EP0873789A2 - Vorrichtung zur gekapselten Aufnahme eines Materials - Google Patents
Vorrichtung zur gekapselten Aufnahme eines Materials Download PDFInfo
- Publication number
- EP0873789A2 EP0873789A2 EP98107137A EP98107137A EP0873789A2 EP 0873789 A2 EP0873789 A2 EP 0873789A2 EP 98107137 A EP98107137 A EP 98107137A EP 98107137 A EP98107137 A EP 98107137A EP 0873789 A2 EP0873789 A2 EP 0873789A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- gaseous
- cavities
- liquid
- technology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/50—Movable or transportable mixing devices or plants
- B01F33/501—Movable mixing devices, i.e. readily shifted or displaced from one place to another, e.g. portable during use
- B01F33/5011—Movable mixing devices, i.e. readily shifted or displaced from one place to another, e.g. portable during use portable during use, e.g. hand-held
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/713—Feed mechanisms comprising breaking packages or parts thereof, e.g. piercing or opening sealing elements between compartments or cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/713—Feed mechanisms comprising breaking packages or parts thereof, e.g. piercing or opening sealing elements between compartments or cartridges
- B01F35/7135—Opening the seal between the compartments by application of heat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/713—Feed mechanisms comprising breaking packages or parts thereof, e.g. piercing or opening sealing elements between compartments or cartridges
- B01F35/7137—Piercing, perforating or melting membranes or closures which seal the compartments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0677—Valves, specific forms thereof phase change valves; Meltable, freezing, dissolvable plugs; Destructible barriers
Definitions
- the present invention relates to a device for encapsulated recording of a material using a such device.
- Sensitive means the lifespan, i.e. H. the Availability for a specific purpose, is available on contact reduced with a certain substance or mixture of substances. Because of this limited life it is desirable to use this Materials just before they are used in the harmful Release the measuring medium and take it up to this point Keep protective gas or protective liquid or vacuum.
- the harmful measuring medium can with the substance to be measured be identical.
- the usual methods are to encapsulate the substance in one Glass flasks, plastic foils or similar packaging.
- the disadvantage of these methods is manifold: the encapsulation methods can only be miniaturized to a limited extent and / or the closure is not automatic or only consuming to open.
- Such sensitive substances are also in a vessel included, which via a valve and / or Hose system is connected to the outside world. This device can be opened automatically, but here the speed can the mechanical opening for some applications not be sufficient. Responding to fast processes is not possible. Furthermore limits the necessary Mechanics the minimum achievable size and the Cost reduction.
- the direct coating of the substance to be protected with e.g. electrically vaporizable materials is very limited can be used because in many cases this method becomes a irreversible contamination of the coated material leads.
- DE 3919042 A1 discloses a system for the analysis of solid Substances on mercury. With this known system a solid substance to be analyzed is introduced into a vessel, which is subsequently closed by a membrane being, when, over the membrane, a lid on the edge of the vessel is set by heating the membrane solid substance and a resulting overpressure in the Vessel is destroyed. Those disclosed in DE 3919042 A1 However, the system used is for a device Large series production not suitable.
- DE 3520416 C2 describes a device for controllable Opening a partition, the partition consisting of an in a clamping ring used membrane with adjacent heating wires there is an opening of the membrane when supply effect with electrical energy.
- This device too is not for mass production, for example suitable micromechanical method.
- DE 3818614 A1 and DE3915920 A1 disclose micromechanical Structures with a plurality of recesses for receiving of small amounts of material, especially in the field of biotechnology.
- the wells are by means of a lid, preferably with the wells has corresponding surveys, closed.
- membrane structures for example Si 3 N 4 on Si carrier material and other combinations.
- these membrane structures are used due to their very low thermal heat capacity and / or thermal conductivity. They serve as a carrier material for temperature-sensitive resistors, for example in the implementation of thermal flow meters and / or for the thermal insulation of a heating element from its surroundings.
- the invention is based on the cited prior art the task of a miniaturizable device to create the event or timed, allows automatic mixing of two substances.
- Another object of the present invention is a miniaturizable device for automatic Release of a gaseous, liquid or solid substance to create in the environment.
- the present invention provides an apparatus for separate, encapsulated recording of a plurality of the same or different substances in a plurality of closed Cavities in a micromechanically manufactured structure, where at least two of the cavities by one in microsystem technology or membrane implemented in thin film technology are separated, the device being an electrical actuatable heater to destroy the membrane in order which has to connect at least two cavities.
- the micromechanically manufactured structure can preferably be formed by a plurality of semiconductor wafers which are connected such that at least two recesses in the semiconductor wafers by the in microsystem technology or Thin film technology implemented membrane are separated.
- Such a micromechanically manufactured structure can also be used have a plurality of membranes, each membrane in each case at least two cavities in the micromechanically manufactured Structure separates.
- a suitable driver device for driving the electrically operated heating devices the majority of the membranes can then essentially destroyed at the same time or with a time delay.
- the present invention further provides the use of a Encapsulated device for a gaseous, liquid or solid substance, the device a a recess for receiving the gaseous, liquid or solid substance formed in microsystem technology Base body, a spanning the base body, in microsystem technology or membrane implemented in thin film technology for encapsulating the material in the recess of the base body and an electrically actuated heating device for Destroy the membrane to the gaseous, liquid or expose solid substance, has to release the gaseous, liquid or solid into the environment.
- the membrane used in the present invention can preferably be provided with a protective layer which Enabling aggressive media to be housed.
- a protective layer which Enabling aggressive media to be housed.
- the membrane for example made of silicon nitride, can be resistant Protective layer, for example silicon carbide be used.
- An advantage of the use according to the invention for example compared to a pump, it consists of mechanical and electronic much simpler structure of the invention Systems. Up to a certain number of releases this method is therefore cheaper per system than for example the use of a pump. Another advantage is the higher functional reliability due to the simple structure of the system. The release of the substance happens without using flaps, valves and channels. In contrast to a pump, for example, no clogging of channels possible, as these are required Function according to the present invention is not required will.
- the present invention takes advantage of the fact that in thin membranes, which in thin film technology or microsystem technology are implemented, often higher tension forces occur in other areas of technology are considered a problem of such membrane structures. These tension forces which are present in the membrane, cause application of thermal forces on the membrane an explosive Bursting of the same.
- the membrane evaporates not, but shatters into individual pieces.
- the according heater used in the present invention preferably as a heater integrated on the membrane executed, in which a short heating pulse a thermal Tensioning the membrane caused by this membrane to Burst is brought.
- the structures used in accordance with the present invention offer a simple, contamination-proof and fast way and way to a gaseous, liquid or solid substance into the environment, or to release a plurality of in to mix substances located in different cavities, the structure being simple in a mass production technique is accessible.
- the proper destruction of the Membrane can each have a suitable electrode geometry be signaled.
- the present invention operates thus a structure that is compatible with common large-scale production Methods can be implemented.
- the membrane body structure advantageously in microsystem technology executed.
- the membrane can also be made using thin film technology.
- FIG. 1 The only figure of the present application shows one schematic cross-sectional representation of an embodiment the device according to the invention for separate, encapsulated Inclusion of a plurality of the same or different Fabrics.
- the device has that is designated in its entirety with the reference number 10 is, a carrier 1, for example, from Quartz exists.
- a layer 2 is optionally on the carrier 1 applied, for example, to support a connection of the carrier 1 with a semiconductor wafer, which in the preferred embodiment consists of silicon, serve can, in which a recess 8 by conventional, photolithographic and etching methods are incorporated. over a recess 5 is formed in the recess 8.
- a semiconductor wafer which in the preferred embodiment consists of silicon
- a heater structure 7 which has connection lines with connection pads or bond pads stands, arranged.
- the membrane 5 On the surface opposite the support structure 4. the membrane 5 is another wafer 9, which in the preferred Embodiment consists of silicon, attached.
- the wafer 9 has a recess 10 and is so over the membrane 5 connected to the wafer 4 that the cavities 8 and 10 are opposite, the same through Membrane 5 are separated.
- the present invention thus enables separation a certain number of substances in two or more chambers or recesses separated by "membrane technology".
- a structure can be achieved by the encapsulation either in the manufacture of several chambers and contains membrane, or alternatively in which the elements at wafer or individual part level, for example Wafer bonding or gluing can be combined accordingly.
- Dependent of the structure and the desired reaction can now certain number of chambers quasi-simultaneously (in the millisecond range) or open at any time be by the individual heater devices accordingly can be controlled.
- With a multi-chamber technology it can the number of possible within a membrane system, for example chemical reactions, for example detection reactions, be greatly increased.
- the present invention provides further developed use of a device for encapsulated receptacle of a material that has a recess to hold the material in microsystem technology formed basic body, a spanning the basic body, in microsystem technology or thin film technology implemented membrane to encapsulate the material in the Recess of the base body and an electrically operated Has heater for destroying the membrane to the Material that is a gaseous, liquid or solid substance may be to release into the environment.
- the membrane can be made with a resistant Protective layer. Does it exist Membrane made of silicon nitride, can in a suitable form a silicon carbide layer can be used as a protective layer. Thereby the membrane is also in aggressive media, for example strong acids, can be used. With appropriate choice of material and thickness affects this protective layer Function of the system, d. H. destroying the membrane, Not. In contrast, mechanically moving parts are like they contain pumps, generally more difficult with protective layers to cover.
- the release of a single substance can be taken on its own have a purpose, for example, in the release of fragrances in the room air or in the release of Additives in liquids etc. Furthermore, by the release is also a reaction with surrounding substances and thereby triggered a desired effect with the environment will.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Sampling And Sample Adjustment (AREA)
- Micromachines (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
Claims (9)
- Vorrichtung (10) zur getrennten, gekapselten Aufnahme einer Mehrzahl gleicher oder unterschiedlicher Stoffe in einer Mehrzahl von abgeschlossenen Hohlräumen (8, 10) in einer mikromechanisch gefertigten Struktur, wobei zumindest zwei der Hohlräume (8, 10) durch eine in Mikrosystemtechnik oder Dünnfilmtechnologie implementierte Membran (5) getrennt sind, wobei die Vorrichtung (10) eine elektrisch betätigbare Heizeinrichtung (7) zum Zerstören der Membran (5), um die zumindest zwei Hohlräume (8, 10) zu verbinden, aufweist.
- Vorrichtung nach Anspruch 1, bei der die mikromechanisch gefertigte Struktur durch zumindest zwei Halbleiterwafer (4, 9) gebildet ist, die derart verbunden sind, daß zumindest zwei Ausnehmungen (8, 10) in den Halbleiterwafern (4, 9) durch die in Mikrosystemtechnik oder Dünnfilmtechnologie implementierte Membran (5) getrennt sind.
- Vorrichtung nach Anspruch 1 oder 2, die eine Mehrzahl von in Mikrosystemtechnik oder Dünnfilmtechnologie implementierten Membranen aufweist, die jeweils zumindest zwei Hohlräume in der mikromechanisch gefertigten Struktur trennen, wobei die Vorrichtung für jede Membran eine elektrisch betätigbare Heizeinrichtung zum Zerstören derselben aufweist, und wobei die Vorrichtung eine Treibereinrichtung aufweist, durch die die elektrisch betätigbaren Heizeinrichtungen treibbar sind, um die Mehrzahl der Membranen im wesentlichen gleichzeitig oder zeitversetzt zu zerstören.
- Vorrichtung nach einem der Ansprüche 1 bis 3, bei der die Membran oder zumindest eine der Mehrzahl von Membranen mit einer Schutzschicht versehen ist.
- Vorrichtung nach einem der Ansprüche 1 bis 4, bei der die Membran oder die Mehrzahl von Membranen aus Siliziumnitrid besteht.
- Vorrichtung nach Anspruch 4 oder 5, bei der die Schutzschicht aus Siliziumcarbid besteht.
- Verwendung einer Vorrichtung zur gekapselten Aufnahme eines gasförmigen, flüssigen oder festen Stoffes, die folgende Merkmale aufweist:einen eine Ausnehmung zur Aufnahme des gasförmigen, flüssigen oder festen Stoffs aufweisenden in Mikrosystemtechnik gebildeten Grundkörper,eine den Grundkörper überspannende, in Mikrosystemtechnik oder Dünnfilmtechnologie implementierte Membran zur Kapselung des gasförmigen, flüssigen oder festen Stoffes in der Ausnehmung des Grundkörpers; undeine elektrisch betätigbare Heizeinrichtung zum Zerstören der Membran, um den gasförmigen, flüssigen oder festen Stoff freizulegen,zur Freisetzung des gasförmigen, flüssigen oder festen Stoffes in die Umgebung.
- Verwendung einer Vorrichtung nach Anspruch 7, wobei die Membran der Vorrichtung mit einer Schutzschicht versehen ist.
- Verwendung einer Vorrichtung nach Anspruch 8 zur Freisetzung von aggressiven Medien an die Umgebung.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19716683 | 1997-04-21 | ||
DE19716683A DE19716683C1 (de) | 1997-04-21 | 1997-04-21 | Vorrichtung zur getrennten, gekapselten Aufnahme einer Mehrzahl gleicher oder unterschiedlicher Stoffe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0873789A2 true EP0873789A2 (de) | 1998-10-28 |
EP0873789A3 EP0873789A3 (de) | 1999-09-15 |
Family
ID=7827208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98107137A Withdrawn EP0873789A3 (de) | 1997-04-21 | 1998-04-20 | Vorrichtung zur gekapselten Aufnahme eines Materials |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0873789A3 (de) |
DE (1) | DE19716683C1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19858443A1 (de) * | 1998-12-17 | 2000-07-06 | Inst Mikrotechnik Mainz Gmbh | Verfahren zum Abgeben eines Fluids, fluidisches Bauteil sowie Vorrichtung zur Handhabung solcher Bauteile |
WO2004078350A2 (en) * | 2003-02-28 | 2004-09-16 | Applera Corporation | Sample substrate having a divided sample chamber and method of loading thereof |
WO2004071487A3 (en) * | 2002-08-16 | 2004-09-30 | Microchips Inc | Controlled release device and method |
WO2007040455A1 (en) * | 2005-10-04 | 2007-04-12 | Nanospace Ab | A high pressure isolation valve system |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7070590B1 (en) | 1996-07-02 | 2006-07-04 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
DE60018582T2 (de) | 1999-08-18 | 2006-01-19 | Microchips, Inc., Bedford | Thermisch aktivierbarer microchip als abgabevorrichtung für chemikalien |
AU782639B2 (en) | 1999-12-10 | 2005-08-18 | Massachusetts Institute Of Technology | Microchip devices for delivery of molecules and methods of fabrication thereof |
JP3960802B2 (ja) * | 2000-03-02 | 2007-08-15 | マイクロチップス・インコーポレーテッド | 化学物質およびデバイスを格納し、選択的に露出させるための微細加工されたデバイス |
AU2002211629A1 (en) | 2000-10-10 | 2002-04-22 | Microchips, Inc. | Microchip reservoir devices using wireless transmission of power and data |
JP4657577B2 (ja) | 2001-01-09 | 2011-03-23 | マイクロチップス・インコーポレーテッド | 眼への適用および他への適用のための可撓性マイクロチップデバイス |
US6875208B2 (en) | 2001-05-31 | 2005-04-05 | Massachusetts Institute Of Technology | Microchip devices with improved reservoir opening |
US7318912B2 (en) * | 2001-06-07 | 2008-01-15 | Nanostream, Inc. | Microfluidic systems and methods for combining discrete fluid volumes |
DE10133013C2 (de) * | 2001-07-06 | 2003-07-03 | Karlsruhe Forschzent | Verschluss für Hohlräume oder Durchführungen |
US7497855B2 (en) | 2002-09-04 | 2009-03-03 | Microchips, Inc. | Method and device for the controlled delivery of parathyroid hormone |
US7534241B2 (en) | 2002-09-23 | 2009-05-19 | Microchips, Inc. | Micro-reservoir osmotic release systems and microtube array device |
US7599737B2 (en) | 2002-10-04 | 2009-10-06 | Microchips, Inc. | Medical device for neural stimulation and controlled drug delivery |
US7917208B2 (en) | 2002-10-04 | 2011-03-29 | Microchips, Inc. | Medical device for controlled drug delivery and cardiac monitoring and/or stimulation |
DE602004029396D1 (de) | 2003-11-03 | 2010-11-11 | Microchips Inc | Medizinprodukt zum messen von glucose |
DE102004041941B4 (de) * | 2004-08-30 | 2007-01-11 | P.A.L.M. Microlaser Technologies Ag | Verfahren zur Gewinnung von biologischen Objekten mit einer Aufnahmeeinheit |
EP1861333B1 (de) | 2004-11-04 | 2018-12-26 | Microchips Biotech, Inc. | Druck- und kaltschweissdichtverfahren und -vorrichtungen |
US7413846B2 (en) | 2004-11-15 | 2008-08-19 | Microchips, Inc. | Fabrication methods and structures for micro-reservoir devices |
CN112337516B (zh) * | 2020-09-18 | 2022-04-29 | 东莞东阳光医疗智能器件研发有限公司 | 气压平衡微流控芯片及其控制方法 |
Citations (7)
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US4198135A (en) * | 1979-04-04 | 1980-04-15 | Polaroid Corporation | Method and apparatus for releasing processing fluid from a fluid applicator by application of thermal energy |
DE3520416A1 (de) * | 1985-06-07 | 1986-12-11 | Erno Raumfahrttechnik Gmbh | Vorrichtung zum steuerbaren oeffnen einer trennwand |
US5262127A (en) * | 1992-02-12 | 1993-11-16 | The Regents Of The University Of Michigan | Solid state chemical micro-reservoirs |
WO1994025862A1 (en) * | 1993-05-04 | 1994-11-10 | Washington State University Research Foundation | Biosensor substrate for mounting bilayer lipid membrane containing a receptor |
WO1997021090A1 (en) * | 1995-12-05 | 1997-06-12 | Gamera Bioscience | Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
DE19610293C1 (de) * | 1996-03-15 | 1997-07-31 | Fraunhofer Ges Forschung | Vorrichtung zur gekapselten Aufnahme eines Materials |
FR2744803A1 (fr) * | 1996-02-12 | 1997-08-14 | Bio Merieux | Procede et dispositif de traitement d'une carte d'analyse |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3818614A1 (de) * | 1988-06-01 | 1989-12-07 | Messerschmitt Boelkow Blohm | Mikrobehaelter |
DE3915920A1 (de) * | 1989-05-16 | 1990-11-22 | Messerschmitt Boelkow Blohm | Mikromechanische struktur |
DE3919042A1 (de) * | 1989-06-10 | 1990-12-13 | Bodenseewerk Perkin Elmer Co | Verfahren und vorrichtung zur analyse von festen substanzen auf quecksilber |
-
1997
- 1997-04-21 DE DE19716683A patent/DE19716683C1/de not_active Expired - Fee Related
-
1998
- 1998-04-20 EP EP98107137A patent/EP0873789A3/de not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4198135A (en) * | 1979-04-04 | 1980-04-15 | Polaroid Corporation | Method and apparatus for releasing processing fluid from a fluid applicator by application of thermal energy |
DE3520416A1 (de) * | 1985-06-07 | 1986-12-11 | Erno Raumfahrttechnik Gmbh | Vorrichtung zum steuerbaren oeffnen einer trennwand |
US5262127A (en) * | 1992-02-12 | 1993-11-16 | The Regents Of The University Of Michigan | Solid state chemical micro-reservoirs |
WO1994025862A1 (en) * | 1993-05-04 | 1994-11-10 | Washington State University Research Foundation | Biosensor substrate for mounting bilayer lipid membrane containing a receptor |
WO1997021090A1 (en) * | 1995-12-05 | 1997-06-12 | Gamera Bioscience | Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
FR2744803A1 (fr) * | 1996-02-12 | 1997-08-14 | Bio Merieux | Procede et dispositif de traitement d'une carte d'analyse |
DE19610293C1 (de) * | 1996-03-15 | 1997-07-31 | Fraunhofer Ges Forschung | Vorrichtung zur gekapselten Aufnahme eines Materials |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19858443A1 (de) * | 1998-12-17 | 2000-07-06 | Inst Mikrotechnik Mainz Gmbh | Verfahren zum Abgeben eines Fluids, fluidisches Bauteil sowie Vorrichtung zur Handhabung solcher Bauteile |
WO2004071487A3 (en) * | 2002-08-16 | 2004-09-30 | Microchips Inc | Controlled release device and method |
CN100594892C (zh) * | 2002-08-16 | 2010-03-24 | 微芯片公司 | 使用电热消融的受控释放的装置和方法 |
US7910151B2 (en) | 2002-08-16 | 2011-03-22 | Microchips, Inc. | Method for making device for controlled reservoir opening by electrothermal ablation |
US8211092B2 (en) | 2002-08-16 | 2012-07-03 | Microchips, Inc. | Containment device with multi-layer reservoir cap structure |
WO2004078350A2 (en) * | 2003-02-28 | 2004-09-16 | Applera Corporation | Sample substrate having a divided sample chamber and method of loading thereof |
WO2004078350A3 (en) * | 2003-02-28 | 2004-12-23 | Applera Corp | Sample substrate having a divided sample chamber and method of loading thereof |
US7332348B2 (en) | 2003-02-28 | 2008-02-19 | Applera Corporation | Sample substrate having a divided sample chamber and method of loading thereof |
US8628730B2 (en) | 2003-02-28 | 2014-01-14 | Applied Biosystems, Llc | Sample substrate having a divided sample chamber and method of loading thereof |
WO2007040455A1 (en) * | 2005-10-04 | 2007-04-12 | Nanospace Ab | A high pressure isolation valve system |
US8141572B2 (en) | 2005-10-04 | 2012-03-27 | Nanospace Ab | High pressure isolation valve system |
Also Published As
Publication number | Publication date |
---|---|
DE19716683C1 (de) | 1998-06-04 |
EP0873789A3 (de) | 1999-09-15 |
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