EP0963140B1 - Verfahren und Einrichtung zum Erzeugen von Plasma - Google Patents

Verfahren und Einrichtung zum Erzeugen von Plasma Download PDF

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Publication number
EP0963140B1
EP0963140B1 EP99890141A EP99890141A EP0963140B1 EP 0963140 B1 EP0963140 B1 EP 0963140B1 EP 99890141 A EP99890141 A EP 99890141A EP 99890141 A EP99890141 A EP 99890141A EP 0963140 B1 EP0963140 B1 EP 0963140B1
Authority
EP
European Patent Office
Prior art keywords
arc
anode
voltage
cathode
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99890141A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0963140A3 (de
EP0963140A2 (de
Inventor
Gerhard Dipl.-Ing. Schwankhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inocon Technologie GmbH
Original Assignee
Inocon Technologie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inocon Technologie GmbH filed Critical Inocon Technologie GmbH
Publication of EP0963140A2 publication Critical patent/EP0963140A2/de
Publication of EP0963140A3 publication Critical patent/EP0963140A3/de
Application granted granted Critical
Publication of EP0963140B1 publication Critical patent/EP0963140B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Definitions

  • the invention relates to a method according to the Preamble of claim 1.
  • the current usually fluctuates at a frequency of 1 to 10Hz, the maximum current usually being 7 to 15 times of the minimum current.
  • the power supply is usually by a Transformer with downstream rectifier formed.
  • Anode-cathode with one of the arc's arc voltage corresponding voltage is applied, for igniting the Arc, a separate ignition pulse is provided.
  • US 5 296 665 describes a circuit for a Plasma cutter as part of a conventional Welding process in which the anode for generating the Arc is formed by the workpiece.
  • a plasma emits UV radiation to a considerable extent e.g. be used for the sterilization of objects could. However, the one that takes place at the same time Radiation of a significant amount of heat is a problem.
  • the aim of the invention is to avoid these disadvantages and a To propose methods of the type mentioned at the beginning that it enables plasma to be generated so that it can be used for a wide variety of purposes Applications can be used.
  • the proposed measures have the advantage that that plasma pulses of very short duration are generated.
  • plasma pulses although a very high temperature are also made of relatively sensitive materials due to their short duration without causing any damage tolerated, because the over a long period of time treating material introduced energy under a harmful limit can be kept.
  • the Plasma generated according to the invention in an acted upon Keep the workpiece energy at a low level, see above that even sensitive workpieces with such a plasma, whose individual impulses have a high energy density, can be edited.
  • Another object of the invention is a device according to propose the preamble of claim 4, which is for the implementation of the method according to the invention is suitable and is characterized by a simple structure.
  • the pulse times by appropriate Dimensioning of the capacitors and the resistance of the Circle containing anode-cathode path, but also the Charging circuit to determine the corresponding time constant can be set very easily.
  • the features of claim 4 also allow a very precise definition of the ignition of the arc, however it is ensured that the end of the voltage pulse or the burning time of the arc by the discharge of the Capacitor battery on one under the burning voltage of the Arcing voltage is determined. This is also in If the arc is ignited using a separate one Ignition voltage source ensures that between each The arc pulses go out and no quiescent current flows through the Anode-cathode section flows.
  • the measures according to claim 4 also make it possible to Ignition of the arc before reaching the Triggering a breakdown voltage of the anode-cathode path, whereby the burning time of the arc and thus the Burning time of the plasma pulses can be kept extremely short without a particularly high effort to a particularly low resistance Formation of the discharge circuit of the capacitor bank must be driven.
  • Capacitor battery as a power supply for the Plasma torch also a technical AC network or a high frequency alternating current supply voltage source in To be used in conjunction with a leading edge control. It must be made from different materials Electrodes should be ensured that only the same polarized half-waves are partially switched through, so that always on the different electrodes Voltage pulses with the same polarity applied and the conditions are essentially the same as for supplying the plasma torch with DC voltage pulses, e.g. from a capacitor bank, result.
  • Electrodes are always charged with the same polarity, is generally described in the description and the claims of Anode and cathode spoken.
  • the features of claim 5 give the advantage that the individual plasma pulses at a very high speed emerge from the outflow opening of the chamber and with very high kinetic energy on the workpiece to be treated incident. In the case of test arrangements, exit speeds were possible from 1000 to 2000m / sec. Thereby it will also be possible to drill very small holes in thin ones To produce sheets or welding spots.
  • a device according to the invention is also according to the invention manufactured plasma for sterilizing objects, especially of the interior of hollow objects or Lines provided.
  • very short plasma pulses can also be used for surgical and dental purposes, e.g. instead of Use laser scalpels.
  • Plasma torches come with a relatively smaller size Performance, e.g. Outputs from 0.5kW to 10kW exhibit.
  • the plasma generated according to the invention can also be used very good for spot welding or making out Use seams produced by welding spots.
  • welding according to the invention produced plasma also requires significantly less energy than with the usual flow plasma. It also results overall less heating of the workpiece and thus also lower thermal stresses and deformations of the Workpiece.
  • the solidification also takes place individual welding spots due to the very small Schmelzbadvolumina faster than welding with flow plasma. this makes possible it also in every welding position, i.e. also upside down, to achieve good welding quality.
  • the plasma torches required to generate the plasma pulse must have an appropriate output, for example 20 kW to 150 kW or more, depending on the parts to be welded. Spot welding of thin sheets can be produced with only one plasma pulse of only a short duration, for example 10 -3 to 10 -5 sec.
  • FIGS. 1 and 2 is one of a electrically insulating material, e.g. Ceramics made essentially hollow cylindrical holder 1 is provided, in one end area also made of an insulating material manufactured insert 2 is pressed.
  • a electrically insulating material e.g. Ceramics made essentially hollow cylindrical holder 1 is provided, in one end area also made of an insulating material manufactured insert 2 is pressed.
  • This insert 2 is from a central, a gas supply line 3 forming tube that penetrates the front of the projecting insert 2 ends over the end face of the holder 1.
  • the insert 2 also has two in a diametral plane lying holes 4 in which serve as abutments Press-fit parts 7 are held, which in turn are held by the souls 5 of leads 6 are interspersed with play.
  • connecting lines 6 are connected to one in FIG. 3 illustrated power supply connected in a predetermined Frequency delivers voltage pulses.
  • Compression springs 8 are supported on these press-fit parts 7 Contact pins 9, which are soldered to the souls 5, to the outside pushing.
  • the contact pins 9 are at their free end provided with an end face approach 10 with a Contact surface of a plasma generator 11 cooperates, which in a fastening device arranged on the end face of the holder 1 12 is held as one from an electrical Insulated material manufactured bracket in which the plasma generator 11 is inserted from above.
  • This plasma generator 11 has a connecting part 13 an electrically insulating material, e.g. Ceramics on the tapered in its lower region and an opening 14 on its lower end face having.
  • an electrically insulating material e.g. Ceramics on the tapered in its lower region and an opening 14 on its lower end face having.
  • This opening 14 is from an annular anode 15 enforced in the usual way from an electrically conductive and thermally highly resilient material is manufactured and has a nozzle opening 16 in its mouth region.
  • the anode 15 has a conically widening upwards Area that abuts the inside of the connecting part 13 and which merges into a cylindrical area.
  • An intermediate part 17 is located on the upper end face of the anode 15 at the ring-shaped and made of an electric insulating material, e.g. Ceramics.
  • an electrically highly conductive material e.g. Copper
  • an electrically highly conductive material e.g. Copper
  • an electrically conductive and thermally highly resilient Material such as Tungsten cerium oxide alloy manufactured is and in the nozzle opening 16 near the anode 15 End region is conical.
  • the anode 15, as well as the holding part 18 are for fixing the mutual position of the cathode 10 and the nozzle opening 16 of the Anode suitably fitted into the connecting part 13.
  • the anode 15, the intermediate part 17 and the holding part 18 with the pressed cathode 19 form together with the connecting part 13 a module of the device that easily in the holder can be installed and removed from it.
  • This pressure part 20 acts together with a cover 22 on the one in the upper end face of the connecting part 13 Area arranged external thread 23 is screwed on.
  • the connecting part 13 is three along a surface line arranged radial bores 24, 25 provided, of which the Bores 24 the passage of the lugs 10 of the contact pins 9th enable and in the region of the holding part 18, or Anode 15 lie.
  • the bore 25 is in the range of Intermediate part 17 arranged and aligned with a radially extending Inlet 26 of the intermediate part to one through the Inner wall of the intermediate part 17 limited chamber 27 leads is penetrated by the cathode 19.
  • the bore 25 is aligned when inserted in the holder 1 Plasma generator, which is constructed as a module, also with the in Holder 1 provided gas supply line 3.
  • the connecting lines 6, the insulating jackets 28 with play in the bores 4 of the insert 2 of the holder 1 are guided, withdraw and the plasma generator 11 from above in the Insert bracket 12.
  • the connecting lines 6 be released and the contact pins 9 snap into the holes 24 of the connecting part 13 and secure the position of the Plasma generator 11 in the holder 1.
  • their end faces by means of the springs 8 on the holding part 8, or pressed the anode 15 and so a good electrical contact manufactured.
  • a gas for example helium, CO 2 etc.
  • a gas for example helium, CO 2 etc.
  • FIG. 3 A power supply for a plasma generator according to the Fig. 1 and 2 is shown in FIG. 3.
  • a capacitor bank 30 has a charging resistor 31 with the connections X1 of a controllable DC voltage source 32 connected.
  • the capacitor bank 30 has one permanently connected capacitor 1C1 and one over one Switch 1S1 to this parallel connectable capacitor 1C2 on, both groups of capacitors can act.
  • This capacitor bank 30 is via connecting lines 33 34th with the plasma generator 11, or not in FIG. 3 shown cathode and anode connected.
  • An R / C element is connected in parallel with the capacitor bank 30, that through a capacitor 1C3 and a resistor 1R1 is formed.
  • This R / C link forms in connection with the choke 1L1 connected in the connecting line 34 an RF blocking circuit which is used to protect the capacitor bank 30 is provided before RF signals.
  • an igniter 35 is connected on the input side to an AC voltage source X2 and provided with a trigger switch 1S2, by its actuation an ignition pulse can be triggered.
  • the capacitor battery 30 is charged during operation according to the set voltage of the DC voltage source 32, e.g. adjustable between 50V and 300V is, and that by the line resistance and the charging resistance with a certain time constant.
  • the capacitor bank 30 discharges accordingly by their capacity and line resistance and the time constant given by the resistance of the arc.
  • the voltage of the capacitor bank drops 30 below the arc arc voltage, so goes out this and the capacitor bank 30 recharges, whereby the process described is repeated and a Frequency results, which is determined by charging and discharging time constants is.
  • the operation of the ignitor is not required.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Ignition Installations For Internal Combustion Engines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP99890141A 1998-05-04 1999-04-30 Verfahren und Einrichtung zum Erzeugen von Plasma Expired - Lifetime EP0963140B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT28598U 1998-05-04
AT0028598U AT3549U1 (de) 1998-05-04 1998-05-04 Verfahren und einrichtung zum erzeugen von plasma

Publications (3)

Publication Number Publication Date
EP0963140A2 EP0963140A2 (de) 1999-12-08
EP0963140A3 EP0963140A3 (de) 2002-05-15
EP0963140B1 true EP0963140B1 (de) 2004-09-08

Family

ID=3486492

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99890141A Expired - Lifetime EP0963140B1 (de) 1998-05-04 1999-04-30 Verfahren und Einrichtung zum Erzeugen von Plasma

Country Status (7)

Country Link
US (1) US6225743B1 (cs)
EP (1) EP0963140B1 (cs)
AT (1) AT3549U1 (cs)
CA (1) CA2270072C (cs)
CZ (1) CZ295951B6 (cs)
DE (1) DE59910426D1 (cs)
HU (1) HUP9900992A3 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003351A1 (de) 2009-03-26 2010-12-30 Inocon Technologie Gmbh Kolbenmotor mit Plasmainjektionsantrieb
DE102009015510B4 (de) * 2009-04-02 2012-09-27 Reinhausen Plasma Gmbh Verfahren und Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2807912B1 (fr) * 2000-04-17 2003-06-27 Lasers Et Tech Avancees Bureau Procede et torche a plasma pour traiter une surface dans une cavite, et installation de remplissage bouchage s'y rapportant

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3447322A (en) * 1966-10-25 1969-06-03 Trw Inc Pulsed ablating thruster apparatus
US4974487A (en) * 1984-10-05 1990-12-04 Gt-Devices Plasma propulsion apparatus and method
DE4008405C1 (cs) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De
US5421312A (en) * 1990-11-03 1995-06-06 Dawson Royalties Limited Electrical circuit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1928757C3 (de) * 1969-06-06 1978-11-23 Messer Griesheim Gmbh, 6000 Frankfurt Schaltungsanordnung zum Stabilisieren und Zünden von Schweißlichtbögen
FR2611132B1 (fr) * 1987-02-19 1994-06-17 Descartes Universite Rene Bistouri a plasma
US5170030A (en) * 1991-04-08 1992-12-08 Thermal Dynamics Corporation Plasma torch electronic pulsing circuit
WO1992019166A1 (en) * 1991-04-15 1992-11-12 Nauchno-Issledovatelsky Institut Energeticheskogo Mashinostroenia Moskovskogo Gosudarstvennogo Tekhnicheskogo Universiteta Imeni N.E.Baumana Device for plasma surgical treatment of biological tissues
US5296665A (en) * 1992-05-19 1994-03-22 Hypertherm, Inc. Method of restarting a plasma arc torch using a periodic high frequency-high voltage signal
JPH06197930A (ja) * 1993-01-06 1994-07-19 Nippon Steel Weld Prod & Eng Co Ltd 使用済み注射針の処理方法およびその装置
US5901551A (en) * 1994-10-24 1999-05-11 Primex Technologies, Inc. Converging constrictor for an electrothermal arcjet thruster
US5924278A (en) * 1997-04-03 1999-07-20 The Board Of Trustees Of The University Of Illinois Pulsed plasma thruster having an electrically insulating nozzle and utilizing propellant bars
DE19806519A1 (de) * 1998-02-17 1999-08-19 Ruediger Haaga Gmbh Vorrichtung zum Sterilisieren von Behältern mittels eines Niederdruckplasmas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3447322A (en) * 1966-10-25 1969-06-03 Trw Inc Pulsed ablating thruster apparatus
US4974487A (en) * 1984-10-05 1990-12-04 Gt-Devices Plasma propulsion apparatus and method
DE4008405C1 (cs) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De
US5421312A (en) * 1990-11-03 1995-06-06 Dawson Royalties Limited Electrical circuit

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEUBERT G. ET AL: "Grundlagen der Schweisstechnik, Energiequellen und Einrichtungen", 1988, VEB VERLAG TECHNIK, BERLIN *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003351A1 (de) 2009-03-26 2010-12-30 Inocon Technologie Gmbh Kolbenmotor mit Plasmainjektionsantrieb
DE102009015510B4 (de) * 2009-04-02 2012-09-27 Reinhausen Plasma Gmbh Verfahren und Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls

Also Published As

Publication number Publication date
CZ295951B6 (cs) 2005-12-14
HUP9900992A3 (en) 2002-12-28
US6225743B1 (en) 2001-05-01
CZ159799A3 (cs) 2000-05-17
EP0963140A3 (de) 2002-05-15
HUP9900992A2 (hu) 2000-11-28
HU9900992D0 (en) 1999-06-28
EP0963140A2 (de) 1999-12-08
DE59910426D1 (de) 2004-10-14
CA2270072A1 (en) 1999-11-04
AT3549U1 (de) 2000-04-25
CA2270072C (en) 2007-11-13

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