EP1062181A2 - Verfahren zur trocknung und herstellung von mikroporösen teilchen sowie eine vorrichtung zur trocknung - Google Patents
Verfahren zur trocknung und herstellung von mikroporösen teilchen sowie eine vorrichtung zur trocknungInfo
- Publication number
- EP1062181A2 EP1062181A2 EP99915573A EP99915573A EP1062181A2 EP 1062181 A2 EP1062181 A2 EP 1062181A2 EP 99915573 A EP99915573 A EP 99915573A EP 99915573 A EP99915573 A EP 99915573A EP 1062181 A2 EP1062181 A2 EP 1062181A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- fluid
- particles
- drying
- microporous
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00
Definitions
- the present invention relates to a method for drying microporous, fluid-containing particles, a method for producing microporous, spatially crosslinked particles, in which this drying method is used, and a device for carrying out the drying method.
- hydrogels e.g. Silica hydrogels, which can be produced by precipitation of gel from water glass, to dry under supercritical conditions to microporous, spatially cross-linked silicon dioxide particles.
- supercritical drying the interfacial tension of the fluid contained in the microporous, spatially crosslinked particles is completely or largely removed with the aim of largely avoiding shrinkage of the microporous, spatially crosslinked particles during drying, since when shrinking, characteristic properties of the microporous, spatially all or part of the cross-linked particles are lost.
- Such a product obtained by supercritical drying is called airgel in gels.
- airgel in gels In contrast to conventional drying without special precautions, in which the gels suffer a large volume contraction and xerogels are formed, there is therefore only a small ( ⁇ 15%) volume contraction when drying near the critical point.
- WO-A-95 06 617 relates to hydrophobic silica aerogels which are obtained by reacting a water glass solution with an acid at a pH of 7.5 to 11, largely removing ionic constituents from the hydrogel formed by washing with water or dilute aqueous Solutions of inorganic bases while maintaining the pH of the hydrogel in the range from 7.5 to 11, displacement of the aqueous phase contained in the hydrogel by an alcohol and subsequent supercritical drying of the alkogel obtained.
- a process for producing silica airgel on a pilot scale is described by White in Industrial and Engineering Chemistry, Volume 31 (1939), No. 7, pp. 827-831, and in Trans. A J. Chem. E. (1942) , Pp. 435-447.
- the process comprises the following steps: production and aging of silica hydrogel, comminution of the hydrogel into granules, removal of salt from the gel formed, replacement of the water in the gel with alcohol, introduction of the dry gel into a pressure vessel, heating of the pressure vessel, lowering of the Pressure to atmospheric pressure, evacuation of the pressure vessel and subsequent removal of the Aerogels.
- the disadvantage of this method is that all steps are carried out discontinuously and are therefore very time, personnel and cost intensive.
- White does not mention continuous processes for granule production and desalination.
- the object of the present invention was to provide an improved, more economical method for drying microporous, fluid-containing particles, a device suitable for carrying out this method and an improved, more economical method for producing microporous, spatially crosslinked particles using the drying method, wherein the above-mentioned disadvantages of the prior art can be avoided.
- this object can be achieved if the heat required for heating to temperatures which are at least close to the critical temperature of the fluid is supplied by convection. Furthermore, it was found that this measure can be carried out particularly advantageously in an apparatus in which a pressure container has an inner container and a pressure-bearing outer container, a gap being provided between the inner and outer containers, and the device suitable measuring and control devices and pumps and has heat exchange devices.
- the invention thus relates to a process for drying microporous, fluid-containing particles by reducing the interfacial tension of the fluid, preferably to 0 to 1/10, in particular to 0 to 1/20, of the interfacial tension of the fluid present at room temperature by until supercritical pressure of the fluid increases the temperature accordingly.
- the process according to the invention is then characterized in that the heat required for increasing the temperature is supplied by convection.
- the invention relates to a device for carrying out this drying process, which is characterized in that it has a pressure container with an inner container and a pressure-bearing outer container as well as suitable measuring and control devices and pump and heat exchange devices, the inner container being provided for receiving the particles to be dried is, and a gap or space is provided between the inner container and outer container.
- the range in which work is preferably carried out according to the invention can be defined in that the microporous particles do not lose their properties during drying; this means that e.g. the apparent density of the product does not increase significantly, that the thermal conductivity of the product does not increase significantly, that preferably no shrinkage of more than 15%, in particular no shrinkage of more than 10%, occurs.
- This fact can also be described in that the airgel must not become a xerogel (gel dried at normal pressure)
- the interfacial tension mentioned above is determined as described in "The Properties of Gases and Liquids" by Reid, Brausnitz, Sherwood, McGraw Hill, 1977, pp. 601 ff. is described, the interfacial tension at the temperature (and pressure) to be tested being measured and compared with that at room temperature and atmospheric pressure under the same conditions.
- the invention relates to a method for producing microporous, spatially crosslinked particles by
- step (b) optionally washing and / or desalting the obtained in step (a),
- step (e) optionally separating sorted gases and / or substances from the dried particles from step (d),
- step (b ) the particles obtained from stage (a) are directed towards a solvent stream and / or water stream
- step (c) the particles are countercurrent to the fluid
- stage (e) the dried particles are directed towards an inert gas stream.
- microporous, fluid-containing particles which are suitable for drying according to the invention are not subject to any particular restrictions. All particles, solids, structures or granules are suitable which are at least partially, preferably entirely, microporous and contain a fluid in the pores.
- Suitable particles are, for example, gels which consist of inorganic or organic materials or of polymer material, for example of inorganic oxides or hydroxides such as boron or silica, oxides or hydroxides of the metals titanium, molybdenum, tungsten, iron or tin, aluminum oxide or organic gels such as agar-agar , Gelatin or albumin.
- the process according to the invention is particularly suitable for drying silica gels.
- Gels can be used which contain compounds with a critical temperature lower than 350 ° C. or mixtures or mixtures thereof, preferably water and / or liquid organic compounds, as a fluid.
- Suitable as fluid include all compounds that are mentioned later in the description of the drying fluids.
- Particularly suitable fluids are water, Ci-C ⁇ alkanols or mixtures thereof, with methanol, ethanol, n- and isopropanol being preferred. Most preferred is isopropanol.
- hydrogels and alkogels The method according to the invention is used most frequently in the drying of silica gels which contain water, the abovementioned liquid organic compounds or mixtures thereof as a fluid.
- the microporous, fluid-containing particles contain 50 to 97% by weight, in particular 80 to 90% by weight, of fluid, based on the total weight of the particles under standard conditions (pressure of 1 bar, temperature of 25 ° C.).
- the particle diameters are in the range from 1 to 15 mm, in particular 2 to 6 mm. Macro, meso and / or micro pores are present in the particles.
- the microporous particles to be dried can have any shape, for example beads (spheres) or angular shapes.
- the drying method according to the invention is also suitable for drying microporous, fluid-containing particles or structures which have a certain regular arrangement of the building blocks can have.
- Suitable particles are, for example, crystallized structures, nanostructures, the regular arrangement of which is self-organized in the presence of thermally degradable templates, or nanocomposites and their precursors or clathrates.
- the microporous particles can also be a microporous cover layer provided with a certain doping on a non-porous carrier.
- Catalysts or compounds which have been given chemically reactive centers by impregnation or modification or which are impregnated or modified during drying are also suitable. Aerogels are preferably formed after drying. If the particles to be dried do not contain any fluid suitable for the drying according to the invention, this can be replaced by a suitable fluid or a more suitable fluid before drying.
- some microporous particles can be dried with water as the fluid.
- a water-miscible drying fluid e.g. an alcohol
- the water contained in the hydrogel can be exchanged for one for the Drying more suitable fluid, such as an alcohol, completely or partially. Exchange and drying can also be carried out at the same time.
- the convective heat supply according to the method according to the invention can take place in different ways and is not subject to any particular restriction. All materials that can be brought into the supercritical state without decomposition are suitable as convection media or currents. These are preferably inert to the particles to be dried. In addition, substances can also be added to the convection current from a certain temperature in order to chemically modify, impregnate the structure to be dried or e.g. Remove traces of water. Modification may be desirable if, e.g. the interfacial tension can be reduced.
- drying is used as a convection current or medium drying fluids, the critical data of which are not too high, in order to avoid a greater outlay on equipment.
- Suitable drying fluids are ammonia, sulfur dioxide, nitrogen dioxide, sulfur hexafluoride; Alkanes such as propane, butane, pentane, hexane and cyclohexane; Alkenes such as -CC 7 -n-, iso-, neo-, secondary or tertiary alkenes, for example ethene or propene; Alkanols such as methanol, ethanol or n- or isopropanol or butanols; Ethers such as dimethyl ether, diethyl ether or tetrahydrofuran; Aldehydes such as formaldehyde or acetaldehyde; Ketones such as acetone; Esters such as the methyl, ethyl, n- or
- C 1 -C 6 -alkanols, ethers, ketones, aldehydes, alkanes, alkenes, esters or amines are preferred. Most preferred are -C 3 alkanols, especially isopropanol.
- halogenated hydrocarbons are also possible, but these will be avoided for reasons of material selection and environmental protection requirements. Media with high critical temperatures or high pressures, such as water, will also be attempted to be avoided.
- supercritical carbon dioxide is also suitable as the drying fluid. Because of its favorable critical temperature of 31 ° C, this is particularly suitable for thermally sensitive substances.
- drying fluid In general, the choice of drying fluid depends on various points. If you want to set "close” critical conditions, the thermal stability of the particles to be dried or the end product determines, among other things, the selection of the drying fluid and thus also limits the critical temperature of the drying fluid. In addition, possible fluid recovery, toxicological safety, miscibility with the fluid in the particles to be dried, product properties and safety-related data can play a role in the selection of the drying fluid. There is also the possibility of adding a component to the drying fluid which contains functional groups, the the surface of the particles to be dried are reacted, absorbed or adsorbed. This means that uniform coating, coating or impregnation of the particles to be dried can be achieved at the same time during drying.
- a modified application of the drying fluid is, for example, the addition of ammonia to isopropanol as the drying fluid in order, for example, to be able to dry acidic hydrogels without isopropanol decomposing.
- ammonia means that an undesirable amount of ether is not formed.
- isopropanol or isobutanol can be added to make a silica gel hydrophobic.
- suitable components for the chemical or physical modification of the particles to be dried can be added before or when the critical temperature of the fluid is reached.
- drying fluid is miscible with the fluid contained in the particles to be dried, at least under the conditions present during drying.
- the drying fluid is advantageously the same as the fluid contained in the microporous particles.
- fluids / drying fluids which are completely miscible under the conditions of drying are mixtures of water with higher alcohols or aromatics.
- the convection current can flow through the bed of the particles to be dried from top to bottom, from bottom to top or from an axial distributor to the outside or vice versa.
- the mechanical stability, the elasticity, the particle size distribution and the average particle diameter of the particles determine the type of flow through the bed. Any fine-particle material that forms can be carried along in the fluid circuit or separated.
- the flow can be completely or partially fluidized in the case of an inflow from below.
- the convection current can be circulated using a temperature-resistant pump, or only "fresh" drying fluid is brought up to temperature in a straight-ahead mode.
- the drying is carried out in such a way that the convection medium is first fed into the drying room without pressure and then the particles to be dried, which are preferably heated, are flushed in without pressure.
- the pressure in the drying room is then set to the desired value in the vicinity of the critical point.
- a graft flow is then preferably set with the convection medium.
- the temperature is then increased to the vicinity of the critical point. After the near-critical to supercritical conditions of the fluid have been reached, the pressure is released, whereby the particles are "dried".
- the convection medium can be circulated.
- the interfacial tension of the fluid contained in the pores of the particles to be dried can also be reduced by adding surface-active substances or a prior modification of the microporous, fluid-containing particles by e.g. Silanization, organic esterification or etherification or, in the case of silica gels, siloxanization of vicinal silane mono / di triols of the inner and outer surface.
- surface-active substances e.g. Silanization, organic esterification or etherification or, in the case of silica gels, siloxanization of vicinal silane mono / di triols of the inner and outer surface.
- the invention relates to a method for producing microporous, spatially crosslinked particles by the steps (a) to (e) defined above.
- Microporous particles containing pore liquid can be produced continuously according to methods known to the person skilled in the art.
- a washing step for the particles obtained in step (a) can be carried out if undesired constituents, such as unreacted starting material or impurities in the starting material, are to be removed.
- the particles from stage (a) are moved towards a solvent, preferably a water-miscible solvent.
- a desalting step (b) of the microporous, pore liquid or solvent-containing particles can be provided before, after or simultaneously with the washing or alone (without washing) if the particles contain undesired salts.
- Such a step is carried out continuously by counteracting the particles obtained from stage (a) or the particles obtained after washing as a moving bed with a stream of water.
- a suitable ratio or a suitable setting of the material flows of particles to be dried and water or solvent for the production and maintenance of the moving bed can be determined by the person skilled in the art in the course of experiments customary in the art. This setting depends, among other things, on the height of the moving bed, the internal mass transfer in the particles to be dried and the swirl point, ie on the density and particle size or particle size distribution of the microporous particles to be dried.
- the water flow or solvent flow is preferably set so that there is no fluidization in the moving bed and thus no undesired segregation.
- the backmixing on the water side or solvent side is lowest if one works with a water or solvent flow rate in the vicinity of the loosening point of the moving bed.
- All types of pumps which are suitable for conveying granular material are suitable as input and discharge elements for the particles to be dried, with modified concrete pumps having proven particularly useful.
- the moving bed process can be used without problems in washing and / or desalting, ie a process can be used in which the microporous particles migrate from top to bottom without a conveyor.
- a process can be used in which the microporous particles migrate from top to bottom without a conveyor.
- the density difference is smeared to a sufficient moving bed length and one Minimum relative speed set.
- an acceptable specific displacement component requirement is then achieved in comparison with a fixed bed exchange operated in batches.
- very favorable demand conditions ie the volume of fresh water required to obtain a certain volume of desalinated hydrogel
- the washing step and / or desalination step are accelerated by increasing the temperature, i.e. the higher the temperature, the faster they run. They are therefore preferably carried out at an elevated temperature, the upper limit for the temperature inter alia. by the decomposition of the particles to be washed or desalted, their clumping / tendency to stick, dissolve in the fluid, etc. is specified. For example, you can desalt some silica gels at around 80 ° C. A pulsation of the solvent or water flow can also be provided to improve the cross-mixing. Furthermore, by bubbling in gas, e.g. Air that loosened up the hiking layer. In stage (b), silica gel is preferably desalted after aging.
- step (c) the pore liquid contained in the particles is partially or completely replaced, in particular 97 to 99%, by a fluid.
- Suitable fluids are the fluids described above in the description of the microporous fluid-containing particles. Analogous to desalination, elevated temperatures favor the exchange. The statements made above under step (b) therefore apply with regard to the suitable temperature. What has been said above under stage (b) also applies to the setting of the moving bed. People can do the same with the exchange step desired degree of exchange can be set. Such an exchange of the pore liquid can of course be omitted if the particles obtained in step (a) or (b) already contain a suitable fluid.
- step (c) the pore liquid in the particles is first exchanged for a liquid which is miscible with the pore liquid but is not suitable for drying. In this case, the liquid miscible with the pore liquid is then exchanged for a fluid suitable for drying.
- stage (c) it is also possible to feed material flows of different purities at different heights.
- a combination of the exchange step with a separation of fines or, for example, adhering oil from the gelation is possible and can save a separate classification step if necessary.
- the combination of desalination in stage (b) and exchange in stage (c) in one apparatus can also be advantageous if the kinetic conditions are appropriate.
- step (d) the microporous, fluid-containing particles are dried.
- the drying is carried out by means of convective heat supply, as described above in the drying method according to the invention.
- stage (e) which may be carried out, the dried particles are separated or freed from absorptively and / or adsorptively bound gases and / or substances.
- This step is carried out continuously in a moving bed in countercurrent, the dried particles being directed towards an inert gas stream, preferably under reduced pressure.
- Suitable inert gases are nitrogen, carbon dioxide or noble gases. Air or flue gas may also be used.
- the separation step can optionally be improved by displacement adsorption with a stronger adsorbent.
- the removal of the absorbed and / or adsorptively bound substances and / or gases can also be carried out solely by applying a vacuum.
- Step (e) can be followed by a continuous final assembly step in which the microporous, spatially crosslinked particles are brought into the desired shape, for example by grinding, sieving or mixing with additives suitable for the application. It is also possible to provide the particles obtained with a hard shell, e.g. by means of sintering to increase their mechanical strength.
- microporous, spatially crosslinked particles obtained are the same particles as have been described above in the drying process according to the invention, these particles being additionally freed from undesired by-products compared to the abovementioned.
- microporous particles obtainable by means of the process according to the invention can be used in many technical fields. Among other things, they are suitable for the production of transparent or opaque thermal insulation materials (under certain circumstances as a substitute for fluorine-chlorine-hydrocarbon-containing materials).
- catalysts and catalyst supports adsorbents, carbon aerogels obtained by coking microporous polymers as electrodes (eg soaked in electrolyte in capacitive energy stores), membranes, Cerenkov detectors, super light sponges for storage / storage or as C ⁇
- the device according to the invention for drying microporous, fluid-containing particles comprises at least one “double-shell” container comprising an inner container and a pressure-bearing outer container, as well as suitable measuring and regulating devices and pump and heat exchange devices.
- the inner container is provided or intended for receiving the particles to be dried, and a gap or space is provided between the inner and outer containers.
- the inner container can have any shape, preferably a rotationally symmetrical shape, e.g. a cylinder with a conical outlet or a ball, so that in a preferred embodiment the gap is rotationally symmetrical.
- the inner container can be conical at the top and / or at the bottom. It can be made from all materials that still have the required strength at the drying temperature to be set.
- the inner container is preferably thin-walled, the inner container is preferably designed for pressures less than 6 bar.
- the outer container is made of materials that have the compressive strength required for drying. Fine-grain structural steel or heat-resistant steel is preferred.
- the gap or space between the inner and outer container provides thermal insulation. It is expediently filled with an inert gas, preferably a poorly heat-conducting gas, such as nitrogen or krypton. To improve the insulation, it can also be filled with insulation material (e.g. rock or glass wool).
- the figure describes a device with inner and outer container and suitable measuring and control devices and pumps and heat exchangers, which is particularly suitable for carrying out the drying process according to the invention.
- the actual dryer consists of the thin-walled inner container 1 and the pressure-bearing outer container 2.
- the method according to the invention is carried out as follows. First, the inner container 1 via line 3 with drying fluid filled. The particles to be dried are then flushed in from the storage container 4 via line 5 at the top of the dryer with drying fluid. The dryer is closed and the pressure in it is increased to near to supercritical conditions. Then the pump 6 presses the drying fluid heated in the heat exchanger 7 from below into the particle bed.
- a differential pressure control is preferably used between the inner container 1 and the outer container 2, since the inner container 1 is to be constructed as thinly as possible. This differential pressure control works as follows: If the level in the standing vessel 10 rises because there is an overpressure in the drying fluid circuit and drying fluid flows to the standing vessel 10 via the cooler 11, the level of the pressure is measured via a fill level sensor 12 with the aid of an N 2 split-range control 13 N 2 cushion in the gap formed between the inner and outer container increased.
- the N 2 split-range control 13 will correspondingly reduce the pressure of the N 2 cushion in the gap.
- a small cleaning fluid flow 14 is fed to the standing container 10 via a flow control.
- This flow of material may also take on the task, inter alia, of reducing the level of components which are formed and are disruptive by supplying fresh fluid.
- an overflow valve between the inner and outer container (not shown) preferably protects the inner container 1.
- the pressure drop between the foot and head of the particle bed should be limited. If corresponding regulations fail, the inner container 1 is protected from destruction by a further overflow valve in a dryer bypass (not shown).
- the invention offers the advantages that considerable amounts of energy can be saved, since the outer container only has a small temperature change in the drying process subject to. In addition, the temperature change stress on the flanges and other parts of the apparatus is largely reduced in comparison to known methods from the prior art.
- To load the dryer only the inner container has to be cooled, for example by evaporative cooling. The batch time is considerably reduced by eliminating the heating and cooling processes of the outer container.
- silica hydrogels were produced. At least 95% by volume of these had a pearl diameter of 2 to 12 mm. Coarse material was separated off using a harp sieve immersed in water. Next, the silica hydrogels were added before Desalination undergoes a continuous stream classification.
- the liquid exchange step was carried out in a 11 m high and 500 mm wide moving bed, which was constructed similarly to that used for desalination.
- the alcohol was supplied via a distributor above the rotary valve.
- the water / alcohol mixture was able to run through slotted sieves. At low flow velocities and with gels that tend to stick, the cross-mixing in the bed could be improved with static mixers.
- the desalted hydrogel stream from stage (b) of about 1000 l / h was sent an isopropanol stream of about 1400 l / h. After 10 hours at the latest, a steady state in the moving bed was established. The densities of the samples from the various sampling points along the bed showed no change. The residual water content in the gel, which was derived at the foot of the moving bed, was less than 1% by weight. The specific isopropanol / volume ratio was 1.4: 1.
- the apparatus used corresponded schematically to the device shown in the figure.
- the equipment used consisted of a 100 bar pressure-resistant outer container made of heat-resistant steel, stainless steel-plated inside, and a 400 mm wide inner container made of stainless steel.
- the outer container was 8 m high, cylindrical, and had an outer diameter of 600 mm and a wall thickness of 50 mm.
- the Inner container had a wall thickness of 4 mm and tapered at the top and bottom.
- the usable volume was 1 m.
- the annular gap filled with nitrogen between the inner and outer container was 50 mm wide in the cylindrical area.
- the inner container communicated with the drying fluid circuit, which housed the pressure maintenance, circuit pump and heat exchanger.
- a trunk protruded into the head of the inner container, which had the Alkogel feed line in the center and the screen surface on the outside of the cylinder for fluid / solid separation.
- the pressure-bearing part of the dryer was heated to 300 ° C with 100 bar steam.
- the inner container was boiled by adding isopropanol.
- Alkogel was rinsed in with isopropanol, which was circulated. During this charging process, the temperature of the alkogel hardly increased.
- the annular gap and inner container were brought to 60 bar pressure.
- the pump was switched on and drying fluid was first fed in at low speed, for example 1 m per hour at a density above 0.7 kg / 1.
- the bed of the alkogel was flowed from below. Then the heat exchanger was heated. The speed of the pump could be increased with decreasing density of the drying fluid.
- the temperature at the top of the dryer could also be used as a reference variable. 70% of the isopropanol could be forced out of the circuit when cold. The supercritical temperature at the top of the bed was reached after 50 minutes. It was relaxed without affecting the two-phase area. Stage (s): separation of sorted gases / substances
- a 3 m silo was used to remove / separate the sorted gases / materials.
- the airgel was pneumatically transferred to the silo.
- the silo was then evacuated and a weak stream of nitrogen was allowed to flow through the bed at approximately 30 mbar pressure. This stream of nitrogen exchanged the gas atmosphere in the silo ten times per hour. As a result, the partial pressure of desorbed alcohol was kept low, the desorption accelerated and completed.
- the residence time was more than 30 minutes in order to also remove sorted gases / substances from the Knudsen pores of the airgel. If it was desired or necessary to cool, the silo was operated at normal pressure and worked with N 2 in a circular mode over a washer.
- the continuous assembly step was carried out by grinding and mixing in dopants (blowing) in a pin mill.
- the airgel granules obtained had a grain size of up to 12 mm, only 2% by volume of the granules having a grain size of less than 2 mm.
- the average thermal conductivity eio of the 2-3 mm fraction of the granulate was better than 18 mW / (mK) according to DIN 52616, for the powder it was 16 mW / (mK).
- the transparency of the 2-3 mm fraction was 60% at 1 cm layer thickness.
- the bulk density according to ISO 3944 was 70 to 130 g / 1.
- the airgel was water-repellent and floated on water.
- the headspace (the Gas phase above the bed) of the airgel did not become explosive at 100 ° C and only explosive at 160 ° C after one hour.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Silicon Compounds (AREA)
- Drying Of Solid Materials (AREA)
- Manufacturing Of Micro-Capsules (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19810564 | 1998-03-11 | ||
DE19810564A DE19810564A1 (de) | 1998-03-11 | 1998-03-11 | Verfahren zur Trocknung und Herstellung von mikroporösen Teilchen sowie eine Vorrichtung zur Trocknung |
PCT/EP1999/001591 WO1999046203A2 (de) | 1998-03-11 | 1999-03-11 | Verfahren zur trocknung und herstellung von mikroporösen teilchen sowie eine vorrichtung zur trocknung |
Publications (2)
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EP1062181A2 true EP1062181A2 (de) | 2000-12-27 |
EP1062181B1 EP1062181B1 (de) | 2004-06-02 |
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Application Number | Title | Priority Date | Filing Date |
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EP99915573A Expired - Lifetime EP1062181B1 (de) | 1998-03-11 | 1999-03-11 | Verfahren zur trocknung und herstellung von mikroporösen teilchen |
Country Status (9)
Country | Link |
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US (1) | US6438867B1 (de) |
EP (1) | EP1062181B1 (de) |
JP (1) | JP3535829B2 (de) |
KR (1) | KR100604727B1 (de) |
AT (1) | ATE268310T1 (de) |
DE (2) | DE19810564A1 (de) |
DK (1) | DK1062181T3 (de) |
ES (1) | ES2222027T3 (de) |
WO (1) | WO1999046203A2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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DE19810565A1 (de) * | 1998-03-11 | 1999-09-16 | Basf Ag | Verfahren zur Trocknung und Herstellung von mikroporösen Teilchen |
JP4857459B2 (ja) * | 2000-03-06 | 2012-01-18 | 栗田工業株式会社 | 水熱反応方法および装置 |
US7557073B2 (en) * | 2001-12-31 | 2009-07-07 | Advanced Technology Materials, Inc. | Non-fluoride containing supercritical fluid composition for removal of ion-implant photoresist |
US7326673B2 (en) * | 2001-12-31 | 2008-02-05 | Advanced Technology Materials, Inc. | Treatment of semiconductor substrates using long-chain organothiols or long-chain acetates |
CN1748114A (zh) * | 2002-12-19 | 2006-03-15 | 卡格斯-福尔康布里奇股份有限公司 | 用于液相萃取的系统和方法 |
US7776218B2 (en) * | 2003-12-19 | 2010-08-17 | Kfi Intellectual Properties L.L.C. | System for liquid extraction, and methods |
US20040241742A1 (en) * | 2003-05-30 | 2004-12-02 | Peck Bill J. | Ligand array processing methods that include a low surface tension fluid deposition step and compositions for practicing the same |
US20060084707A1 (en) * | 2004-10-15 | 2006-04-20 | Aspen Aerogels, Inc. | Methods for manufacture of aerogels |
US7877895B2 (en) | 2006-06-26 | 2011-02-01 | Tokyo Electron Limited | Substrate processing apparatus |
US7908765B2 (en) * | 2006-12-22 | 2011-03-22 | Collette Nv | Continuous granulating and drying apparatus |
US7803343B2 (en) * | 2007-06-27 | 2010-09-28 | J.M. Huber Corporation | Silica gel manufacturing method and gels made thereby |
US8596468B2 (en) * | 2007-06-27 | 2013-12-03 | J.M. Huber Corporation | Composite caustic silica gel manufacturing method and gels made thereby |
JP5811620B2 (ja) | 2010-12-13 | 2015-11-11 | 富士ゼロックス株式会社 | シリカ粒子の製造方法 |
JP2012151398A (ja) * | 2011-01-21 | 2012-08-09 | Toshiba Corp | 超臨界乾燥装置及び方法 |
WO2014030192A1 (ja) * | 2012-08-24 | 2014-02-27 | パナソニック株式会社 | シリカ多孔体および光マイクロフォン |
CN107824129B (zh) * | 2017-12-04 | 2024-03-12 | 陕西盟创纳米新型材料股份有限公司 | 一种醇超临界法生产气凝胶的干燥系统 |
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US2249767A (en) * | 1937-07-03 | 1941-07-22 | Monsanto Chemicals | Method of making aerogels |
DE3429671A1 (de) * | 1984-08-11 | 1986-02-20 | Basf Ag, 6700 Ludwigshafen | Verfahren zur herstellung von aerogelen |
US4610863A (en) * | 1985-09-04 | 1986-09-09 | The United States Of America As Represented By The United States Department Of Energy | Process for forming transparent aerogel insulating arrays |
DE4316540A1 (de) * | 1993-05-18 | 1994-11-24 | Hoechst Ag | Verfahren zur unterkritischen Trocknung von Aerogelen |
AU7655594A (en) * | 1993-08-31 | 1995-03-22 | Basf Aktiengesellschaft | Hydrophobic silicic acid aerogels |
EP0783371B1 (de) * | 1994-09-22 | 1998-06-24 | F. Hoffmann-La Roche Ag | Heterogenen katalysatoren |
US5686031A (en) * | 1995-01-05 | 1997-11-11 | Regents Of The University Of California | Method for rapidly producing microporous and mesoporous materials |
DE19538333A1 (de) * | 1995-10-14 | 1997-04-17 | Basf Ag | Verfahren zur unterkritischen Herstellung von Aerogelen |
US5680713A (en) * | 1996-03-05 | 1997-10-28 | Hoechst Aktiengesellschaft | Process for the subcritical drying of aerogels |
-
1998
- 1998-03-11 DE DE19810564A patent/DE19810564A1/de not_active Withdrawn
-
1999
- 1999-03-11 AT AT99915573T patent/ATE268310T1/de not_active IP Right Cessation
- 1999-03-11 EP EP99915573A patent/EP1062181B1/de not_active Expired - Lifetime
- 1999-03-11 US US09/623,873 patent/US6438867B1/en not_active Expired - Lifetime
- 1999-03-11 JP JP2000535586A patent/JP3535829B2/ja not_active Expired - Fee Related
- 1999-03-11 DK DK99915573T patent/DK1062181T3/da active
- 1999-03-11 ES ES99915573T patent/ES2222027T3/es not_active Expired - Lifetime
- 1999-03-11 DE DE59909648T patent/DE59909648D1/de not_active Expired - Lifetime
- 1999-03-11 WO PCT/EP1999/001591 patent/WO1999046203A2/de active IP Right Grant
- 1999-03-11 KR KR1020007010049A patent/KR100604727B1/ko not_active IP Right Cessation
Non-Patent Citations (1)
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See references of WO9946203A2 * |
Also Published As
Publication number | Publication date |
---|---|
WO1999046203A3 (de) | 2000-04-06 |
KR20010041782A (ko) | 2001-05-25 |
JP2002505956A (ja) | 2002-02-26 |
US6438867B1 (en) | 2002-08-27 |
EP1062181B1 (de) | 2004-06-02 |
DE59909648D1 (de) | 2004-07-08 |
DE19810564A1 (de) | 1999-09-16 |
WO1999046203A2 (de) | 1999-09-16 |
KR100604727B1 (ko) | 2006-07-28 |
JP3535829B2 (ja) | 2004-06-07 |
DK1062181T3 (da) | 2004-08-16 |
ATE268310T1 (de) | 2004-06-15 |
ES2222027T3 (es) | 2005-01-16 |
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