EP0630524A1 - Weather-resistant thin layer solar module - Google Patents

Weather-resistant thin layer solar module

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Publication number
EP0630524A1
EP0630524A1 EP93905173A EP93905173A EP0630524A1 EP 0630524 A1 EP0630524 A1 EP 0630524A1 EP 93905173 A EP93905173 A EP 93905173A EP 93905173 A EP93905173 A EP 93905173A EP 0630524 A1 EP0630524 A1 EP 0630524A1
Authority
EP
European Patent Office
Prior art keywords
solar module
module according
zinc oxide
aluminum
electrode structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93905173A
Other languages
German (de)
French (fr)
Inventor
Robert Dr. Van Den Berg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SolarWorld Industries Deutschland GmbH
Original Assignee
Siemens Solar GmbH
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Filing date
Publication date
Application filed by Siemens Solar GmbH filed Critical Siemens Solar GmbH
Publication of EP0630524A1 publication Critical patent/EP0630524A1/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • H01L31/022483—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of zinc oxide [ZnO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/048—Encapsulation of modules
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • Thin-film solar modules made of amorphous silicon are produced directly on large substrates made of glass or metal.
  • a full-surface contact layer (front contact) made of transparent conductive oxides (TCO) is first deposited on the substrate, and a photoactive layer is generated above it, which is then covered with a further mostly transparent contact layer as the back contact.
  • TCO transparent conductive oxides
  • the thin-film solar module is divided into strip-shaped individual cells connected in series with one another. By suitable structuring of each individual layer immediately after its deposition, layer generation and electrical interconnection form an integrated process.
  • the current-carrying electrodes front and back contact
  • both their optical and their electrical properties determine the efficiency of each individual cell and the overall module.
  • the optical properties of the front contact layer influence the amount of light coupled into the photoactive layer and thus also the photocurrent.
  • the electrical properties are responsible for deriving the generated photocurrent.
  • the specific resistance of the contact material leads to ohmic losses in the solar module.
  • zinc oxide (ZnO) as material for the front contacts on transparent substrates allows the morphology of the contact layers to be set within certain limits, which makes it possible to optimize the coupling of light into the active semiconductor layer and to improve the short-circuit current of the individual cells.
  • zinc oxide layers z for example, are doped with boron. If the same material is also used for the back contact, semitransparent solar modules can be produced and used as a top cell in a tandem module, as roof glazing for automobiles or as building glazing (facade module or window module).
  • ZnO: B boron-doped zinc oxide
  • the contact layers are protected from moisture by hermetic packaging.
  • the back contact for example with a PVB film
  • thin-film solar cells produced for test purposes with rear-side contact structures made of aluminum-doped zinc oxide without a lacquer layer as a rear-side covering have excellent moisture-heat resistance and survive the climate test described in more detail almost unchanged. Even after this long-term exposure to moisture and heat, the solar cells show only an insignificant increase in the sheet resistance and therefore no loss in the maximum achievable output.
  • the invention therefore represents a considerable simplification in construction and leads to great savings in terms of the material and production costs.
  • Zinc oxide as an electrode material for front and rear contacts' has the advantage that its morphology and thus, above all, the optical properties can be adjusted well and optimized for the solar cell or the module. A high transmission and, with a suitable morphology, a high light coupling and an associated high short-circuit current in the module are achieved.
  • the aluminum-doped zinc oxide shows a sheet resistance which is reduced by a factor of 3.
  • the contacts can be produced, for example, by sputtering, which results in an extremely homogeneous distribution of the dopant in the ZnO: Al material. So that are homogeneous
  • Zinc / aluminum mixed targets in a reactive oxygen-containing atmosphere or zinc oxide / aluminum mixed targets in an inert atmosphere can be used as targets.
  • the second alternative is preferred, since it ensures better process control and thus better reproducibility in the production of the contacts.
  • the Substrattempera ⁇ structure is preferably set to a value of about 300 "C, beispiels ⁇ , 350 * C. This leads to the formation of a uni- formly hexagonal crystal structure in the zinc oxide, showing the best stability against environmental influences and also to a plasma treatment unchanged in the properties remains.
  • the thin-film solar module according to the invention is suitable for all photoactive semiconductors which can be deposited over a large area, in particular for amorphous silicon, silicon-germanium alloys, chalcopyrites (I-III-VI 2 semiconductors) or also for multilayer modules such as tandem or stacked cells with the same or single cells made of different materials.
  • the modules can be produced semi-transparently, a clear epoxy lacquer, for example, can be used as the back cover.
  • a clear epoxy lacquer for example
  • the paint layer of the back cover is designed as a 'reflecting layer, to which also a suitable ge selective epoxy-type paint can be used.
  • titanium oxide Ti0 2 can be contained as a color pigment in a resultant white epoxy lacquer.
  • the varnish should have good reflector properties for the red portion of the incident radiation and be matt and not shiny for a diffuse reflection.
  • the figure shows a thin-film solar module according to the invention in a schematic cross section.
  • a 1.5 ⁇ m thick aluminum-doped zinc oxide layer is deposited as a front contact 2 on a glass substrate 1 and then structured with a laser in order to produce narrow electrode strips 2.
  • the active semiconductor layer 3 of amorphous silicon (a-Si: H) with a pin structure is generated over a whole area with a thickness of, for example, 300 nm.
  • the active semiconductor layer is also patterned parallel to the strip-shaped electrodes of the front contact layer 2 with a laser, but offset by at least one trench width from the front contacts.
  • a rear side contact 4 is deposited over the entire area in a thickness of approximately 1.5 ⁇ m and structured, for example, with a laser.
  • the structure line (trench) is offset by a further trench width compared to the structure line of the active semiconductor layer 3.
  • the individual solar cells which are electrically connected in series are provided with external connections and the module is covered by covering it with an approximately 20 to 30 ⁇ m thick epoxy lacquer. layer 5 sealed.
  • the illustrated in the figure ready 'solar module with respect to humidity and temperature exposure to extremely stable and shows accelerated environmental tests no losses in the maximum achievable performance.
  • the solar module according to the invention is therefore ideally suited for use as roof glazing for automobiles, for facade cladding of buildings or as a power module in extreme climatic zones (for example tropics), since it can withstand even extreme weather conditions.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Les modules solaires à couche mince connus comportant des matériaux d'électrodes transparents sont extrêmement sensibles aux effets climatiques et nécessitent une vitrification coûteuse, afin d'éviter une forte augmentation inadmissible de la résistance en série des modules. L'invention propose de ce fait un module solaire à couche mince qui utilise de l'oxyde de zinc dopé d'aluminium comme matériau d'électrodes et permet d'effectuer une vitrification simple et résistante aux effets climatiques avec une simple couche de vernis en revêtement envers.Known thin-film solar modules comprising transparent electrode materials are extremely sensitive to climatic effects and require costly vitrification, in order to avoid a large unacceptable increase in the series resistance of the modules. The invention therefore provides a thin-film solar module which uses zinc oxide doped with aluminum as the electrode material and makes it possible to carry out a simple vitrification which is resistant to climatic effects with a single layer of varnish in back coating.

Description

Klimastabiles Dünnschichtsolarmodul.Climate-stable thin-film solar module.
Dünnschichtsolarmodule aus amorphem Silizium werden direkt auf großflächigen Substraten aus Glas oder Metall erzeugt. Dazu wird zunächst eine ganzflächige Kontaktschicht (Vorderkontakt) aus transparenten leitfähigen Oxiden (TCO) auf dem Substrat abgeschieden, darüber eine photoaktive Schicht erzeugt, die anschließend mit einer weiteren zumeist transparenten Kontakt¬ schicht als Rückkontakt abgedeckt wird. Zur Bereitstellung einer geeigneten Spannung ist das Dünnschichtsolarmodul in seriell miteinander verschaltete streifenförmige Einzelzellen aufgeteilt. Durch geeignete Strukturierung jeder einzelnen Schicht direkt nach ihrer Abscheidung bilden Schichterzeugung und elektrische Verschaltung einen integrierten Prozeß.Thin-film solar modules made of amorphous silicon are produced directly on large substrates made of glass or metal. For this purpose, a full-surface contact layer (front contact) made of transparent conductive oxides (TCO) is first deposited on the substrate, and a photoactive layer is generated above it, which is then covered with a further mostly transparent contact layer as the back contact. To provide a suitable voltage, the thin-film solar module is divided into strip-shaped individual cells connected in series with one another. By suitable structuring of each individual layer immediately after its deposition, layer generation and electrical interconnection form an integrated process.
Den stromführenden Elektroden (Vorder- und Rückkontakt) kommt eine entscheidende Rolle zu, da sowohl ihre optischen als auch ihre elektrischen Eigenschaften über die Effizienz jeder Ein¬ zelzelle und des Gesamtmoduls entscheiden.The current-carrying electrodes (front and back contact) play a decisive role, since both their optical and their electrical properties determine the efficiency of each individual cell and the overall module.
Die optischen Eigenschaften der Vorderkontaktschicht wie Trans¬ parenz und Lichtstreuung beeinflussen die Menge des in die photoaktive Schicht eingekoppelten Lichtes und somit auch den Photostrom.The optical properties of the front contact layer, such as transparency and light scattering, influence the amount of light coupled into the photoactive layer and thus also the photocurrent.
Die elektrischen Eigenschaften (Kontaktpotential, spezifischer Widerstand) sind für die Ableitung des erzeugten Photostromes verantwortlich. Der spezifische Widerstand des Kontaktmaterials führt zu ohm'schen Verlusten im Solarmodul.The electrical properties (contact potential, specific resistance) are responsible for deriving the generated photocurrent. The specific resistance of the contact material leads to ohmic losses in the solar module.
Die Verwendung von Zinkoxid (ZnO) als Material für die Vorder¬ kontakte auf transparenten Substraten erlaubt es in gewissen Grenzen, die Morphologie der Kontaktschichten einzustellen, wodurch eine Optimierung der Lichteinkopplung in die aktive Halbleiterschicht und eine Verbesserung des Kurzschlußstromes der einzelnen Zellen möglich wird. Zur Erhöhung der Leitfähig- keit werden Zinkoxidschichten z, Beispiel mit Bor dotiert. Wird das gleiche Material auch für den Rückkoπtakt verwendet, können halbtransparente Solarmodule hergestellt werden und als Topzelle in einem Tandemmodul, als Dachverglasung für Automo¬ bile oder als Bauverglasung (Fassadenmodul oder Fenstermodul) verwendet werden.The use of zinc oxide (ZnO) as material for the front contacts on transparent substrates allows the morphology of the contact layers to be set within certain limits, which makes it possible to optimize the coupling of light into the active semiconductor layer and to improve the short-circuit current of the individual cells. To increase the conductivity, zinc oxide layers z, for example, are doped with boron. If the same material is also used for the back contact, semitransparent solar modules can be produced and used as a top cell in a tandem module, as roof glazing for automobiles or as building glazing (facade module or window module).
Ungeschützte Dünnschichtsolarzellen oder -module mit Vorder- und Rückkontakten aus bordotiertem Zinkoxid (ZnO:B) erweisen sich allerdings als nicht klimastabil. Bei längerer und gleich- zeitiger Einwirkung von erhöhter Temperatur und Feuchtigkeit ergeben sich irreversible Erhöhungen des Schichtwiderstandes der Kontaktschichten, insbesondere des außen liegenden Rück¬ kontakts. Damit ändert sich der Serienwiderstand der Solarzel¬ le bzw. des Solarmoduls, was direkt zu Einbußen in der maximal entnehmbaren Leistung des Moduls führt.Unprotected thin-film solar cells or modules with front and back contacts made of boron-doped zinc oxide (ZnO: B), however, do not prove to be climate-stable. In the event of prolonged and simultaneous exposure to elevated temperature and moisture, there are irreversible increases in the sheet resistance of the contact layers, in particular the external rear contact. The series resistance of the solar cell or the solar module thus changes, which leads directly to losses in the maximum power that can be drawn from the module.
Bei bekannten Solarmodulen aus amorphem Silizium mit Vorder- und Rückkontakten aus Zn0:B werden die Kontaktschichten durch hermetische Verpackung vor Feuchteeinflüssen geschützt. Dazu wird auf den Rückkontakt zum Beispiel mit einer PVB-FolieIn known solar modules made of amorphous silicon with front and back contacts made of Zn0: B, the contact layers are protected from moisture by hermetic packaging. For this purpose, the back contact, for example with a PVB film
(Polyvinylbutyral) eine weitere Glasscheibe auflaminiert. Als äußere Feuchtesperre wird das Glaspaket mit den dazwischenlie¬ genden Solarzellen am Rand mit einem Rahmen aus Polyurethan umspritzt. Für nicht transparente Solarzellen wird direkt auf dem Rückkontakt als zusätzliche Wasserdampfsperre ein Epoxi- lack aufgetragen, der gleichzeitig als Restlichtreflektor dient.(Polyvinyl butyral) another glass pane is laminated on. As an external moisture barrier, the glass package with the solar cells in between is overmolded with a frame made of polyurethane. For non-transparent solar cells, an epoxy varnish is applied directly to the back contact as an additional water vapor barrier, which also serves as a residual light reflector.
Diese für die genannten Solarmodule erforderliche hermetische Versiegelung der dünnen Schichten erfordert einen hohen Mate¬ rial- und Arbeitsaufwand, was zu erheblich erhöhten Herstel¬ lungskosten führt. Doch selbst mit der genannten Versiegelung gelingt es nicht, die empfindlichen Schichten vollständig vor dem Eindringen von Feuchtigkeit zu schützen. Die Module zeigen in beschleunigten Klimatests (1000 Stunden bei 85°C und 85 Prozent Luftfeuchtigkeit, Qualification Test Procedure for Photovqltaic Thin Modules, Spec. Nr. 701, Test B13, JRC, 21020 Ispra (Va)-Italy) zum Teil erhebliche Verluste in der maxima¬ len Leistung, die auf das Eindringen von Wasserdampf in den Modulaufbau zurückzuführen ist.This hermetic sealing of the thin layers, which is required for the solar modules mentioned, requires a high outlay on materials and labor, which leads to considerably increased production costs. But even with the sealing mentioned, it is not possible to completely protect the sensitive layers from the ingress of moisture. The modules show in accelerated climate tests (1000 hours at 85 ° C and 85 percent humidity, Qualification Test Procedure for Photovqltaic Thin Modules, Spec.No. 701, Test B13, JRC, 21020 Ispra (Va) -Italy) sometimes considerable losses in the maxima¬ len performance, which is due to the penetration of water vapor into the module structure.
Aufgabe der vorliegenden Erfindung ist es daher, ein Dünn- schichtsolarmodul anzugeben, welches eine erhöhte Klimastabi¬ lität zeigt und dabei einen verminderten Verpackungsaufwand erfordert.It is therefore an object of the present invention to provide a thin-film solar module which shows increased climatic stability and which requires less packaging.
Diese Aufgabe wird erfindungsgemäß gelöst durch ein Solarmodul mit den Merkmalen von Anspruch 1.This object is achieved according to the invention by a solar module with the features of claim 1.
Weitere Ausgestaltungen der Erfindung sowie eine erfindungsge¬ mäße Verwendung der neuen Module sind den Unteransprüchen zu entnehmen.Further refinements of the invention and use of the new modules according to the invention can be found in the subclaims.
Es hat sich gezeigt, daß zu Testzwecken hergestellte Dünn¬ schichtsolarzellen mit rückseitigen Kontaktstrukturen aus alu¬ miniumdotiertem Zinkoxid ohne Lackschicht als Rückseitenab¬ deckung eine ausgezeichnete Feuchte-Wärmebeständigkeit besit- zen und den oben näher bezeichneten Klimatest nahezu unverän¬ dert überstehen. Die Solarzellen zeigen auch nach dieser lang¬ zeitigen Feuchte-Wärmebeaufschlagung eine nur unwesentliche Erhöhung des Schichtwiderstands und somit keinerlei Einbuße in der maximal erreichbaren Leistung.It has been shown that thin-film solar cells produced for test purposes with rear-side contact structures made of aluminum-doped zinc oxide without a lacquer layer as a rear-side covering have excellent moisture-heat resistance and survive the climate test described in more detail almost unchanged. Even after this long-term exposure to moisture and heat, the solar cells show only an insignificant increase in the sheet resistance and therefore no loss in the maximum achievable output.
So kann bei dem erfindungsgemäßen Solarmodul auf eine aufwen¬ dige Laminierung mit einer Kunststoffolie oder gar einer weite¬ ren Glasscheibe verzichtet werden. Ebenso ist die Versiegelung des Moduls mit einem Rahmen überflüssig. Der insbesondere zum mechanischen Schutz des Rückkontaktes aufgebrachte Lack ist zur Versiegelung ausreichend. Die Erfindung stellt daher ge¬ genüber bekannten Dünnschichtsolarmodulen eine erhebliche Ver¬ einfachung im Aufbau dar und führt zu großen Einsparungen be¬ züglich des Material- und Herstellungsaufwandes. Zinkoxid als Elektrodenmaterial für Vorder- und Rückkontakte 'hat den Vorteil, daß sich dessen Morphologie und damit vor allem die optischen Eigenschaften gut einstellen und auf die Solarzelle bzw. das Modul optimieren lassen. Es wird eine hohe Transmission und bei geeigneter Morphologie eine hohe Lichtein¬ kopplung und ein damit verbundener hoher Kurzschlußstrom im Modul erreicht. Gegenüber dem für Dünnschichtsolarmodule be¬ kannten bordotierten Zinkoxid als Elektrodenmaterial zeigt das aluminiumdotierte Zinkoxid einen um mehr als Faktor 3 ernied¬ rigten Schichtwiderstand.In the case of the solar module according to the invention, there is no need for complex lamination with a plastic film or even a further glass pane. Sealing the module with a frame is also superfluous. The lacquer applied in particular for mechanical protection of the back contact is sufficient for sealing. Compared to known thin-film solar modules, the invention therefore represents a considerable simplification in construction and leads to great savings in terms of the material and production costs. Zinc oxide as an electrode material for front and rear contacts' has the advantage that its morphology and thus, above all, the optical properties can be adjusted well and optimized for the solar cell or the module. A high transmission and, with a suitable morphology, a high light coupling and an associated high short-circuit current in the module are achieved. Compared to the boron-doped zinc oxide known as an electrode material for thin-film solar modules, the aluminum-doped zinc oxide shows a sheet resistance which is reduced by a factor of 3.
Die Herstellung der Kontakte kann zum Beispiel durch Sputtern erfolgen, wobei sich eine äußerst homogene Verteilung des Do- tierstoffs im ZnO:AI-Material ergibt. Damit sind homogeneThe contacts can be produced, for example, by sputtering, which results in an extremely homogeneous distribution of the dopant in the ZnO: Al material. So that are homogeneous
Schichteigenschaften über die gesamte Modulfläche gewährlei¬ stet. Als Targets können Zink/Aluminium-Mischtargets in reak¬ tiver sauerstoffhaltiger Atmosphäre oder Zinkoxid/Aluminium- Mischtargets in inerter Atmosphäre verwendet werden. Bevorzugt ist jedoch die zweite Alternative, da sie eine bessere Verfah¬ renskontrolle und somit eine bessere Reproduzierbarkeit bei der Erzeugung der Kontakte gewährleistet. Die Substrattempera¬ tur wird vorzugsweise auf einen Wert von über 300"C, beispiels¬ weise 350*C eingestellt. Dies führt zum Ausbilden einer ein- heitlich hexagonalen Kristallstruktur im Zinkoxid, die die beste Stabilität gegen Klimaeinflüsse zeigt und auch nach einer Plasmabehandlung unverändert in den Eigenschaften bleibt.Layer properties guaranteed over the entire module area. Zinc / aluminum mixed targets in a reactive oxygen-containing atmosphere or zinc oxide / aluminum mixed targets in an inert atmosphere can be used as targets. However, the second alternative is preferred, since it ensures better process control and thus better reproducibility in the production of the contacts. The Substrattempera¬ structure is preferably set to a value of about 300 "C, beispiels¬, 350 * C. This leads to the formation of a uni- formly hexagonal crystal structure in the zinc oxide, showing the best stability against environmental influences and also to a plasma treatment unchanged in the properties remains.
Das erfindungsgemäße Dünnschichtsolarmodul ist für sämtliche großflächig abscheidbaren photoaktiven Halbleiter geeignet, insbesondere für amorphes Silizium, Silizium-Germanium-Legie¬ rungen, Chalkopyrite (I-III-VI2-Halbleiter) oder auch für mehrschichtige Module wie Tandem- oder Stapelzellen mit aus gleichen oder unterschiedlichen Materialien bestehenden Ein- zelzellen.The thin-film solar module according to the invention is suitable for all photoactive semiconductors which can be deposited over a large area, in particular for amorphous silicon, silicon-germanium alloys, chalcopyrites (I-III-VI 2 semiconductors) or also for multilayer modules such as tandem or stacked cells with the same or single cells made of different materials.
Die Module können semi-transparent erzeugt werden, wobei als Rückseitenabdeckung zum Beispiel ein klarer Epoxilack verwen¬ det werden kann. Im Sinne einer höheren Lichtabsorption im Modul ist die Lackschicht der Rückseitenabdeckung jedoch als 'Reflexionsschicht ausgelegt, wozu ebenfalls ein geeignet ge¬ wählter Epoxilack dienen kann.The modules can be produced semi-transparently, a clear epoxy lacquer, for example, can be used as the back cover. In the sense of a higher light absorption in the Module, the paint layer of the back cover, however, is designed as a 'reflecting layer, to which also a suitable ge selective epoxy-type paint can be used.
Für diese Zwecke kann zum Beispiel Titanoxid Ti02 als Farb¬ pigment in einem infolgedessen weißen Epoxilack enthalten sein. Der Lack sollte gute Reflektoreigenschaften für den roten Anteil der einfallenden Strahlung besitzen und für eine diffuse Reflexion matt und nicht glänzend sein.For these purposes, for example, titanium oxide Ti0 2 can be contained as a color pigment in a resultant white epoxy lacquer. The varnish should have good reflector properties for the red portion of the incident radiation and be matt and not shiny for a diffuse reflection.
Im folgenden wird die Erfindung anhand eines Ausführungsbei¬ spiels und der dazugehörigen Figur näher erläutert.The invention is explained in more detail below with the aid of an exemplary embodiment and the associated figure.
Die Figur zeigt ein erfindungsgemäßen Dunnschichtsolarmodul im schematischen Querschnitt.The figure shows a thin-film solar module according to the invention in a schematic cross section.
Auf einem Glassubstrat 1 wird ganzflächig eine 1,5 um dicke aluminiumdotierte Zinkoxidschicht als Vorderkontakt 2 abgeschie- den und anschließend mit einem Laser strukturiert, um schmale Elektrodenstreifen 2 zu erzeugen.A 1.5 μm thick aluminum-doped zinc oxide layer is deposited as a front contact 2 on a glass substrate 1 and then structured with a laser in order to produce narrow electrode strips 2.
In einem PECVD-Verfahren wird darüber ganzflächig die aktive Halbleiterschicht 3 aus amorphem Silizium (a-Si:H) mit pin- Struktur in einer Dicke von zum Beispiel 300 nm erzeugt. Eben¬ falls mit einem Laser wird die aktive Halbleiterschicht pa¬ rallel zu den streifenförmigen Elektroden der Vorderkontakt¬ schicht 2 strukturiert, jedoch um zumindest eine Grabenbreite gegenüber den Vorderkontakten versetzt.In a PECVD process, the active semiconductor layer 3 of amorphous silicon (a-Si: H) with a pin structure is generated over a whole area with a thickness of, for example, 300 nm. The active semiconductor layer is also patterned parallel to the strip-shaped electrodes of the front contact layer 2 with a laser, but offset by at least one trench width from the front contacts.
In gleicher Weise wie die Vorderkontakte 2 wird ein Rücksei¬ tenkontakt 4 ganzflächig in ca. 1,5 μm Dicke abgeschieden und zum Beispiel mit einem Laser strukturiert. Die Strukturlinie (Graben) ist um eine weitere Grabenbreite gegenüber der Struk- turlinie der aktiven Halbleiterschicht 3 versetzt.In the same way as the front contacts 2, a rear side contact 4 is deposited over the entire area in a thickness of approximately 1.5 μm and structured, for example, with a laser. The structure line (trench) is offset by a further trench width compared to the structure line of the active semiconductor layer 3.
Schließlich werden die elektrisch in Serie verschalteten Ein¬ zelsolarzellen mit Außenanschlüssen versehen und das Modul durch Abdecken mit einer ca. 20 bis 30 μm dicken Epoxilack- schicht 5 versiegelt. Das in der Figur dargestellte fertige 'Solarmodul ist bezüglich Feuchte und Temperatureinwirkung äußerst stabil und zeigt in beschleunigten Klimatests keine Verluste in der maximal erreichbaren Leistung.Finally, the individual solar cells which are electrically connected in series are provided with external connections and the module is covered by covering it with an approximately 20 to 30 μm thick epoxy lacquer. layer 5 sealed. The illustrated in the figure ready 'solar module with respect to humidity and temperature exposure to extremely stable and shows accelerated environmental tests no losses in the maximum achievable performance.
Das erfindungsgemäße Solarmodul ist daher bestens zur Verwen¬ dung als Dachverglasung von Automobilen, zur Fassadenverklei¬ dung von Bauwerken oder als Leistungsmodul in extremen kli a- tischen Zonen (zum Beispiel Tropen) geeignet, da es selbst extremen Witterungsverhältnissen standhält. The solar module according to the invention is therefore ideally suited for use as roof glazing for automobiles, for facade cladding of buildings or as a power module in extreme climatic zones (for example tropics), since it can withstand even extreme weather conditions.

Claims

Patentansprüche Claims
1. Dunnschichtsolarmodul mit einem transparenten Substrat (1), zumindest einer aktiven Halbleiterschicht (3) mit Diodenstruk¬ tur, wobei die Halbleiterschicht in streifenförmige Einzelso¬ larzellen strukturiert ist; mit Elektrodenstrukturen (2, 4) aus aluminiumdotiertem Zinkoxid (Zn0:Al) als Vorder- und Rück¬ kontakte sowie zur integrierten Verschaltung des SolarmodulSj und mit einer Lackschicht als Rückseitenabdeckung.1. thin-film solar module with a transparent substrate (1), at least one active semiconductor layer (3) with a diode structure, the semiconductor layer being structured in strip-shaped individual solar cells; With electrode structures (2, 4) made of aluminum-doped zinc oxide (Zn0: Al) as front and rear contacts as well as for the integrated connection of the solar module J and with a lacquer layer as a back cover.
2. Solarmodul nach Anspruch 1, dessen Elektrodenstrukturen (2, 4) aus aluminiumdotiertem Zinkoxid mit hexagonaler Struktur bestehen.2. Solar module according to claim 1, whose electrode structures (2, 4) consist of aluminum-doped zinc oxide with a hexagonal structure.
3. Solarmodul nach Anspruch 1 oder 2, dessen zumindest eine aktive Halbleiterschicht (3) aus amorphem Silizium (a-Si:H) besteht.3. Solar module according to claim 1 or 2, whose at least one active semiconductor layer (3) consists of amorphous silicon (a-Si: H).
4. Solarmodul nach einem der Ansprüche 1 bis 3 mit einer Rück¬ seitenabdeckung (5) aus Epoxilack.4. Solar module according to one of claims 1 to 3 with a rear side cover (5) made of epoxy paint.
5. Solarmodul nach einem der Ansprüche 1 bis 4 mit mehreren übereinanderliegenden aktiven Halbleiterschichten (Stapel o- dul).5. Solar module according to one of claims 1 to 4 with a plurality of superposed active semiconductor layers (stack o- module).
6. Solarmodul nach einem der Ansprüche 1 bis 5, dessen Elektro¬ denstrukturen aus einem aluminiumdotierten Zinkoxid bestehen, welches durch Sputtern erzeugt ist.6. Solar module according to one of claims 1 to 5, the electrode structures of which consist of an aluminum-doped zinc oxide which is produced by sputtering.
7. Solarmodul nach einem der Ansprüche 1 bis 6, bei dem die Aluminiumkonzentration in den Elektrodenstrukturen 0,5 bis 6 Atom-Prozent beträgt.7. Solar module according to one of claims 1 to 6, wherein the aluminum concentration in the electrode structures is 0.5 to 6 atomic percent.
8. Solarmodul nach einem der Ansprüche 1 bis 7, dessen Elektro¬ denstrukturen von einem Zinkoxid/Aluminium-Mischtarget gesput- tert sind.8. Solar module according to one of claims 1 to 7, the electrode structures of which are sputtered from a zinc oxide / aluminum mixed target.
9. Solarmodul nach einem der Ansprüche 1 bis 8 mit einem trans- parenten Lack als Rückseitenabdeckung (5).9. Solar module according to one of claims 1 to 8 with a trans Parent paint as a back cover (5).
10. Verwendung eines Solarmoduls als Dachverglasung für ein Kraftfahrzeug.10. Use of a solar module as roof glazing for a motor vehicle.
11. Verwendung eines Solarmoduls nach einem der Ansprüche 1 bis 9 als Element zur Fassadenverkleidung. 11. Use of a solar module according to one of claims 1 to 9 as an element for facade cladding.
EP93905173A 1992-03-19 1993-03-09 Weather-resistant thin layer solar module Withdrawn EP0630524A1 (en)

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