AU4865196A - X-ray source - Google Patents

X-ray source

Info

Publication number
AU4865196A
AU4865196A AU48651/96A AU4865196A AU4865196A AU 4865196 A AU4865196 A AU 4865196A AU 48651/96 A AU48651/96 A AU 48651/96A AU 4865196 A AU4865196 A AU 4865196A AU 4865196 A AU4865196 A AU 4865196A
Authority
AU
Australia
Prior art keywords
particle beam
charged particle
coils
ray source
beam generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU48651/96A
Inventor
George H. Fellingham
Peter E Loeffler
Brian Skillicorn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NexRay Inc
Original Assignee
NexRay Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NexRay Inc filed Critical NexRay Inc
Publication of AU4865196A publication Critical patent/AU4865196A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray

Abstract

The x-ray source of the present invention comprises a charged particle beam generator (112) and a vacuum enclosure assembly (176). The charges particle beam generator includes only a single electrical connection (803) for providing high voltage to the electron gun. The generated charged particle beam is controlled through a series of dynamic and static focus coils (187, 185) and moved across the inner face of the target (50) by a stepping coil assembly comprising X and Y deflection coils (190) as well as an X step and preferably Y step coils (188). Further, to minimize power usage a control grid pinches off the charged particle beam during the steppimg of the beam.
AU48651/96A 1995-02-10 1996-01-31 X-ray source Abandoned AU4865196A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38688495A 1995-02-10 1995-02-10
US386884 1995-02-10
PCT/US1996/001641 WO1996025024A1 (en) 1995-02-10 1996-01-31 X-ray source

Publications (1)

Publication Number Publication Date
AU4865196A true AU4865196A (en) 1996-08-27

Family

ID=23527471

Family Applications (1)

Application Number Title Priority Date Filing Date
AU48651/96A Abandoned AU4865196A (en) 1995-02-10 1996-01-31 X-ray source

Country Status (7)

Country Link
EP (1) EP0871973B1 (en)
JP (1) JPH11504750A (en)
AT (1) ATE241856T1 (en)
AU (1) AU4865196A (en)
DE (1) DE69628454T2 (en)
IL (1) IL116961A (en)
WO (1) WO1996025024A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118854A (en) * 1998-10-06 2000-09-12 Cardiac Mariners, Inc. Method of making x-ray beam hardening filter and assembly
US6181764B1 (en) 1998-10-06 2001-01-30 Cardiac Mariners, Inc. Image reconstruction for wide depth of field images
US6198802B1 (en) 1998-10-06 2001-03-06 Cardiac Mariners, Inc. Scanning beam x-ray source and assembly
US6118853A (en) * 1998-10-06 2000-09-12 Cardiac Mariners, Inc. X-ray target assembly
US6234671B1 (en) 1998-10-06 2001-05-22 Cardiac Mariners, Inc. X-ray system with scanning beam x-ray source below object table
US6183139B1 (en) * 1998-10-06 2001-02-06 Cardiac Mariners, Inc. X-ray scanning method and apparatus
US6208709B1 (en) 1998-10-06 2001-03-27 Cardiac Mariners, Inc. Detection processing system
US6175611B1 (en) 1998-10-06 2001-01-16 Cardiac Mariners, Inc. Tiered detector assembly
US6157703A (en) * 1998-10-06 2000-12-05 Cardiac Mariners, Inc. Beam hardening filter for x-ray source
US6178223B1 (en) 1998-10-06 2001-01-23 Cardiac Mariners, Inc. Image reconstruction method and apparatus
BE1012248A6 (en) * 1998-10-26 2000-08-01 Ind Control Machines S A Control device x-ray
JP2011019802A (en) * 2009-07-17 2011-02-03 Ge Medical Systems Global Technology Co Llc X-ray ct apparatus
JP5766128B2 (en) * 2010-02-08 2015-08-19 株式会社日立メディコ X-ray tube apparatus and X-ray CT apparatus
KR101127887B1 (en) * 2010-02-12 2012-03-21 주식회사 쎄크 X-ray tube
WO2012087238A1 (en) * 2010-12-22 2012-06-28 Excillum Ab Aligning and focusing an electron beam in an x-ray source
CN108419356B (en) * 2018-05-16 2023-09-22 中国工程物理研究院流体物理研究所 Method for improving service life of ion source in cyclotron and ion source equipment
US11719652B2 (en) * 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3949229A (en) * 1974-06-24 1976-04-06 Albert Richard D X-ray scanning method and apparatus
GB1604252A (en) * 1977-06-03 1981-12-09 Emi Ltd X-ray generating arrangements
US4730350A (en) * 1986-04-21 1988-03-08 Albert Richard D Method and apparatus for scanning X-ray tomography
US5023768A (en) * 1989-11-24 1991-06-11 Varian Associates, Inc. High voltage high power DC power supply

Also Published As

Publication number Publication date
EP0871973A2 (en) 1998-10-21
EP0871973A4 (en) 1998-10-21
DE69628454D1 (en) 2003-07-03
IL116961A (en) 2000-02-29
JPH11504750A (en) 1999-04-27
IL116961A0 (en) 1996-05-14
ATE241856T1 (en) 2003-06-15
EP0871973B1 (en) 2003-05-28
DE69628454T2 (en) 2004-05-06
WO1996025024A1 (en) 1996-08-15

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