EP0937786A3 - Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht - Google Patents

Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht Download PDF

Info

Publication number
EP0937786A3
EP0937786A3 EP99102511A EP99102511A EP0937786A3 EP 0937786 A3 EP0937786 A3 EP 0937786A3 EP 99102511 A EP99102511 A EP 99102511A EP 99102511 A EP99102511 A EP 99102511A EP 0937786 A3 EP0937786 A3 EP 0937786A3
Authority
EP
European Patent Office
Prior art keywords
thermal barrier
barrier coating
einer
bis
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99102511A
Other languages
English (en)
French (fr)
Other versions
EP0937786B1 (de
EP0937786A2 (de
Inventor
Uwe Dr. Schulz
Christoph Dr. Leyens
Thomas Krell
Uwe Leushake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsches Zentrum fuer Luft und Raumfahrt eV
Original Assignee
Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Zentrum fuer Luft und Raumfahrt eV filed Critical Deutsches Zentrum fuer Luft und Raumfahrt eV
Publication of EP0937786A2 publication Critical patent/EP0937786A2/de
Publication of EP0937786A3 publication Critical patent/EP0937786A3/de
Application granted granted Critical
Publication of EP0937786B1 publication Critical patent/EP0937786B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

Gegenstand der Erfindung ist ein Verfahren zum Beschichten von metallischen Substraten mit einer Wärmedämmschicht und die so erhältlichen Bauteile.
Verfahren zum Beschichten von metallischen Substraten mit einer Metalloxidschicht aus Aluminiumoxid und einer oxidischen Wärmedämmschicht, das dadurch gekennzeichnet ist, daß man
  • a) das Substrat mit einer 1 bis 10 µm dicken α-Aluminiumoxidschicht durch ein PVD-Verfahren bei einer Temperatur des Substrats im Bereich bis 950 °C mit einer gegebenenfalls nachgeschalteten Wärmebehandlung und
  • b) die gemäß a) erhaltene α-Aluminiumoxidschicht in an sich bekannter Weise mit einer Wärmedämmschicht einer Wärmeleitfähigkeit< 3 W/mK und einer Dicke von 10 bis 1000 µm
    versieht.
    • Figure 00000001
    EP99102511A 1998-02-21 1999-02-10 Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht Expired - Lifetime EP0937786B1 (de)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE19807359 1998-02-21
    DE19807359A DE19807359A1 (de) 1998-02-21 1998-02-21 Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht

    Publications (3)

    Publication Number Publication Date
    EP0937786A2 EP0937786A2 (de) 1999-08-25
    EP0937786A3 true EP0937786A3 (de) 2001-05-16
    EP0937786B1 EP0937786B1 (de) 2008-04-16

    Family

    ID=7858522

    Family Applications (1)

    Application Number Title Priority Date Filing Date
    EP99102511A Expired - Lifetime EP0937786B1 (de) 1998-02-21 1999-02-10 Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht

    Country Status (2)

    Country Link
    EP (1) EP0937786B1 (de)
    DE (2) DE19807359A1 (de)

    Families Citing this family (12)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    DE10118541A1 (de) * 2001-04-14 2002-10-17 Alstom Switzerland Ltd Verfahren zur Abschätzung der Lebensdauer von Wärmedämmschichten
    DE10163551A1 (de) * 2001-12-21 2003-07-10 Forschungszentrum Juelich Gmbh Verfahren zur Beschichtung eines Substrates A mit einer Schicht aus den Komponenten BC sowie durch das Verfahren beschichtete Substrate
    AU2003202402A1 (en) * 2002-02-15 2003-09-04 Alstom Technology Ltd Method for producing a component having a high thermal loading capacity and coated with a heat-protective layer
    DE102004034687A1 (de) * 2004-07-17 2006-02-02 Öko-Insel Energietechnik GmbH Verfahren zur Herstellung eines Bauteils aus Keramik-Verbund-Werkstoff für thermisch und mechanisch hoch beanspruchbare Turbinen, und Turbine aus Keramik-Verbund-Werkstoff, insbesondere Mikrogasturbine in Axialbauweise
    SG128580A1 (en) * 2005-06-08 2007-01-30 United Technologies Corp Reduced thermal conductivity thermal barrier coating by electron beam-physical vapor deposition process
    US20070078521A1 (en) * 2005-09-30 2007-04-05 Depuy Products, Inc. Aluminum oxide coated implants and components
    DE102005053531A1 (de) * 2005-11-08 2007-05-10 Man Turbo Ag Wärmedämmende Schutzschicht für ein Bauteil innerhalb des Heißgasbereiches einer Gasturbine
    US9315905B2 (en) 2010-03-04 2016-04-19 United Technologies Corporation Coated article and coating process therefor
    US9581042B2 (en) 2012-10-30 2017-02-28 United Technologies Corporation Composite article having metal-containing layer with phase-specific seed particles and method therefor
    US11661849B2 (en) 2021-02-12 2023-05-30 Garrett Transportation I Inc. Turbocharger turbine wheels having an alpha-alumina coating and methods for manufacturing the same
    CN116288207B (zh) * 2023-03-21 2024-04-05 浙江大学 一种热障涂层及其制备方法和在高温合金中的应用
    CN119980232B (zh) * 2025-04-15 2025-07-01 矿冶科技集团有限公司 一种抗氧化涂层及其制备方法、高温部件和航空设备

    Citations (3)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    EP0705912A2 (de) * 1992-03-05 1996-04-10 ROLLS-ROYCE plc Beschichtete Formkörper
    WO1996034129A1 (en) * 1995-04-25 1996-10-31 Siemens Aktiengesellschaft Superalloy component with a protective coating system
    US5683761A (en) * 1995-05-25 1997-11-04 General Electric Company Alpha alumina protective coatings for bond-coated substrates and their preparation

    Patent Citations (3)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    EP0705912A2 (de) * 1992-03-05 1996-04-10 ROLLS-ROYCE plc Beschichtete Formkörper
    WO1996034129A1 (en) * 1995-04-25 1996-10-31 Siemens Aktiengesellschaft Superalloy component with a protective coating system
    US5683761A (en) * 1995-05-25 1997-11-04 General Electric Company Alpha alumina protective coatings for bond-coated substrates and their preparation

    Non-Patent Citations (4)

    * Cited by examiner, † Cited by third party
    Title
    LEUSHAKE U ET AL: "Microstructure and phase stability of EB-PVD alumina and alumina/zirconia for thermal barrier coating applications", 24TH INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS AND THIN FILMS, SAN DIEGO, CA, USA, 21-25 APRIL 1997, vol. 94-95, no. 1-3, Surface and Coatings Technology, Oct. 1997, Elsevier, Switzerland, pages 131 - 136, XP000991527, ISSN: 0257-8972 *
    PRAKASH S ET AL: "Pretreatment effects on the morphology and properties of aluminum oxide thermally grown on NiCoCrAlY", PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON METALLURGICAL COATINGS, LOS ANGELES, CA, USA, 15-19 APRIL 1985, vol. 3, no. 6, Journal of Vacuum Science & Technology A (Vacuum, Surfaces, and Films), Nov.-Dec. 1985, USA, pages 2551 - 2556, XP002162476, ISSN: 0734-2101 *
    THORNTON J A ET AL: "STRUCTURE AND HEAT TREATMENT CHARACTERISTICS OF SPUTTER-DEPOSITED ALUMINA", AMERICAN CERAMIC SOCIETY BULLETIN,US,AMERICAN CERAMIC SOCIETY. COLUMBUS, vol. 56, no. 5, 1 May 1977 (1977-05-01), pages 504 - 508, XP000601547, ISSN: 0002-7812 *
    WANG ET AL: "THE EFFECT OF REACTIVELY-SPUTTERED ALUMINA FILMS ON THE OXIDATION OF CoCrAlY COATINGS.", JOURNAL DE PHYSIQUE, vol. 3, no. C9, December 1993 (1993-12-01), FR, pages 551 - 557, XP000991478 *

    Also Published As

    Publication number Publication date
    EP0937786B1 (de) 2008-04-16
    DE59914726D1 (de) 2008-05-29
    EP0937786A2 (de) 1999-08-25
    DE19807359A1 (de) 1999-08-26

    Similar Documents

    Publication Publication Date Title
    EP0937786A3 (de) Wärmedämmschichtsystem mit integrierter Aluminiumoxidschicht
    EP0049007A1 (de) Verfahren zum direkten Verbinden von Kupferfolien mit Oxidkeramiksubstraten
    CA2357583A1 (fr) Procede de realisation d&#39;un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue
    JPS63236545A (ja) 触媒担体及びその製造法
    CA2165641A1 (en) A method of applying a thermal barrier coating to a superalloy article and a thermal barrier coating
    US20040247930A1 (en) Composite reactive multilayer foil
    CN107787259B (zh) 用于制造复合材料的方法
    NO156747C (no) Superlegeringsgjenstand med et vedheftende, holdbart, keramisk og termisk barrierebelegg, samt fremgangsmaate til fremstilling av gjenstanden.
    JPH03216909A (ja) 補強された直接結合銅構造体
    MX169998B (es) Sistema de revestimiento con barrera termica
    Hsueh Some considerations of determination of residual stresses and Young's moduli in ceramic coatings
    US5706999A (en) Preparation of a coated metal-matrix composite material
    CN1954097B (zh) 铸造机部件用金属材料、与熔融铝合金接触的构件
    EP0862209A3 (de) Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat
    EP0350648A3 (de) Verfahren zur Herstellung hochtemperaturbeständiger Kupferbeschichtungen auf anorganischen Dielektrika
    EP0086520B1 (de) Verfahren zur Metallplattierung
    JP3392594B2 (ja) アルミニウム−セラミックス複合基板のエッチング処理方法およびエッチング液
    TW365057B (en) Manufacturing method for micro-mirror on the silicon substrate
    DE3233022A1 (de) Verfahren zum direkten verbinden eines koerpers mit einem keramischen substrat
    Lin et al. Diffusional breakdown of a Ag diffusion barrier in a Cu-Ag-Ni diffusion triple
    RU2569858C2 (ru) Способ подготовки деталей под пайку
    KR890005827A (ko) 자기 금속 박막층 제조방법
    JPH08199322A (ja) 金属溶湯部材
    EP1336669B1 (de) Verfahren zum Bereitstellen eines schildkrötenpanzerartigen Farbeffekts auf Metalloberflächen
    Sheets et al. Thermal Stresses Under Engine Heat Flux. I. Ceramic Coatings on Metal Substrate

    Legal Events

    Date Code Title Description
    PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

    Free format text: ORIGINAL CODE: 0009012

    AK Designated contracting states

    Kind code of ref document: A2

    Designated state(s): DE FR GB IT NL

    AX Request for extension of the european patent

    Free format text: AL;LT;LV;MK;RO;SI

    RIN1 Information on inventor provided before grant (corrected)

    Inventor name: LEUSHAKE, UWE

    Inventor name: KRELL, THOMAS

    Inventor name: LEYENS, CHRISTOPH DR.

    Inventor name: SCHULZ, UWE DR.

    PUAL Search report despatched

    Free format text: ORIGINAL CODE: 0009013

    AK Designated contracting states

    Kind code of ref document: A3

    Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

    AX Request for extension of the european patent

    Free format text: AL;LT;LV;MK;RO;SI

    17P Request for examination filed

    Effective date: 20010912

    AKX Designation fees paid

    Free format text: DE FR GB IT NL

    RAP1 Party data changed (applicant data changed or rights of an application transferred)

    Owner name: DEUTSCHES ZENTRUM FUER LUFT- UND RAUMFAHRT E.V.

    17Q First examination report despatched

    Effective date: 20061129

    GRAP Despatch of communication of intention to grant a patent

    Free format text: ORIGINAL CODE: EPIDOSNIGR1

    RIC1 Information provided on ipc code assigned before grant

    Ipc: F01D 5/18 20060101ALI20070727BHEP

    Ipc: C23C 14/08 20060101ALI20070727BHEP

    Ipc: C23C 28/00 20060101AFI20070727BHEP

    GRAS Grant fee paid

    Free format text: ORIGINAL CODE: EPIDOSNIGR3

    GRAA (expected) grant

    Free format text: ORIGINAL CODE: 0009210

    AK Designated contracting states

    Kind code of ref document: B1

    Designated state(s): DE FR GB IT NL

    REF Corresponds to:

    Ref document number: 59914726

    Country of ref document: DE

    Date of ref document: 20080529

    Kind code of ref document: P

    NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: NL

    Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

    Effective date: 20080416

    PLBE No opposition filed within time limit

    Free format text: ORIGINAL CODE: 0009261

    STAA Information on the status of an ep patent application or granted ep patent

    Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

    EN Fr: translation not filed
    26N No opposition filed

    Effective date: 20090119

    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: IT

    Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

    Effective date: 20080416

    GBPC Gb: european patent ceased through non-payment of renewal fee

    Effective date: 20090210

    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: GB

    Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

    Effective date: 20090210

    PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

    Ref country code: DE

    Payment date: 20100205

    Year of fee payment: 12

    REG Reference to a national code

    Ref country code: DE

    Ref legal event code: R119

    Ref document number: 59914726

    Country of ref document: DE

    Effective date: 20110901

    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: FR

    Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

    Effective date: 20090227

    PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

    Ref country code: DE

    Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

    Effective date: 20110901