EP0471695A1 - Entrainement hydraulique. - Google Patents

Entrainement hydraulique.

Info

Publication number
EP0471695A1
EP0471695A1 EP90906855A EP90906855A EP0471695A1 EP 0471695 A1 EP0471695 A1 EP 0471695A1 EP 90906855 A EP90906855 A EP 90906855A EP 90906855 A EP90906855 A EP 90906855A EP 0471695 A1 EP0471695 A1 EP 0471695A1
Authority
EP
European Patent Office
Prior art keywords
drive device
input shaft
setpoint
measuring system
hydraulic drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90906855A
Other languages
German (de)
English (en)
Other versions
EP0471695B1 (fr
Inventor
Hans Hartmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to AT90906855T priority Critical patent/ATE93584T1/de
Publication of EP0471695A1 publication Critical patent/EP0471695A1/fr
Application granted granted Critical
Publication of EP0471695B1 publication Critical patent/EP0471695B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/28Means for indicating the position, e.g. end of stroke
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F15B9/09Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor with electrical control means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T408/00Cutting by use of rotating axially moving tool
    • Y10T408/65Means to drive tool
    • Y10T408/675Means to drive tool including means to move Tool along tool-axis
    • Y10T408/6757Fluid means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T409/00Gear cutting, milling, or planing
    • Y10T409/40Broaching
    • Y10T409/406475Cutter infeed means
    • Y10T409/40665Imparting rectilinear motion to cutter
    • Y10T409/407Fluid powered means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00Turning
    • Y10T82/25Lathe
    • Y10T82/2531Carriage feed
    • Y10T82/2533Control

Definitions

  • the invention relates to a hydraulic drive device for the infeed and feed and the retraction movements of a tool head of a machine tool and with the other generic features mentioned in the preamble of claim 1.
  • Such a hydraulic drive device is known from DE 34 38 600 AI.
  • the piston of a hydraulic motor which is firmly coupled to the tool, is controlled by means of a follow-up control valve which operates with an electromechanically controllable position setpoint specification for the movable drive element of the hydraulic motor and with mechanical actual position feedback.
  • a threaded spindle and a spindle nut which meshes with its thread are provided for the position setpoint specification and actual value feedback, one of these two elements - the spindle nut system - being drivable by means of an electric motor in the sense of the position setpoint specification and the other of these two elements can be driven in the sense of the actual position feedback, such that that if the change rate of the position setpoint specification and the position actual value feedback are the same, the spindle and the nut rotate at the same speed and do not perform any axial relative movements against one another.
  • a valve actuating element which, when the spindle and the nut rotate at different speeds, also carries out relative movements of the nut against the spindle and thereby the valve in the sense of an increase in the flow cross sections of supply paths via which the Pressure medium flows to achieve the desired direction of movement, controlled when the rate of change of the actual position is less than the change in the position setpoint specification, and keeps these flow cross-sections constant if and as long as these rates of change are the same.
  • the signals required for the motion control of the electric motor are generated by an electronic control unit with an interface for an NC or CNC control.
  • a monitoring device is provided in which the distance of the control valve actuator from its basic position is monitored and if this distance falls below a predefinable, defined minimum value, which is equivalent to the fact that the tool approaches the dead center, triggers a position-characteristic monitoring signal from a proximity switch.
  • the overrun control valve is fully open , that is if the following error ⁇ S of the rule Circle becomes very large, which can be taken as an indication that there is a collision between the drive element and an obstacle, and the drive device is then switched off.
  • the direction of the movement of the drive element is also taken into account here, that is to say it can be seen from the signal combinations generated by the monitoring device whether a collision has taken place in the “forward” or “backward” direction.
  • the object of the invention is therefore to improve a drive device of the type mentioned in such a way that a continuous and continuous detection of the following error ⁇ S is possible.
  • the monitoring device comprises a rotary position transmitter which, for.
  • a rotary position transmitter which, for.
  • an output is generated in digital format which is a direct measure of the total number of revolutions made by the setpoint input shaft and their azimuthal position within each revolution
  • an electronic displacement sensor is also provided, the output of which is a direct measure of the axial deflection the setpoint input shaft compared to the neutral position of the same or the neutral position of the valve actuating element and thus a measure of the drag error ⁇ S by which the actual position of the tool or the drive element of the hydraulic motor lags behind its set position .
  • a meaningful and in this respect simple use of this knowledge can, for. B. consist in a large number of similar machining operations, which are repeated periodically, evaluated how large the following error ⁇ S is at a certain desired position of the tool driven by the drive device. If it is shown here that the following error ⁇ s, based on this specific target position of the tool, increases continuously over several work processes, this is an indication that the tool is becoming "bad" - blunt - and must therefore be replaced immediately got to. To this extent, the drive device according to the invention offers the possibility of recognizing an impending malfunction of the machine equipped with it as a whole and of course also the - timely - avoidance of this malfunction, which could be linked to damage to the machine.
  • This control unit enables the drive device z. B. in the sense of the best possible compromise between desired high dynamics and gentle operation.
  • the preferred design of the rotary position encoder provided for monitoring the position setpoint specification and the arrangement of its rotating encoder elements on the setpoint input shaft of the overrun control valve of the drive device has the advantage of very precise detection of the relevant position setpoint - Finally - of the tool, since no gears or transmission elements, which may be subject to slip or play, are connected between the position setpoint input shaft and the rotary position transmitter.
  • the drive device can be realized with low axial dimensions.
  • the working medium of the drive device can be used in a simple manner for cooling the control motor, which is thereby controlled with higher electrical power can, which in turn benefits the dynamics of the entire drive device.
  • a power output stage of the electronic control device provided for the operational control of the drive device, which is intended for direct control of the control motor, can also be accommodated in a - unpressurized - leakage oil space of the device and can thus be cooled in a simple manner, it being understood that the electrical supply and control lines as well as the signal lines, via which the sensor elements of the rotary position transmitter and the displacement transmitter are connected to the electronic control unit, must be guided out of the housing of the drive device in an insulated and liquid-tight manner, but this is technically problem-free.
  • the evaluation of the displacement sensor output signal provided in accordance with claim 11 means that the neutral position of the valve actuating element of the follower control valve can not be assigned to a specific output signal level of the displacement sensor, which means that time-consuming adjustment and calibration processes can be dispensed with.
  • FIG. 1 shows a preferred exemplary embodiment of a hydraulic drive device according to the invention with a measurement system for the setpoint value of the piston position and for the following error of the control.
  • FIG. 2a shows details of a rotary encoder unit of the measuring system according to FIG. 1,
  • the follow-up control valve 12 and the measuring system are designed as a compact structural unit accommodated in a common housing 17, the follow-up Control valve 12, seen along the central axis 18 of the assembly 11, 12, 14, "between” the hydraulic motor 11 and the measuring system 14 is arranged.
  • the hydraulic motor 11 in the particular embodiment shown is designed as a linear hydraulic cylinder, the piston 16 of which is fixedly connected to the piston rod 19 within a section forming the housing 17 of this hydraulic cylinder 11 of the housing 17 delimits two drive pressure chambers 21 and 22 of the hydraulic cylinder 11 so that they can be moved in a pressure-tight manner, by means of which - by means of the follow-up control valve 12 controlled alternative connection to the high pressure (P) outlet 23 of the only schematically indicated pressure supply unit 24 or its - pressure-free tank T) port 26 of the drive piston 16 in the directions of movement represented by the arrows 27 and 28 - feed movement and retraction movement - can be driven.
  • P high pressure
  • the follow-up control valve 12 is a 4/3-way valve in its function, the neutral basic position 0 is its blocking position, in which both drive pressure chambers 21 and 22 of the hydraulic motor 11 both against the P connection 23 and against the T connection 26 of the pressure supply unit are blocked.
  • the drive pressure chamber 21 on the left in FIG. 1 is via a flow path 32 of the overrun Control valve 12 is connected to the - unpressurized - tank connection 26 of the pressure supply unit 24, while the other drive pressure chamber 22 of the hydraulic cylinder 11 is connected to the P pressure outlet 23 of the pressure supply unit 24 via the second flow path 33 which is effective in the functional position II of the follow-up control valve 12 .
  • the drive piston 16 of the hydraulic motor 11 moves in the direction of the arrow 28, according to FIG. 1 to the left.
  • a hollow shaft 37 is rotatably and axially displaceably mounted End section facing hydraulic motor 11 is provided with an internal thread 38 via which it meshes with a central, elongated threaded spindle 39, which is fixedly connected to drive piston 16 of hydraulic motor 11.
  • This hollow shaft 37 is for setting the position - Setpoint of the drive piston 16 of the hydraulic motor 11 - can be driven by means of an electric motor designated overall by 41, the power supply of which is controlled by electrical output signals of the electronic control unit 13 in the sense of the position setpoint specification.
  • this electric motor has a stator 42 fixed to the housing and an axially reciprocable rotor 43, the rotor shaft of which is formed by a section of the hollow shaft 37, which is connected to the rotor 43 so as to be fixed in terms of rotation and displacement .
  • the rotor 43 of the electric motor 41 is thus via the section 44 of the hollow shaft 37 axially penetrated by the threaded spindle 39 on the block-shaped central section 17 ′′ of the housing 17, on the one hand and on the other hand with a further section 46 of the hollow shaft 37 carrying the rotor 43 in a central bore 47 an intermediate wall 48 of the housing 17 rotatably mounted, which essentially delimits the space 49 occupied by the motor 41 and the overrun control valve 12 from the housing space 51 provided for accommodating the measuring system 14, these spaces 49 and 41, however, not being pressure-tight to one another Are completed, but overall form the leakage oil space of the drive device 10.
  • a generally designated 52 yoke-shaped valve actuating member which has two yoke legs 53 and 54 running parallel to one another which are firmly connected to each other by a guide rod 56 running parallel to the central longitudinal axis 18 of the drive device, which passes through a radially lateral guide bore 57 of the block-shaped, central housing part 17 "and is axially connected to each other via an actuating pin 58 or 59 Act on the sides of the valve piston 34, this support of the yoke legs 53 and 54 on the actuating pins 58 and 59 or the valve piston 34 being fully positive.
  • the two yoke legs 53 and 54 have mutually aligned bores 61 and 62 which are coaxial with the central longitudinal axis 18 of the drive device 10 and whose diameter is slightly larger than the outer diameter of the hollow shaft 37, so that the latter has sufficient clearance for its easy rotation these bores 61 and 62 of the yoke legs 53 and 54 of the valve actuating member 52 can pass through.
  • the valve actuating member 52 is axially free of play between radial driving flanges 66 and 67 of the hollow shaft 37 via ball bearings 63 and 64, which impart smooth rotation of the hollow shaft 37 relative to the valve actuating member 52.
  • the hydraulic motor starting from a rest position in which the overrun control valve 12 assumes its blocking position 0, e.g. B. the rest position shown, should perform a feed movement in the direction of arrow 27.
  • the electric drive motor 41 is driven by output signals from the electronic control unit 13 with that direction of rotation - the motor 41 can be driven in alternative directions of rotation - that its rotor 43 and with it the hollow shaft 37 - because of their thread engagement with the first one thread spindle 39 which remains at rest - experiences an axial displacement in the direction 28 opposite to the feed direction 27, which is also transmitted to the valve piston 34 of the follow-up control valve 12 via the valve actuating element 52, which also carries out this initial axial displacement of the hollow shaft 37 thereby reaches its functional position I assigned to the feed operation. Due to the resulting - increasing - pressurization of the one drive pressure chamber 21 of the hydraulic motor 11 on the left according to FIG.
  • the measuring system 14 for the explanation of which reference is now also made to the details of FIGS. 2a and 2b and 2c, comprises a total of 3 sensor elements 68, 69 and 71, which are essentially rotationally symmetrical in principle, and which are identical to those shown in FIG. 1 apparent assembly at an axial distance to each other and move rotationally firmly on the projecting into the receiving space 51 of the measuring system 14 • end portion 72 of the hollow shaft are arranged 37th
  • the first mechanical transmitter element 68 is in the form of a toothed wheel with teeth 73 running parallel to the central longitudinal axis 18, which trigger pulse-shaped AC voltage output signals of these sensor elements 74 and 75 when passing by electronic sensor elements 74 and 75 arranged fixed to the housing, i.e. Sequences of voltage pulses varying between a maximum and a minimum level, the pulse shape of which corresponds to the hollow shaft 37 or the rotor 43 of the electric motor 41 to a very good approximation of a sine wave at a predetermined speed.
  • So-called field plate sensors of known design are used as sensor elements 74 and 75, in which the amplitudes of the output signals are independent of the rotational speed of the mechanical transmitter elements 68, ie the signal level of their output signals varies between defined - upper and lower - extreme values , so that the output signals of the two sensor elements 74 and 75 can also be easily evaluated in terms of their level.
  • the two sensor elements 74 and 75 are arranged at such an azimuthal distance ⁇ ( f from one another that there is a phase shift of 90 ° between their output signals, so that continuous monitoring of the temporal course of the output signals of the two sensor elements 74 and 75 and the temporal changes (temporal differential quotients) of the same, the direction of rotation of the hollow shaft 37 can also be detected.
  • the gear-shaped transmitter element 68 and the sensor elements 74 and 75 assigned to it thus form an angular position measuring system, the accuracy of which is greater, the greater the number of teeth 73 equidistantly distributed over the circumference of the transmitter element 68 and the higher the accuracy the output signal amplitudes of the two sensor elements 74 and 75 can be measured.
  • the measurement accuracy in this respect allows the angular spacing of two successive teeth to be recorded precisely to 1/100 of its amount. With an angular distance of 3.6 ° between two successive teeth 73, the accuracy of the angular position measuring system 68.74.75 is 3.6 x 1 ⁇ "2 °.
  • the second mechanical encoder element 69 which rotates with the hollow shaft 37, is designed as an annular flange-shaped element which has only a single, for example V-shaped, slot 56 on its circumference, or alternatively a - pointed - projection 76 'by its passage on an associated with this transmitter element 69, fixed to the housing electronic sensor element 77 a reference pulse is triggered.
  • the gear-shaped transmitter element 68 and the ring-flange-shaped transmitter element 69 and the electronic sensor elements 74 and 75 and 77 assigned to them are arranged and designed such that the output signals of at least the two sensor elements 74 and 75 of the angular position measuring system 68, 74, 75 by the possible axial displacements of the hollow shaft 37 during operation of the drive device 10 - and thus also the transmitter elements 68 and 69 - are not influenced, since the output signals of the two sensor elements 74 and 75 should also be able to be evaluated as precisely as possible with regard to the amounts of their amplitudes (signal level) .
  • the subsystem of the measuring system 14 comprising the third rotating sensor element 71 and at least one further electronic sensor element 78 which is also arranged fixed to the housing is designed such that the output signal level of the output signals generated by this third electronic sensor element 78 is significant, preferably varies in a linear relation with axial displacements of the encoder element 71 or the hollow shaft 37, in order to use the relevant variation or the respective amount of the output signal of the sensor element 78 to determine the following error AS, which is relevant in the operation of the drive device 10, with sufficient accuracy ⁇ to be able to vote.
  • its mechanical transmitter element 71 is designed as an annular rib with conical flanks 79 and 81, which adjoin one another along a sharp ring edge 82, through the axial edge thereof Displacements relative to the sensor element 78 whose output signal level is influenced.
  • An element of the type is again provided as sensor element 78, as already explained for the angular position measuring system 68, 74, 75.
  • a position of the mechanical transmitter element 71 is linked to the - blocking - basic position 0 of the follow-up control valve 12, in which the output signal of the sensor element 78 of the drag 1 measuring system 71, 78 corresponds to a - high or low - extreme value, so that changes in the output signal level of the sensor element 78 each have a monotonous relationship with the drag error ⁇ S in one or the other Stand in the direction.
  • a necessary adjustability of the following error measuring system 71, 78 can be realized in that its transmitter element 71 can be screwed onto a thread 83 of the hollow shaft end section 72 and can thus be displaced in the axial direction and can be fixed by means of a locking nut (not shown) .
  • a single-conical ring 71 ' can also be provided as a mechanical encoder element, as exemplified in the upper part of FIG. 2c, to achieve a monotonous relationship between the output signal level of the sensor element 78 and the following error S.
  • the mechanical transmitter element 71 'of the following error measuring system 71 *, 78 provided in accordance with FIG. 2c calibration thereof in units of the following error ⁇ S is possible in a simple manner in that when the drive device is switched on, i. as long as the hollow shaft 37 or the encoder element 71 'has not yet undergone any displacement, the output signal level of the sensor element 78 is stored as a reference point for the following error measurement and is taken into account as a correction quantity for the following error measurement.
  • a mechanical encoder element 71 * is provided, the radius of which varies periodically between a minimum value r and a maximum value R, preferably as shown, linearly within the axial length L of the encoder element 71 "used for the following error
  • a sensor system which detects the direction of the following error change can then be implemented in a simple manner with two sensor elements 78 'and 78 "of the same type as the sensor element 78, which are arranged at a distance from one another which is dimensioned such that their Output signals, based on the periodic structure of the encoder element 71 "have a phase shift of 90 ° or an odd multiple thereof, so that - in analogy to the angular position measuring system 68, 74, 75, here too, in addition to the absolute value of the following error ⁇ S thereof
  • a related arrangement of the two sensor elements 78 'and 78 " is, for example, the one in which their axial distance ⁇ L has the value 1/4 1, with 1 denoting the periodicity length of the periodic structure of the transmitter element 71". Even with this configuration of the following error measuring system 71 ", 78 ', 78", "calibration” is possible in that the output signal combination of the two sensor elements 78' and 78 "is stored before or with the start of the control and monitoring operation and as reference variables for the further measurements are taken into account.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Servomotors (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

Un entraînement hydraulique pour les mouvements de réglage, d'avancement et de retour d'une tête d'outil d'une machine-outil comprend un moteur hydraulique (11) et une soupape de régulation par poursuite (12). La valeur de référence de la position est fixée et la valeur réelle indiquée en retour au moyen d'une broche filetée (39) et d'un écrou de broche (37) se présentant sous la forme d'un arbre creux. L'un de ces deux éléments peut être entraîné par un moteur électrique (41) afin d'établir la valeur de référence de la position. L'autre élément peut être entraîné afin d'indiquer en retour la valeur de la position réelle. Un système indicateur de position rotative et angulaire (68, 74, 75 et 69, 77) produit un signal de sortie qui mesure directement le nombre total de révolutions exécutées par l'arbre à valeur de référence prédéfinie ainsi que sa position azimutale à l'intérieur de chaque révolution. Un système détecteur de position électronique (71, 78 et 71', 78'; 71'') produit un signal de sortie qui mesure l'erreur de poursuite DELTAS dont la position réelle de la tête d'outil ou de l'élément d'entraînement du moteur hydraulique (16) est en retard de phase par rapport à sa position de référence.
EP90906855A 1989-05-07 1990-05-04 Entrainement hydraulique Expired - Lifetime EP0471695B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90906855T ATE93584T1 (de) 1989-05-07 1990-05-04 Hydraulische antriebsvorrichtung.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3914860A DE3914860A1 (de) 1989-05-07 1989-05-07 Hydraulische antriebsvorrichtung
DE3914860 1989-05-07

Publications (2)

Publication Number Publication Date
EP0471695A1 true EP0471695A1 (fr) 1992-02-26
EP0471695B1 EP0471695B1 (fr) 1993-08-25

Family

ID=6380165

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90906855A Expired - Lifetime EP0471695B1 (fr) 1989-05-07 1990-05-04 Entrainement hydraulique

Country Status (5)

Country Link
US (1) US5192174A (fr)
EP (1) EP0471695B1 (fr)
JP (1) JPH04507066A (fr)
DE (2) DE3914860A1 (fr)
WO (1) WO1990013747A1 (fr)

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WO2008052234A1 (fr) 2006-10-30 2008-05-08 Franz Ehrenleitner Procédé d'élimination de l'erreur de traînée du point de travail d'un dispositif

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JPH09502501A (ja) * 1994-01-27 1997-03-11 エッチアール テキストロン インコーポレイテッド モータ位置センサを有するダイレクトドライブサーボバルブ
FI102413B1 (fi) * 1996-04-11 1998-11-30 Lako Forest Oy Järjestelmä hydraulisylinterin käyttämän laitteen työliikkeen seuraamiseksi
US6494617B1 (en) 1999-04-30 2002-12-17 General Electric Company Status detection apparatus and method for fluid-filled electrical equipment
US6401518B1 (en) 1999-07-29 2002-06-11 General Electric Company Fluid filled electrical device with diagnostic sensor located in fluid circulation flow path
US6865498B2 (en) * 2001-11-30 2005-03-08 Thermwood Corporation System for calibrating the axes on a computer numeric controlled machining system and method thereof
GB2405933A (en) * 2003-09-12 2005-03-16 Page Aerospace Ltd Measuring movement of a hydraulic actuator
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Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
JPH04507066A (ja) 1992-12-10
US5192174A (en) 1993-03-09
EP0471695B1 (fr) 1993-08-25
DE3914860A1 (de) 1990-11-08
DE59002490D1 (de) 1993-09-30
WO1990013747A1 (fr) 1990-11-15

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