EP0407548B1 - Deuterium-lampe für spektralanalyse-vorrichtungen - Google Patents

Deuterium-lampe für spektralanalyse-vorrichtungen Download PDF

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Publication number
EP0407548B1
EP0407548B1 EP90902241A EP90902241A EP0407548B1 EP 0407548 B1 EP0407548 B1 EP 0407548B1 EP 90902241 A EP90902241 A EP 90902241A EP 90902241 A EP90902241 A EP 90902241A EP 0407548 B1 EP0407548 B1 EP 0407548B1
Authority
EP
European Patent Office
Prior art keywords
interference filter
layer
deuterium lamp
bulb
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90902241A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0407548A1 (de
Inventor
Werner Schwarz
Horst Kremmling
Günter Thomas
Hans-Georg Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Noblelight GmbH
Original Assignee
Leybold AG
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Heraeus Noblelight GmbH filed Critical Leybold AG
Publication of EP0407548A1 publication Critical patent/EP0407548A1/de
Application granted granted Critical
Publication of EP0407548B1 publication Critical patent/EP0407548B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope

Definitions

  • the invention relates to a deuterium lamp with a discharge bulb made of quartz glass for spectral analysis devices, in particular spectrophotometers, in which the radiation generated passes through a partial region of the bulb.
  • Deuterium lamps of the type characterized above are known, for example, from the brochure "Deuterium lamps - D 800/900 series” (D 310 686 / 2C 7.86 / VN Ko) from WC Heraeus GmbH. These deuterium lamps provide a continuous line-free spectrum in the ultraviolet spectral range between 160 and 360 nm. They are used in particular in photometric devices, preferably spectral analysis devices.
  • the bulb of these deuterium lamps is made of quartz glass, whereby the use of synthetic quartz glass allows the lamp bulb to be transparent for wavelengths up to approx. 160 nm.
  • Deuterium lamps of this known type have proven themselves very well in their operation. They are characterized by a long service life and, in particular, high radiation stability.
  • the known deuterium lamps have a radiation noise level of about 2 x 10 ⁇ 4 AU (A bsoption U nits).
  • An alkali metal halide high-pressure lamp with an interference filter coating is known from NL-A-8502966, which has a high reflection in the spectral range from 310 to 350 nm; Such an interference coating would be extremely problematic for deuterium lamps for spectral analysis devices, since the long-wave part of the ultraviolet spectral range would no longer be available as a continuum.
  • the object of the present invention is to further reduce the level of the radiation noise of the deuterium lamps characterized at the outset while maintaining the aforementioned favorable properties of the known deuterium lamps.
  • the bulb portion has an interference filter multiple layer on its outer surface made of alternating aluminum oxide and silicon dioxide or magnesium fluoride, the physical layer thickness of each layer being in the range of 10 is up to 70 nm and the first effective layer of the interference filter facing the piston surface consists of aluminum oxide, and the interference filter multilayer has an absorption edge at a wavelength in the range from about 190 to 200 nm, but has the highest possible transmission for wavelengths greater than 200 nm .
  • a pair of layers is understood to mean a combination of an aluminum oxide and a silicon dioxide or magnesium fluoride layer.
  • the interference filter multilayer has a steep absorption edge in the wavelength range from approximately 190 to 200 nm.
  • the inventive formation of the deuterium lamp made it possible to reduce the radiation noise level by at least more than 50%. If the number of layers was increased, a reduction of around an order of magnitude could be achieved, ie the level of radiation noise could be reduced to a value of 2 x 10 ⁇ 5 AU.
  • the deuterium lamps provided with interference filters designed according to the invention are not only distinguished by the steep absorption edge in the range from 190 to 200 nm, but also by the fact that they have an extraordinarily high transmission for the longer-wave UV radiation at a wavelength greater than 200 nm , in particular the radiation that you want to use for carrying out spectral analysis.
  • the lamps according to the invention have not changed in terms of their service life compared to deuterium lamps without an interference filter multilayer; also has the transmission of UV radiation with a wavelength greater than 200 nm does not experience any adverse change, even at operating times that exceed 1500 hours.
  • the deuterium lamps according to the invention it should be emphasized that there is no ozone formation which disturbs the spectral analysis and the operating personnel.
  • Interference filter-layer combinations of aluminum oxide and silicon dioxide have proven particularly useful.
  • the uppermost layer of the interference filter facing away from the surface of the quartz glass bulb consists of silicon dioxide.
  • the interference filter multiple layers are layers that are vapor-deposited in particular in a vacuum.
  • this does not preclude the possibility that, in addition to vapor-deposited layers, other interference filter layers applied in the usual way can also be used.
  • each layer of the interference filter is ⁇ / 4, where ⁇ is the limiting wavelength of the absorption edge, which is approximately 190 nm.
  • a schematically illustrated deuterium lamp designed according to the invention is described below with reference to FIG. 1.
  • Reference number 1 denotes the quartz glass bulb which contains deuterium and on whose surface the filter 3 made of an interference multilayer is applied.
  • the deuterium lamp is supplied with electrical current via the current leads 2.
  • the cathode and anode of the deuterium lamp are arranged in the metallic housing 4. The generated radiation passes through the opening in the housing 4 designated by the reference number 5 and then through the quartz glass bulb 1 and the filter 3.
  • FIG. 2 shows a transmission curve of a deuterium lamp bulb with an interference multilayer according to the invention applied, the wavelength in nm on the abscissa and the transmission on the ordinate are plotted in percent.
  • the transmission curve clearly shows that the deuterium lamp provided with the interference filter multilayer according to the invention has a steep absorption edge in the range from 190 to 200 nm and that the transmission increases to values in the range from 80 to 90% for UV wavelengths greater than 200 nm is maintained.
  • the interference filter multilayer is applied to the quartz glass lamp bulb, for example, as described below.
  • the evaporation system was evacuated to a pressure of 5 x 10 ⁇ 4 Pa within 30 minutes. After a heating time of one hour, the quartz glass bulb was pretreated in a glow discharge in an argon atmosphere at a pressure of 5 Pa for 10 minutes. The layers of silicon dioxide and aluminum dioxide were then vapor-deposited in an alternating sequence and with the specified layer thicknesses (see table) at an oxygen partial pressure of 2 ⁇ 10 ⁇ 2 Pa.
  • the layer structure and the control of the evaporator sources were carried out by means of an optical layer thickness measuring device of known design.
  • the quartz glass bulb produced in this way had a transmission in the spectral range above 200 nm, the maximum of which exceeded 90%, at the same time the transmission below 200 nm was less than 20%.
  • the second layer of the interference filter - in the table layer number 2 - and the (n-1) th layer - in the table the 39th layer - are so-called adaptation layers to reduce the ripple of the transmission curve acts.

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Filters (AREA)
EP90902241A 1989-01-25 1990-01-20 Deuterium-lampe für spektralanalyse-vorrichtungen Expired - Lifetime EP0407548B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3902144 1989-01-25
DE3902144A DE3902144A1 (de) 1989-01-25 1989-01-25 Deuterium-lampe fuer spektralanalyse-vorrichtungen
PCT/EP1990/000114 WO1990009032A1 (de) 1989-01-25 1990-01-20 Deuterium-lampe für spektralanalyse-vorrichtungen

Publications (2)

Publication Number Publication Date
EP0407548A1 EP0407548A1 (de) 1991-01-16
EP0407548B1 true EP0407548B1 (de) 1995-09-06

Family

ID=6372769

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90902241A Expired - Lifetime EP0407548B1 (de) 1989-01-25 1990-01-20 Deuterium-lampe für spektralanalyse-vorrichtungen

Country Status (6)

Country Link
US (1) US5117150A (OSRAM)
EP (1) EP0407548B1 (OSRAM)
JP (1) JPH0834769B2 (OSRAM)
AT (1) ATE127616T1 (OSRAM)
DE (2) DE3902144A1 (OSRAM)
WO (1) WO1990009032A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010108581A1 (de) 2009-03-26 2010-09-30 Heraeus Noblelight Gmbh Deuteriumlampe

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4120730C2 (de) * 1991-06-24 1995-11-23 Heraeus Noblelight Gmbh Elektrodenlose Niederdruck-Entladungslampe
US5513039A (en) * 1993-05-26 1996-04-30 Litton Systems, Inc. Ultraviolet resistive coated mirror and method of fabrication
US5382804A (en) * 1993-07-15 1995-01-17 Cetac Technologies Inc. Compact photoinization systems
US5353113A (en) * 1993-07-15 1994-10-04 Cetac Technologies Incorporated Single and multiple radiation transparent afterglow electric discharge detector systems
DE19619358C2 (de) * 1996-05-14 2001-09-27 Heraeus Noblelight Gmbh Verwendung eines optischen Filters mit Interferenzfilter-Mehrfachschicht
US6078132A (en) * 1998-01-21 2000-06-20 Imaging & Sensing Technology Corporation Miniature deuterium arc lamp
US5972469A (en) * 1998-01-30 1999-10-26 Imaging & Sensing Technology Corporation Baffle for eliminating interference ring(s) from the output light pattern of a deuterium lamp
DE19931954A1 (de) * 1999-07-10 2001-01-11 Leica Microsystems Beleuchtungseinrichtung für ein DUV-Mikroskop
US7390669B2 (en) * 2000-02-24 2008-06-24 Georgia Tech Research Corporation Simultaneous and rapid determination of multiple component concentrations in a Kraft liquor process stream
DE102011018986A1 (de) 2011-04-28 2012-10-31 Heraeus Noblelight Gmbh Lampenmodul, insbesondere für Spektralanalysevorrichtungen
DE102013107694A1 (de) * 2013-07-18 2015-01-22 Heraeus Noblelight Gmbh Gasentladungslampe und deren Verwendung
EP3150562B1 (de) 2015-10-01 2022-02-16 Heraeus Quarzglas GmbH & Co. KG Verwendung von optischem filtermaterial aus dotiertem quarzglas sowie das optische filtermaterial enthaltende uv-lampe
CN116242481B (zh) * 2023-05-12 2023-08-29 中国计量科学研究院 氘灯光源系统及校准方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1353566A (fr) * 1963-01-15 1964-02-28 Le I Kinoingenerov Réflecteur interférentiel et son procédé de fabrication
DE1589095A1 (de) * 1967-07-12 1970-03-05 Braun Ag Gasentladungslampe fuer Blitzgeraete
CH564785A5 (OSRAM) * 1972-12-08 1975-07-31 Balzers Patent Beteilig Ag
US3931536A (en) * 1974-07-15 1976-01-06 Gte Sylvania Incorporated Efficiency arc discharge lamp
US4049987A (en) * 1976-06-04 1977-09-20 The Perkin-Elmer Corporation Ozone absorbance controller
JPS6038681B2 (ja) * 1978-09-27 1985-09-02 キヤノン株式会社 紫外用多層膜
NL8502966A (nl) * 1985-10-30 1986-10-01 Philips Nv Hogedrukontladingslamp.
US4910431A (en) * 1987-04-24 1990-03-20 W. C. Heraeus Gmbh Hydrogen discharge ultraviolet light source or lamp, and method of its manufacture
DE3713704A1 (de) * 1987-04-24 1988-11-03 Heraeus Gmbh W C Wasserstoff-entladungslampe und verfahren zu ihrer herstellung
DE3726803C1 (de) * 1987-08-12 1988-09-15 Heraeus Gmbh W C Licht- und Wetterechtheitspruefgeraet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010108581A1 (de) 2009-03-26 2010-09-30 Heraeus Noblelight Gmbh Deuteriumlampe
DE102009014425A1 (de) 2009-03-26 2010-10-21 Heraeus Noblelight Gmbh Deuteriumlampe

Also Published As

Publication number Publication date
DE3902144C2 (OSRAM) 1992-03-12
JPH0834769B2 (ja) 1996-03-29
WO1990009032A1 (de) 1990-08-09
US5117150A (en) 1992-05-26
DE3902144A1 (de) 1990-08-02
JPH03503817A (ja) 1991-08-22
ATE127616T1 (de) 1995-09-15
DE59009610D1 (de) 1995-10-12
EP0407548A1 (de) 1991-01-16

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