EP0842527A1 - Dispositif a decharge gazeuse dote d'electrodes et destine a la technique du vide - Google Patents

Dispositif a decharge gazeuse dote d'electrodes et destine a la technique du vide

Info

Publication number
EP0842527A1
EP0842527A1 EP96927550A EP96927550A EP0842527A1 EP 0842527 A1 EP0842527 A1 EP 0842527A1 EP 96927550 A EP96927550 A EP 96927550A EP 96927550 A EP96927550 A EP 96927550A EP 0842527 A1 EP0842527 A1 EP 0842527A1
Authority
EP
European Patent Office
Prior art keywords
magnet
housing
electrodes
gas discharge
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96927550A
Other languages
German (de)
English (en)
Inventor
Ludolf Gerdau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0842527A1 publication Critical patent/EP0842527A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Definitions

  • the invention relates to a device with the features of the preamble of claim 1.
  • Devices that can be used in vacuum technology and require gas discharge for their operation are, for example, ionization (Penning) vacuum meters, gas discharge ion sources, ion atomizing pumps or the like. They are equipped with one or more magnets, the fields of which lengthen the path of the ionizing electrons.
  • a cold cathode ionization or Penning vacuum meter of this type is known from DE-A-36 42 670.
  • Your transducer comprises two non-heated electrodes (cathode and anode), between which a discharge is ignited and maintained by means of a direct voltage (order of magnitude 2 KV), which burns stationary even at very low pressures. This is achieved by making the path of the electrons so long with the help of a magnetic field that their collision rate with the gas molecules still present becomes sufficiently large, to form the number of carriers required to maintain the discharge.
  • the magnetic field (order of magnitude 0.1 T) is arranged such that the magnetic lines of force are superimposed on the electric lines of force. This forces the electrons onto a helical path on their way to the anode.
  • the positive and negative charge carriers generated here by impact migrate to the corresponding electrodes and form the pressure-dependent discharge current.
  • the electrodes are located within a vacuum-tight housing. Two permanent magnets are arranged outside the housing. When ready for use, the entire system is located within a protective cap.
  • Gas discharge ion sources and ion atomizing pumps of a known type have a similar structure. They are operated with correspondingly dimensioned electrical voltages and magnetic fields.
  • the magnets used to generate the magnetic fields are located outside the respective device housing.
  • the electrodes are located inside the housing, the housing itself being able to form one of the electrodes - frequently the cathode.
  • the housing is expediently at earth potential.
  • the anode inside the housing is then to be supplied with a positive high voltage.
  • the object of the present invention is to simplify the construction of a device of the type concerned here.
  • this object is achieved in that the magnet is inside the housing and at the same time forms one of the electrodes.
  • the construction of a device of the type concerned here is particularly simple if the housing forms the second electrode. Separate, separately manufactured and assembled components for electrodes can be omitted in this embodiment.
  • FIG. 1 shows a sensor for a cold cathode ionization vacuum meter
  • FIG. 2 is a gas discharge ion source
  • FIG. 3 shows a diode ion atomizing pump
  • the housing equipped with a flange 2 is designated by 3. Inside the housing 3 there is an annular magnet 4, the end faces 5, 6 of which form the poles. Some magnetic lines 7 are shown.
  • the magnet 4 is connected to a high-voltage source, not shown, via a lead 8 which is isolated from the housing 3.
  • the housing is grounded.
  • the polarity is expediently chosen so that the magnet 4 forms the anode and the housing 3 the cathode. Electrical field lines, not shown, extend between the magnets 4 and the housing 3.
  • the polarity can also Conversely chosen, that is, the magnet 4 forms the cathode, which is achieved by appropriate voltage selection.
  • the magnet 4 simultaneously forms the anode and the housing 3 simultaneously the cathode, separate electrode components can be omitted. Its structure is therefore particularly suitable for transmitter designs in which the electronic components have to be accommodated in the immediate vicinity of the sensor.
  • FIG. 2 shows an exemplary embodiment for a gas discharge ion source.
  • Its housing 3 is essentially cylindrical.
  • the axis of the housing is designated 9. It is also the axis of the ring-shaped magnet 4.
  • the gas to be ionized is metered in via a connecting piece 10.
  • an ion cloud is located in the center of the ring-shaped magnet 4.
  • ions are sucked out of the ion cloud in a manner known per se and formed into an ion beam, which is then e.g. a quadrupole mass spectrometer can be supplied for analysis of the gas.
  • FIG. 3 shows a diode ion atomizing pump, the anode of which is formed by the ring-shaped magnet 4.
  • Plates 12 and 13 made of suitable cathode material (e.g. titanium) applied to the inside of the housing serve as the cathode.
  • the electrons generate ions which are accelerated onto the plates 12 and 13.
  • the cathode material atomizes and forms the getter layers implanting the gas molecules in a manner known per se.
  • the invention can also be used in a triode ion atomizing pump.
  • the magnet 4 does not have to have a ring shape. Other designs of the magnet - and also of the housing - are possible. It is just make sure that the polarization of the magnet 4 and the polarity of the electric field are selected so that magnetic and electric field lines intersect. The extension of the path of the electrons necessary for the operation of the gas discharge is then always guaranteed.
  • a plurality of ring-shaped magnets can be arranged side by side in such a way that their axes are approximately perpendicular to the cathode plates. They thus form the multi-cell anode that is particularly useful in ion atomizing pumps.
  • the housing expediently consists of a ferromagnetic material, e.g. Stainless steel, so that the course of the magnetic field lines can be influenced with the help of the housing.
  • a ferromagnetic material e.g. Stainless steel
  • magnets e.g. Iron-neodymium-boron magnets or cobalt-samarium magnets
  • the magnet 4 is therefore expediently coated, e.g. to avoid Ha embrittlement.
  • a coating is shown and designated 14.
  • the coating can consist of a hard material layer, which is applied by plasma evaporation or plasma polymerization.
  • magnets 4 e.g. made of stainless steel, completely encapsulated. It is sufficient if these sheet metal sections have a thickness of approximately 0.05 mm. Impairment of the magnetic fields by the sheet metal capsule is negligible with this thickness of the sheet metal sections.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un dispositif (1) dont l'utilisation est destinée à la technique du vide. Ce dispositif comporte un boîtier (3) renfermant des électrodes entre lesquelles une décharge gazeuse est maintenue pendant le fonctionnement du dispositif. Ce dispositif comporte également au moins un aimant (4) dont le champ magnétique provoque un rallongement du chemin des électrodes ionisantes. Afin de simplifier la construction d'un tel dispositif, il est prévu selon l'invention que l'aimant (4) soit placé à l'intérieur du boîtier (3) et qu'il constitue une des électrodes (figure 1).
EP96927550A 1995-08-02 1996-07-19 Dispositif a decharge gazeuse dote d'electrodes et destine a la technique du vide Withdrawn EP0842527A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19528314 1995-08-02
DE1995128314 DE19528314A1 (de) 1995-08-02 1995-08-02 In der Vakuumtechnik einsetzbares Gerät mit Elektroden für eine Gasentladung
PCT/EP1996/003185 WO1997005645A1 (fr) 1995-08-02 1996-07-19 Dispositif a decharge gazeuse dote d'electrodes et destine a la technique du vide

Publications (1)

Publication Number Publication Date
EP0842527A1 true EP0842527A1 (fr) 1998-05-20

Family

ID=7768466

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96927550A Withdrawn EP0842527A1 (fr) 1995-08-02 1996-07-19 Dispositif a decharge gazeuse dote d'electrodes et destine a la technique du vide

Country Status (4)

Country Link
EP (1) EP0842527A1 (fr)
JP (1) JPH11510644A (fr)
DE (1) DE19528314A1 (fr)
WO (1) WO1997005645A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19717263A1 (de) * 1997-04-24 1998-10-29 Leybold Vakuum Gmbh Penning-Vakuummeter
KR100860274B1 (ko) 2007-06-29 2008-09-25 포항공과대학교 산학협력단 저온 가열탈기체 처리 가능한 소형, 경량 초고진공용스퍼터 이온펌프 및 그제조방법
KR102473925B1 (ko) * 2017-10-24 2022-12-02 가부시키가이샤 마루나카 가스 분석기

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2882429A (en) * 1957-05-09 1959-04-14 Cons Electrodynamics Corp Gas measuring apparatus
NL261279A (fr) * 1960-03-08
DE1539142A1 (de) * 1964-07-20 1969-04-30 Varian Associates Vorrichtung fuer magnetisch eingeschnuerte Glimmentladung
NL6516537A (fr) * 1965-12-18 1966-02-25
US3756682A (en) * 1967-02-13 1973-09-04 Schlumberger Technology Corp Method for outgassing permanent magnets
US3505554A (en) * 1968-01-05 1970-04-07 Sergei Arkadievich Vekshinsky Ionization pressure gauge
HU179482B (en) * 1979-02-19 1982-10-28 Mikroelektronikai Valalat Penning pulverizel source
DE3045468C2 (de) * 1980-12-02 1985-05-09 Sergej Ivanovič Tomsk Beljuk Gasentladungs-Elektronen-Ionenquelle
JPS60170141A (ja) * 1984-02-13 1985-09-03 Toshiba Corp イオン源装置
DE3642670A1 (de) * 1986-12-13 1988-06-23 Leybold Ag Penning-ionisationsvakuummeter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9705645A1 *

Also Published As

Publication number Publication date
DE19528314A1 (de) 1997-02-06
WO1997005645A1 (fr) 1997-02-13
JPH11510644A (ja) 1999-09-14

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