EP0488370A2 - Gyroscope utilisant un bâton circulaire comme vibrateur piézoélectrique - Google Patents

Gyroscope utilisant un bâton circulaire comme vibrateur piézoélectrique Download PDF

Info

Publication number
EP0488370A2
EP0488370A2 EP91120513A EP91120513A EP0488370A2 EP 0488370 A2 EP0488370 A2 EP 0488370A2 EP 91120513 A EP91120513 A EP 91120513A EP 91120513 A EP91120513 A EP 91120513A EP 0488370 A2 EP0488370 A2 EP 0488370A2
Authority
EP
European Patent Office
Prior art keywords
electrodes
rod
piezoelectric
circular rod
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91120513A
Other languages
German (de)
English (en)
Other versions
EP0488370B1 (fr
EP0488370A3 (en
Inventor
Hiroshi Shimizu
Tetsuo c/o Tokin Corporation Yoshida
Chikara c/o Tokin Corporation Mashiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3023844A external-priority patent/JP2660940B2/ja
Priority claimed from JP3053721A external-priority patent/JP2557286B2/ja
Application filed by Tokin Corp filed Critical Tokin Corp
Publication of EP0488370A2 publication Critical patent/EP0488370A2/fr
Publication of EP0488370A3 publication Critical patent/EP0488370A3/en
Application granted granted Critical
Publication of EP0488370B1 publication Critical patent/EP0488370B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams

Definitions

  • the present invention relates to gyroscopes for use in attitude control systems, navigation systems, and others, and, in particular, to gyroscopes using piezoelectric vibrators or transducers.
  • the piezoelectric material is used in an electromechanical transducer. Such a transducer is called a piezoelectric transducer.
  • the piezoelectric transducer can convert an electric energy into a mechanical energy or vibration and can convert the mechanical energy or vibration into an electrical energy or signal.
  • the piezoelectric transducer is used in a gyroscope.
  • the gyroscope using the piezoelectric transducer utilizes the Coriolis' force.
  • the piezoelectric transducer drives a vibrating body.
  • the vibrating body is rotated at a rotational speed under the condition that the vibrating body vibrates in a direction, the Coriolis' force is generated in a direction perpendicular to the vibration.
  • the vibrating body is further vibrated in the perpendicular direction due to the Coriolis' force.
  • the vibration due to the Coriolis' force is converted by the piezoelectric transducer into an electric signal representative of the rotation speed.
  • one or more piezoelectric transducers are fixedly mounted by use of adhesive onto a metallic vibrating body as described in detail hereinafter with reference to the drawing.
  • the known gyroscope is difficult to be produced with a constant accuracy because of use of the adhesive.
  • a piezoelectric vibrator for use in a gyroscope which comprises a circular rod of a piezoelectric material, the circular rod having a circular cylindrical outer surface, a central axis along a longitudinal direction and a resonant frequency, and a plurality of elongated electrodes formed on the outer surface in parallel with each other along the central axis, the circular rod being polarized in a direction from each one of a particular one of the electrodes and other odd-numbered electrodes counted from the particular electrode to two even-numbered electrodes adjacent to the each one electrode.
  • a gyroscope system comprises a piezoelectric vibrator.
  • the vibrator comprises a circular rod of a piezoelectric material, the circular rod having a circular cylindrical outer surface, a central axis along a longitudinal direction and a resonant frequency, and a plurality of elongated electrodes formed on the outer surface in parallel with each other along the central axis, the circular rod being polarized in a direction from each one of a particular one of the electrodes and other odd-numbered electrodes counted from the particular electrode to two even-numbered electrodes adjacent to the each one electrode.
  • the gyroscope system further comprises driving means for supplying a driving signal with a frequency corresponding to the resonant frequency to predetermined ones of the electrodes to vibrate the circular rod in a particular diametric direction, specific ones of the electrodes producing output signals due to vibration caused by the Coriolis' force generated by rotation of the circular rod at a rotational speed, and means coupled with the specific electrodes responsive to the output signals for producing a detected signal representative of the rotational speed.
  • a known gyroscope shown therein includes a tuning fork which comprises two vibrating reeds 101 and 101'. Additional vibrating reeds 102 and 102' are mounted onto top ends of vibrating reeds 101 and 101', respectively, so that the additional vibrating reeds 102 and 102' vibrate in a direction perpendicular to the vibration of the vibrating reeds 101 and 101'.
  • the tuning fork including the additional vibrating reeds has a resonant frequency.
  • piezoelectric transducers 103 through 106 are mounted and fixed by adhesive onto surfaces of those vibrating reeds 101, 101', 102 and 102', respectively.
  • Each of piezoelectric transducers 103 through 106 comprises a thin piezoelectric plate polarized in a direction of the thickness and electrodes formed on both surfaces.
  • piezoelectric transducers 103 and 104 When piezoelectric transducers 103 and 104 are applied with, as a driving voltage, an alternating voltage having a frequency corresponding to the resonant frequency, the vibrating reeds 101 and 101' are driven to vibrate in thickness direction shown at arrow X, and additional vibrating reeds 102 and 102' are also vibrated in X direction.
  • another known gyroscope shown therein comprises a vibrator of a rectangular metallic rod 107 and two piezoelectric transducers 108 and 109 mounted and fixed by adhesive onto two adjacent surfaces of the rectangular metallic rod 107.
  • the rectangular metallic rod 107 is able to vibrate in two directions X and Y perpendicular to each other and perpendicular to the adjacent surfaces of the rectangular metallic rod 107 with a resonant frequency.
  • Each of the piezoelectric transducers 108 and 109 is made similar to the piezoelectric transducers 103 through 106 in Fig. 1.
  • the piezoelectric transducer 108 When the piezoelectric transducer 108 is supplied with a driving voltage having a frequency corresponding to the resonant frequency, the metallic rod 107 is driven to vibrate in the X direction perpendicular to the surface on which the piezoelectric transducer 108 is mounted. Under the condition, when the metallic rod 107 is rotated at a rotating speed, the Coriolis' force is generated in the perpendicular direction Y and vibrates the metallic rod 107 in the Y direction. Accordingly, the other piezoelectric transducer 109 produces an output voltage in proportion to the rotating speed.
  • another known gyroscope comprises a vibrator of triangular metallic rod 110 and three piezoelectric transducers 111 through 113.
  • the metallic rod 110 is able to vibrate at a resonant frequency in three directions perpendicular to the three surfaces of the triangular rod 110, respectively.
  • Each of the three piezoelectric transducers 111 through 113 is made similar to each of the piezoelectric transducers 103 through 106 in Fig. 1.
  • the piezoelectric effect is reversible. Therefore, when the triangular rod 110 is vibrating at the resonant frequency in X direction by any other external force, the piezoelectric transducer 111 produces an output voltage corresponding to a level of the vibration.
  • the triangular rod 110 when the driving voltage v i is applied to the adjacent piezoelectric transducers 111 and 112 with the same phase, the triangular rod 110 is driven to vibrate in the X direction by the piezoelectric transducers 111 and also vibrate by the other piezoelectric transducers 112 in the direction Y perpendicular to the surface on which the piezoelectric transducers 112 is mounted. As a result, the triangular rod 110 vibrates in a resultant direction as shown by an arrow R which is perpendicular to the other surface on which the remaining piezoelectric transducer 113 is mounted.
  • a voltage difference (v i + v ⁇ c ) - (v i + v c ) is present across terminals of both piezoelectric transducers 111 and 112.
  • the voltage difference is proportional to the rotational speed of the triangular rod 110.
  • the piezoelectric vibrator comprises a circular rod 10 of a piezoelectric material such as BaTiO3 and PbTi x Zr 1-x O3.
  • the rod 10 is a rigid lengthy body but may be a hollow lengthy body like a tube or a pipe.
  • the rod 10 has a circular cylindrical outer surface and a central axis in a longitudinal direction and is able to make a bending vibration in any radial direction at a resonant frequency fr which is determined by the following equation:
  • a plurality of (2n, n being an integer larger than 2) elongated electrodes 20 are formed on the outer surface of the rod 10 and equiangularly spaced from each other to extend in parallel with each other along the central axis of the rod 10.
  • the electrodes 20 can be formed on the rod 10 by the screen printing method which is per se well known in the art.
  • the outer surface of the rod 10 is entirely covered with a layer of an electrode forming material by, for example, plating, and the layer is partially removed by, for example, the photoetching technique which is also well known in the art.
  • the elongated electrodes 20 are formed.
  • the number of the electrodes 20 is not limited but is preferably six or eight in view of easiness and accuracy of the electrode forming operation. Description will be made as to an example having six electrodes below.
  • the first group is a set of three electrodes 11, 13 and 15 which are odd-numbered electrodes when counted from the electrode 11, and the second group is another set of the remaining electrodes 12, 14 and 16 which are even-numbered ones.
  • the electrodes 11, 13 and 15 in the first group are electrically connected to a common terminal 21 by electric cables.
  • the electrodes 12, 14 and 16 in the second group are electrically connected to a common terminal 22 by electric cables. DC voltage are applied across the terminals 21 and 22 so as to polarize the piezoelectric rod 10.
  • the piezoelectric rod 10 is polarized in the directions as illustrated by dotted arrows in the figure. That is, the rod 10 is polarized at spaces G1-G6 between adjacent ones of the electrodes 11-16. The polarization at each space is directed from one of the electrodes 12, 14 and 16 of the second group to one of the electrodes 11, 13 and 15 of the first group which determine the space.
  • the piezoelectric rod 10 when an alternative voltage of a frequency corresponding to the resonant frequency is applied across the adjacent electrodes 11 and 12 as a driving voltage v i , the piezoelectric rod 10 expands and contracts at the space portion G1 between the adjacent electrodes 11 and 12.
  • the space portion G1 when an electric field is generated by the driving voltage in the direction polarized at the space portion G1, the space portion G1 is expanded.
  • the piezoelectric rod 10 makes the bending vibration in a diametric direction as shown by an arrow X along a plane which connects a middle of the space portion G1 and the center axis of the rod 10.
  • the piezoelectric rod 10 when the driving voltage v i is further applied across another adjacent electrodes 13 and 12 in addition to the adjacent electrodes 11 and 12 in Fig. 10, the piezoelectric rod 10 further makes the bending vibration in another diametric direction as shown by an arrow Y along a plane which connects a middle of the space portion G2 and the center axis of the rod 10.
  • the X direction vibration and the Y direction vibration are composed to each other and the piezoelectric rod 10 vibrates at a resultant direction as shown by an arrow R in Fig. 12.
  • the resultant direction R is a diametric direction along a plane which connects a center of the central electrode 12 and the center axis of the rod 10.
  • electrodes 16, 15 and 14 are symmetrically located to the electrodes 11, 12 and 13 with reference to a diameter perpendicular to the vibrating direction R. Accordingly, when the rod 10 is vibrated in the R direction due to application of the driving voltage v i across the electrodes 11 and 12 and across the electrodes 13 and 12, an output voltage is generated across the electrodes 15 and 16 and across the electrodes 14 and 15 in the similar reason in Fig. 10.
  • the output voltage is proportional to a level of the vibration and is determined as v i if neglecting the converting loss.
  • the driving voltage v i is applied across the adjacent electrodes 11 and 12 as in Fig. 11 and the driving voltage v i is also applied across the adjacent electrodes 13 and 12 but as a driving voltage v ⁇ i in the reversed phase in comparison with Fig. 11. Therefore, the vibration in the X direction is generated similar to that in Fig. 11 but the vibration in the Y direction is generated as a vibration Y' of a reversed phase in comparison with Fig. 11. Accordingly, the vibrations in the X and the Y' directions are composed and the piezoelectric rod 10 is vibrated in a resultant direction R' as shown in Fig. 14. it will be understood that the direction R' is perpendicular to the direction R in Fig. 12.
  • the other electrodes 16, 15 and 14 are also symmetrically located to the electrodes 11, 12 and 13 with reference to a diameter in the vibrating direction R'. Accordingly, when the rod 10 is vibrated in the R' direction due to application of the driving voltages v i and v ⁇ i across the electrodes 11 and 12 and the electrodes 13 and 12, respectively, output voltages of reversed phases are generated across the electrodes 15 and 16 and across the electrodes 14 and 15, respectively, in the similar reason in Fig. 12.
  • the output voltages are proportional to the vibration in the R' direction and are determined as v i and v ⁇ i if neglecting the converting loss.
  • a piezoelectric gyroscope system uses the piezoelectric vibrator as described above in connection with Figs. 8 to 14.
  • the electrodes 11 and 13 are grounded and the driving voltage v i is applied to the electrode 12. Accordingly, the piezoelectric rod 10 vibrates in the direction R as described above in connection with Figs. 11 and 12.
  • the electrodes 16 and 14 are connected to a comparator 23 or a differential amplifier and the electrode 15 is grounded.
  • an output voltage v i is generated at the electrodes 16 and 14 due to the vibration in the R direction as described in connection with Fig. 12, and output voltages v c and v ⁇ c of reversed phases are produced at the electrodes 16 and 14 due to the vibration in the C direction as described in connection with Fig. 14.
  • the voltages (v i + v c ) and (v i + v ⁇ c ) are present at the electrodes 16 and 14.
  • the comparator 23 produces a voltage difference between the output voltages (v i + v c ) and (v i + v ⁇ c ) as a detection output (2v c ) which is proportional to the rotating speed.
  • the vibrator is not symmetric and the comparator 23 produces an error voltage even when the transducer is not rotated.
  • the error voltage varies in dependence on the dimensional error.
  • driving voltages applied to the electrodes 11, 12 and 13 are made adjustable.
  • the central electrode 12 is grounded and the electrodes 11 and 13 are supplied with driving voltages v i and v i ' which are adjustable.
  • the piezoelectric rod 10 vibrates in the X direction due to the application of v i across the electrodes 11 and 12 and also in the Y direction due to the application of v i ' across the electrodes 13 and 12.
  • the vibration level in each of the X and Y direction can be controlled by adjusting each of voltage levels of v i and v i '.
  • the resultant vibrating direction R of X and Y directions can be adjusted to coincide with a diametric direction along a plane which connects a center line of the central electrode 12 and the center axis of the rod 10 as shown in Fig. 17.
  • a source voltage v o is divided by a variable resistor 21 into v i and v i ' which are applied to the electrodes 11 and 13, respectively.
  • the voltages v i and v i ' can be controlled by adjusting the variable resistor 21.
  • the source voltage v o is transformed into v i and v i ' through a voltage transformer 22 which are applied to the electrodes 11 and 13.
  • the transformer 22 has an adjusting core which is movable as shown by an arrow so as to vary a coupling factor between a primary and a secondary winding of the transformer.
  • the voltages v i and v i ' can be adjusted by operation of the adjusting core.
  • the first group is a set of four electrodes 11, 13, 15 and 17 which are odd-numbered electrodes when counted from the electrode 11, and the second group is another set of the remaining electrodes 12, 14, 16 and 18 which are even-numbered ones.
  • the electrodes 11, 13, 15 and 17 in the first group are electrically connected to a common terminal 21 by electric cables.
  • the electrodes 12, 14, 16 and 18 in the second group are electrically connected to a common terminal 22 by electric cables. DC voltage are applied across the terminals 21 and 22 so as to polarize the piezoelectric rod 10.
  • the piezoelectric rod 10 is polarized in the directions as illustrated by dotted arrows in the figure. That is, the rod 10 is polarized at spaces G1-G8 between adjacent ones of the electrodes 11-18. The polarization at each space is directed to one of the electrodes 12, 14, 16 and 18 of the second group from one of the electrodes 11, 13, 15 and 17 of the first group which determine the space.
  • the piezoelectric rod 10 when an alternative voltage of a frequency corresponding to the resonant frequency is applied across the adjacent electrodes 11 and 12 as a driving voltage v i , the piezoelectric rod 10 expands and contracts at the space portion G1 between the adjacent electrodes 11 and 12, as in Fig. 10. As a result, the piezoelectric rod 10 makes the bending vibration in a diametric direction as shown by an arrow X1 along a plane which connects a middle of the space portion G1 and the center axis of the rod 10.
  • the piezoelectric rod 10 when the driving voltage v i is further applied across another adjacent electrodes 13 and 12 in addition to the adjacent electrodes 11 and 12 in Fig. 21, the piezoelectric rod 10 further makes the bending vibration in another diametric direction as shown by an arrow X2 along a plane which connects a middle of the space portion G2 and the center axis of the rod 10.
  • the X1 direction vibration and the X2 direction vibration are composed to each other and the piezoelectric rod 10 vibrates at a resultant direction as shown by an arrow R in the figure.
  • the resultant direction R is a diametric direction along a plane which connects a center of the central electrode 12 and the center axis of the rod 12.
  • the driving voltage v i is applied across electrodes 11-13 as in Fig. 22. Therefore, the rod 10 is vibrated in X1 and X2 directions as in Fig. 22. Further, the driving voltage v i is also applied across the electrodes 15-17 with a reversed phase in comparison with that to electrodes 11-13. Therefore, the driving voltage to the electrodes 15-17 is represented by v ⁇ i .
  • the electrodes 15-17 are positioned symmetric with the electrodes 11-13 with reference to the center of the rod 10. Accordingly, the rod 10 is further vibrated in the directions shown by arrows X3 and X4. As a result, the rod 10 is vibrated in a resultant direction R1 which is similar to the direction R.
  • the driving voltages of reversed phases v i and v ⁇ i are applied to the electrodes 13-15 and 17-19 which are positioned different by 90 angular degrees from electrodes to which v i and v ⁇ i are applied in Fig. 23. Accordingly, the rod 10 vibrates in the similar pattern to Fig. 23 but vibrating directions Y1, Y2, Y3, and Y4 are shifted by 90 angular degrees from X1, X2, X3 and X4 in Fig. 23. Therefore, a resultant vibrating direction R2 is also different by 90 angular degrees from R1 in Fig. 23.
  • the reversed-phase output voltages are also generated at electrodes 14 and 18 when the rod 10 is vibrating in the R2 direction by any other external force.
  • a piezoelectric gyroscope system uses the piezoelectric vibrator as described above in connection with Figs. 20 to 24.
  • the driving voltages v i and v ⁇ i are applied to the vibrator in the similar manner as shown in Fig. 23. Accordingly, the piezoelectric rod 10 vibrates in the direction R1 as described above in connection with Fig. 23.
  • the electrodes 14 and 18 are connected to a comparator 23 or a differential amplifier.
  • the comparator 23 produces a voltage differences between the output voltages v c and v ⁇ c as a detection output (2v c ) which is proportional to the rotating speed.
  • the piezoelectric vibrator has an even number of electrodes.
  • the electrodes When an odd number of electrodes are formed on a circular rod of a piezoelectric material to form the vibrator, the electrodes must be located within an angular region of (360 angular degrees x 2/3) on an outer surface of the rod.
  • the number of the electrodes is not limited but is preferably five or seven in view of easiness and accuracy of the electrode forming operation. Description will be made as to an example having five electrodes below.
  • five electrodes 11 through 15 are formed at equiangularly spaced positions within an angular region of (360 angular degrees x 2/3) on the outer surface of the rod 10.
  • Those electrodes 11-15 are classified into a first and a second groups.
  • the first group is a set of three electrodes 11, 13 and 15 which are odd-numbered electrodes when counted from the electrode 11, and the second group is another set of the remaining electrodes 12 and 14 which are even-numbered ones.
  • the electrodes 11, 13 and 15 in the first group are electrically connected to a common terminal 21 by electric cables.
  • the electrodes 12 and 14 in the second group are electrically connected to a common terminal 22 by electric cables.
  • the piezoelectric rod 10 is polarized in the directions as illustrated by dotted arrows in the figure. That is, the rod 10 is polarized at spaces G1-G5 between adjacent ones of the electrodes 11-15. The polarization at each space is directed from one of the electrodes 11, 13 and 15 of the first group to one of the electrodes 12 and 14 of the second group which determine the space.
  • the piezoelectric rod 10 expands and contracts at the space portion G1 between the adjacent electrodes 11 and 12 in the similar manner as in Fig. 10.
  • the piezoelectric rod 10 makes the bending vibration in a diametric direction as shown by an arrow X along a plane which connects a middle of the space portion G1 and the center axis of the rod 10.
  • the piezoelectric rod 10 Since the piezoelectric effect is reversible, the piezoelectric rod 10 is vibrating in the direction X by any other external force, an output voltage is produced across the adjacent electrodes 11 and 12 in proportion to a level of the vibration.
  • the output voltage is proportional to a level of the vibration and is determined as v i if neglecting the converting loss.
  • the piezoelectric rod 10 when the driving voltage v i is further applied across another adjacent electrodes 13 and 12 in addition to the adjacent electrodes 11 and 12 in Fig. 27, the piezoelectric rod 10 further makes the bending vibration in another diametric direction as shown by an arrow Y along a plane which connectes a middle of the space portion G2 and the center axis of the rod 10.
  • the X direction vibration and the Y direction vibration are composed to each other and the piezoelectric rod 10 vibrates at a resultant direction as shown by an arrow R in Fig. 29.
  • the resultant direction R is a diametric direction along a plane which connects a center of the central electrode 12 and the center axis of the rod 12.
  • electrodes 11, 13 and 15 of the first group are grounded and the other electrodes 12 and 14 of the second group are supplied with the driving voltage v i in the same phase. Accordingly, the piezoelectric rod 10 vibrates in the direction shown at X' due to the application of the driving voltage v i across the electrode 12 and each of electrodes 11 and 13 as described above in connection with Figs. 28 and 29. In the similar manner, the piezoelectric rod 10 vibrates in a direction (shown by Y') symmetric with the direction X' due to the application of the driving voltage v i across the electrode 14 and each of electrodes 13 and 15.
  • the X' direction vibration and the Y' direction vibration are composed, so that the piezoelectric rod 10 vibrates in a resultant direction as shown by an arrow R' in the figure.
  • the direction R' is a diametric direction along a plane which connects a center line of the central electrode 13 and the center axis of the rod 10.
  • the odd number of electrodes 11-15 should be formed within the angular range of (360 angular degrees x 2/3).
  • the piezoelectric rod 10 vibrates in the X' direction and Y' direction similar to Fig. 30.
  • the phase of the vibration in the X' and Y' directions is reversed.
  • the Y' direction is shown by an arrow Y'' in the figure which is reversed in comparison with the arrow Y' in Fig. 30. Therefore, the X direction vibration and the Y'' direction vibration are composed, so that the piezoelectric rod 10 vibrates in a resultant direction as shown by an arrow R'' in the figure.
  • the direction R'' is perpendicular to the direction R' in Fig. 30.
  • Fig. 31 when the rod 10 is vibrated in the R'' direction by any other external force, an output voltage is generated at electrodes 12 and 14 with a reversed phase.
  • the output voltage is proportional to a level of the vibration and is determined as v i and v ⁇ i if neglecting the converting loss.
  • a piezoelectric gyroscope system uses the piezoelectric vibrator as described above in connection with Figs. 26 to 31.
  • the electrodes 11, 13 and 15 are grounded and the driving voltage v i is applied to the electrodes 12 and 14 in the same phase. Therefore, the piezoelectric rod is vibrated in the direction R' similar to Fig. 30.
  • the electrodes 12 and 14 are connected to a comparator 23.
  • the comparator 23 compares the voltages on the electrodes 12 and 14 to produce an error signal.
  • the error signal is a detection voltage representative of the rotational speed of the rod 10.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
EP91120513A 1990-11-29 1991-11-29 Gyroscope utilisant un bâton circulaire comme vibrateur piézoélectrique Expired - Lifetime EP0488370B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP335987/90 1990-11-29
JP33598790 1990-11-29
JP3023844A JP2660940B2 (ja) 1990-11-29 1991-01-25 圧電振動ジャイロ
JP23844/91 1991-01-25
JP53721/91 1991-02-27
JP3053721A JP2557286B2 (ja) 1991-02-27 1991-02-27 圧電振動ジャイロ

Publications (3)

Publication Number Publication Date
EP0488370A2 true EP0488370A2 (fr) 1992-06-03
EP0488370A3 EP0488370A3 (en) 1992-06-17
EP0488370B1 EP0488370B1 (fr) 1996-05-22

Family

ID=27284404

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91120513A Expired - Lifetime EP0488370B1 (fr) 1990-11-29 1991-11-29 Gyroscope utilisant un bâton circulaire comme vibrateur piézoélectrique

Country Status (3)

Country Link
US (1) US5336960A (fr)
EP (1) EP0488370B1 (fr)
DE (1) DE69119715T2 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5874674A (en) * 1988-08-12 1999-02-23 Murata Manufacturing Co., Ltd. Vibrator including piezoelectric electrodes or detectors arranged to be non-parallel and non-perpendicular to coriolis force direction and vibratory gyroscope using the same
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
JP3016986B2 (ja) * 1993-02-17 2000-03-06 三菱電機株式会社 振動ジャイロ用検出回路
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
DE19544338A1 (de) * 1994-11-28 1996-05-30 Nippon Denso Co Winkelgeschwindigkeitssensor
JPH08247770A (ja) * 1995-03-14 1996-09-27 Murata Mfg Co Ltd 振動ジャイロ
JPH09113279A (ja) * 1995-10-16 1997-05-02 Murata Mfg Co Ltd 振動ジャイロ
JP2996157B2 (ja) * 1995-10-12 1999-12-27 株式会社村田製作所 振動ジャイロ
US5698784A (en) * 1996-01-24 1997-12-16 Gyration, Inc. Vibratory rate gyroscope and methods of assembly and operation
US5760304A (en) * 1997-02-18 1998-06-02 Litton Systems, Inc. Vibratory rotation sensor with AC forcing voltages
US6063200A (en) * 1998-02-10 2000-05-16 Sarcos L.C. Three-dimensional micro fabrication device for filamentary substrates
US6457358B1 (en) * 1999-03-18 2002-10-01 Board Of Regents Of The University Of Nebraska Tubular coriolis force driven piezoelectric gyroscope system, and method of use
US6777857B1 (en) 1999-03-18 2004-08-17 Board Of Regents Of The University Of Nebraska Piezoelectric gyroscope system, and method of use
US6140748A (en) * 1999-03-18 2000-10-31 Board Of Regents Of The University Of Nebraska High voltage sensitivity coriolis force driven peizoelectric transformer-gryoscope system, and method of use
US7890433B2 (en) * 2000-06-30 2011-02-15 Tara Chand Singhal Private and secure payment system
US7107842B2 (en) * 2003-05-10 2006-09-19 The Regents Of The University Of California Angular rate sensor using micro electromechanical haltere
JP4967663B2 (ja) * 2007-01-09 2012-07-04 ソニー株式会社 振動型ジャイロセンサ、制御回路及び電子機器
JP5602194B2 (ja) * 2012-07-19 2014-10-08 京セラドキュメントソリューションズ株式会社 電荷供給部材及びそれを備えた画像形成装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2111209A (en) * 1981-12-08 1983-06-29 Nat Res Dev Piezoelectric oscillatory gyroscopes
EP0153189A2 (fr) * 1984-02-22 1985-08-28 National Research Development Corporation Appareils gyroscopiques
DE3926504A1 (de) * 1988-08-12 1990-02-15 Murata Manufacturing Co Schwingungserreger und diesen verwendender schwingkreisel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1861862A (en) * 1929-06-07 1932-06-07 Hund August Piezo-electric crystal oscillator system
FR2517823B1 (fr) * 1981-12-08 1986-10-10 Nat Res Dev Gyroscope oscillant
JPH0236766A (ja) * 1988-07-26 1990-02-06 Matsushita Electric Works Ltd インバータ用制御回路
US5081391A (en) * 1989-09-13 1992-01-14 Southwest Research Institute Piezoelectric cylindrical transducer for producing or detecting asymmetrical vibrations

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2111209A (en) * 1981-12-08 1983-06-29 Nat Res Dev Piezoelectric oscillatory gyroscopes
EP0153189A2 (fr) * 1984-02-22 1985-08-28 National Research Development Corporation Appareils gyroscopiques
DE3926504A1 (de) * 1988-08-12 1990-02-15 Murata Manufacturing Co Schwingungserreger und diesen verwendender schwingkreisel

Also Published As

Publication number Publication date
EP0488370B1 (fr) 1996-05-22
DE69119715T2 (de) 1996-10-31
DE69119715D1 (de) 1996-06-27
EP0488370A3 (en) 1992-06-17
US5336960A (en) 1994-08-09

Similar Documents

Publication Publication Date Title
US5336960A (en) Gyroscope using circular rod type piezoelectric vibrator
US5912524A (en) Vibratory gyroscope
JP4690652B2 (ja) マイクロ電子機械システム
US5847487A (en) Vibration gyroscope and image blur prevention apparatus using the same
EP0427177B1 (fr) Vibrateur
GB2158579A (en) Angular rate sensor system
KR100328532B1 (ko) 각속도검출장치
US7095156B2 (en) Actuator
KR19980086521A (ko) 단일결정 진동 비임 각속도 센서
US5448128A (en) Vibration type driving device
US5625145A (en) Angular velocity detection method and angular velocity detection apparatus
EP0469883B1 (fr) Moteur actionné par vibrations
JPS61221584A (ja) 振動波モ−タの駆動回路
KR100210707B1 (ko) 진동 자이로스코프
JP2660940B2 (ja) 圧電振動ジャイロ
US6092417A (en) Gyrosensor
JPH08201066A (ja) 振動型ジャイロスコープ
JPH0642972A (ja) 圧電振動ジャイロ及び圧電振動ジャイロの共振周波数の調整方法
JP3473241B2 (ja) 振動ジャイロおよび振動ジャイロの製造方法
JPH08278147A (ja) 振動ジャイロ
JPH07190782A (ja) 振動角速度計
JP3783894B2 (ja) 圧電振動角速度計用振動子
JP3371608B2 (ja) 振動ジャイロ
JPH08193835A (ja) 振動型ジャイロスコープ
JP3136545B2 (ja) 圧電振動ジャイロ

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR GB IT

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): DE FR GB IT

17P Request for examination filed

Effective date: 19921023

17Q First examination report despatched

Effective date: 19931111

19U Interruption of proceedings before grant

Effective date: 19941117

19W Proceedings resumed before grant after interruption of proceedings

Effective date: 19951114

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: TOKIN CORPORATION

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

ITF It: translation for a ep patent filed

Owner name: BARZANO' E ZANARDO MILANO S.P.A.

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB IT

ET Fr: translation filed
REF Corresponds to:

Ref document number: 69119715

Country of ref document: DE

Date of ref document: 19960627

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20021104

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20021128

Year of fee payment: 12

REG Reference to a national code

Ref country code: FR

Ref legal event code: CD

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20031129

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20031129

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040730

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20041125

Year of fee payment: 14

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20051129

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060601