EP0707175B1 - Dispositif à boûler avec une tuyère - Google Patents

Dispositif à boûler avec une tuyère Download PDF

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Publication number
EP0707175B1
EP0707175B1 EP95202720A EP95202720A EP0707175B1 EP 0707175 B1 EP0707175 B1 EP 0707175B1 EP 95202720 A EP95202720 A EP 95202720A EP 95202720 A EP95202720 A EP 95202720A EP 0707175 B1 EP0707175 B1 EP 0707175B1
Authority
EP
European Patent Office
Prior art keywords
nozzle
tube
burning device
combustion chamber
tubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95202720A
Other languages
German (de)
English (en)
Other versions
EP0707175A1 (fr
Inventor
Andreas c/o Philips Patentverwaltung GmbH Chow
Herbert c/o Philips Maass-Emden
Uwe c/o Philips Patentverwaltung GmbH Neumann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Patentverwaltung GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH, Koninklijke Philips Electronics NV filed Critical Philips Patentverwaltung GmbH
Publication of EP0707175A1 publication Critical patent/EP0707175A1/fr
Application granted granted Critical
Publication of EP0707175B1 publication Critical patent/EP0707175B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/14—Special features of gas burners
    • F23D2900/14642—Special features of gas burners with jet mixers with more than one gas injection nozzles or orifices for a single mixing tube

Definitions

  • the invention relates to a combustion device with a nozzle according to the Preamble of claim 1, for example a quartz burner of a diffusion furnace with an injector nozzle.
  • Such a nozzle is known from US Pat. No. 4,680,008.
  • an injector nozzle which consists of a quartz tube with an expanding end piece. Hydrogen (H 2 ) is introduced into the combustion chamber through this injector nozzle.
  • Another quartz tube which partially surrounds the injector nozzle, simultaneously introduces oxygen (O 2 ) into the combustion chamber.
  • oxygen O 2
  • water vapor H 2 O
  • semiconductor manufacturing such an arrangement is used to form oxide layers in various semiconductor processes.
  • DE-A1-42 31 866 describes a burner and a method for burning Low calorific gas known. That in a mixing chamber with combustion air mixed gas of low calorific value is there through several tubular Throttle installation nozzles injected into the combustion chamber.
  • the present invention has for its object a combustion device with a nozzle with improved flame shape.
  • the flame While in the known arrangement the flame is one compared to the diameter very large length and very large close to the outlet opening of the nozzle Has heat, the flame is essential in the arrangement according to the invention shorter with a larger diameter.
  • a slight leads Misalignment of the injector nozzle for example, in that the outlet area of the Nozzle continues to burn over time, causing the flame hits the inner wall of the combustion chamber and leads to recrystallization there.
  • Both the recrystallizations on the nozzle opening as well as on the inner wall of the Combustion chamber significantly increase the number of particles in the combustion chamber, which is particularly important in semiconductor manufacturing must be avoided.
  • the tubes and tube are made of quartz. This ensures that as little foreign particles as possible in the Combustion temperatures prevailing from the nozzle itself get into the combustion chamber and that the quality of the Products, especially in semiconductor manufacturing, if possible is high.
  • Tubes in a further embodiment of the invention fused together and melted into the tube.
  • a further simplification of the production results in a further configuration, in which the tubes and the tube is in the form of straight circular cylinders.
  • Fig. 1 denotes a quartz combustion chamber, the at one end to an outlet opening 2 for the in the combustion chamber 1 tapered water vapor generated.
  • the injector 3 At the other end of the combustion chamber 1 is the injector 3 with the Injector nozzle 4 attached.
  • Hydrogen through the injector nozzle 4 into the combustion chamber 1 conducts and mixes with the oxygen there through a further feed line 6 through the injector 3 and the annular gap 13 around the nozzle 4 in the combustion chamber 1 flows.
  • a heating element, not shown, outside the combustion chamber 1 heats the combustion chamber 1, thereby Hydrogen-oxygen mixture with formation of water vapor burns in the combustion chamber 1.
  • the flame 7 has about the shape shown.
  • Fig. 2 shows a sectional drawing through part of the Injector 3 with the nozzle 4.
  • the nozzle 4 consists of a Tube 8 in which a bundle 9 consisting of a number of tubes with a much smaller diameter than that outer tube 8, fixed - melted, for example - is.
  • the tubes are parallel to each other arranged, fused together to form the bundle 9 and have, like the tube 8, the shape of straight circular cylinders on.
  • On the pipe 8 is a conical pipe section 10 attached - for example welded - for connection the nozzle 4 with the hydrogen supply line 5.
  • the injector 3 consists of two tubes 11 and 12 attached to each other, between the tube 11 and the tube 8 of the nozzle 4 remains narrow annular gap 13 through which the Oxygen flows into the combustion chamber 1.
  • the Flame 7 has a ratio of length to diameter at the thickest point of about 4: 1, while at the known arrangement the flame has a ratio of about 60: 1. Since also in the inventive Arrange the flame 7 not directly at the outlet opening the nozzle 4 burns, is the number in the combustion chamber 1 passing particles lower, which are characterized by Remove recrystallization from nozzle 4. This prevents further misalignment of the nozzle 4 after a short time Operating time, whereby the flame 7 as in the known Then hit the inner wall of the combustion chamber 1 and can generate particles there by recrystallization. Since the erosion of the nozzle 4 in front of it much more slowly goes, the nozzle 4 can be about a factor of three longer be used. Ultimately, the quality of the Products improved due to the lower number of particles.
  • the injector nozzle 4 is manufactured in such a way that the Tubes are pushed lengthwise into the tube 8, so that the tube 8 is filled as well as possible.
  • the tubes are then in a heating process in the tube 8th welded in, fused together, and at the same time the bundle 9 and the tube 8 are pulled until the desired one Outside diameter of the tube 8 is reached.
  • the example shown was about 50 tubes in diameter 1.5 mm inserted into a tube 8 with a diameter of 20 mm, and then the tube 8 was made to an outside diameter drawn by 16.5 mm.
  • 4 was from the nozzle Part of the length about 8 mm separated and with the conical pipe section 10 welded.
  • Such a nozzle is used in diffusion furnaces semiconductor manufacturing, but also other possible uses like a combustion device for hazardous gases are due to the very high achievable with this nozzle Combustion temperatures possible.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Gas Burners (AREA)
  • Pre-Mixing And Non-Premixing Gas Burner (AREA)

Claims (6)

  1. Dispositif de combustion avec une tuyère (4) à partir de capillaires (9) disposés dans un tuyau (8),
       caractérisé en ce qu'une fente est prévue entre le tuyau (8) et un tuyau (11) supplémentaire entourant la tuyère (4).
  2. Dispositif selon la revendication 1,
       caractérisé en ce que les capillaires (9) et le tuyau (8) sont en quartz.
  3. Dispositif selon l'une des revendications 1 ou 2,
       caractérisé en ce que les capillaires (9) sont soudés entre eux et fondus sans le tuyau (8).
  4. Dispositif selon l'une des revendications précédentes,
       caractérisé en ce que les axes longitudinaux des capillaires (9)sont disposés parallèlement l'un à l'autre et parallèlement à l'axe longitudinal du tuyau (8).
  5. Dispositif selon l'une des revendications précédentes,
       caractérisé en ce que les capillaires (9) et le tuyau (8) présentent la forme de cylindres circulaires droits.
  6. Procédé de fabrication d'une tuyère (4) pour un dispositif d'incinération selon l'une des revendications précédentes,
       caractérisé en ce que le tuyau (8) est rempli de capillaires (9) et que les capillaires (9) et le tuyau (8) sont chauffés, étirés au diamètre souhaité du tuyau (8) et soudés l'un à l'autre.
EP95202720A 1994-10-15 1995-10-10 Dispositif à boûler avec une tuyère Expired - Lifetime EP0707175B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4436908 1994-10-15
DE4436908A DE4436908A1 (de) 1994-10-15 1994-10-15 Düse für eine Verbrennungsvorrichtung

Publications (2)

Publication Number Publication Date
EP0707175A1 EP0707175A1 (fr) 1996-04-17
EP0707175B1 true EP0707175B1 (fr) 1999-01-20

Family

ID=6530867

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95202720A Expired - Lifetime EP0707175B1 (fr) 1994-10-15 1995-10-10 Dispositif à boûler avec une tuyère

Country Status (5)

Country Link
US (1) US5692891A (fr)
EP (1) EP0707175B1 (fr)
JP (1) JPH08178225A (fr)
KR (1) KR960014754A (fr)
DE (2) DE4436908A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3853781B2 (ja) * 2003-11-25 2006-12-06 株式会社国際電気セミコンダクターサービス 燃焼ヒータ及び排ガス燃焼装置
CN100520176C (zh) * 2006-03-31 2009-07-29 裕富宝厨具设备（深圳）有限公司 一种预混燃烧器
US8920159B2 (en) * 2011-11-23 2014-12-30 Honeywell International Inc. Burner with oxygen and fuel mixing apparatus
CN106287718A (zh) * 2016-08-25 2017-01-04 郭玉 一种扩散式燃气喷枪
JP6551375B2 (ja) * 2016-12-07 2019-07-31 トヨタ自動車株式会社 水素ガスバーナ構造およびこれを備えた水素ガスバーナ装置
JP6940338B2 (ja) * 2017-09-04 2021-09-29 トヨタ自動車株式会社 水素ガスバーナー装置用のノズル構造体
JP6863189B2 (ja) * 2017-09-05 2021-04-21 トヨタ自動車株式会社 水素ガスバーナー装置用のノズル構造体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291189A (en) * 1965-03-09 1966-12-13 Rca Corp Gas burner
US4202660A (en) * 1970-04-22 1980-05-13 Owens-Illinois, Inc. Glass-ceramic article and method of making same
DD283452A5 (de) * 1984-12-07 1990-10-10 Veb Jenaer Glaswerk,Dd Verfahren zur herstellung von brennerduesenelementen aus kieselglas
US4680008A (en) * 1986-12-08 1987-07-14 Northern Telecom Limited High temperature furnace for integrated circuit manufacture
US5022853A (en) * 1990-04-24 1991-06-11 Micron Technology, Inc. Semiconductor processing furnace tube and alignment jig
JP2524025B2 (ja) * 1991-09-24 1996-08-14 株式会社神戸製鋼所 低カロリ―ガスの燃焼バ―ナ構造およびその燃焼方法

Also Published As

Publication number Publication date
EP0707175A1 (fr) 1996-04-17
US5692891A (en) 1997-12-02
DE4436908A1 (de) 1996-04-18
KR960014754A (ko) 1996-05-22
DE59504891D1 (de) 1999-03-04
JPH08178225A (ja) 1996-07-12

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