EP0833705A4 - On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing - Google Patents

On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing

Info

Publication number
EP0833705A4
EP0833705A4 EP96919223A EP96919223A EP0833705A4 EP 0833705 A4 EP0833705 A4 EP 0833705A4 EP 96919223 A EP96919223 A EP 96919223A EP 96919223 A EP96919223 A EP 96919223A EP 0833705 A4 EP0833705 A4 EP 0833705A4
Authority
EP
European Patent Office
Prior art keywords
ultra
hydrofluoric acid
semiconductor processing
site manufacture
purity hydrofluoric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96919223A
Other languages
German (de)
French (fr)
Other versions
EP0833705A1 (en
Inventor
Joe G Hoffman
R Scot Clark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide America Corp
Original Assignee
Startec Ventures Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1995/007649 external-priority patent/WO1996039358A1/en
Application filed by Startec Ventures Inc filed Critical Startec Ventures Inc
Priority claimed from PCT/US1996/009554 external-priority patent/WO1996041687A1/en
Publication of EP0833705A1 publication Critical patent/EP0833705A1/en
Publication of EP0833705A4 publication Critical patent/EP0833705A4/en
Withdrawn legal-status Critical Current

Links

EP96919223A 1995-06-05 1996-06-05 On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing Withdrawn EP0833705A4 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
WOPCT/US95/07649 1995-06-05
PCT/US1995/007649 WO1996039358A1 (en) 1995-06-05 1995-06-05 Point-of-use ammonia purification for electronic component manufacture
US3871195P 1995-07-07 1995-07-07
US49941495A 1995-07-07 1995-07-07
US499414 1995-07-07
PCT/US1996/009554 WO1996041687A1 (en) 1995-06-05 1996-06-05 On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing

Publications (2)

Publication Number Publication Date
EP0833705A1 EP0833705A1 (en) 1998-04-08
EP0833705A4 true EP0833705A4 (en) 1999-12-15

Family

ID=26715472

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96919223A Withdrawn EP0833705A4 (en) 1995-06-05 1996-06-05 On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing

Country Status (1)

Country Link
EP (1) EP0833705A4 (en)

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *
See also references of WO9641687A1 *

Also Published As

Publication number Publication date
EP0833705A1 (en) 1998-04-08

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Legal Events

Date Code Title Description
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