EP1026718B1 - Elektrostatisch gesteuertes Mikrorelais - Google Patents

Elektrostatisch gesteuertes Mikrorelais Download PDF

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Publication number
EP1026718B1
EP1026718B1 EP19990830731 EP99830731A EP1026718B1 EP 1026718 B1 EP1026718 B1 EP 1026718B1 EP 19990830731 EP19990830731 EP 19990830731 EP 99830731 A EP99830731 A EP 99830731A EP 1026718 B1 EP1026718 B1 EP 1026718B1
Authority
EP
European Patent Office
Prior art keywords
electrode
petal
supporting base
relay device
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19990830731
Other languages
English (en)
French (fr)
Other versions
EP1026718A3 (de
EP1026718A2 (de
Inventor
Marco Pizzi
Valerian Koniachkine
Piero Perlo
Sabino Sinesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Publication of EP1026718A2 publication Critical patent/EP1026718A2/de
Publication of EP1026718A3 publication Critical patent/EP1026718A3/de
Application granted granted Critical
Publication of EP1026718B1 publication Critical patent/EP1026718B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Claims (5)

  1. Elektrostatisch gesteuerte Mikro-Relais Vorrichtung, die aufweist:
    einen Grundträger (2), der zumindest eine Elektrode (5) und ein Paar feststehender, voneinander entfernter elektrische Kontakte (11) trägt, die an den zwei Seiten der Elektrode (5) gelegen sind,
    ein bewegliches Blatt (8), das eine dünne Folie aus elektrisch leitendem Material aufweist, mit zumindest einem Endteil mit dem Grundträger (2) verbunden ist und einen beweglichen Teil aufweist, welcher einen beweglichen Kontakt (10) trägt, der seitlich über das Blatt (8) vorstehende Endteile besitzt,
    wobei genanntes Blatt dazu eingerichtet ist, durch elektrostatische Wirkung gegen die genannte Elektrode hin vorgespannt zu werden, wenn eine elektrische Spannung zwischen die Elektrode (5) und das Blatt (8) angelegt wird, so dass die genannten Endteile des beweglichen Kontaktes (10) mit dem genannten Paar feststehender Kontakte (11) zusammenwirkt, dadurch gekennzeichnet, dass das Blatt (8) mit seinen beiden Enden mit dem Grundträger (2) verbunden und mit einem zweiten beweglichen Kontakt (10) versehen ist, der zur Zusammenwirkung mit einem zweiten Paar feststehender Kontakte (12) vorgesehen ist, die oberhalb des Grundträgers (2) an den zwei Seiten einer zweiten Elektrode (6) vorgesehen sind, welche ebenfalls mit dem Grundträger (2) verbunden ist, an einer Stelle, die von der genannten ersten Elektrode (5) entfernt ist.
  2. Mikro-Relais Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass der Grundträger (2) eine Schicht eines dielektrischen Materials (7) beinhaltet, die die erste und die zweite Elektrode (5, 6) bedeckt.
  3. Mikro-Relais Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass der Grundträger (2) eine Platte (4) beinhaltet, die aus einem Werkstoff gebildet ist, der ausgewählt ist unter Aluminium, Silizium, Glas, Kunststoff.
  4. Mikro-Relais Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass jeder bewegliche Kontakt (10) oberhalb des Blattes (8) mit Zwischenlage einer Schicht dielektrischen Materials (9) angeordnet ist.
  5. Mikro-Relais Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass auch die Bewegung des Blattes von der genannten Elektrode (5) weg durch Anlegen einer elektrischen Spannung erhalten wird.
EP19990830731 1999-02-02 1999-11-25 Elektrostatisch gesteuertes Mikrorelais Expired - Lifetime EP1026718B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO990072 1999-02-02
ITTO990072 IT1307131B1 (it) 1999-02-02 1999-02-02 Dispositivo di micro-rele' a controllo elettrostatico.

Publications (3)

Publication Number Publication Date
EP1026718A2 EP1026718A2 (de) 2000-08-09
EP1026718A3 EP1026718A3 (de) 2001-09-12
EP1026718B1 true EP1026718B1 (de) 2003-02-05

Family

ID=11417411

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19990830731 Expired - Lifetime EP1026718B1 (de) 1999-02-02 1999-11-25 Elektrostatisch gesteuertes Mikrorelais

Country Status (4)

Country Link
EP (1) EP1026718B1 (de)
DE (1) DE69905233T2 (de)
ES (1) ES2189379T3 (de)
IT (1) IT1307131B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (de) * 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
FR2854726B1 (fr) * 2003-05-09 2005-08-26 St Microelectronics Sa Microcommutateur a plusieurs positions fermees a deplacement lateral
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
KR100693345B1 (ko) * 2005-11-30 2007-03-09 삼성전자주식회사 Ｍｅｍｓ 스위치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19730715C1 (de) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
JPH10162713A (ja) * 1996-11-29 1998-06-19 Omron Corp マイクロリレー
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
DE69905233D1 (de) 2003-03-13
IT1307131B1 (it) 2001-10-29
ITTO990072A1 (it) 2000-08-02
DE69905233T2 (de) 2003-11-06
EP1026718A3 (de) 2001-09-12
EP1026718A2 (de) 2000-08-09
ES2189379T3 (es) 2003-07-01

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