EP0847533A1 - A method and apparatus for measuring linear displacements - Google Patents

A method and apparatus for measuring linear displacements

Info

Publication number
EP0847533A1
EP0847533A1 EP95944538A EP95944538A EP0847533A1 EP 0847533 A1 EP0847533 A1 EP 0847533A1 EP 95944538 A EP95944538 A EP 95944538A EP 95944538 A EP95944538 A EP 95944538A EP 0847533 A1 EP0847533 A1 EP 0847533A1
Authority
EP
European Patent Office
Prior art keywords
stationary
transducer device
plate
movable plate
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP95944538A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0847533A4 (xx
Inventor
Yishay Netzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0847533A4 publication Critical patent/EP0847533A4/xx
Publication of EP0847533A1 publication Critical patent/EP0847533A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/02Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means
    • G01D5/06Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means acting through a wall or enclosure, e.g. by bellows, by magnetic coupling
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields

Definitions

  • the present invention relates to displacement transducers and more
  • potentiometer is the friction inherent to the sliding contact and the
  • transducer is based on a displacement dependent magnetic coupling
  • each of said stationary members comprising one or more than
  • a movable member or plate or electrode
  • the monitored body body or element the displacement of which is to be measured
  • said movable and second stationary members constitute
  • stationary member are preferably means, such as a transimpedance
  • the input alternating tension is preferably applied to the first
  • the first stationary member may be called
  • the movable member may be called “signal plate” or “electrode”.
  • the first stationary member may be called "displacement plate” or "electrode"
  • the first stationary member may be called "displacement plate" or "electrode"
  • member comprises two stationary excitation plates, to which two opposite
  • phase AC voltages are applied.
  • phase AC voltages are applied.
  • said two plates are triangular and arranged so that the base of each of them
  • the stationary plates may be arranged in cylindrical form, e.g., as
  • the movable plate may be formed on a piston which slides within said
  • each stationary plate is
  • the excitation plate further comprises
  • each electrode pair being excited by a complementary
  • kinematic means may be of any kind, and may be e.g., kinematic means of any convenient
  • structure may include an electromagnetic coupling.
  • body according to the invention comprises providing at least two
  • capacitances including at least one movable plate, displacing said movable plate as a function of the displacements of the monitored body, applying
  • three capacitances including one movable plate and
  • Figs. 1-a and 1-b are a diagram of a device according to a first
  • Figs. 2-a and 2-b are a diagram of a device according to a second
  • Figs. 3-a and 3-b are a diagram of a device according to a third
  • Fig. 4-a and 4-b show two constructional implementations
  • Fig 5 illustrates a cylindrical constructional implementation of Figs.
  • Fig. 6 shows a constructional implementation, schematically
  • Fig. 7 shows a constructional implementation, schematically
  • embodiment of the invention including coarse and fine channels
  • Fig. 8 shows an actual mask use for screen printing coarse and fine
  • Fig. 9 illustrates an hermetically sealed device according to an
  • Fig. 10 illustrates a device according to a further embodiment of the
  • Fig. 11 illustrates a device according to a still further embodiment
  • Fig. 1(a) diagrammatically illustrates a transducer device according
  • Electrode 6 is capacitively coupled to said electrodes 1 and 3.
  • members 1 and 3 consists of a fixed capacitance C 3 and two
  • V 0 which is the output of the transimpedance amplifier 5
  • V ex is the excitation voltage applied to
  • FIG. 1 A modified configuration of the transducer device is shown in Fig.
  • Fig. 3(a) illustrates an embodiment wherein the first stationary
  • phase of the output voltage varies and is indicative of the sense
  • sum signal can be used to normalize the differential signal against common
  • the input AC voltage can be applied to the signal plate
  • FIG. 4(a) shows a
  • the plates can actually be flat bodies, or the drawing can be understood to represent the development on a plane of
  • Excitation plates 1 and 2 are identical to Excitation plates 1 and 2
  • Capacitance . 3 is therefore constant and capacitances C,. 6 and C 2 . 6 are
  • FIG. 4(b) illustrates a modification to the configuration of Fig. 4(a)
  • the stationary plates are cylindrical, in particular, they are disposed on a
  • the stationary plates can be made by
  • Figs. 4(a) or 4(b) can be taken as representing the surface of the
  • movable piston can be made from a low friction conductive material such as
  • the piston can be made from a Teflon-coated
  • FIG. 5 includes a rod 10 that serves mechanically to couple
  • actuator /displacement transducer is useful in various pneumatic systems
  • the stationary plates of the transducer of the present invention are identical to the stationary plates of the transducer of the present invention.
  • the stationary plates and piston 9 is sensitive to radial misalignment of the
  • This sensitivity can be decreased by employing, in place of
  • FIG. 7 illustrates another embodiment of the invention, wherein an
  • additional channel comprises two periodic patterns, shown as triangular in
  • the second pattern includes the electrodes 12 and 13 whereas the second pattern includes
  • Electrodes 14 and 15 Each electrodes pair is excited with two opposite
  • the fine channels enable an interpolation within an individual cycle
  • Fig. 8 illustrates an actual mask used for screen printing plates on
  • FIG. 9 illustrates
  • the momtored body is obtained by the interaction between two concentric elements
  • Numeral 8 designates a non-conductive cylinder as in Fig. 5.
  • a first cylindrical magnet 16 is mounted within piston 9 and a second
  • annular magnet 17 is concentric to the first one. The two magnets are
  • FIG. 10 A further embodiment of the invention is illustrated in Fig. 10.
  • This embodiment incorporates a cylinder that has an elongated slot 18
  • FIG. 11 A further embodiment of the invention is illustrated in Fig. 11.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
EP95944538A 1995-01-02 1995-12-28 A method and apparatus for measuring linear displacements Withdrawn EP0847533A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL11221895 1995-01-02
IL11221895A IL112218A0 (en) 1995-01-02 1995-01-02 A method and apparatus for measuring linear displacements
PCT/US1995/016908 WO1996021159A1 (en) 1995-01-02 1995-12-28 A method and apparatus for measuring linear displacements

Publications (2)

Publication Number Publication Date
EP0847533A4 EP0847533A4 (xx) 1998-06-17
EP0847533A1 true EP0847533A1 (en) 1998-06-17

Family

ID=11066961

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95944538A Withdrawn EP0847533A1 (en) 1995-01-02 1995-12-28 A method and apparatus for measuring linear displacements

Country Status (4)

Country Link
EP (1) EP0847533A1 (xx)
AU (1) AU4689296A (xx)
IL (1) IL112218A0 (xx)
WO (1) WO1996021159A1 (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung
GB9815826D0 (en) * 1998-07-22 1998-09-16 British Aerospace Capacitive position transducer
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
EP2131161A1 (en) * 1998-12-08 2009-12-09 Emerson Electric Co. Coriolis mass flow controller
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
US6526839B1 (en) 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
JP3620998B2 (ja) * 1999-06-08 2005-02-16 株式会社ニレコ 導電性物体の端部検出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990001760A1 (en) * 1988-08-15 1990-02-22 Siecor Corporation Humidity resistant meter reading device
FR2682760A1 (fr) * 1991-10-22 1993-04-23 Prototype Mecanique Ind Capteurs de deplacements lineaires ou angulaires sans contact.

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3784897A (en) * 1972-02-17 1974-01-08 Landis Tool Co Capacitor transducer
US3860918A (en) * 1973-06-25 1975-01-14 Becton Dickinson Co Capacitive position transducer
US4303919A (en) * 1978-12-04 1981-12-01 John Dimeff Non-contacting device for sensing multi-component motion
US4434391A (en) * 1982-01-15 1984-02-28 Sperry Corporation Capacitive feedback transducer and closed loop instrument meter mechanism
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
CH670306A5 (xx) * 1986-11-13 1989-05-31 Hans Ulrich Meyer
EP0336022A1 (en) * 1988-04-08 1989-10-11 SCHUT'S IM- & EXPORTHANDEL B.V. Capacitive displacement meter
US5239307A (en) * 1989-10-10 1993-08-24 Micro Encoder Inc. Method and apparatus for sensing of position
US5317351A (en) * 1990-12-21 1994-05-31 Canon Kabushiki Kaisha Position detecting device
US5461319A (en) * 1992-12-28 1995-10-24 Peters; Randall D. Symmetric differential capacitance transducer employing cross coupled conductive plates to form equipotential pairs
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990001760A1 (en) * 1988-08-15 1990-02-22 Siecor Corporation Humidity resistant meter reading device
FR2682760A1 (fr) * 1991-10-22 1993-04-23 Prototype Mecanique Ind Capteurs de deplacements lineaires ou angulaires sans contact.

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9621159A1 *

Also Published As

Publication number Publication date
IL112218A0 (en) 1995-03-30
EP0847533A4 (xx) 1998-06-17
AU4689296A (en) 1996-07-24
WO1996021159A1 (en) 1996-07-11

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