EP0961936B1 - Halbleiterpruefgeraet mit schaltkreis zur datenserialisierung - Google Patents

Halbleiterpruefgeraet mit schaltkreis zur datenserialisierung Download PDF

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Publication number
EP0961936B1
EP0961936B1 EP98904807A EP98904807A EP0961936B1 EP 0961936 B1 EP0961936 B1 EP 0961936B1 EP 98904807 A EP98904807 A EP 98904807A EP 98904807 A EP98904807 A EP 98904807A EP 0961936 B1 EP0961936 B1 EP 0961936B1
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EP
European Patent Office
Prior art keywords
data
memory
tester
address
output
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EP98904807A
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English (en)
French (fr)
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EP0961936A1 (de
Inventor
Benjamin J. Brown
John F. Donaldson
Kurt B. Gusinow
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Teradyne Inc
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Teradyne Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31919—Storing and outputting test patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31712—Input or output aspects
    • G01R31/31715—Testing of input or output circuits; test of circuitry between the I/C pins and the functional core, e.g. testing of input or output driver, receiver, buffer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/31813—Test pattern generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31926—Routing signals to or from the device under test [DUT], e.g. switch matrix, pin multiplexing

Definitions

  • This invention relates generally to testing semiconductor components and more specifically to the testing of semiconductor components containing memory.
  • Tester Automatic test equipment
  • a tester can generate and measure many signals. Each signal is connected to one lead on the device being tested. Each signal can be programmed so that any device can be connected to the tester and tested.
  • a tester for VLSI semiconductor circuits contains numerous channels. In most modern test systems, the circuitry in each channel generates or measures one test signal and each channel can be programmed independently.
  • FIG. 1 shows in block diagram format a prior art VLSI tester 130.
  • Tester 130 includes numerous drivers 136 or comparators 138, each of which is connected to one lead 116 of a semiconductor device under test (DUT) 112.
  • DUT semiconductor device under test
  • the drivers 136 or comparators 138 each represent one channel.
  • FIG. 1 shows a single driver 136 or a single comparator 138 making up each channel. More likely, every channel is the same and can be programmed to, at any time, either drive or measure a test signal. Also, each channel includes circuitry that can be programmed to control the time at which a signal is measured or provided to DUT 112. None of this circuitry is shown for simplicity.
  • Vector pattern memory 132 stores a test pattern.
  • a test pattern is made up of a series, or pattern, of vectors.
  • a vector is a set of data values for all the channels of tester 130.
  • Timing circuitry (not shown) inside tester 130 ensures that one vector is executed for each cycle of the tester's operation. Execution of a vector means that the data is read from vector pattern memory and used to control the operation of all the channels.
  • FIG. 1 shows that the values from vector pattern memory 132 are applied to drivers 136 and comparators 138.
  • the outputs of comparators 138 are provided to failure processor 134.
  • the data from vector pattern memory 132 specifies what values comparators 138 should be detecting if DUT 112 is operating properly. Thus, the outputs of comparators 138 indicate whether DUT 112 has failed.
  • Failure processor 134 might simply be a memory which stores these values. Failure processor 134 might perform more complicated logic functions to selectively store data from comparators 138 during only certain cycles of tester operation. For simplicity, the circuitry of failure processor 134 is not shown in detail.
  • FIG. 1 illustrates a particular problem in testing semiconductor devices.
  • DUT 112 contains on board memories 118 and 120 and a logic section 114. Internal to DUT 112, memories 118 and 120 are connected to logic section 114. However, memories 118 and 120 contain many address and data inputs that would not be connected to leads 116 of DUT 112. Thus, once DUT 112 is packaged, access to the inputs and outputs of memories 118 and 120 is not available.
  • FIG. 1 shows one possible solution to this problem. Specifically, it shows what is sometimes known as "scan testing.”
  • DUT 112 is made with a scan input lead 116 in and an scan output lead 116 out connected to each memory.
  • Memories 118 and 120 are made with "scan registers" (not shown) connected to their internal input or output lines. Data applied at scan input lead 116 in is shifted into the scan register. In this way, the data for all the input lines can be provided as a serial data stream through a single lead.
  • the process is repeated in reverse to measure the outputs of the memories 118 or 120.
  • the data values on the internal output lines of memories 118 and 120 are latched into the scan register. These values are shifted out, one bit at a time, through scan output leads 116 out .
  • Tester 130 is highly programmable to generate virtually any type of signal. It can thus be programmed with a vector pattern that provides the required data as a serial stream and analyzes the measurements. The drawback of this approach is that it is often complicated to write the test program for the memory.
  • the internal lines of a memory are usually not in the same order as the logical lines.
  • a memory might have a data bus with lines logically ordered D0...D15. It might also have an address bus with lines logically ordered A0...A7 and could further have a few control signal lines.
  • the lines corresponding to the data bus, address bus and control signal might appear in any order and might be interleaved.
  • generating the serial data pattern can be complicated.
  • the first bit might be data bit D4, the next bit could be address bit A5, etc.
  • the memories 118 and 120 could have different physical layouts of their internal input, output and control lines. The vector pattern written to test memory 118 is therefore unlikely to be useful to test memory 120 even if memories 118 and 120 are logically equivalent.
  • An alternative to using scan testing is to provide a port for each memory, as shown in FIG. 2.
  • the input and output lines of the memory might be accessible through leads 216.
  • DUT 212 might be constructed so that certain of the leads 216 could be connected to the internal lines of memory 218.
  • Those leads might serve a dual purpose of making a connection to logic section 214 at one time, but, in response to certain control signals used only for testing, might be switched to connect to the internal lines of memory 218.
  • FIG. 2 also shows a further enhancement.
  • Algorithmic pattern generator 252 is included in tester 230.
  • Algorithmic pattern generator 252 is a circuit that generates a series of data values and the address within memory 218 at which those values should be read or written to fully test memory 218. For example, a memory might be tested by writing into every location in the memory words that have an alternating pattern of 1's and 0's. When values in memory are read back, this same pattern should be repeated. The pattern might then be inverted, with the 1's being replaced by 0's and the 0's being replaced by 1's and the process repeated. These patterns can be generated by a circuit that is programmed to generate data with this pattern. It is not necessary that the actual pattern be stored. However, for this approach to work, it is necessary that the memory be accessible through a port.
  • algorithmic pattern generator 252 To incorporate algorithmic pattern generator 252 into tester 230, a series of multiplexers 250 are used in each channel. Multiplexers 250, sometimes called “alternative data source” multiplexers, allow for each channel a selection between data from the algorithmic pattern generator 252 and data from vector pattern memory 232. The multiplexers allow algorithmic pattern generator 252 to be connected to any of the channels.
  • the foregoing and other objects are achieved in a tester with a pattern generator connected to a data serializer circuit.
  • the data serializer circuit converts test words into a serial stream for application to scan leads of a device under test.
  • the data serializer circuit includes selection circuitry that allow the outputs of the pattern generator to appear in any order in the serial data stream.
  • FIG. 3 shows a tester 330 capable of performing scan tests on an embedded memory with the data simply generated algorithmically. As will be described below, these features allow test programs to be developed quickly. Also, there is time saved when a test engineer must debug the test program.
  • Tester 330 includes vector pattern memory 332, failure processor 334 and algorithmic pattern generator 352, all as in the prior art. Also as in the prior art, tester 330 has numerous channels which include drivers 336 and comparators 338. The source of data for drivers 336 and comparators 338 is selected by alternative data source multiplexers 350.
  • Tester 330 has several channels that are equipped with serializer circuits 410. These channels can be connected to scan input leads 316 in or scan output leads 316 out on a device under test 312. Serializer circuits 410 convert algorithmically generated test data into a form suitable for use in scan testing. For the conversion, the data must be converted to serial data streams for scanning in and out. More importantly, the bits at the output of serializer 410 must have the order required to test the specific memories in the scan chain connected to a particular channel. For that reason, each serializer circuit 310 must be programmable so that the desired bits of the test pattern can be applied in the desired order.
  • FIG. 3 shows that there are four serializers 410.
  • the number of serializer circuits is not important to the invention. There are preferably several serializer circuits to allow simultaneously scanning in and scanning out data from several scan chains on a single device under test In a preferred embodiment, there is one serializer circuit 410 for every 16 channels.
  • algorithmic pattern generator 352 includes an address portion and a data portion.
  • the address represents the signals that are applied to the address lines of the memory under test.
  • the data portion represents the data that is supplied to the data lines of the memory under test.
  • algorithmic pattern generator 352 generates 32 address lines. These address lines are connected to each serializer in a bus fashion.
  • Algorithmic pattern generator provides, in a preferred embodiment, two data lines. In prior art testers, each channel connected to a data line of the memory under test was connected to one of the data lines. By changing the values on these data lines, cells in the memory connected to that data line can be tested.
  • each serializer circuit 410 is in series with one of the channels.
  • the data lines from the algorithmic pattern generator for that channel are also input to the serializer.
  • Serializer circuits 410 accept the output of algorithmic pattern generator 352, which is a string of addresses for the memory under test and data values. For example, a simple test pattern is to have the first bit in every other word in the memory under test alternate values. This was done in the prior art by configuring the tester with the channel connected to data line 1 to be connected to the first data line. The channels connected to all the other data lines would then be connected to the other data line. As the test ran, the algorithmic pattern generator would output addresses increasing sequentially. For each new address, the value on the first data lines would invert. In this way, the first bit of every other word would be inverted.
  • Serializer circuits 410 perform this function. As shown in FIG. 3, the alternative data source select multiplexers 350 in the channels including the serializers 410 can choose between the output of the serializer or the output of algorithmic pattern generator 352. In this way, tester 330 can be operated just as in the prior art or can be configured to operate with the serializers 410.
  • Serializer 410 is shown to have a plurality of multiplexers 412. Here, 8 multiplexers 412 are shown. Multiplexers 412 receive as their input the address lines from algorithmic pattern generator 352. Serializer control register 418 is programmed so that eight of the address lines are selected to act as address inputs to memory 420.
  • the values on eight of the 32 address lines are generated by a separate address counter 414. Typically, these lines will be selected by multiplexers 412.
  • the control register is programmed by a computer work station controlling tester 330, as in the prior art.
  • Address counter 414 is controlled by an override control circuit 416.
  • Override control circuit is programmed with the length of a scan chain. If, for example, a particular memory under test is a 4K x 64 memory, it will have 12 address lines, 64 data inputs and perhaps one control signal. Thus, if a single pin is used to scan into the part, a total of 77 values are required to be scanned into that pin for each value generated by algorithmic pattern generator 352. Counter 414 would be preset by override control circuit 416 to count out the number of values in the scan chain.
  • the output of multiplexers 412 are the address inputs to memory 420.
  • Memory 420 is programmed with the order of the registers in the scan chain. The first value in memory 420 indicates which of the 34 lines from algorithmic pattern generator 352 contains the data for the last register in the scan chain. The next value in memory 420 indicates which of the 34 lines from algorithmic pattern generator 352 contains the data for the next to last register in the scan chain, and so on.
  • Memory 420 is loaded with the required values when tester 330 is set up to test a specific type of semiconductor component.
  • Tester 330 is controlled by a computer work station (not shown).
  • Tester 330 is generally set up to perform tests on a specific type of part and then numerous parts of that type are tested.
  • control registers and memories such as memory 420, are loaded with data.
  • the data loaded into memory 420 is specific for the type of part being tested and is derived from information about the order in which the internal address and data lines of a memory under test are connected in a scan chain.
  • Multiplexer 422 selects the appropriate one of the 34 lines from algorithmic pattern generator 352 and passes it to multiplexers 424 and 426.
  • multiplexers 424 and 426 run through alternative data source select multiplexers 350 to the drivers 236 or comparators 238 in the channel containing the serializer.
  • multiplexers 424 and 426 are configured to select the output of multiplexer 422.
  • serializer circuit 410 can be effectively disabled by controlling multiplexers 424 and 426 to pass through data directly from algorithmic pattern generator 352.
  • Two multiplexers 424 and 426 are provided for compatibility with the prior art.
  • a comparator can be operated to indicate that its input matches the expected if the input is logic HI or logic LO.
  • the comparator can be set into a "don't care” state, which means that it will indicate that its input matched the expected state regardless of the value of the input.
  • two bits of data are needed to represent these three possible operating conditions: One bit indicates whether or not the comparator should be in a "don't care” state. The other indicates the expected value.
  • the "don't care” bit appears on a predetermined one of the lines from algorithmic pattern generator 352.
  • multiplexer 426 When serializer 410 is used in a channel configured with a comparator, multiplexer 426 is configured to pass through the "don't care" bit. Multiplexer 424 is configured to pass through a data bit from the output of the multiplexer 422. When serializer 410 is used in a channel configured with a driver, only one data bit is needed. Thus, the outputs of multiplexers 424 and 426 are identical and both multiplexers are configured to select the output of multiplexer 422.
  • Multiplexers 424 and 426 are controlled from output control register 428. As with serializer control register 418, output control register 428 is loaded with a value when tester 330 is set up for a particular test. These values are likewise sent from the computer work station (not shown) that controls tester 330.
  • serializers 410 allow an embedded memory 318 or 320 to be tested using an algorithmic pattern generator 252 despite the fact that only a limited number of test points to the memory are present on device under test 312.
  • the algorithmic pattern generator can be easily programmed to generate a test pattern for an embedded memory.
  • the same programming can be used for any embedded memory of the same size. That program can be developed and debugged once.
  • Great programming savings can be obtained by having program pieces that are device independent and can be used for testing of many types of devices. Less time is needed to write or debug the program to test any device.
  • test data for the embedded memory is generated in logical fashion. All the data lines can be treated in a logical group, regardless of the order in which they appear in the memory under test. Likewise, the address lines can be treated as a group, regardless of the physical position of the address lines in the embedded memory. It is easier and faster for a human to debug test programs when the data and address values are in logical form.
  • serializer circuits 410 associated with each scan chain in each embedded memory being tested are programmed separately.
  • the serializer circuits 410 are programmed once for each scan chain, regardless of the number of tests performed on that memory. Thus, further savings are obtained. These savings are obtained from the novel architecture of the invention.
  • multiplexers 412 select lines which are derived from a counter. It is not necessary that all of the lines used to address memory 420 be derived from a counter or from the same counter.
  • Memory 420 is shown with eight address lines, allowing it to handle scan chains up to 256 bits long. If the scan chain is not that long, memory 420 can additionally be used for other functions.
  • One possible function is to emulate the "topo invert" function of the prior art. Some memories are designed so that some of the cells in the memory represent a logical one by storing a charge and a logical zero by not storing a charge. Other cells represent data by doing the opposite.
  • At least one line from algorithmic pattern generator 352 indicates a data value. Often, the data lines appear in pairs, with one line of the pair including the invert of the first. When data is provided to a cell that represents a logical 1 by storing a charge, the first line is used. When data is provided to a cell that represents a logical 1 by the absence of a charge, the second line is used. Another line, called a topo line, indicates, for a particular cell, whether the regular or inverted data is needed. Prior art testers included separate circuitry to select between these lines based on the topo line. Selection between the two lines can be made by having the topo lines be selected by multiplexers 412 as some of the address inputs to memory 420. Memory 420 is programmed to select the appropriate data line - either inverted or not - based on the value of the topo bits.
  • serializer circuit might be used with other architectures.
  • channels it is not necessary that channels be bi-directional. It is possible that some channels drive signals and some channels receive signals.
  • serializer circuits 410 could be used in addition to testing performed using the vector pattern memory.
  • Multiplexers 350 can be used to switch between the serialized data or data from the vector pattern memory. In this way, great flexibility can be achieved in testing of components.
  • FIG. 3 shows that serializer circuits 310 receive data only from an algorithmic pattern generator. It is possible that a serializer might receive data from other sources. For example, the inputs of the serializers might be multiplexed.
  • serializers are used only in conjunction with algorithmically generated data.
  • An embedded memory might be tested in part with algorithmically generated data and partially by data from a vector pattern.
  • the data and address signals might be algorithmically generated while control signals, such as the write control, might be derived from vector pattern memory.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)
  • Techniques For Improving Reliability Of Storages (AREA)

Claims (16)

  1. Tester für eine Halbleitereinrichtung (312) mit einem eingebetteten Speicher (318, 320) mit Daten- und Adressenleitungen, auf die durch wenigstens eine Scankette zugegriffen werden kann, wobei der Tester umfasst:
    einen algorithmischen Mustergenerator (352), der eine Vielzahl von Ausgangsignalen parallel erzeugt;
    eine Vielzahl von Kanälen (336, 338), die jeweils Signale an einem Testpunkt einer Einrichtung (312), die getestet wird, ansteuern oder empfangen können,
       gekennzeichnet durch:
    eine Vielzahl von Serialisiererschaltungen (410), wobei jede Serialisiererschaltung (410) enthält:
    i) einen Multiplexer (422) mit einer Vielzahl von Dateneingängen, wenigstens einem Datenausgang und einem Steuereingang, wobei die Vielzahl von Dateneingängen mit der Vielzahl von Ausgangssignalen des algorithmischen Mustergenerators (352) verbunden sind, und der Ausgang mit einem der Vielzahl von Kanälen (336, 338) gekoppelt ist; und
    ii) ein Speicher (420) mit einem Adresseneingang mit einer Vielzahl von Adressenleitungen und einem Datenausgang, der mit dem Steuereingang des Multiplexers (422) gekoppelt ist.
  2. Tester nach Anspruch 1, dadurch gekennzeichnet, dass die Serialisiererschaltung (410) zusätzlich eine Vielzahl von zweiten Multiplexern (412) umfasst, wobei jeder eine Vielzahl von Dateneingängen und einen Datenausgang aufweist, wobei die Datenausgänge der Vielzahl von zweiten Multiplexern (412) mit dem Adresseneingang des Speichers verbunden sind und wobei die Dateneingänge mit wenigstens einem Abschnitt der Vielzahl von Ausgangssignalen von dem algorithmischen Mustergenerator (352) verbunden sind.
  3. Tester nach Anspruch 1, dadurch gekennzeichnet, dass er zusätzlich einen Zähler (414) umfasst, der mit den Adresseneingängen des Speichers (420) gekoppelt ist.
  4. Tester nach Anspruch 3, dadurch gekennzeichnet, dass er zusätzlich eine Einrichtung (416) zum Einstellen des Zählers (414) auf Grundlage der Länge einer Scankette umfasst.
  5. Tester nach Anspruch 1, dadurch gekennzeichnet, dass der Speicher (420) eine Abbildung zwischen der Vielzahl von Ausgangssignalen von dem algorithmischen Mustergenerator (352) und der Reihenfolge in einer Scankette der Daten- und Adressleitungen des eingebetteten Speichers (318, 320) speichert.
  6. Tester nach Anspruch 1, dadurch gekennzeichnet, dass
    a) er zusätzlich einen Musterspeicher (332) umfasst; und
    b) wobei ein Abschnitt der Kanäle einen Multiplexer umfasst, der konfiguriert ist, um zwischen dem Ausgang von einem der Serialisiererschaltungen (410) und einem Ausgang des Musterspeichers (332) zu wählen.
  7. Tester nach Anspruch 1, dadurch gekennzeichnet, dass die Anzahl von Serialisiererschaltungen (410) kleiner als die Anzahl von Kanälen (336, 338) ist.
  8. Tester nach Anspruch 1, dadurch gekennzeichnet, dass die Vielzahl von Ausgangssignalen des algorithmischen Mustergenerators (352) mit der Vielzahl von Dateneingängen des Multiplexers (422) von jeder der Vielzahl von Serialisiererschaltungen (410) über einen Bus verbunden sind.
  9. Tester nach Anspruch 1, dadurch gekennzeichnet, dass ein Abschnitt der Vielzahl von Kanälen (336) konfiguriert ist, um Signale anzusteuern und ein Abschnitt der Vielzahl von Kanälen (338) konfiguriert sind, um Signale zu empfangen.
  10. Tester für eine Halbleitereinrichtung (312) mit einem eingebetteten Speicher (318, 320) mit Daten- und Adressleitungen, auf die durch wenigstens eine Scankette zugegriffen werden kann, wobei der Tester umfasst:
    einen algorithmischen Mustergenerator (352);
    eine Vielzahl von Kanälen (336, 338), die jeweils Signale an einem Testpunkt einer Halbleitereinrichtung (312), die getestet wird, anzusteuern oder zu empfangen; und
       gekennzeichnet durch
       eine Vielzahl von Serialisiererschaltungen (410) mit einem Speicher (420);
       wobei der Tester (330) in Übereinstimmung mit dem folgenden Verfahren betrieben wird:
    i) Laden des Speichers (420) innerhalb einer Serialisiererschaltung (410) mit Daten, die die Reihenfolge anzeigen, in der Daten- und Adressenleitungen des eingebetteten Speichers (318, 320) in einer Scanketter verbunden werden;
    ii) Verbinden eines Kanals (336, 338) mit einem Testpunkt auf der mit der Scankette verbundenenen Halbleitereinrichtung (312), die getestet wird;
    iii) Betreiben des algorithmischen Mustergenerators (352) zum Erzeugen eines Stroms von Werten für die Adressen- und Datenleitungen des eingebetteten Speichers (318, 320); und
    iv) Betreiben der Serialisiererschaltung (410), um in Übereinstimmung mit der Reihenfolge, die von den Daten spezifiziert wird, die in den Speicher (420) geladen werden, zu wählen, die Werte für die Adressen- und Datenleitungen an den Kanal (336, 338) zu leiten.
  11. Tester nach Anspruch 10, gekennzeichnet durch
    a) einen Musterspeicher (332) mit einer Vielzahl von Ausgängen; und
    b) einer Vielzahl von Multiplexem, die mit wenigstens einem Abschnitt der Vielzahl von Kanälen verbunden sind, konfiguriert zum Wählen zwischen einem der Vielzahl von Ausgängen des Musterspeichers (332) und den Ausgängen von einer der Vielzahl von Serialisiererschaltungen (410).
  12. Tester nach Anspruch 11, dadurch gekennzeichnet, dass er in Übereinstimmung mit dem Verfahren einer gleichzeitigen Bereitstellung von Daten von den Serialisiererschaltungen (410) und dem Musterspeicher (332) betrieben wird.
  13. Tester für eine Halbleitereinrichtung (312) mit einem eingebetteten Speicher (318, 320) mit Daten- und Adressleitungen, auf die durch wenigstens eine Scankette zugegriffen werden kann, wobei der Tester umfasst:
    eine Einrichtung zum algorithmischen Erzeugen eines Musters von Adressenbits und Datenbits, die an den eingebetteten Speicher (318, 320) angelegt werden sollen;
    eine erste Kanalschaltung mit einem Treiber (336) mit einem Dateneingang und einem Ausgang;
    eine zweite Kanalschaltung mit einem Vergleicher (338) mit einem Signaleingang, einem Dateneingang und einem Ausgang;
       gekennzeichnet durch
       eine erste Einrichtung zum Empfangen eines Ausgangs der Einrichtung zum algorithmischen Erzeugen eines Musters und in Übereinstimmung mit einer programmierbaren Reihenfolge, zum sequentiellen Anlegen der Adressenbits und Datenbits an den Dateneingang des ersten Kanals; und
       eine zweite Einrichtung zum Empfangen eines Ausgangs der Einrichtung zum algorithmischen Erzeugen eines Musters und in Übereinstimmung mit einer programmierbaren Reihenfolge, zum sequentiellen Anlegen der Adressenbits und Datenbits an den Dateneingang des zweiten Kanals.
  14. Tester nach Anspruch 13, dadurch gekennzeichnet, dass die erste Einrichtung zum Empfangen eine Information über die programmierbare Reihenfolge speichert, umfasst.
  15. Tester nach Anspruch 14, dadurch gekennzeichnet, dass er einen Zähler (414) zum Bereitstellen von Adresseneingängen an dem Speicher (420) umfasst.
  16. Tester nach Anspruch 15, gekennzeichnet durch
    a) eine Vielzahl von Multiplexern (412), die jeweils Steuereingänge, eine Vielzahl von Eingangsleitungen und eine Ausgangsleitung umfassen, wobei
    i) ein erster Abschnitt der Vielzahl von Eingängen mit dem Zähler (414) verbunden ist;
    ii) ein zweiter Abschnitt der Vielzahl von Eingängen zum Empfangen von Ausgängen von der Einrichtung zum algorithmischen Erzeugen eines Musters verbunden ist; und
    iii) die Ausgangsleitungen der Multiplexer mit einem Adresseneingang des Speichers (420) verbunden sind; und
    b) ein programmierbares Steuerregister (418), das mit den Steuereingängen der Vielzahl von Multiplexern verbunden ist.
EP98904807A 1997-02-20 1998-02-02 Halbleiterpruefgeraet mit schaltkreis zur datenserialisierung Expired - Lifetime EP0961936B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/803,111 US5923675A (en) 1997-02-20 1997-02-20 Semiconductor tester for testing devices with embedded memory
US803111 1997-02-20
PCT/US1998/001885 WO1998037428A1 (en) 1997-02-20 1998-02-02 Semiconductor tester with data serializer

Publications (2)

Publication Number Publication Date
EP0961936A1 EP0961936A1 (de) 1999-12-08
EP0961936B1 true EP0961936B1 (de) 2002-07-31

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EP (1) EP0961936B1 (de)
JP (1) JP4008041B2 (de)
KR (1) KR100544213B1 (de)
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WO (1) WO1998037428A1 (de)

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DE69806904D1 (de) 2002-09-05
JP4008041B2 (ja) 2007-11-14
JP2001512575A (ja) 2001-08-21
DE69806904T2 (de) 2003-09-18
WO1998037428A1 (en) 1998-08-27
US5923675A (en) 1999-07-13
EP0961936A1 (de) 1999-12-08
KR100544213B1 (ko) 2006-01-23

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