EP0871973A4 - - Google Patents

Info

Publication number
EP0871973A4
EP0871973A4 EP96904583A EP96904583A EP0871973A4 EP 0871973 A4 EP0871973 A4 EP 0871973A4 EP 96904583 A EP96904583 A EP 96904583A EP 96904583 A EP96904583 A EP 96904583A EP 0871973 A4 EP0871973 A4 EP 0871973A4
Authority
EP
European Patent Office
Prior art keywords
particle beam
charged particle
coils
beam generator
steppimg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96904583A
Other languages
English (en)
Other versions
EP0871973A2 (de
EP0871973B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NexRay Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of EP0871973A2 publication Critical patent/EP0871973A2/de
Publication of EP0871973A4 publication Critical patent/EP0871973A4/xx
Application granted granted Critical
Publication of EP0871973B1 publication Critical patent/EP0871973B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray

Landscapes

  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP96904583A 1995-02-10 1996-01-31 Röntgenstrahlenquelle Expired - Lifetime EP0871973B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38688495A 1995-02-10 1995-02-10
US386884 1995-02-10
PCT/US1996/001641 WO1996025024A1 (en) 1995-02-10 1996-01-31 X-ray source

Publications (3)

Publication Number Publication Date
EP0871973A2 EP0871973A2 (de) 1998-10-21
EP0871973A4 true EP0871973A4 (de) 1998-10-21
EP0871973B1 EP0871973B1 (de) 2003-05-28

Family

ID=23527471

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96904583A Expired - Lifetime EP0871973B1 (de) 1995-02-10 1996-01-31 Röntgenstrahlenquelle

Country Status (7)

Country Link
EP (1) EP0871973B1 (de)
JP (1) JPH11504750A (de)
AT (1) ATE241856T1 (de)
AU (1) AU4865196A (de)
DE (1) DE69628454T2 (de)
IL (1) IL116961A (de)
WO (1) WO1996025024A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118853A (en) * 1998-10-06 2000-09-12 Cardiac Mariners, Inc. X-ray target assembly
US6208709B1 (en) 1998-10-06 2001-03-27 Cardiac Mariners, Inc. Detection processing system
US6118854A (en) * 1998-10-06 2000-09-12 Cardiac Mariners, Inc. Method of making x-ray beam hardening filter and assembly
US6175611B1 (en) 1998-10-06 2001-01-16 Cardiac Mariners, Inc. Tiered detector assembly
US6181764B1 (en) 1998-10-06 2001-01-30 Cardiac Mariners, Inc. Image reconstruction for wide depth of field images
US6183139B1 (en) 1998-10-06 2001-02-06 Cardiac Mariners, Inc. X-ray scanning method and apparatus
US6234671B1 (en) 1998-10-06 2001-05-22 Cardiac Mariners, Inc. X-ray system with scanning beam x-ray source below object table
US6178223B1 (en) 1998-10-06 2001-01-23 Cardiac Mariners, Inc. Image reconstruction method and apparatus
US6157703A (en) * 1998-10-06 2000-12-05 Cardiac Mariners, Inc. Beam hardening filter for x-ray source
US6198802B1 (en) 1998-10-06 2001-03-06 Cardiac Mariners, Inc. Scanning beam x-ray source and assembly
BE1012248A6 (fr) * 1998-10-26 2000-08-01 Ind Control Machines S A Dispositif de controle a rayons x
JP2011019802A (ja) * 2009-07-17 2011-02-03 Ge Medical Systems Global Technology Co Llc Ｘ線ｃｔ装置
WO2011096557A1 (ja) * 2010-02-08 2011-08-11 株式会社 日立メディコ Ｘ線管装置及びｘ線ｃｔ装置
KR101127887B1 (ko) * 2010-02-12 2012-03-21 주식회사 쎄크 Ｘ선관
EP2656369B8 (de) * 2010-12-22 2016-09-21 Excillum AB Ausrichtung und fokussierung eines elektronenstrahls in einer röntgenquelle
CN108419356B (zh) * 2018-05-16 2023-09-22 中国工程物理研究院流体物理研究所 用于提升回旋加速器内离子源寿命的方法及离子源设备
US11719652B2 (en) * 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206356A (en) * 1977-06-03 1980-06-03 E M I Limited X-Ray generating arrangements
US4730350A (en) * 1986-04-21 1988-03-08 Albert Richard D Method and apparatus for scanning X-ray tomography

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3949229A (en) * 1974-06-24 1976-04-06 Albert Richard D X-ray scanning method and apparatus
US5023768A (en) * 1989-11-24 1991-06-11 Varian Associates, Inc. High voltage high power DC power supply

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206356A (en) * 1977-06-03 1980-06-03 E M I Limited X-Ray generating arrangements
US4730350A (en) * 1986-04-21 1988-03-08 Albert Richard D Method and apparatus for scanning X-ray tomography

Also Published As

Publication number Publication date
EP0871973A2 (de) 1998-10-21
WO1996025024A1 (en) 1996-08-15
EP0871973B1 (de) 2003-05-28
ATE241856T1 (de) 2003-06-15
DE69628454T2 (de) 2004-05-06
AU4865196A (en) 1996-08-27
IL116961A0 (en) 1996-05-14
IL116961A (en) 2000-02-29
JPH11504750A (ja) 1999-04-27
DE69628454D1 (de) 2003-07-03

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