EP0437661B1 - Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon - Google Patents

Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon Download PDF

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Publication number
EP0437661B1
EP0437661B1 EP90101004A EP90101004A EP0437661B1 EP 0437661 B1 EP0437661 B1 EP 0437661B1 EP 90101004 A EP90101004 A EP 90101004A EP 90101004 A EP90101004 A EP 90101004A EP 0437661 B1 EP0437661 B1 EP 0437661B1
Authority
EP
European Patent Office
Prior art keywords
cold finger
compressor
force
line
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90101004A
Other languages
German (de)
English (en)
Other versions
EP0437661A1 (fr
Inventor
Wilhelm Strasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP90101004A priority Critical patent/EP0437661B1/fr
Priority to DE9090101004T priority patent/DE59000576D1/de
Priority to JP3002610A priority patent/JP2823705B2/ja
Priority to US07/641,308 priority patent/US5090206A/en
Publication of EP0437661A1 publication Critical patent/EP0437661A1/fr
Application granted granted Critical
Publication of EP0437661B1 publication Critical patent/EP0437661B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/006—Gas cycle refrigeration machines using a distributing valve of the rotary type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/13—Vibrations

Definitions

  • the invention relates to a cold head with a refrigerator operating according to the Gifford / McMahon principle and further features according to the preamble of claim 1.
  • Cold heads of this type are used as a cold source in cryostats, cryopumps, etc.
  • Refrigerators are low-temperature chillers in which a thermodynamic cycle takes place. The course of this process will first be explained with reference to FIGS. 1a to 1e.
  • a single-stage refrigerator 1 is shown, with a housing 2 and a cylindrical work space 3.
  • the displacer 4 with a central regenerator 5 is located within this work space 3. During the operation of the refrigerator, the displacer 4 moves between the two dead centers OT and UT and forth.
  • the cold head version affected here is equipped with a gas drive, as is known, for example, from European patent application 254 759.
  • a drive piston 6 with a reduced diameter compared to the displacer is provided on one end face of the displacer 4.
  • the drive piston 7 is assigned to the drive cylinder 7.
  • a working gas - preferably helium - is required which is present under high pressure (HP, for example 22 bar) and under low pressure (LP, for example 7 bar).
  • HP high pressure
  • LP low pressure
  • This working gas also serves to supply the gas drive.
  • a gas distributor unit 8 is shown schematically, which is designed here as a valve system.
  • Other gas supply control devices are possible, for example a rotary valve driven by a motor, as is known from the European patent application mentioned.
  • FIG. 1a Part of FIG. 1 is an indicator diagram (FIG. 1a), which indicates the course of the cycle.
  • the displacer is in top dead center according to Figure 1b.
  • the working gas in the working space 3 is under low pressure.
  • the working cylinder 7 of the drive piston 6 is under high pressure.
  • the working space 3 is then connected to the high-pressure connection for the working gas. This increases the working gas pressure in work area 3, so that point II in the indicator diagram is reached.
  • the position of the displacer 4 remains unchanged during this time.
  • displacer 4 is shifted from top dead center OT to bottom dead center UT. This is done with the aid of the gas drive 6, 7, 8, by changing the pressure from high pressure to low pressure in the working cylinder 7, so that the displacer 4 assumes the position shown in FIG. 1c.
  • the present invention has for its object to design a cold head with the features of the preamble of claim 1 such that the disturbing vibrations or impact forces that occur due to the displacement movement are largely reduced.
  • FIGS. 2 to 8 show that the housing 2 of the refrigerator 1 consists of the cylindrical section 11, the cap 12 (at the cold end) and the cylindrical intermediate piece 13. Due to the seal 14, a safe separation of the "cold" side of the displacer 4 from its “warm” side is guaranteed.
  • the cylinder 7 is surrounded by an annular space 16 which is formed by corresponding cutouts in the displacer 4 and in the intermediate piece 13. In the annular space 16 opens on the side of the intermediate piece 13, the bore 17 through which the working space 3 is supplied with working gas.
  • bores 18 open into the annular space 16, through which the working gas flows, which either flows into the regenerator 5 or flows out. Lateral bores 19 and a reduced diameter of the “cold” end of the displacer 4 form the flow paths of the working gas between the regenerator 5 and the working space 3.
  • a helical spring 21 surrounding the cylinder 7 is located within the annular space 16, which is supported on the displacer 4 and the intermediate piece 13 and constantly exerts a force that tries to move the displacer 4 towards it to postpone the "cold" end.
  • This spring is dimensioned so that it allows a displacement movement in the direction of the piston 6 easily. Before reaching the dead center, however, a spring damping of the movement occurs, which supports the gas damping, so that outward impacts are avoided.
  • the cylinder 7 opens a bore 22 through which it can be supplied with working gas.
  • a throttle 23 which serves to dampen the movement of the displacer 4.
  • the supply of the cylinder 7 with working gas is controlled during a displacement movement in the direction of its cold end in such a way that the bore 22 is connected to the low-pressure connection.
  • the displacement movement initially supported by the spring 21 is damped before reaching the dead center in that the working gas can only flow into the working cylinder 7 through the throttle 23 at a limited rate.
  • the size of the throttle 23 is to be set so that effective damping is achieved.
  • the throttle 23 is adjustable.
  • an acceleration sensor 24 attached to the refrigerator housing is provided.
  • the acceleration sensor supplies its signals to a control unit 25, with which the throttle 23 can be automatically adjusted. With such a device, optimal damping can be achieved regardless of the operating state.
  • Figure 3 shows the manner of gas supply.
  • a housing 26 is fastened, in the interior 27 of which there is a drive motor 28 and a rotary valve 29.
  • the bore 17 and - centrally - another bore 31 open out.
  • This bore 31 and also the bore 22 with the throttle 23 are connected to a transverse bore 32, which points outwards is led out and communicates with a low pressure port 33.
  • the high-pressure connection is designated 34 and opens into the interior 27 of the housing.
  • the rotary valve 29 is designed such that the bore 17 is alternately supplied with working gas under high pressure and low pressure in the desired manner.
  • the drive motor 28 is held in the housing 26 either with the aid of a metal pressure spring 37 and the clamping ring 38 (FIG. 4) or with the aid of the rubber-elastic spring ring 41 and the clamping ring 42 (FIG. 7).
  • the element exerting a constant force on the displacer in FIGS. 2, 3 and 8 is a compression spring which tries to move the displacer 4 towards its "cold" end.
  • the bore 22 is connected to the throttle 23 with the low pressure connection 33.
  • the spring 21 is also the possibility of designing the spring 21 as a tension spring. In this case, the bore 22 must be connected to the throttle 23 with the high-pressure connection 34.
  • the force which is constantly exerted on the displacer is magnetic in nature.
  • the intermediate piece 13 and the displacer 4 are equipped with permanent magnets 43, 44 or electromagnets 45, 46.
  • the polarity (the north poles N face each other) is selected such that the magnets repel one another.
  • the constantly on the Force 4 exerted force therefore also tries to move the displacer 4 towards its "cold" end.
  • the bore 22 with the throttle 23 is therefore reconnected to the low pressure connection 33.
  • the polarity of the magnets is chosen such that they attract each other, the force effect would be reversed.
  • the bore 22 with the throttle 23 would then have to be connected to the high-pressure connection 34.
  • the intermediate piece 13 is equipped with a coil 47, which is assigned a soft iron ring 48 on the displacer 4.
  • the soft iron ring 48 is attracted when the current is switched on in the coil 47, so that the bore 22 must be connected to the throttle 23 with the high-pressure connection 34.
  • FIG. 8 shows an exemplary embodiment with a split cold head 1.
  • the refrigerator 2 and the housing 26 are independent of one another and connected to one another via the line 51, which represents an extension of the bore 17 in the intermediate piece 13.
  • the working gas only flows back and forth; there is no complete exchange. It is therefore expedient to cool this connecting line 51.
  • it is surrounded concentrically by the pipeline 52.
  • the annular space 53 thus formed is flowed through by a coolant, preferably cooling water.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Claims (10)

  1. Réfrigérant
    - avec un réfrigérateur (1) qui travaille selon le principe de Gifford/McMahon, qui présente un espace de travail cylindrique (3) se trouvant dans un carter (2) et un refouleur (4), qui est équipé d'un régénérateur central (5) et qui, pendant le fonctionnement de la tête réfrigérante, se déplace en va et vient dans l'espace de travail entre deux points mort.
    - avec des dispositifs de raccordement pour un gaz de travail qui comprennent un raccord pour du gaz de travail se trouvant sous basse pression et un raccord pour du gaz de travail se trouvant sous haute pression, ainsi que des dispositifs de commande du gaz, et
    - avec un piston (6) qui est fixé à une face frontale du refouleur et présente un diamètre réduit par rapport au refouleur (4), ainsi qu'avec le cylindre (7) qui correspond au piston (6) et dans lequel débouche une conduite pour l'alimentation en gaz de travail.
    - tête réfrigérante caractérisée
    par le fait qu'au refouleur (4) correspondent des moyens (21, 43 à 47) qui exercent sur le refouleur une force agissant en permanence en direction de l'un des deux points morts du mouvement du refouleur, et
    - par le fait que dans le cas où la force agit en direction du piston (6), le cylindre est relié en permancence avec le raccord de gaz de travail qui se trouve sous haute pression, un étranglement (23) se trouvant dans cette conduite, ou bien
    - par le fait que dans le cas où la force agit en sens opposé, le cylindre (7) est relié en permanence, par l'intermédiaire de la conduite (22), avec le raccord de gaz de travail qui se tient sous basse pression, un étranglement (23) se trouvant dans cette conduite.
  2. Tête réfrigérante selon la revendication 1, caractérisée par le fait qu'il est prévu un ressort (ressort de traction ou ressort de compression) pour exercer une force sur le refouleur.
  3. Tête réfrigérante selon la revendication 1, caractérisée par le fait que des électro-aimants (45, 46) ou des aimants permanents (43, 44) sont prévus pour exercer une force sur le refouleur (4).
  4. Tête réfrigérante selon la revendication 1, caractérisée par le fait qu'une bobine (47) et un noyau de fer doux (48) sont prévus pour exercer une force sur le refouleur (4).
  5. Tête réfrigérante selon l'une des revendications précédentes, caractérisée par le fait que l'étranglement (23) est réglable.
  6. Tête réfrigérante selon la revendication 5, caractérisée par le fait qu'au carter (11, 26) de la tête réfrigérante (1) est fixé un capteur d'accélération (24) et par le fait que des moyens de commande (25) sont prévus pour régler l'étranglement (23) en fonction des signaux fournis par le capteur d'accélération (24).
  7. Tête réfrigérante selon l'une des revendications précédentes, caractérisée par le fait que le carter du réfrigérateur (2) est constitué d'un tronçon cylindrique (11), d'un capuchon (12) (extrémité froide) et d'un élément intermédiaire (13) et par le fait que le cylindre (7) du piston (6) est un composant de l'élément intermédiaire (13).
  8. Tête réfrigérante selon la revendication 7, caractérisée par le fait que le cylindre (7) est entouré d'un espace annulaire (16) dans lequel se trouvent les moyens (21, 43 à 47) prévus pour exercer une force agissant sur le refouleur.
  9. Tête réfrigérante selon la revendication 8, caractérisée par le fait que dans l'espace annulaire (16) débouchent des tronçons de conduite (17 et 18) parcourus par le gaz de travail.
  10. Tête réfrigérante selon l'une des revendications précédentes, caractérisée par le fait que le réfrigérateur (2) et le carter (26) de l'organe de répartition du gaz constituent des éléments distincts qui sont réunis l'un à l'autre par une conduite refroidie (51) pour le gaz de travail.
EP90101004A 1990-01-18 1990-01-18 Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon Expired - Lifetime EP0437661B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP90101004A EP0437661B1 (fr) 1990-01-18 1990-01-18 Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon
DE9090101004T DE59000576D1 (de) 1990-01-18 1990-01-18 Kaltkopf mit einem nach dem gifford/mc mahon-prinzip arbeitenden refrigerator.
JP3002610A JP2823705B2 (ja) 1990-01-18 1991-01-14 冷却ヘッド
US07/641,308 US5090206A (en) 1990-01-18 1991-01-14 Vibration-dampening arrangement for a refrigerator operating according to the gifford-mcmahon principle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90101004A EP0437661B1 (fr) 1990-01-18 1990-01-18 Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon

Publications (2)

Publication Number Publication Date
EP0437661A1 EP0437661A1 (fr) 1991-07-24
EP0437661B1 true EP0437661B1 (fr) 1992-12-09

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ID=8203511

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90101004A Expired - Lifetime EP0437661B1 (fr) 1990-01-18 1990-01-18 Sonde froide avec un réfrigérateur cryogénique du type Gifford-McMahon

Country Status (4)

Country Link
US (1) US5090206A (fr)
EP (1) EP0437661B1 (fr)
JP (1) JP2823705B2 (fr)
DE (1) DE59000576D1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5103647A (en) * 1991-02-19 1992-04-14 General Electric Company Dynamically balanced Gifford-McMahon refrigerator cold head
US5385021A (en) * 1992-08-20 1995-01-31 Sunpower, Inc. Free piston stirling machine having variable spring between displacer and piston for power control and stroke limiting
US5482919A (en) * 1993-09-15 1996-01-09 American Superconductor Corporation Superconducting rotor
NL9401251A (nl) * 1994-08-01 1996-03-01 Hollandse Signaalapparaten Bv Stirling-koeler.
US5653112A (en) * 1994-08-03 1997-08-05 Hughes Electronics Cryocooler system with welded cold tip
US5735127A (en) * 1995-06-28 1998-04-07 Wisconsin Alumni Research Foundation Cryogenic cooling apparatus with voltage isolation
DE19547030A1 (de) * 1995-12-15 1997-06-19 Leybold Ag Tieftemperatur-Refrigerator mit einem Kaltkopf sowie Verfahren zur Optimierung des Kaltkopfes für einen gewünschten Temperaturbereich
US5678409A (en) * 1996-06-21 1997-10-21 Hughes Electronics Passive three state electromagnetic motor/damper for controlling stirling refrigerator expanders
US6467276B2 (en) * 2000-02-17 2002-10-22 Lg Electronics Inc. Pulse tube refrigerator
DE10152262A1 (de) * 2001-10-20 2003-04-30 Leybold Vakuum Gmbh Kaltkopf für eine Tieftempratur-Kältemaschine
DE10339843A1 (de) 2003-08-29 2005-03-24 Leybold Vakuum Gmbh Kälteerzeuger
JP2013174393A (ja) * 2012-02-24 2013-09-05 Sumitomo Heavy Ind Ltd 極低温冷凍機
CN106679217B (zh) * 2016-12-16 2020-08-28 复旦大学 一种机械振动隔离的液氦再凝聚低温制冷系统
US11209193B2 (en) * 2018-04-09 2021-12-28 Edwards Vacuum Llc Pneumatic drive cryocooler

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
US4294077A (en) * 1979-10-29 1981-10-13 Oerlikon-Buhrle U.S.A. Inc. Cryogenic refrigerator with dual control valves
DE8411307U1 (de) * 1984-04-11 1984-07-05 Leybold-Heraeus GmbH, 5000 Köln Kaeltemaschine
US4713939A (en) * 1986-05-23 1987-12-22 Texas Instruments Incorporated Linear drive motor with symmetric magnetic fields for a cooling system
EP0254759A1 (fr) * 1986-07-29 1988-02-03 Leybold Aktiengesellschaft Procédé d'échange d'un piston de déplacement dans une machine frigorifique et machine frigorifique pour la mise en oeuvre du procédé
US4792346A (en) * 1987-03-03 1988-12-20 Sarcia Domenico S Method and apparatus for snubbing the movement of a free, gas-driven displacer in a cooling engine
US4912932A (en) * 1987-09-14 1990-04-03 Cryodynamics, Inc. Unloader valve for cryogenic refrigerator
US4954053A (en) * 1987-12-14 1990-09-04 Matsushita Electric Industrial Co., Ltd. Free-piston compressor with gas spring control
EP0335643B1 (fr) * 1988-03-28 1992-12-09 Mitsubishi Denki Kabushiki Kaisha Machine frigorifique à gaz
JP2552709B2 (ja) * 1988-05-24 1996-11-13 三菱電機株式会社 冷凍機

Also Published As

Publication number Publication date
JP2823705B2 (ja) 1998-11-11
JPH05118689A (ja) 1993-05-14
EP0437661A1 (fr) 1991-07-24
DE59000576D1 (de) 1993-01-21
US5090206A (en) 1992-02-25

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