EP0847533A1 - A method and apparatus for measuring linear displacements - Google Patents
A method and apparatus for measuring linear displacementsInfo
- Publication number
- EP0847533A1 EP0847533A1 EP95944538A EP95944538A EP0847533A1 EP 0847533 A1 EP0847533 A1 EP 0847533A1 EP 95944538 A EP95944538 A EP 95944538A EP 95944538 A EP95944538 A EP 95944538A EP 0847533 A1 EP0847533 A1 EP 0847533A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stationary
- transducer device
- plate
- movable plate
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/02—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means
- G01D5/06—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means acting through a wall or enclosure, e.g. by bellows, by magnetic coupling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields
Definitions
- the present invention relates to displacement transducers and more
- potentiometer is the friction inherent to the sliding contact and the
- transducer is based on a displacement dependent magnetic coupling
- each of said stationary members comprising one or more than
- a movable member or plate or electrode
- the monitored body body or element the displacement of which is to be measured
- said movable and second stationary members constitute
- stationary member are preferably means, such as a transimpedance
- the input alternating tension is preferably applied to the first
- the first stationary member may be called
- the movable member may be called “signal plate” or “electrode”.
- the first stationary member may be called "displacement plate” or "electrode"
- the first stationary member may be called "displacement plate" or "electrode"
- member comprises two stationary excitation plates, to which two opposite
- phase AC voltages are applied.
- phase AC voltages are applied.
- said two plates are triangular and arranged so that the base of each of them
- the stationary plates may be arranged in cylindrical form, e.g., as
- the movable plate may be formed on a piston which slides within said
- each stationary plate is
- the excitation plate further comprises
- each electrode pair being excited by a complementary
- kinematic means may be of any kind, and may be e.g., kinematic means of any convenient
- structure may include an electromagnetic coupling.
- body according to the invention comprises providing at least two
- capacitances including at least one movable plate, displacing said movable plate as a function of the displacements of the monitored body, applying
- three capacitances including one movable plate and
- Figs. 1-a and 1-b are a diagram of a device according to a first
- Figs. 2-a and 2-b are a diagram of a device according to a second
- Figs. 3-a and 3-b are a diagram of a device according to a third
- Fig. 4-a and 4-b show two constructional implementations
- Fig 5 illustrates a cylindrical constructional implementation of Figs.
- Fig. 6 shows a constructional implementation, schematically
- Fig. 7 shows a constructional implementation, schematically
- embodiment of the invention including coarse and fine channels
- Fig. 8 shows an actual mask use for screen printing coarse and fine
- Fig. 9 illustrates an hermetically sealed device according to an
- Fig. 10 illustrates a device according to a further embodiment of the
- Fig. 11 illustrates a device according to a still further embodiment
- Fig. 1(a) diagrammatically illustrates a transducer device according
- Electrode 6 is capacitively coupled to said electrodes 1 and 3.
- members 1 and 3 consists of a fixed capacitance C 3 and two
- V 0 which is the output of the transimpedance amplifier 5
- V ex is the excitation voltage applied to
- FIG. 1 A modified configuration of the transducer device is shown in Fig.
- Fig. 3(a) illustrates an embodiment wherein the first stationary
- phase of the output voltage varies and is indicative of the sense
- sum signal can be used to normalize the differential signal against common
- the input AC voltage can be applied to the signal plate
- FIG. 4(a) shows a
- the plates can actually be flat bodies, or the drawing can be understood to represent the development on a plane of
- Excitation plates 1 and 2 are identical to Excitation plates 1 and 2
- Capacitance . 3 is therefore constant and capacitances C,. 6 and C 2 . 6 are
- FIG. 4(b) illustrates a modification to the configuration of Fig. 4(a)
- the stationary plates are cylindrical, in particular, they are disposed on a
- the stationary plates can be made by
- Figs. 4(a) or 4(b) can be taken as representing the surface of the
- movable piston can be made from a low friction conductive material such as
- the piston can be made from a Teflon-coated
- FIG. 5 includes a rod 10 that serves mechanically to couple
- actuator /displacement transducer is useful in various pneumatic systems
- the stationary plates of the transducer of the present invention are identical to the stationary plates of the transducer of the present invention.
- the stationary plates and piston 9 is sensitive to radial misalignment of the
- This sensitivity can be decreased by employing, in place of
- FIG. 7 illustrates another embodiment of the invention, wherein an
- additional channel comprises two periodic patterns, shown as triangular in
- the second pattern includes the electrodes 12 and 13 whereas the second pattern includes
- Electrodes 14 and 15 Each electrodes pair is excited with two opposite
- the fine channels enable an interpolation within an individual cycle
- Fig. 8 illustrates an actual mask used for screen printing plates on
- FIG. 9 illustrates
- the momtored body is obtained by the interaction between two concentric elements
- Numeral 8 designates a non-conductive cylinder as in Fig. 5.
- a first cylindrical magnet 16 is mounted within piston 9 and a second
- annular magnet 17 is concentric to the first one. The two magnets are
- FIG. 10 A further embodiment of the invention is illustrated in Fig. 10.
- This embodiment incorporates a cylinder that has an elongated slot 18
- FIG. 11 A further embodiment of the invention is illustrated in Fig. 11.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL11221895 | 1995-01-02 | ||
IL11221895A IL112218A0 (en) | 1995-01-02 | 1995-01-02 | A method and apparatus for measuring linear displacements |
PCT/US1995/016908 WO1996021159A1 (en) | 1995-01-02 | 1995-12-28 | A method and apparatus for measuring linear displacements |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0847533A4 EP0847533A4 (xx) | 1998-06-17 |
EP0847533A1 true EP0847533A1 (en) | 1998-06-17 |
Family
ID=11066961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95944538A Withdrawn EP0847533A1 (en) | 1995-01-02 | 1995-12-28 | A method and apparatus for measuring linear displacements |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0847533A1 (xx) |
AU (1) | AU4689296A (xx) |
IL (1) | IL112218A0 (xx) |
WO (1) | WO1996021159A1 (xx) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19715078A1 (de) * | 1997-04-11 | 1998-10-15 | Univ Ilmenau Tech | Verfahren zur kapazitiven Weg- und Winkelmessung |
GB9815826D0 (en) * | 1998-07-22 | 1998-09-16 | British Aerospace | Capacitive position transducer |
US6513392B1 (en) | 1998-12-08 | 2003-02-04 | Emerson Electric Co. | Coriolis mass flow controller |
EP2131161A1 (en) * | 1998-12-08 | 2009-12-09 | Emerson Electric Co. | Coriolis mass flow controller |
US6748813B1 (en) | 1998-12-08 | 2004-06-15 | Emerson Electric Company | Coriolis mass flow controller |
US6526839B1 (en) | 1998-12-08 | 2003-03-04 | Emerson Electric Co. | Coriolis mass flow controller and capacitive pick off sensor |
JP3620998B2 (ja) * | 1999-06-08 | 2005-02-16 | 株式会社ニレコ | 導電性物体の端部検出装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990001760A1 (en) * | 1988-08-15 | 1990-02-22 | Siecor Corporation | Humidity resistant meter reading device |
FR2682760A1 (fr) * | 1991-10-22 | 1993-04-23 | Prototype Mecanique Ind | Capteurs de deplacements lineaires ou angulaires sans contact. |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3784897A (en) * | 1972-02-17 | 1974-01-08 | Landis Tool Co | Capacitor transducer |
US3860918A (en) * | 1973-06-25 | 1975-01-14 | Becton Dickinson Co | Capacitive position transducer |
US4303919A (en) * | 1978-12-04 | 1981-12-01 | John Dimeff | Non-contacting device for sensing multi-component motion |
US4434391A (en) * | 1982-01-15 | 1984-02-28 | Sperry Corporation | Capacitive feedback transducer and closed loop instrument meter mechanism |
US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
CH670306A5 (xx) * | 1986-11-13 | 1989-05-31 | Hans Ulrich Meyer | |
EP0336022A1 (en) * | 1988-04-08 | 1989-10-11 | SCHUT'S IM- & EXPORTHANDEL B.V. | Capacitive displacement meter |
US5239307A (en) * | 1989-10-10 | 1993-08-24 | Micro Encoder Inc. | Method and apparatus for sensing of position |
US5317351A (en) * | 1990-12-21 | 1994-05-31 | Canon Kabushiki Kaisha | Position detecting device |
US5461319A (en) * | 1992-12-28 | 1995-10-24 | Peters; Randall D. | Symmetric differential capacitance transducer employing cross coupled conductive plates to form equipotential pairs |
DE4313344A1 (de) * | 1993-04-23 | 1994-11-03 | Roch Pierre Ets | Kapazitive Meßeinrichtung |
-
1995
- 1995-01-02 IL IL11221895A patent/IL112218A0/xx unknown
- 1995-12-28 WO PCT/US1995/016908 patent/WO1996021159A1/en not_active Application Discontinuation
- 1995-12-28 EP EP95944538A patent/EP0847533A1/en not_active Withdrawn
- 1995-12-28 AU AU46892/96A patent/AU4689296A/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990001760A1 (en) * | 1988-08-15 | 1990-02-22 | Siecor Corporation | Humidity resistant meter reading device |
FR2682760A1 (fr) * | 1991-10-22 | 1993-04-23 | Prototype Mecanique Ind | Capteurs de deplacements lineaires ou angulaires sans contact. |
Non-Patent Citations (1)
Title |
---|
See also references of WO9621159A1 * |
Also Published As
Publication number | Publication date |
---|---|
IL112218A0 (en) | 1995-03-30 |
EP0847533A4 (xx) | 1998-06-17 |
AU4689296A (en) | 1996-07-24 |
WO1996021159A1 (en) | 1996-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 19970731 |
|
A4 | Supplementary search report drawn up and despatched | ||
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): DE GB Kind code of ref document: A1 Designated state(s): DE GB |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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R18D | Application deemed to be withdrawn (corrected) |
Effective date: 20030701 |