EP0844465B1 - Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image - Google Patents

Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image Download PDF

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Publication number
EP0844465B1
EP0844465B1 EP96402542A EP96402542A EP0844465B1 EP 0844465 B1 EP0844465 B1 EP 0844465B1 EP 96402542 A EP96402542 A EP 96402542A EP 96402542 A EP96402542 A EP 96402542A EP 0844465 B1 EP0844465 B1 EP 0844465B1
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EP
European Patent Office
Prior art keywords
radiation source
wavelength
extended
extended radiation
radiation
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP96402542A
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German (de)
English (en)
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EP0844465A1 (fr
Inventor
Cheol-Jung Kim
Kwang-Suk Kim
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Korea Atomic Energy Research Institute KAERI
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Korea Atomic Energy Research Institute KAERI
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Priority to AT96402542T priority Critical patent/ATE230105T1/de
Priority to DE1996625489 priority patent/DE69625489T2/de
Priority to EP96402542A priority patent/EP0844465B1/fr
Priority to US08/763,752 priority patent/US5875026A/en
Publication of EP0844465A1 publication Critical patent/EP0844465A1/fr
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Publication of EP0844465B1 publication Critical patent/EP0844465B1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light

Definitions

  • This invention relates to a method and system for monitoring an extended radiation source and, more particularly, to a method and system to apply spatial filtering of an extended radiation source with chromatic aberration of imaging optics to the monitoring of the extended radiation source with single-element detector.
  • the extended radiation source has been monitored for tracking, weld monitoring and autofocusing with single-element or array detectors.
  • the array detector can monitor the variation of the extended radiation source easily, it cannot be used with a single-core fiber.
  • the spatial filtering of an extended radiation source with chromatic aberration of imaging optics is applied to the monitoring of the variation of the extended radiation source.
  • the local variation of an extended radiation source can be detected with single-element detectors, not with an array detector, for faster and easier monitoring the extended radiation source, and the remote operation with single core fiber transmission is possible.
  • Fig. 1 of the drawings a schematic diagram of a simplified model for monitoring an extended radiation source is shown.
  • the radiation from the extended radiation source 1 is collected and imaged on an aperture 3 by an imaging optics 2.
  • the extended radiation source 1 can be either a self-radiating extended radiation source or an induced extended radiation source such as the weld pool generated by laser delivered through the same imaging optics 2.
  • the imaging optics 2 consists of one or several lenses having large chromatic aberration.
  • the aperture 3 can be either the detector itself or any physical aperture such as a hole or an input end of a fiber which delivers the laser to the imaging optics for laser materials processing.
  • the only requirement for an aperture 3 is that all the radiation which passes the aperture 3 should be integrated by the detector 4.
  • the spatial filtering is applied over the extended radiation source 1 for signal enhancement before the radiation gets to the detector 4 and is integrated over the extended radiation source 1. Due to the chromatic aberrations of imaging optics 2, the maximum effective radius of the extended radiation source which the detector 4 can see varies by the wavelengths.
  • the " effective radius" means the radius where the transmittance times the intensity of radiation at that radius has some reasonable value for the contribution to the integrated signal.
  • the transmittance of radiation from each element of the extended radiation source 1 to the detector 4 depends on the wavelengths of the radiation and the position of the radiation source element.
  • the intensity profile of the radiation for each wavelength is multiplied by its own transmittance curve during the integration at detector 4.
  • the shape of the intensity profile does not vary much by the wavelengths. In principle, it is quite similar to filtering process, and some wavelengths having wider bandwidth can see the wider extended radiation source.
  • the curves a, b are the transmittance curves for two wavelengths W a and W b
  • the curves c, d are the intensity curves of the exteded radiation source at two moment, respectively. If the intensity curve of the extended radiation source is changed from curve c to curve d, the detector signal at wavelength W b can distinguish only the change in the intensity of the extended radiation source. However, in this case, the detector signal at wavelength W a can distinguish both the change in the size and the change in the intensity of the extended radiation source. Therefore, to remove the effect of the signal level change, the two signals are divided and the ratio of the detector signal at wavelength W a to that at wavelength W b can detect the change in the size of the extended radiation source without any interference from the change in the intensity of the extended radiation source.
  • the factor which causes the variation of the transmittance curve can be detected and controlled.
  • the transmittance curve depends also on the focus shift of the extended radiation source. Therefore, according to this invention, the focus informations can be obtained by processing the spatially-filtered multi-wavelength detector signals, and the focus of the extended radiation source can be controlled on the basis of the focus informations.
  • a remote optical system for monitoring an extended radiation source 9 is shown.
  • the radiation from the extended radiation source 9 is collected and imaged on the input end of a fiber 12 by an imaging optics 10.
  • the imaging optics 10 consists of one or several lenses. If the spherical aberration of the imaging optics 10 becomes large compared to the chromatic aberration, the image blurring due to the spherical aberration reduces the chromatic discrimination by the wavelengths. Therefore, the lenses of the imaging optics 10 have high index of refraction to increase the chromatic aberration and to decrease the spherical aberration.
  • the imaging optics 10 consists of two high index of refraction plano convex lenses 11a and 11b to reduce the image blurring due to the spherical aberration of the imaging optics.
  • a fiber 12 is used as an aperture and also as means for the flexible delivery of radiation.
  • the radiation of the extended radiation source 9 is imaged on the input end of the fiber 12 by the imaging optics 10, and delivered by the fiber 12.
  • a collimating lens 13 is provided on front of the output end of the fiber 12.
  • the radiation delivered through the fiber 12 is collimated by the collimating lens 13.
  • dichromatic filters 14, 15 are provided after the collimating lens 13.
  • wavelengths W 1 , W 2 , and W 3 are chosen in the order of W 1 ⁇ W 2 ⁇ W 3 for the spectral analysis of the extended radiation source.
  • the wavelength W 2 is the wavelength to control the focus of the extended radiation source or the wavelength quite near to that control wavelength with almost same chromatic aberration.
  • the wavelengths W 1 and W 3 are located further from the control wavelength and have much chromatic aberration with respect to the wavelength W 2 .
  • a first dichromatic filter 14 and a second dichromatic filter 15 are used to split the radiation by wavelengths W 1 , W 2 , and W 3 .
  • the number of dichromatic filter depends on the number of the subject wavelengths for the spectral analysis of the extended radiation source.
  • the collimated radiation enters into the first dichromatic filter 14.
  • the first dichromatic filter 14 transmits the radiation at wavelength W 1 but reflects at both wavelength W 2 and W 3 .
  • the reflected radiation enters into the second dichromatic filter 15, which reflects the radiation at wavelength W 2 but transmits the radiation at wavelength W 3 .
  • the splitted radiations pass the band-pass filters 16, 17 and 18.
  • the band-pass filter 16 has only wavelength W 1 passed
  • the band-pass filter 17 has only wavelength W 2 passed
  • the band-pass filter 18 has only wavelength W 3 passed.
  • the splitted and filtered radiations are collected on the corresponding detectors 22, 23, 24 by focusing lenses 19, 20, 21, respectively.
  • the detectors 22, 23, 24 make the detector signals corresponding to wavelengths W 1 , W 2 , and W 3 .
  • the detector signals from the detectors 22, 23, 24 are input to a computer 26 for signal processing by an interface 25.
  • the diameter of the circular extended radiation source 9 is assumed to be near 1 mm and imaged by two SF6 lenses with 25 mm focal length and 8 mm clear aperture on the 1 mm core diameter fiber 12 with one to one magnification.
  • Three wavelengths of 0.532 ⁇ m (wavelength W 1 ), 0.95 ⁇ m (wavelength W 2 ), and 1.5 ⁇ m (wavelength W 3 ) are chosen for spectral analysis.
  • the dependence of the transmittance for each source element on the position of the source element over the extended radiation source and the focus shift of the extended radiation source can be calculated at three wavelengths with an optical analysis program. Owing to the circular symmetry, the radius of the source element is varied during the analysis.
  • the transmittance curves vs. the radius of source element and the focus shift of the extended radiation source are shown in three-dimensional diagram in Figs. 4, 5, 6 and the data are listed in Figs. 7, 8, 9. In Figs. 4, 5, 6, x-direction represents the focus shift of the extended radiation source.
  • the positive direction means the outward defocus region and the negative direction means the inward defocus region.
  • the ratios of the two spectral signals, wavelength W 1 (0.532 ⁇ m) signal over wavelength W 2 (0.95 ⁇ m) signal or wavelength W 3 (1.5 ⁇ m) signal over wavelength W 2 (0.95 ⁇ m) signal can detect the change in the size of the extended radiation source between the two effective radii in outward or in inward defocus region respectively. Furthermore, the decrease of the effective radius with focus shift is noticeable at wavelength W 2 compared to the small decrease in the effective radius with focus shift at wavelength W 1 in the outward defocus region and that at wavelength W 3 in the inward defocus region.
  • the signal at wavelength W 2 does not change since the change of the intensity occurs outside of the effective diameter at wavelength W 2 .
  • the signals at wavelengths W 1 and W 3 in the outward defocus region and in the inward defocus region respectively corresponding to the variation of the intensity can be applied to detect the intensity change outside of the effective diameter at wavelength W 2 if the size of the extended radiation source is fixed.
  • the signal at wavelength W 2 is very sensitive to the radial misalignment of the extended radiation source from the imaging optics axis compared to the signals at wavelength W 1 or W 3 . Therefore, instead of using the signal at wavelength W 2 for tracking of the extended radiation source, the ratio of the signal at wavelength W 1 over the signal at wavelength W 2 or the ratio of the signal at wavelength W 3 over the signal at wavelength W 2 can be used in the tracking of the extended radiation source where the intensity variation of the extended radiation source due to the environmental effects can be compensated by the division of the signals.
  • the ratio of X/Y at the start of each repetitive process can detect the variation at the start of each process.
  • the ratio of (X- X')/(Y-Y') where X' and Y' are measured with short time delay compared to the period of the repetitive process after the measurement of X and Y can detect the variation occurred after the start of each process, which possibly occurred due to the environmental effects.
  • the environmental effects on the extended radiation source can be detected from the ratio' of (X-X')/(Y-Y').
  • the present invention can perform spatial filtering on the extended radiation source by which the local variation of the extended radiation source can be detected from the one-element detector signal.
  • the present invention can detect the change thereof and control the extended radiation source, and in particular, the present invention can detect the local variation of the extended radiation source in realtime and repetitively.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Claims (13)

  1. Procédé pour détecter une variation locale dans un profil d'intensité de rayonnement d'une source de rayonnement étendue à partir de signaux de détecteurs mono-éléments intégrés sur la source de rayonnement étendue, comprenant les étapes suivantes :
    focaliser le rayonnement de la source de rayonnement étendue sur une fenêtre au moyen d'une optique d'imagerie présentant une aberration chromatique ;
    transmettre le rayonnement focalisé de la source de rayonnement étendue à travers la fenêtre ;
    diviser le rayonnement transmis suivant la longueur d'onde ;
    focaliser le rayonnement divisé sur les détecteurs ;
    détecter chaque signal de longueur d'onde intégré sur la source de rayonnement étendue de façon répétitive ; et
    traiter lesdits signaux afin de détecter la variation locale du profil d'intensité de rayonnement sur la source de rayonnement étendue.
  2. Procédé selon la revendication 1, comprenant en outre l'étape consistant à appliquer un filtrage spatial au profil d'intensité chromatique de la source de rayonnement étendue au moyen d'un filtre spatial pour traiter les signaux afin de détecter la variation locale de la source de rayonnement étendue.
  3. Procédé selon la revendication 2, comprenant en outre l'étape consistant à modifier la largeur de bande du filtre spatial pour chaque profil d'intensité chromatique de la source de rayonnement étendue avec l'aberration chromatique de l'optique d'imagerie de façon à ce que la taille effective de la source de rayonnement étendue pour sa contribution au signal spectral intégré varie suivant la longueur d'onde.
  4. Procédé selon la revendication 3, dans lequel le filtre spatial pour chaque profil d'intensité chromatique est défini comme la facteur de transmission de la longueur d'onde issue de chaque élément source sur la source de rayonnement étendue à travers l'optique d'imagerie et la fenêtre.
  5. Procédé selon la revendication 1, comprenant en outre l'étape consistant à choisir les trois longueurs d'onde pour l'analyse spectrale de la source de rayonnement étendue, la deuxième longueur d'onde étant la longueur d'onde pour le contrôle de la focalisation de la source de rayonnement étendue ou la longueur d'onde très proche de cette longueur d'onde de contrôle présentant pratiquement la même aberration chromatique, la première longueur d'onde étant plus courte que la deuxième longueur d'onde, et la troisième longueur d'onde étant plus longue que la deuxième longueur d'onde, et la première et la troisième longueurs d'onde sont plus éloignées de la longueur d'onde de contrôle et présentent plus d'aberration chromatique par rapport à la deuxième longueur d'onde.
  6. Procédé selon la revendication 1, dans lequel la variation de la taille de la source de rayonnement étendue entre les diamètres effectifs des longueurs d'onde mesurées peut être contrôlée à partir des signaux spectraux filtrés spatialement.
  7. Procédé selon la revendication 1, dans lequel le traitement de signal consistant à calculer le rapport des signaux spectraux filtrés spatialement est utilisé pour contrôler la défocalisation ou le centrage de la source de rayonnement étendue.
  8. Procédé selon la revendication 1, dans lequel le traitement de signal consistant à calculer le rapport des différences des signaux spectraux filtrés spatialement, où la différence de chaque signal spectral filtré spatialement est calculée à partir des deux mesures dudit signal spectral mesuré avec un certain retard, est utilisé pour contrôler le changement de la source de rayonnement étendue comprenant le changement induit par des effets environnementaux.
  9. Procédé selon les revendications 7 et 8, dans lequel le traitement des signaux spectraux est calculé de façon répétitive pour le contrôle de la source de rayonnement étendue induit par le processus périodique.
  10. Système pour détecter la variation locale dans un profil d'intensité de rayonnement d'une source de rayonnement étendue (9) comprenant :
    une optique d'imagerie (10) pour capter le rayonnement d'une source de rayonnement étendue (9), l'optique d'imagerie (10) présentant une aberration chromatique importante
    une fenêtre pour limiter la transmission de l'image de la source de rayonnement étendue ;
    des moyens pour diviser et séparer le spectre du rayonnement suivant les longueurs d'onde (14-18) ;
    une interface (25) pour numériser les signaux spectraux à plusieurs reprises pour chaque processus répétitif avec des retards variables pour détecter la variation dans chaque processus répétitif et pour contrôler le changement dans le temps dans chaque processus ;
       et
       un ordinateur personnel (26) pour traiter les signaux spectraux, de façon à détecter la variation locale du profil d'intensité de rayonnement sur la source de rayonnement étendue.
  11. Système selon la revendication 10, dans lequel les moyens pour diviser et séparer le spectre du rayonnement comprennent :
    une lentille à collimation (13) pour collimater le rayonnement divergent hors de la fenêtre ;
    des filtres dichromatiques (14, 15) pour diviser le rayonnement suivant les longueurs d'onde ;
    des filtres passe-bande (16-18) pour réduire la largeur de bande de chaque longueur d'onde ; et
    des lentilles de focalisation (19-21) pour focaliser chaque rayonnement chromatique sur le détecteur correspondant (22-24).
  12. Système selon la revendication 10, dans lequel la fenêtre est constituée d'une extrémité d'entrée d'une fibre (12) pour un fonctionnement à distance.
  13. Système selon la revendication 10, dans lequel l'optique d'imagerie comprend une ou plusieurs lentilles présentant un indice de réfraction élevé.
EP96402542A 1996-11-26 1996-11-26 Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image Expired - Lifetime EP0844465B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT96402542T ATE230105T1 (de) 1996-11-26 1996-11-26 Verfahren und vorrichtung zum überwachen einer ausgedehnten strahlungsquelle mit einzelelement- detetektor-messung mittels räumlicher filterung und unter ausnutzung der chromatischen aberration der abbildungsoptik
DE1996625489 DE69625489T2 (de) 1996-11-26 1996-11-26 Verfahren und Vorrichtung zum Überwachen einer ausgedehnten Strahlungsquelle mit Einzelelement-Detetektor-Messung mittels räumlicher Filterung und unter Ausnutzung der chromatischen Aberration der Abbildungsoptik
EP96402542A EP0844465B1 (fr) 1996-11-26 1996-11-26 Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image
US08/763,752 US5875026A (en) 1996-11-26 1996-12-11 Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP96402542A EP0844465B1 (fr) 1996-11-26 1996-11-26 Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image
US08/763,752 US5875026A (en) 1996-11-26 1996-12-11 Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source

Publications (2)

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EP0844465A1 EP0844465A1 (fr) 1998-05-27
EP0844465B1 true EP0844465B1 (fr) 2002-12-18

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EP96402542A Expired - Lifetime EP0844465B1 (fr) 1996-11-26 1996-11-26 Méthode et système pour observer une source de radiation étendue à l'aide d'un détecteur mono-élément, utilisant le filtrage spatial et l'aberration chromatique de l'optique de formation d'image

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Publication number Priority date Publication date Assignee Title
US6707550B1 (en) 2000-04-18 2004-03-16 Pts Corporation Wavelength monitor for WDM systems

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Publication number Priority date Publication date Assignee Title
US3582666A (en) * 1968-10-18 1971-06-01 Erico Prod Inc Light beam alignment and photoelectric receiver apparatus
US5206502A (en) * 1976-10-21 1993-04-27 The United States Of America As Represented By The Secretary Of The Navy Laser radiation detection system
US4742222A (en) * 1984-07-23 1988-05-03 Tavkozlesi Kutato Intezet Selective optical detector apparatus utilizing longitudinal chromatic aberration
US4909633A (en) * 1986-05-12 1990-03-20 Minolta Camera Kabushiki Kaisha Multi-channel spectral light measuring device
JPH01246516A (ja) 1988-03-29 1989-10-02 Sony Corp 焦点位置検出装置
JP2798218B2 (ja) 1990-01-08 1998-09-17 三菱重工業株式会社 レーザ溶接モニタリング装置
AU683869B2 (en) * 1992-12-28 1997-11-27 Michele Hinnrichs Image multispectral sensing
US5278402A (en) * 1993-06-09 1994-01-11 Litton Systems Real-scene dispersion sensor detecting two wavelengths and determining time delay
US5444236A (en) 1994-03-09 1995-08-22 Loral Infrared & Imaging Systems, Inc. Multicolor radiation detector method and apparatus
US5592285A (en) * 1995-12-12 1997-01-07 Pund; Marvin L. Optical source position and direction sensor

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EP0844465A1 (fr) 1998-05-27
US5875026A (en) 1999-02-23

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