EP0833705A4 - On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing - Google Patents
On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processingInfo
- Publication number
- EP0833705A4 EP0833705A4 EP96919223A EP96919223A EP0833705A4 EP 0833705 A4 EP0833705 A4 EP 0833705A4 EP 96919223 A EP96919223 A EP 96919223A EP 96919223 A EP96919223 A EP 96919223A EP 0833705 A4 EP0833705 A4 EP 0833705A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- ultra
- hydrofluoric acid
- semiconductor processing
- site manufacture
- purity hydrofluoric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
WOPCT/US95/07649 | 1995-06-05 | ||
PCT/US1995/007649 WO1996039358A1 (en) | 1995-06-05 | 1995-06-05 | Point-of-use ammonia purification for electronic component manufacture |
US3871195P | 1995-07-07 | 1995-07-07 | |
US49941495A | 1995-07-07 | 1995-07-07 | |
US499414 | 1995-07-07 | ||
PCT/US1996/009554 WO1996041687A1 (en) | 1995-06-05 | 1996-06-05 | On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0833705A1 EP0833705A1 (en) | 1998-04-08 |
EP0833705A4 true EP0833705A4 (en) | 1999-12-15 |
Family
ID=26715472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96919223A Withdrawn EP0833705A4 (en) | 1995-06-05 | 1996-06-05 | On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing |
Country Status (1)
Country | Link |
---|---|
EP (1) | EP0833705A4 (en) |
-
1996
- 1996-06-05 EP EP96919223A patent/EP0833705A4/en not_active Withdrawn
Non-Patent Citations (2)
Title |
---|
No further relevant documents disclosed * |
See also references of WO9641687A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP0833705A1 (en) | 1998-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19980102 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IT NL |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: AIR LIQUIDE AMERICA CORPORATION |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 19991104 |
|
AK | Designated contracting states |
Kind code of ref document: A4 Designated state(s): DE FR GB IT NL |
|
RIC1 | Information provided on ipc code assigned before grant |
Free format text: 6B 08B 7/04 A, 6B 01D 1/00 B, 6B 01D 3/14 B, 6B 01D 3/02 B, 6B 01D 3/00 B, 6C 01B 7/19 B, 6C 01B 7/07 B, 6F 26B 7/00 B, 6C 01C 1/02 B |
|
17Q | First examination report despatched |
Effective date: 20000724 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Withdrawal date: 20020703 |