EP1058065A3 - Schleuse für Reinraum-Anlagen - Google Patents

Schleuse für Reinraum-Anlagen Download PDF

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Publication number
EP1058065A3
EP1058065A3 EP00110416A EP00110416A EP1058065A3 EP 1058065 A3 EP1058065 A3 EP 1058065A3 EP 00110416 A EP00110416 A EP 00110416A EP 00110416 A EP00110416 A EP 00110416A EP 1058065 A3 EP1058065 A3 EP 1058065A3
Authority
EP
European Patent Office
Prior art keywords
airlock
clean room
air lock
wall
double skinned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00110416A
Other languages
English (en)
French (fr)
Other versions
EP1058065B1 (de
EP1058065A2 (de
Inventor
Rüdiger Prof. Dr.-Ing. Detzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imtech Deutschland GmbH and Co KG
Original Assignee
Rud Otto Meyer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rud Otto Meyer GmbH and Co KG filed Critical Rud Otto Meyer GmbH and Co KG
Publication of EP1058065A2 publication Critical patent/EP1058065A2/de
Publication of EP1058065A3 publication Critical patent/EP1058065A3/de
Application granted granted Critical
Publication of EP1058065B1 publication Critical patent/EP1058065B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

Eine Reinraumschleuse mit einem von jeweils zwei kreissegmentartigen Seitenwänden und Türeinsätzen sowie von Boden und Decke begrenzten Schleusenraum im wesentlichen zylindrischen, von Luft in Drallströmungsart durchströmten Querschnittes, bei dem eine der Seitenwände Ausströmöffnung/-gen und Decken- und/oder Bodenbereich jeweils Überströmöffnungen für die den Schleusenraum durchströmende Luft aufweisen, sowie mit einer Zuström- und einer Rückluftkammer, wird dadurch ohne die Nachteile des Standes der Technik wirtschaftlich herstellbar, problemlos einsetzbar und einfach betreibbar, wenn die eine Seitenwand die Zuströmkammer (10) bildet, deren Innenwand (11) mindestens eine im wesentlichen achsparallele, über zumindest einen Teil ihrer Höhe verlaufende Ausströmöffnung (17) und deren Außenwand (12) mindestens einen luftdurchlässigen, als Filterwand (15) ausgebildeten Bereich (14) aufweisen, und wenn die andere die andere Seitenwand eine vom Bodenbereich zur Rückluftkammer (4) oberhalb der Decke (4.1) führenden Überströmkanal (23) für die Luft bildet, deren Innenwand (21) den Schleusenraum begrenzt, und auf die ein Gebläse (6) mit in diese geführtem Ansaug (7) aufgesetzt ist.
Figure 00000001
EP00110416A 1999-06-04 2000-05-16 Schleuse für Reinraum-Anlagen Expired - Lifetime EP1058065B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29909803U DE29909803U1 (de) 1999-06-04 1999-06-04 Schleuse für Reinraum-Anlagen
DE29909803U 1999-06-04

Publications (3)

Publication Number Publication Date
EP1058065A2 EP1058065A2 (de) 2000-12-06
EP1058065A3 true EP1058065A3 (de) 2002-12-18
EP1058065B1 EP1058065B1 (de) 2005-04-27

Family

ID=8074389

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00110416A Expired - Lifetime EP1058065B1 (de) 1999-06-04 2000-05-16 Schleuse für Reinraum-Anlagen

Country Status (3)

Country Link
EP (1) EP1058065B1 (de)
AT (1) ATE294362T1 (de)
DE (2) DE29909803U1 (de)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3285693A (en) * 1966-11-15 Apparatus for decontaminating personnel
JPS6071837A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd エアシヤワ−装置
JPS62106247A (ja) * 1985-11-05 1987-05-16 Hitachi Ltd エアジエツトノズルおよびそれを用いたエアシヤワ−装置
DE3604422A1 (de) * 1986-02-13 1987-08-20 Kessler & Luch Gmbh Vorrichtung zum saeubern kontaminierter oberflaechen mittels stroemender luft
JPS62225838A (ja) * 1986-03-26 1987-10-03 Nippon Air Curtain Kk エア−シヤワ−装置
JPH07293956A (ja) * 1994-04-28 1995-11-10 Hitachi Plant Eng & Constr Co Ltd エアシャワー装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3285693A (en) * 1966-11-15 Apparatus for decontaminating personnel
JPS6071837A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd エアシヤワ−装置
JPS62106247A (ja) * 1985-11-05 1987-05-16 Hitachi Ltd エアジエツトノズルおよびそれを用いたエアシヤワ−装置
DE3604422A1 (de) * 1986-02-13 1987-08-20 Kessler & Luch Gmbh Vorrichtung zum saeubern kontaminierter oberflaechen mittels stroemender luft
JPS62225838A (ja) * 1986-03-26 1987-10-03 Nippon Air Curtain Kk エア−シヤワ−装置
JPH07293956A (ja) * 1994-04-28 1995-11-10 Hitachi Plant Eng & Constr Co Ltd エアシャワー装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 213 (M - 408) 30 August 1985 (1985-08-30) *
PATENT ABSTRACTS OF JAPAN vol. 011, no. 323 (M - 634) 21 October 1987 (1987-10-21) *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 087 (M - 678) 19 March 1988 (1988-03-19) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 03 29 March 1996 (1996-03-29) *

Also Published As

Publication number Publication date
DE50010142D1 (de) 2005-06-02
DE29909803U1 (de) 2000-08-17
EP1058065B1 (de) 2005-04-27
ATE294362T1 (de) 2005-05-15
EP1058065A2 (de) 2000-12-06

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