EP0448738A1 - Dispositif utilisant un réfrigérateur cryogénique - Google Patents

Dispositif utilisant un réfrigérateur cryogénique Download PDF

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Publication number
EP0448738A1
EP0448738A1 EP90105627A EP90105627A EP0448738A1 EP 0448738 A1 EP0448738 A1 EP 0448738A1 EP 90105627 A EP90105627 A EP 90105627A EP 90105627 A EP90105627 A EP 90105627A EP 0448738 A1 EP0448738 A1 EP 0448738A1
Authority
EP
European Patent Office
Prior art keywords
housing
refrigerator
ring
sections
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90105627A
Other languages
German (de)
English (en)
Inventor
Wilhelm Strasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP90105627A priority Critical patent/EP0448738A1/fr
Publication of EP0448738A1 publication Critical patent/EP0448738A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface

Definitions

  • the invention relates to a device operated with a refrigerator, such as a cryopump, cryostat or the like, with a housing which accommodates the components to be cooled, with a connecting tube provided on the housing and connected to the housing of the refrigerator, with a through the refrigerator housing and the connecting pipe extending refrigeration device, which comprises at least one cylindrical working chamber and a displacer oscillating therein and which carries the pumping surfaces located in the housing at its cold end, and with a damping device for preventing the transmission of the vibrations generated by the refrigerator to the housing.
  • a refrigerator such as a cryopump, cryostat or the like
  • Refrigerators are temperature chillers in which thermodynamic cycle processes take place (see, for example, US Pat. No. 2,906,101).
  • a single-stage refrigerator comprises a cylindrical working chamber with a displacer. The chamber is connected in a certain way alternately to a high-pressure and a low-pressure gas source, so that the thermodynamic cycle (Stirling process, Gifford / McMahon process or the like) takes place during the reciprocating movement of the displacer. The result is that heat is extracted from a certain area of the chamber. With two-stage refrigerators of this type and helium as the working gas, temperatures of up to about 10 K can be generated.
  • Cryopumps and cryostats are operated with refrigerators of this type.
  • the refrigerator is usually connected with its housing via a flange to the housing of the cryopump or the cryostat.
  • the refrigerator is usually designed in two stages.
  • the invention is concerned with the problem of coupling the refrigerator housing to the housing of the cryopump, the cryostat or the like.
  • the first, warmer stage carries a cup-shaped pump surface, which at the same time functions as a radiation shield for the pump surface of the second, colder stage.
  • the displacers of the first and second stages located in their work spaces perform an oscillating movement, the frequency of which is usually a few Hertz, e.g. B. 2 to 3 Hertz. This results in a vibration that is transmitted from the refrigerator via the pump housing to the recipient connected to the pump housing. In many cases, e.g. B. when using cryopumps on electron microscopes, these vibrations are disruptive.
  • DE-OS 36 90 477 and US-PS 4 363 217 disclose damping devices with bellows systems, which are combined with damping means such as elastomers, the bellows comprising damping materials, wire suspension systems, magnetic fields, etc. Damping devices of this type are technically complex and space-consuming.
  • the object of the present invention is to equip a device operated with a refrigerator of the type mentioned at the outset with a simple and yet particularly effective damping device.
  • connection tube provided on the housing of the cryopump, the cryostat or the like or the adjoining refrigerator housing is cross-divided with respect to its respective longitudinal axis and in that the two sections formed by the transverse division via a ring made of rubber-elastic material are connected.
  • the ring made of rubber-elastic material has two functions. on the one hand, it acts as a damper. On the other hand, the ring can be used to ensure a vacuum-tight connection of the two sections created by the transverse division.
  • Perbunan, rubber (natural rubber, silicone rubber), polyurethane, etc. can be used as the material for the ring. It is essential that the vibrations generated by the refrigerator are not transmitted to the pump housing due to the rubber-elastic or elastomeric properties of the material used. To do this, the elastomeric properties of the material used must be matched to the mass of the vibrating system.
  • the cryopump 1 with the housing 2 shown in FIG. 1 comprises the two-stage refrigerator 3, the cooling stages of which are designated 4 (first, warmer stage) and 5 (second, colder stage).
  • the cup-shaped pump surface 6 is fastened in a heat-conducting manner so that it, together with the baffle 7 carried by the pot 6, encloses the interior 8 of the pump.
  • the pumping surfaces 9 which are connected to the second cooling stage 5 of the refrigerator 3 with good thermal conductivity.
  • the housing 2 of the cryopump 1 is equipped with a flange 11 which forms the inlet opening of the cryopump and with which the cryopump 1 is connected to a recipient, not shown, e.g. B. is connected with the interposition of a valve.
  • the higher-boiling gases accumulate on the baffle 7 and on the cup-shaped pump surface 6. Gases with lower boiling points, preferably argon, and light gases, preferably hydrogen, enter the interior 8 through the baffle 7.
  • the pump surface 9 has the task of accumulating these gases.
  • the pump housing 2 is equipped with a connecting pipe 12, which in turn carries the flange 13.
  • the cylindrical housing 14 of the refrigerator 3 is attached to this flange 13 in a vacuum-tight manner with its flange 15.
  • the cooling stages 4 and 5 extend axially through the cylindrical refrigerator housing 14 and the connecting pipe 12 into the interior 8 of the pump housing 2.
  • a control device 16 is located directly below the cold stages 4, 5. This device has the task of supplying the working chambers and the drive for the displacers 17, 18 in the cold stages 4, 5 with working gas.
  • the working gas is provided with a compressor, which is not shown.
  • the housing 14 of the refrigerator 3 is cross-divided at the level of the first cooling stage 4 with respect to its longitudinal axis.
  • the housing sections 21 and 22 which are spaced apart from one another in this way are connected to one another via a ring 23 which is rectangular in cross section and made of rubber-elastic material.
  • the ring 23 surrounds the two sections 21, 22 in the region of their separation point 24. Its inside is connected to the outer surfaces of the sections 21, 22 by gluing or vulcanization.
  • the outside of the ring 23 - also by gluing or vulcanization - is covered with a tube 26, which creates a double thrust spring element.
  • the ring 23 can perform the two functions it desires, damping and vacuum-tight connection.
  • the movements of the vibrating system (refrigerator with control device 16, cold stages 4 and 5, pump surfaces 6 and 8, baffle 7) are not transmitted to the housing section 21 and thus not to the pump housing 2 due to the presence of the ring 23.
  • the separation point 24 can also be in the area of the connecting pipe 12.
  • the damping effect of the ring 23 depends on the one hand on the properties of the selected material (elasticity, damping) and the geometric design (spring stiffness) and on the other hand on the mass of the vibrating system. Increasing the mass reduces the natural frequency W c of the oscillating system, which minimizes the permeability of the impacts in the case of subcritical tuning (W / W c ⁇ 1). W is the excitation angular frequency, i.e. the frequency of the or oscillating displacer.
  • An additional weight 25 is shown in FIG. It has an annular shape and surrounds the elastomer ring 23 with the outer tube 26 without contact. It is supported on a flange 27 on the lower section 22 of the refrigerator housing 14 and is therefore part of the vibrating system.
  • An additional weight This type does not take up much space and is particularly expedient if the control device 16 is arranged separately, that is to say its mass is not part of the oscillating system.
  • the lower section 22 of the refrigerator housing 14 in the region of the separation point 24 is equipped with an annular disk 28 which extends radially outwards.
  • the outer edge of this annular disk 28 carries a tube section 29 which concentrically surrounds the upper housing section 21 of the refrigerator housing 14.
  • the elastomer ring 23 is located within the annular space 31 formed by the tube sections 21 and 29.
  • the outside of the ring 23 is connected to the inside of the tube section 29 by gluing or vulcanization. The same applies to the inside of the ring 23 and the outside of the housing section 21.
  • the ring 23 is subject to shear forces. With a suitable choice of the ring material and the height of the ring 23, optimal spring and damping properties can be achieved.
  • FIG. 2 shows the pipe sections 21 and 29 in a position relative to one another which they assume when the cryopump is shut down.
  • a clamping ring 32 which is located in an inner groove 33 on the tube section 29, the outer edge of an annular disc 34, which is attached to the outside of the ring portion 21, for. B. is welded.
  • Clamping ring 32 and washer 34 prevent the vibrating system from lowering further due to the restoring force exerted by ring 23 (arrow 35).
  • the ring 23 is under a prestress.
  • Clamping ring 32 and ring disk 34 have the task of holding the thrust spring formed by ring 23 preloaded in position to approximately 80 to 90% of the force which arises during the complete evacuation.
  • the vacuum created in the pump housing 2 causes a gap between the clamping ring 32 and the washer 34 to form after the preload force has been exceeded, which gap is so large that the amplitudes of those occurring Vibrations do not lead to a stop.
  • the preload ensures that the displacement of the components located in the housing 2 is very small due to the vacuum force and thus the material of the ring 23 can be dimensioned very softly.
  • a damping means for. B. a ring made of metal wool 37 is provided. This is simple, contributes to damping and does not require any space.
  • an essentially annular membrane 36 is also provided, which is located in the region of the underside of the ring 23 and whose inner edge is connected to the housing section 21 and the outer edge of which is connected to the pipe section 29, for. B. is welded.
  • a membrane of this type protects the elastomeric material of the ring 23 from aggressive gases that can get into the pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP90105627A 1990-03-24 1990-03-24 Dispositif utilisant un réfrigérateur cryogénique Withdrawn EP0448738A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP90105627A EP0448738A1 (fr) 1990-03-24 1990-03-24 Dispositif utilisant un réfrigérateur cryogénique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90105627A EP0448738A1 (fr) 1990-03-24 1990-03-24 Dispositif utilisant un réfrigérateur cryogénique

Publications (1)

Publication Number Publication Date
EP0448738A1 true EP0448738A1 (fr) 1991-10-02

Family

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Family Applications (1)

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EP90105627A Withdrawn EP0448738A1 (fr) 1990-03-24 1990-03-24 Dispositif utilisant un réfrigérateur cryogénique

Country Status (1)

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EP (1) EP0448738A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995008211A1 (fr) * 1993-09-15 1995-03-23 American Superconductor Corporation Rotor supraconducteur
DE19612539A1 (de) * 1996-03-29 1997-10-02 Leybold Vakuum Gmbh Mehrstufige Tieftemperaturkältemaschine
US6076877A (en) * 1996-08-16 2000-06-20 Daimlerchrysler Ag Arrangement for the vehicle-fixed holding of control units in a motor vehicle

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR776450A (fr) * 1933-09-08 1935-01-25 Acec Dispositif pour le passage de fluides d'un compresseur d'air, ou autre appareil, monté sur support élastique, à un réservoir ou autre organe fixe au châssis
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
EP0119604A1 (fr) * 1983-03-21 1984-09-26 Air Products And Chemicals, Inc. Pompe cryogénique pouvant être chauffée
US4635448A (en) * 1985-12-10 1987-01-13 The United States Of America As Represented By The Secretary Of The Army Training aid for detector/cooler assembly
WO1988001036A1 (fr) * 1986-08-08 1988-02-11 Helix Technology Corporation Isolation contre les vibrations pour une machine a mouvement alternatif lineaire
US4810888A (en) * 1987-05-14 1989-03-07 Ford Aerospace & Communications Corporation Electrostatic shield for cryostat dewar
US4833899A (en) * 1986-11-14 1989-05-30 Helix Technology Corporation Cryopump with vibration isolation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR776450A (fr) * 1933-09-08 1935-01-25 Acec Dispositif pour le passage de fluides d'un compresseur d'air, ou autre appareil, monté sur support élastique, à un réservoir ou autre organe fixe au châssis
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
EP0119604A1 (fr) * 1983-03-21 1984-09-26 Air Products And Chemicals, Inc. Pompe cryogénique pouvant être chauffée
US4635448A (en) * 1985-12-10 1987-01-13 The United States Of America As Represented By The Secretary Of The Army Training aid for detector/cooler assembly
WO1988001036A1 (fr) * 1986-08-08 1988-02-11 Helix Technology Corporation Isolation contre les vibrations pour une machine a mouvement alternatif lineaire
US4833899A (en) * 1986-11-14 1989-05-30 Helix Technology Corporation Cryopump with vibration isolation
US4810888A (en) * 1987-05-14 1989-03-07 Ford Aerospace & Communications Corporation Electrostatic shield for cryostat dewar

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995008211A1 (fr) * 1993-09-15 1995-03-23 American Superconductor Corporation Rotor supraconducteur
US5482919A (en) * 1993-09-15 1996-01-09 American Superconductor Corporation Superconducting rotor
DE19612539A1 (de) * 1996-03-29 1997-10-02 Leybold Vakuum Gmbh Mehrstufige Tieftemperaturkältemaschine
US6263677B1 (en) 1996-03-29 2001-07-24 Leybold Vakuum Gmbh Multistage low-temperature refrigeration machine
US6076877A (en) * 1996-08-16 2000-06-20 Daimlerchrysler Ag Arrangement for the vehicle-fixed holding of control units in a motor vehicle

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