega Engineering Incorporated located in Stamford, CT under the model number W2103
• the temperature sensors are encapsulated in an inert material such as Teflon® or PVDF (polyvinylidinefluo ⁇ de)
• a flow sensor 36 is located along the inlet pipe 22 to sense the flow rate of the liquid through the system 20
• the incoming flow rate of the liquid through the inlet pipe 22 is substantially the same as the outgoing flow rate through the outlet pipe 28
• a suitable flow sensor is available from Futurestar Corp located in Edina, MN under model number Futurestar TP W
• the output from the temperature sensors 32, 34 and flow sensor 36 are maintained by controller 40
• the controller 40 includes an input/output device 42. such as a touch screen or a keyboard and display
• the controller is connected to a power controller 44 that controls the connection of a power supply 45 (e g , 1 10 volts, 220 volts, 440 volts) to the heater 24
• a power controller 44 suitable for use in the present invention is available from Control Concepts of Chanhassen, MN under model number 1029C
• a controller 40 suitable for use in the present flowing liquid temperature control system 20 is the 25 MFIz-CPU card available from Win Systems of Arlington, Texas under part number M486SX25BM-0479A
• the sensors 32, 34, 36 are polled by the controller 40 about every 40 milliseconds to about every 2 seconds
• a variety of devices may be used for the heater 24, such as the microwave generator described in U S Patent No 5,130,920 In the embodiment illustrated in Figure 3, the heater 24 is about 25 feet of 3/8 inch OD and
• the method of the present flowing liquid temperature control system utilizes the controller 40 to provide feed forward control in response to the incoming temperature and flow rate (Q FLO W) of the liquid as measured by the sensors 32, 36 and feedback control in response to the outgoing temperature (T OUT ) of the liquid as measured by the sensor 34
• An operator uses the input/output device 42 to enter a set point temperature (T SET ) and identify the liquid
• T SET set point temperature
• the identity of the liquid can be correlated with a heat capacity (C p ) and density (p) for that liquid
• the heat capacity (C p ) and density (p) for that liquid can be stored in the controller 40 as a composite number
• the input/output device 42 is utilized for entering a recipe that identifies a series of set point temperatures, time intervals, flow rates, liquids, etc that are used through a segment of the process 20
• the controller 40 monitors the temperature sensor 32 and flow sensor 36 and performs a feed forward calculation to predict the theoretical power (PTHEROR ET IC A L) required to adjust the outgoing temperature (T OUT ) of the liquid to be substantially equal to the set point temperature (T SET )
• PTHEROR ET IC A L the theoretical power required to adjust the outgoing temperature (T OUT ) of the liquid to be substantially equal to the set point temperature (T SET )
• the P TH E RO R ET I C AL is calculated by the equation
• the second step in the feed forward process is to determine a heater efficiency correction factor (J) for the heater 24 and apply it to the P ⁇ HER ⁇ R£ ⁇ c AL to calculate the power (PCALC ULA TE D ) required
• the heater efficiency correction factor can be determined empirically for a given liquid, a given flow rate, a desired temperature rise, or combinations thereof
• the heater efficiency correction factor (/) is a quadratic equation of flow rate (Q FLO W) and the difference between the incoming temperature and the set point temperature of the liquid (TSET -
• the heater efficiency correction factor (f) can be calculated based on the equation a 4 Q F Low " +as(T S ⁇ -T ⁇ QFLOW where ao, ai.
• a 2 , a 3 , -u as are constants
• the constants ao, ai, a 2 , a , - as are empirically derived using known techniques
• the constants ao, a l3 a , a 3 . a-i, a 5 are empirically derived by operating the system 20 at a fixed incoming temperature (TIN) and three different final power levels (PFINAL) and flow rates (QF LO W) until the outgoing temperature (T OUT ) stabilizes
• TIN fixed incoming temperature
• PFINAL final power levels
• QF LO W flow rates
• This analysis can optionally be performed automatically by the controller to periodically update the constants ao, ai, a , a 3 , a*, as to monitor and/or compensate for changes in the heater efficiency over time
• the constants ao, ai, a 2 , a 3 , a 4 , a 5 preferably do not change during operation of the present flowing liquid temperature control system
• the constants ao, ai, a 2 , a 3 , a*, a 5 may optionally be different for various liquids or set point temperatures
• the controller 40 can select the appropriate constants based on the identity of the liquid or set point temperature provided through the input/output device 42 at the beginning of the process
• the heater efficiency correction factor is intended to compensate for heat loss by the various components of the system 20, such as the heater 24, pipes 22, 28, temperature sensor 34, and various other factors
• the heater efficiency correction factor (j) is a number greater than 1, such as 1 1 or 1 2
• the calculated power is determined by the equation
• the calculated power should accurately reflect the power required to adjust the outgoing temperature of the liquid to the set point temperature
• external forces can cause the outgoing temperature to vary from the set point temperature That is, external forces tend to cause the heater 24 to overshoot or undershoot the set point temperature
• These external forces include, but are not limited to aging of the infra-red lamps 72, variations in the heater 24 or power controller 44 due to normal manufacturing tolerances and variations in the actual heater efficiency correction factor/from the simple quadratic approximation
• the calculated power (PC L CU LATED ) also does not include the power required to heat the reflective shell 74 after a change in set point temperature (Tset)
• Tset set point temperature
• a feedback loop utilizing a control algorithm to determine an error term
• the control algorithm is Proportional Integral Derivative (PID) control
• the error term is calculated using the equation
• FIG. 2 is an exemplary illustration of the operation of the Error equation in the present system 20 where the curve is TOUT
• the proportional term P(T SET - T O UT) IS proportional to the distance between the outgoing temperature (T OUT ) and the set point temperature (TSET), such as for example the distances 50a, 50b multiplied by the constant P
• the integral term is proportional to a running total or cumulative area between the curve of the outgoing temperature TOUT curve and T SET for a given time interval, such as for the time interval up to 52a, 52b
• the derivative term is proportional to the slope or approach rate of the outgoing temperature of the liquid to the set point temperature TSET, such as for example the slope of the tangents 54a, 54b to T OUT
• contributions from the integral term are not added to the running total unless the outgoing temperature (TOUT) IS within a predetermined range of the set point temperature (T S ET)
• TOUT outgoing temperature
• T S ET set point temperature
• the integral term is not added to the running total until the outgoing temperature is between 75% and 125% of the set point temperature
• the integral teim is set to zero until the outgoing temperature is between 85% and 1 15% of the set point temperature
• FIG. 3 illustrates application of the present flowing liquid temperature control svstem 20
• Figure 3 schematically illustrates a spray acid processor available under the trade name MERCURY® available from FSI International for processing microelectronic components, such as integrated circuits, components for flat panel displays, precursor components including silicon wafers, and various other electrical components 62 located in a process chamber 64
• the process chamber 64 includes a spray post 66 for applying various chemicals, such as de-ionized water, HF, H 2 O 2 , HCl, NH jOH, H 2 SO 4 , to the components 62
• these chemicals flow through the heater 24 that is attached to the control 40, discussed above In the illustrated embodiment, the various chemicals are delivered to the heater at a temperature at or below the set point temperature
• Another application of the present flowing liquid temperature control system 20 is disclosed in a commonly assigned U S Patent application entitled A METHOD AND SYSTEM TO UNIFORMLY ETCH SUBSTRATES USING AN ETCHING COMPOSITION COMPRISING A FLUOR
• FIG. 4 is a sample graph illustrating the operation of the present flowing liquid control system for processing microelectronic components This example was conducted using the heater and spray acid processor available under the trade name MERCURY® from FSI International of Chaska, Minnesota The liquid was about 2° o bv volume deionized water, about 2% by volume HF and about 96% by volume ethylene glycol The flow rate (Q FLOW ) was about 4 liters/minute and the set point temperature (T SET ) was about 85 degrees C The upper curve illustrates T OLT and the lower curve illustrates T I N
• T OLT is about equal to T IN During the three-minute time index from about 770 seconds to about 950 seconds, T OUT oscillates around TSE ⁇ During the two and a half minute time index from about 950 seconds to about 1 100 seconds, the outgoing temperature of the liquid being is within an acceptable temperature range, e ⁇ en though the incoming temperature declines about 20 degrees C during that period

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• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Automation & Control Theory (AREA)
• Cleaning Or Drying Semiconductors (AREA)
• Control Of Resistance Heating (AREA)
• Control Of Temperature (AREA)

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• 2000
  • 2000-03-03 EP EP00912192A patent/EP1159658A1/de not_active Withdrawn
  • 2000-03-03 WO PCT/US2000/005932 patent/WO2000052547A1/en not_active Application Discontinuation
  • 2000-03-03 JP JP2000602903A patent/JP2002538544A/ja active Pending

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