EP0555640B1 - Electroless electrochemical plating apparatus and bath heated by microwave energy - Google Patents

Electroless electrochemical plating apparatus and bath heated by microwave energy Download PDF

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Publication number
EP0555640B1
EP0555640B1 EP93100382A EP93100382A EP0555640B1 EP 0555640 B1 EP0555640 B1 EP 0555640B1 EP 93100382 A EP93100382 A EP 93100382A EP 93100382 A EP93100382 A EP 93100382A EP 0555640 B1 EP0555640 B1 EP 0555640B1
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Prior art keywords
bath
container
electromagnetic waves
screen
heating
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EP93100382A
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German (de)
French (fr)
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EP0555640A1 (en
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Andreas Prof. Dr.-chem. rer. nat. habil.D Möbius
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LPW-ANLAGEN GmbH
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LPW-ANLAGEN GmbH
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Priority claimed from DE19924203646 external-priority patent/DE4203646C1/en
Priority claimed from DE19924217220 external-priority patent/DE4217220C1/en
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Publication of EP0555640A1 publication Critical patent/EP0555640A1/en
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/02Heating or cooling

Definitions

  • the invention relates to a system for electroless surface treatment of objects arranged in an electrochemical bath, in particular for electroless electrodeposition of metals and of melt alloys on the surface of the objects.
  • Electroless electrochemical metal deposition is explained, for example, in "LPW paperback for electroplating” 1988, pp. 36 and 37.
  • Bad describes the aqueous solution of the chemical substances and electrolyte additives required for the deposition (cf. "LPW-Taschenbuch für Galvanotechnik” 1988, pp. 47 to 52).
  • the bath in which the separation takes place is located in a bath container.
  • Adherence is essential for the so-called operation of the bath, ie for the proper and sufficient separation as well as for the quality of the deposited surface layer, essential.
  • this includes setting and maintaining a deposition temperature which is dependent on the composition of the bath in a more or less narrow temperature range.
  • thermal energy must be supplied at least when the bath is started up and usually also when the bath is in operation.
  • the invention relates generally to these measures.
  • the heating takes place via electrical bath heaters and / or, more complexly, via heat exchangers in the form of heating coils and double-jacket container walls of the container which receives the bath, the heating coils or the double jacket - A heat transfer medium flows through the container walls.
  • the heat transfer from these radiators to the bathroom takes place by convection and / or heat conduction. This means long heating times when heating the bath, long and disturbing dead times with control or regulation of the bath temperature with the known negative influences on the result of the control or regulation. All this interferes with the electrochemical deposition. Local overheating of the bath in the area of the heat-emitting surfaces of the radiators is unavoidable at low bath temperatures and in particular can break up or destroy the organic electrolyte additives in the bath.
  • the invention is based on the technical problem of specifying a system of the type mentioned at the beginning, with which short heating-up times and a very precise control and / or regulation of the bath temperature is possible with currentless operation of the electrochemical bath, without local overheating.
  • the invention relates to a system for electroless surface treatment of objects arranged in an electrochemical bath, in particular for electroless electrodeposition of metals and metal alloys on the surface of the objects, with a container constructed from dielectric materials for holding the electrochemical bath, at least one antenna arrangement on the outside of the container in the region of the container walls and / or below the container base for emitting electromagnetic waves in the microwave range, preferably in the range from 1 to 3 GHz, for heating the bath in the bath container, a metallic shield for protecting the Environment of the bath against stray electromagnetic waves, a goods carrier provided in the bath being equipped for the objects to be coated with reflectors which reflect the electromagnetic waves ktieren, wherein at least one transmitter for the electromagnetic waves and the control and / or regulating devices for the transmitter is arranged outside the shield.
  • the invention teaches that the heating of the bath is carried out by electromagnetic waves which do not interfere with the electrochemical deposition, and that the bath temperature is controlled by selecting and / or adjusting the frequency and / or the intensity and / or the exposure time of the electromagnetic waves or is regulated.
  • the invention is based on the knowledge that the heating of a bath for the electroless electrodeposition of metals and metal alloys described above with electromagnetic waves is possible, namely in the bath itself and with short heating-up times and with very precise temperature control and / or temperature regulation. Local overheating in the area of hot surfaces of radiators is excluded due to the system.
  • the parameters for the heating with electromagnetic waves can be selected so that the electrochemical deposition is not disturbed. This is especially true when working with microwaves, as is common for heating food and beverages in the microwave. These parameters are the frequency or wavelength, the intensity (energy) of the electromagnetic waves and the exposure time. The appropriate parameters can easily be determined from case to case in the laboratory.
  • a systematic determination with subsequent standardization is also possible.
  • a preferred embodiment of the invention teaches that a pool of criticality curves with the criticality as the ordinate and the frequency as the abscissa and the intensity as the curve family parameter or with the criticality as the ordinate and the intensity as the abscissa for a bath of a predetermined composition and intended purpose and a predetermined exposure time of the electromagnetic waves and the frequency is experimentally determined as a family of curves, the areas under a criticality curve define the area in which the electromagnetic waves at a given frequency or intensity Do not interfere with separation. It is within the scope of the invention not to determine a set of criticality curves for a given bath, but rather only to determine a single criticality curve.
  • the "criticality" parameter mentioned here indicates the point at which the electrochemical deposition is disturbed, ie no longer satisfies the specified quality parameters. For a given frequency, the criticality depends on the intensity of the electromagnetic waves, for a given intensity of the electromagnetic waves on their frequency and possibly also on the exposure time.
  • a preferred embodiment of the invention is characterized in that microwave transmitters customary for heating food and beverages are used and the bath temperature is controlled or regulated by the antenna current and / or the on-time of these microwave transmitters. It goes without saying that efforts will be made to generate an intensity density of the electromagnetic waves that is as homogeneous as possible in the bath. That can e.g. B. happen by appropriate training or arrangement of the antennas for the radiation of the electromagnetic waves.
  • the invention can be implemented in various ways in terms of plant technology.
  • the shield preferably consists of a shielding jacket which surrounds the container and the antenna arrangement or the antenna arrangements.
  • the shield consists of a hood that surrounds the antenna assembly outside the container.
  • the shield expediently has a lid-like container closure.
  • the at least one transmitter of the electromagnetic waves is designed as a microwave transmitter which operates in the frequency range from 1 GHz to 3 GHz.
  • a microwave transmitter which is customary for heating food and beverages is expediently used as the transmitter.
  • the shield is additionally designed as a radiation protection shield for protecting the environment from electromagnetic radiation which is harmful to health.
  • the system shown in FIGS. 1 and 2 is intended for the electrochemical deposition of metals and metal alloys on the surface of objects G to be coated.
  • the system includes a bath container 1, which receives the bath 2, in which the objects G to be coated are immersed. This will worked with a goods carrier 3 on which the objects to be coated G are attached or on which they are arranged.
  • a bath container 1 constructed of dielectric materials for receiving the bath, in the exemplary embodiment a plurality of antenna arrangements 4 for the radiation of the electromagnetic waves on the outside of the container in the region of the walls of the bath container 1.
  • a metallic shield 5 for protection is also seen the area around the bath against stray electromagnetic waves.
  • the transmitters 6 for the electromagnetic waves and the control and regulating devices 7 for the transmitters 6 are arranged outside the shield 5.
  • Transducer e.g. B. temperature sensors are located inside the bathroom, which was not drawn.
  • the shield 5 consists of a shielding jacket which surrounds the bath container 1 and the antenna arrangements 4. However, hoods could also be used.
  • the goods carrier 3 is equipped with reflectors 8 which reflect the electromagnetic waves. In this way, a potentially disturbing inductive heating of metallic objects whose surface is to be coated can be prevented. It goes without saying that the reflectors are arranged in practice so that the galvanic ion transport is not disturbed.
  • the arrangement of the transmitters 6 and / or reflectors 8 enables a very homogeneous distribution of the intensity of the electromagnetic waves in the bath 2 to be achieved.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Coating With Molten Metal (AREA)

Abstract

Method for operating a bath for electrochemical deposition of metals and of metal alloys on the surface of objects which are to be coated and which are arranged in the bath, the bath temperature being set and controlled and/or regulated via a heating system. The heating of the bath is effected by electromagnetic waves which do not have an adverse effect on the electrochemical deposition. The bath temperature is controlled or regulated by selecting and/or setting the frequency and/or the intensity and/or the action time of the electromagnetic waves. - Systems for implementing the method are likewise described.

Description

Die Erfindung betrifft eine Anlage zur stromlosen Oberflächenvergütung von in einem elektrochemischen Bad angeordneten Gegenständen, insbesondere für die stromlose elektrochemische Abscheidung von Metallen und von Meltallegierungen auf der Oberfläche der Gegenstände. - Die stromlose elektrochemische Metallabscheidung ist beispielsweise im "LPW-Taschenbuch für Galvanotechnik" 1988, S. 36 und 37 erläutert. Bad bezeichnet die wässrige Lösung der für die Abscheidung erforderlichen chemischen Substanzen und Elektrolytzusätze (vgl. "LPW-Taschenbuch für Galvanotechnik" 1988, S. 47 bis 52). Das Bad, in dem die Abscheidung stattfindet, befindet sich in einem Badbehälter.The invention relates to a system for electroless surface treatment of objects arranged in an electrochemical bath, in particular for electroless electrodeposition of metals and of melt alloys on the surface of the objects. - Electroless electrochemical metal deposition is explained, for example, in "LPW paperback for electroplating" 1988, pp. 36 and 37. Bad describes the aqueous solution of the chemical substances and electrolyte additives required for the deposition (cf. "LPW-Taschenbuch für Galvanotechnik" 1988, pp. 47 to 52). The bath in which the separation takes place is located in a bath container.

Im Rahmen der elektrochemischen Abscheidung von Metallen und Metallegierungen auf der Oberfläche der Gegenstände, die zu diesem Zweck in dem Bad angeordnet werden, müssen besondere physikalische Parameter eingehalten werden. Ihre Einhaltung ist für den sogenannten Betrieb des Bades, d. h. für die ordnungsgemäße und allen Ansprüchen genügende Abscheidung sowie für die Qualität der abgeschiedenen Oberflächenschicht, wesentlich.As part of the electrochemical deposition of metals and metal alloys on the surface of the objects which are arranged for this purpose in the bath, special physical parameters must be observed. Adherence is essential for the so-called operation of the bath, ie for the proper and sufficient separation as well as for the quality of the deposited surface layer, essential.

Im allgemeinen gehört dazu die Einstellung und Einhaltung einer von der Zusammensetzung des Bades abhängigen Abscheidungstemperatur in einem mehr oder weniger engen Temperaturbereich. Dazu muß zumindest bei Inbetriebnahme des Bades und zumeist auch beim Betrieb des Bades Wärmeenergie zugeführt werden. Auf diese Maßnahmen bezieht sich die Erfindung allgemein.In general, this includes setting and maintaining a deposition temperature which is dependent on the composition of the bath in a more or less narrow temperature range. For this purpose, thermal energy must be supplied at least when the bath is started up and usually also when the bath is in operation. The invention relates generally to these measures.

Bei den aus der Praxis bekannten Anlagen, von denen die Erfindung ausgeht, erfolgt die Beheizung über elektrische Badheizer und/oder, aufwendiger, über Wärmetauscher in Form von Heizschlangen und Doppelmantel-Behälterwänden des Behälters, der das Bad aufnimmt, wobei die Heizschlangen oder die Doppelmantel-Behälterwände von einem Wärmeträgermedium durchflossen werden. Der Wärmeübergang von diesen Heizkörpern auf das Bad erfolgt durch Konvektion und/oder Wärmeleitung. Das bedingt beim Aufheizen des Bades lange Aufheizzeiten, bei einer Steuerung oder Regelung der Badtemperatur lange und störende Totzeiten mit den bekannten negativen Einflüssen auf das Ergebnis der Steuerung oder Regelung. Das alles beeinflußt störend die elektrochemische Abscheidung. Örtliche Überhitzung des Bades im Bereich der wärmeenergieabgebenden Oberflächen der Heizkörper ist bei geringer Badtemperatur unvermeidbar und kann insbesondere die organischen Elektrolytzusätze des Bades aufbrechen oder zerstören.In the systems known from practice, from which the invention is based, the heating takes place via electrical bath heaters and / or, more complexly, via heat exchangers in the form of heating coils and double-jacket container walls of the container which receives the bath, the heating coils or the double jacket - A heat transfer medium flows through the container walls. The heat transfer from these radiators to the bathroom takes place by convection and / or heat conduction. This means long heating times when heating the bath, long and disturbing dead times with control or regulation of the bath temperature with the known negative influences on the result of the control or regulation. All this interferes with the electrochemical deposition. Local overheating of the bath in the area of the heat-emitting surfaces of the radiators is unavoidable at low bath temperatures and in particular can break up or destroy the organic electrolyte additives in the bath.

Im übrigen sind Anlagen zum Aufheizen von Aluminierbädern mit aprotischen Elektrolytsystemen bekannt (DE-C 31 38 072), bei denen zwei Elektroden im Aluminiertrog mit Impulsströmen wechselnder Polarität beschickt werden, so daß Joule'sche Wärme erzeugt wird. Hierbei handelt es sich jedoch nicht um stromlose elektrochemische Bäder. Nachteilhafte örtliche Überhitzungen im Aluminiertrog lassen sich insbesondere im Bereich der Elektroden bei diesen Anlagen nicht vermeiden. Solche örtlichen Überhitzungen begünstigen unkontrollierte Wildabscheidungen des Metalls.In addition, systems for heating aluminizing baths with aprotic electrolyte systems are known (DE-C 31 38 072), in which two electrodes in the aluminizing trough are charged with pulse currents of alternating polarity, so that Joule heat is generated. However, these are not electroless electrochemical baths. Disadvantageous local overheating in the aluminum trough cannot be avoided especially in the area of the electrodes in these systems. Such local overheating favors uncontrolled depletion of metal.

Außerdem ist es bekannt (US-A 4 593 169) in einem Wassererhitzer Wasser mit Hilfe von Mikrowellen dielektrisch aufzuheizen. Auch in anderen Bereichen der Technik, insbesondere zum Garen und/oder Erwärmen von Speisen und Getränken, wird eine dielektrische Erwärmung durchgeführt. Die Erwärmung erfolgt hier über elektromagnetische Wellen, die auf das zu erwärmende Gut gerichtet werden sowie in das zu erwärmende Gut eindringen. Ihre elektromagnetische Energie wird in dem Gut unmittelbar in Wärmeenergie umgesetzt. Dabei wird mit sogenannten Mikrowellen gearbeitet, Frequenzbereich von 1 bis 3 GHz (= 1000 bis 3000 MHz). Die insoweit bekannten Maßnahmen haben sich bewährt. Für den Betrieb eines Bades für die elektrochemische Abscheidung von Metallen und Metallegierungen sind derartige Beheizungen bisher nicht üblich. Möglicherweise bestanden Bedenken, weil ein solches Bad in viel stärkerem Maße einen Elektrolyten darstellt als Speisen oder Getränke und die Ionen des Bades, wenn auch trägheitsgebremst, den elektromagnetischen Wellen folgen können und folglich eine Störung der Elektrochemie der Abscheidungszusammenhänge ohne weiteres nicht auszuschließen ist. Im übrigen ist es bekannt, daß bei der Erwärmung von Speisen und Getränken mit Hilfe von Mikrowellen organische Geschmacksbildner, insbesondere polare Molekeln, aufgebrochen und zerstört werden können. Andererseits enthalten die Bäder für die elektrochemische Abscheidung von Metallen und Metallegierungen, wie bereits erwähnt, organische Elektrolytzusätze, so daß zu besorgen ist, daß sie aufgebrochen und zerstört werden könnten, wie die organischen Geschmacksbildner in Speisen und Getränken bei dielektrischer Erwärmung per Mikrowellen Schaden nehmen.It is also known (US Pat. No. 4,593,169) to heat water dielectrically in a water heater using microwaves. Dielectric heating is also carried out in other areas of technology, in particular for cooking and / or heating food and beverages. The heating takes place here via electromagnetic waves which are directed onto the material to be heated and penetrate into the material to be heated. Your electromagnetic energy is directly converted into thermal energy in the estate. So-called microwaves are used, frequency range from 1 to 3 GHz (= 1000 to 3000 MHz). The measures known so far have proven their worth. Such heating systems have so far not been used to operate a bath for the electrochemical deposition of metals and metal alloys. There may have been concerns because such a bath constitutes an electrolyte to a much greater extent than food or drinks and the ions in the bath, although slowed down by inertia, are the electromagnetic waves can follow and consequently a disruption of the electrochemistry of the deposition relationships cannot be excluded without further notice. Furthermore, it is known that when foods and beverages are heated with the aid of microwaves, organic flavoring agents, in particular polar molecules, can be broken down and destroyed. On the other hand, the baths for the electrochemical deposition of metals and metal alloys, as already mentioned, contain organic electrolyte additives, so that it has to be feared that they could be broken open and destroyed, as the organic flavoring agents in food and beverages are damaged by microwave dielectric heating.

Der Erfindung liegt das technische Problem zugrunde, eine Anlage der eingangs genannten Art anzugeben, mit der bei stromloser Betriebsführung des elektrochemischen Bades kurze Aufheizzeiten und eine sehr genaue Steuerung und/oder Regelung der Badtemperatur möglich ist, und zwar ohne örtliche Überhitzungen.The invention is based on the technical problem of specifying a system of the type mentioned at the beginning, with which short heating-up times and a very precise control and / or regulation of the bath temperature is possible with currentless operation of the electrochemical bath, without local overheating.

Zur Lösung dieses technischen Problems ist Gegenstand der Erfindung eine Anlage zur stromlosen Oberflächenvergütung von in einem elektrochemischen Bad angeordneten Gegenständen, insbesondere für die stromlose elektrochemische Abscheidung von Metallen und von Metallegierungen auf der Oberfläche der Gegenstände, mit einem aus dielektrischen Werkstoffen aufgebauten Behälter für die Aufnahme des elektrochemischen Bades, zumindest einer Antennenanordnung behälteraußenseitig im Bereich der Behälterwandungen und/oder unterhalb des Behälterbodens zur Abstrahlung von elektromagnetischen Wellen im Mikrowellenbereich, vorzugsweise im Bereich von 1 bis 3 GHz, für die Aufheizung des Bades in dem Badbehälter, einer metallischen Abschirmung für den Schutz der Umgebung des Bades gegen vagabundierende elektromagnetische Wellen, wobei ein in dem Bad vorgesehener Warenträger für die zu beschichtenden Gegenstände mit Reflektoren ausgerüstet ist, die die elektromagnetischen Wellen reflektieren, wobei zumindest ein Sender für die elektromagnetischen Wellen sowie die Steuer- und/oder Regeleinrichtungen für den Sender außerhalb der Abschirmung angeordnet ist.To solve this technical problem, the invention relates to a system for electroless surface treatment of objects arranged in an electrochemical bath, in particular for electroless electrodeposition of metals and metal alloys on the surface of the objects, with a container constructed from dielectric materials for holding the electrochemical bath, at least one antenna arrangement on the outside of the container in the region of the container walls and / or below the container base for emitting electromagnetic waves in the microwave range, preferably in the range from 1 to 3 GHz, for heating the bath in the bath container, a metallic shield for protecting the Environment of the bath against stray electromagnetic waves, a goods carrier provided in the bath being equipped for the objects to be coated with reflectors which reflect the electromagnetic waves ktieren, wherein at least one transmitter for the electromagnetic waves and the control and / or regulating devices for the transmitter is arranged outside the shield.

Die Erfindung lehrt, daß die Beheizung des Bades durch elektromagnetische Wellen vorgenommen wird, welche die elektrochemische Abscheidung nicht störend beeinflussen, und daß die Badtemperatur durch Auswahl und/oder Einstellung der Frequenz und/oder der Intensität und/oder der Einwirkungszeit der elektromagnetischen Wellen gesteuert oder geregelt wird.The invention teaches that the heating of the bath is carried out by electromagnetic waves which do not interfere with the electrochemical deposition, and that the bath temperature is controlled by selecting and / or adjusting the frequency and / or the intensity and / or the exposure time of the electromagnetic waves or is regulated.

Die Erfindung geht insoweit von der Erkenntnis aus, daß die Beheizung eines Bades für die eingangs beschriebene stromlose elektrochemische Abscheidung von Metallen und Metalllegierungen mit elektromagnetischen Wellen möglich ist und zwar in dem Bad selbst und mit kurzen Aufheizzeiten sowie bei sehr genauer Temperatursteuerung und/oder Temperaturregelung. Örtliche Überhitzung im Bereich heißer Oberflächen von Heizkörpern sind systembedingt ausgeschlossen. Überraschenderweise lassen sich für alle bekannten Bäder für die stromlose elektrochemische Abscheidung von Metallen und von Metallegierungen die Parameter für die Beheizung mit elektromagnetischen Wellen so wählen, daß die elektrochemische Abscheidung nicht gestört wird. Das gilt insbesondere dann, wenn mit Mikrowellen gearbeitet wird, wie sie bei der Mikrowellenerwärmung von Speisen und Getränken üblich sind. Diese Parameter sind die Frequenz oder die Wellenlänge, die Intensität (Energie) der elektromagnetischen Wellen und die Einwirkzeit. Die geeigneten Parameter lassen sich von Fall zu Fall ohne weiteres im Labor ermitteln. Aber auch eine systematische Ermittelung mit anschließender Normierung ist möglich. Eine bevorzugte Ausführungsform der Erfindung lehrt dazu, daß für ein Bad vorgegebener Zusammensetzung und Zweckbestimmung sowie vorgegebener Einwirkzeit der elektromagnetischen Wellen eine Kritikalitätskurvenschar mit der Kritikalität als Ordinate und der Frequenz als Abszisse sowie der Intensität als Kurvenscharparameter oder mit der Kritikalität als Ordinate und der Intensität als Abszisse sowie der Frequenz als Kurvenscharparameter experimentell ermittelt wird, wobei die Flächen unter eine Kritikalitätskurve den Bereich definieren, in dem die elektromagnetischen Wellen bei vorgegebener Frequenz oder vorgegebener Intensität die Abscheidung nicht störend beeinflussen. Im Rahmen der Erfindung liegt es, für ein vorgegebenes Bad nicht eine Kritikalitätskurvenschar, sondern lediglich eine einzige Kritikalitätskurve zu ermitteln. - Der hier erwähnte Parameter "Kritikalität" gibt den Punkt an, bei dem die elektrochemische Abscheidung gestört wird, den vorgegebenen Qualitätsparametern also nicht mehr genügt. Die Kritikalität hängt bei vorgegebener Frequenz von der Intensität der elektromagnetischen Wellen, bei vorgegebener Intensität der elektromagnetischen Wellen von deren Frequenz und gegebenenfalls außerdem von der Einwirkzeit ab.The invention is based on the knowledge that the heating of a bath for the electroless electrodeposition of metals and metal alloys described above with electromagnetic waves is possible, namely in the bath itself and with short heating-up times and with very precise temperature control and / or temperature regulation. Local overheating in the area of hot surfaces of radiators is excluded due to the system. Surprisingly, for all known baths for the electroless electrochemical deposition of metals and metal alloys, the parameters for the heating with electromagnetic waves can be selected so that the electrochemical deposition is not disturbed. This is especially true when working with microwaves, as is common for heating food and beverages in the microwave. These parameters are the frequency or wavelength, the intensity (energy) of the electromagnetic waves and the exposure time. The appropriate parameters can easily be determined from case to case in the laboratory. A systematic determination with subsequent standardization is also possible. A preferred embodiment of the invention teaches that a pool of criticality curves with the criticality as the ordinate and the frequency as the abscissa and the intensity as the curve family parameter or with the criticality as the ordinate and the intensity as the abscissa for a bath of a predetermined composition and intended purpose and a predetermined exposure time of the electromagnetic waves and the frequency is experimentally determined as a family of curves, the areas under a criticality curve define the area in which the electromagnetic waves at a given frequency or intensity Do not interfere with separation. It is within the scope of the invention not to determine a set of criticality curves for a given bath, but rather only to determine a single criticality curve. - The "criticality" parameter mentioned here indicates the point at which the electrochemical deposition is disturbed, ie no longer satisfies the specified quality parameters. For a given frequency, the criticality depends on the intensity of the electromagnetic waves, for a given intensity of the electromagnetic waves on their frequency and possibly also on the exposure time.

Eine bevorzugte Ausführungsform der Erfindung ist dadurch gekennzeichnet, daß mit für die Erwärmung von Speisen und Getränken üblichen Mikrowellensendern gearbeitet und die Badtemperatur durch die Antennenstromstärke und/oder die Einschaltdauer dieser Mikrowellensender gesteuert oder geregelt wird. Es versteht sich, daß man sich bemühen wird, in dem Bad eine möglichst homogene Intensitätsdichte der elektromagnetischen Wellen zu erzeugen. Das kann z. B. durch entsprechende Ausbildung oder Anordnung der Antennen für die Abstrahlung der elektromagnetischen Wellen geschehen.A preferred embodiment of the invention is characterized in that microwave transmitters customary for heating food and beverages are used and the bath temperature is controlled or regulated by the antenna current and / or the on-time of these microwave transmitters. It goes without saying that efforts will be made to generate an intensity density of the electromagnetic waves that is as homogeneous as possible in the bath. That can e.g. B. happen by appropriate training or arrangement of the antennas for the radiation of the electromagnetic waves.

Die Erfindung kann auf verschiedene Weise in anlagentechnischer Hinsicht verwirklicht werden. Vorzugsweise besteht die Abschirmung aus einem Abschirmmantel, der den Behälter und die Antennenanordnung bzw. die Antennenanordnungen umgibt. Nach einer anderen bevorzugten Ausführungsform der Erfindung besteht die Abschirmung aus einer Haube, die die Antennenanordnung behälterabseitig außen umgibt. Zweckmäßigerweise weist die Abschirmung einen deckelartigen Behälterabschluß auf. Es versteht sich, daß der zumindest eine Sender der elektromagnetischen Wellen als Mikrowellensender ausgeführt ist, der im Frequenzbereich von 1 GHz bis 3 GHz arbeitet. Zweckmäßigerweise wird als Sender ein für die Erwärmung von Speisen und Getränken üblicher Mikrowellensender verwendet. Nach bevorzugter Ausführungsform der Erfindung ist die Abschirmung zusätzlich als Strahlenschutzabschirmung zum Schutz der Umgebung vor gesundheitlich bedenklicher elektromagnetischer Strahlung ausgebildet.The invention can be implemented in various ways in terms of plant technology. The shield preferably consists of a shielding jacket which surrounds the container and the antenna arrangement or the antenna arrangements. According to another preferred embodiment of the Invention, the shield consists of a hood that surrounds the antenna assembly outside the container. The shield expediently has a lid-like container closure. It is understood that the at least one transmitter of the electromagnetic waves is designed as a microwave transmitter which operates in the frequency range from 1 GHz to 3 GHz. A microwave transmitter which is customary for heating food and beverages is expediently used as the transmitter. According to a preferred embodiment of the invention, the shield is additionally designed as a radiation protection shield for protecting the environment from electromagnetic radiation which is harmful to health.

Im folgenden wird die erfindungsgemäße Anlage anhand einer lediglich ein Ausführungsbeispiel darstellenden Zeichnung ausführlicher erläutert. Es zeigen

  • Fig. 1 einen Vertikalschnitt durch eine erfindungsgemäße Anlage,
  • Fig. 2 einen Schnitt in Richtung A-A durch den Gegenstand der Fig. 1 und
The system according to the invention is explained in more detail below on the basis of a drawing illustrating only one exemplary embodiment. Show it
  • 1 is a vertical section through a system according to the invention,
  • Fig. 2 shows a section in the direction AA through the subject of Fig. 1 and

Die in den Fig. 1 und 2 dargestellte Anlage ist für die elektrochemische Abscheidung von Metallen und Metallegierungen auf der Oberfläche von zu beschichtenden Gegenständen G bestimmt. Zur Anlage gehört ein Badbehälter 1, der das Bad 2 aufnimmt, in das die zu beschichtenden Gegenstände G eingetaucht werden. Dazu wird mit einem Warenträger 3 gearbeitet, an dem die zu beschichtenden Gegenstände G befestigt oder auf dem sie angeordnet sind. Man erkennt in den Figuren einen aus dielektrischen Werkstoffen aufgebauten Badbehälter 1 für die Aufnahme des Bades, im Ausführungsbeispiel eine Mehrzahl von Antennenanordnungen 4 für die Abstrahlung der elektromagnetischen Wellen behälteraußenseitig im Bereich der Wandungen des Badbehälters 1. Man erkennt außerdem eine metallische Abschirmung 5 für den Schutz der Umgebung des Bades gegen vagabundierende elektromagnetische Wellen. Die Sender 6 für die elektromagnetischen Wellen sowie die Steuer- und Regeleinrichtungen 7 für die Sender 6 sind außerhalb der Abschirmung 5 angeordnet. Meßwertaufnehmer, z. B. Temperaturfühler, befinden sich innerhalb des Bades, was nicht gezeichnet wurde. Im Ausführungsbeispiel besteht die Abschirmung 5 aus einem Abschirmmantel, der den Badbehälter 1 und die Antennenanordnungen 4 umgibt. Es könnte aber auch mit Hauben gearbeitet werden. Der Warenträger 3 ist mit Reflektoren 8 ausgerüstet, die die elektromagnetischen Wellen reflektieren. Auf diese Weise kann eine möglicherweise störende induktive Erwärmung von metallischen Gegenständen, deren Oberfläche zu beschichten ist, verhindert werden. Es versteht sich, daß die Reflektoren in der Praxis so angeordnet werden, daß der galvanische Ionentransport nicht gestört wird. Durch die Anordnung der Sender 6 und/oder Reflektoren 8 kann eine sehr homogene Verteilung der Intensität der elektromagnetischen Wellen in dem Bad 2 erreicht werden.The system shown in FIGS. 1 and 2 is intended for the electrochemical deposition of metals and metal alloys on the surface of objects G to be coated. The system includes a bath container 1, which receives the bath 2, in which the objects G to be coated are immersed. This will worked with a goods carrier 3 on which the objects to be coated G are attached or on which they are arranged. One can see in the figures a bath container 1 constructed of dielectric materials for receiving the bath, in the exemplary embodiment a plurality of antenna arrangements 4 for the radiation of the electromagnetic waves on the outside of the container in the region of the walls of the bath container 1. A metallic shield 5 for protection is also seen the area around the bath against stray electromagnetic waves. The transmitters 6 for the electromagnetic waves and the control and regulating devices 7 for the transmitters 6 are arranged outside the shield 5. Transducer, e.g. B. temperature sensors are located inside the bathroom, which was not drawn. In the exemplary embodiment, the shield 5 consists of a shielding jacket which surrounds the bath container 1 and the antenna arrangements 4. However, hoods could also be used. The goods carrier 3 is equipped with reflectors 8 which reflect the electromagnetic waves. In this way, a potentially disturbing inductive heating of metallic objects whose surface is to be coated can be prevented. It goes without saying that the reflectors are arranged in practice so that the galvanic ion transport is not disturbed. The arrangement of the transmitters 6 and / or reflectors 8 enables a very homogeneous distribution of the intensity of the electromagnetic waves in the bath 2 to be achieved.

Claims (6)

  1. An installation for the currentless surface coating of objects disposed in an electrochemical bath, particularly for the currentless electrochemical deposition of metals and of metal alloys on the surface of the objects, having
    a container (1) constructed of dielectric materials for receiving the electrochemical bath (2),
    at least one antenna arrangement (4) on the outside of the container in the region of the container walls and/or underneath the container base for the radiation of electromagnetic waves in the microwave range, preferably in the range from 1 to 3 GHz, for heating the bath (2) in the bath container (1),
    a metallic screen (5) for protecting the surroundings of the bath (2) from stray electromagnetic waves,
    wherein a workpiece carrier (3) for the objects to be coated which is provided in the bath (2) is equipped with reflectors (8) which reflect the electromagnetic waves,
    wherein at least one transmitter (6) for the electromagnetic waves, as well as the control and/or regulating devices (7) for the transmitter (6), are disposed outside the screen (5).
  2. An installation according to claim 1, wherein the screen (5) consists of a screening jacket which surrounds the container (1) and the antenna arrangement (4) or antenna arrangements (4).
  3. An installation according to claim 1, wherein the screen (5) consists of a hood which externally surrounds the antenna arrangement (4) remote from the container.
  4. An installation according to any one of claims 1 to 3, wherein the screen (5) comprises a cover-like container closure.
  5. An installation according to any one of claims 1 to 4, wherein a microwave transmitter which is customary for the heating of foods and beverages is used as the transmitter (6).
  6. An installation according to any one of claims 1 to 5, wherein the screen is additionally constructed as a radiation protection screen for protecting the surroundings from electromagnetic radiation which is harmful to health.
EP93100382A 1992-02-08 1993-01-13 Electroless electrochemical plating apparatus and bath heated by microwave energy Expired - Lifetime EP0555640B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19924203646 DE4203646C1 (en) 1992-02-08 1992-02-08 Bath for electrochemical deposition of metal (alloys)
DE4203646 1992-02-08
DE19924217220 DE4217220C1 (en) 1992-05-23 1992-05-23 Electrochemical surface treatment - with a separate precipitation zone screened from a microwave heating zone
DE4217220 1992-05-23

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EP0555640A1 EP0555640A1 (en) 1993-08-18
EP0555640B1 true EP0555640B1 (en) 1997-04-16

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Publication number Priority date Publication date Assignee Title
DE19602182C2 (en) * 1996-01-23 1998-08-13 Technotrans Gmbh Method and device for thermal process control in the electrolytic coating of tools for the production of CD data carriers
DE69911504T2 (en) * 1998-01-12 2004-07-08 Koninklijke Philips Electronics N.V. METHOD FOR ELECTROCHEMICALLY MACHINING A WORKPIECE

Citations (1)

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Publication number Priority date Publication date Assignee Title
WO1993002224A1 (en) * 1991-07-19 1993-02-04 The University Of Hull Coating substrates

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Publication number Priority date Publication date Assignee Title
AT45457B (en) * 1909-08-30 1910-12-27 Louis John Hunt AC induction motor.
DE3138072C1 (en) * 1981-09-24 1982-11-04 Siemens AG, 1000 Berlin und 8000 München Process for heating aluminizing baths with aprotic electrolit systems
US4593169A (en) * 1984-03-05 1986-06-03 Thomas Perry W Water heater
FR2643829B1 (en) * 1989-03-06 1994-04-01 Prolabo WET CHEMICAL REACTION APPARATUS HAVING A CHIMNEY PROVIDED WITH A MICROWAVE PROPAGATION BARRIER
US5173169A (en) * 1991-05-08 1992-12-22 Aqua Dynamics Group Corp. Electroplating method and apparatus

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Publication number Priority date Publication date Assignee Title
WO1993002224A1 (en) * 1991-07-19 1993-02-04 The University Of Hull Coating substrates

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EP0555640A1 (en) 1993-08-18

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