EP0354750A2 - Image display apparatus and method of fabrication thereof - Google Patents
Image display apparatus and method of fabrication thereof Download PDFInfo
- Publication number
- EP0354750A2 EP0354750A2 EP89308020A EP89308020A EP0354750A2 EP 0354750 A2 EP0354750 A2 EP 0354750A2 EP 89308020 A EP89308020 A EP 89308020A EP 89308020 A EP89308020 A EP 89308020A EP 0354750 A2 EP0354750 A2 EP 0354750A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrodes
- display apparatus
- image display
- opposed
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
Definitions
- the present invention relates to a thin image display apparatus using a plurality of cold cathodes.
- a number of thin display apparatuses comprising a plurality of cold cathodes arranged two-dimensinally for displaying an image using X-Y matrix electrodes have been disclosed in the related art.
- a thin image display apparatus using a cold cathode of electric field emission type is closely watched.
- This thin diplay apparatus as shown in Fig. 5A, has a substrate with the surface thereof formed of a plurality of cold cathodes of thin film field emission type in a density as high as 106 to 107 units/cm2.
- Fig. 5A has a substrate with the surface thereof formed of a plurality of cold cathodes of thin film field emission type in a density as high as 106 to 107 units/cm2.
- these cathodes make up an X electrode 22 as one part of the matrix electrodes on the surface of a substrate 21, on which a Y electrode 24 is formed as the other part of the matrix electrodes together with an insulating layer 23.
- a minute aperture 25 one ⁇ m to 1.5 ⁇ m in diameter is formed in the Y electrode at each inter-section of the X-Y electrodes, and the insulating layer 23 is etched.
- a substrate assembly thus formed is rotated, while high a melting point metal such as tungsten or molybdenum is diagonally deposited by evaporation thereby to form a conical cold-cathode chip 26.
- the unrequired metal layer in the surface is removed to produce a plurality of electron sources of cold cathodes of thin film field emission type.
- These X-Y matrix electron sources are arranged in opposed relationship with a face plate 27 coated with a phosphor material 28 to configure an image display apparatus.
- This image display apparatus which comprises as many as more than 1000 minute electron sources in each pixel, generally has a uniform characteristic in spite of possible variations in the characteristics of individual minute electron sources, thus producing a comparatively uniform brightness over the whole screen.
- the object of the present invention is to provide a thin image display apparatus comprising an insulating substrate having two-dimensionally arranged electron source units controlled by X-Y matrix control electrodes and a face plate coated with a phosphor material arranged in opposed relationship with the insulating substrate wherein the said electron scorce units corresponding to each intersection of X-Y matrix control electrodes includes a cold cathode connected to an X-control electrode and a gate electrode connected to a Y-control electrode opposed to the cold cathode in the same plane, the electron source being formed in the part of the substrate surface on other than at least one of the X- and Y- control electrodes.
- a high electric field of approximately 107 V/cm is formed at the forward end of the cold cathode and electrons are emitted. A part of the electrons thus emitted enters the anode directly. Another part of the electrons flow into the opposite gate electrode thereby to generate secondary electrons in the surface of the gate electrode.
- the secondary electrons thus generated are accelerated by a positive voltage (hereinafter called the "anode voltage") applied to the phosphor face of the opposed face plate and bombarded on the phosphor material to emit light.
- the apparatus according to the present invention in which a plurality of cold cathodes of planar field emission type are formed on the surface of an insulating substrate defined by X-control electrodes and Y-control electrodes, has the advantages (1) that the electric capacity between the electrodes is extremely reduced (to 1/20 to 1/30 of the related art), (2) that the production cost is low since cold cathodes and gate electrodes are capable of being formed at the same time, and (3) that crosstalks are very small.
- FIG. 1 A partial sectional view of an image display apparatus according to the present invention is shown in Fig. 1.
- the image display apparatus comprises a glass substrate 1 having an electron source for electric field emission at each intersection of X-Y matrix electrodes, and a face plate 4 coated with phosphor material in opposed relationship with the glass substrate 1.
- the glass substrate 1 has cold cathode 2 and gate electrodes 3 arranged face to face on the surface.
- a positive voltage of, say, 100 V is applied to the gate electrodes 3 with respect to the cold cathodes 2
- electron beams 7 are emitted.
- a part of electrons thus emitted flows into the gate electrodes 3, while the other part is accelerated by a high voltage of, say, 500 V applied to an anode 5 and hits a phosphor surface thereby to cause the phosphor to emit light.
- FIG. 2 An enlarged perspective view of an electron source is shown in Fig. 2.
- a multiplicity of sawtoothed protrusions 8 are formed in the surface of the cold cathode 2 opposed to the gate electrode 3. Further, the surface of the glass substrate 1 has a recess 9 between the cold cathode 2 and the gate electrode 3 to facilitate formation of a high electric field at the forward end of the cold cathode 2.
- Fig. 3 shows a part of electrode arrangement.
- X-control electrodes X1, X2, X3, ... X n and Y-control electrodes Y1, Y2, Y3, ... Y n make up matrix control electrodes.
- a plurality of electron sources 13 are formed on the substrate surface defined by these control electrodes.
- Each electron source 13, which is configured as shown in Fig. 2, includes a cold cathode 2 connected to an X-control electrode and a gate electrode 3 connected to a Y-control electrode.
- This construction of the electron sources 15 not overlaid on the X- or Y-control electrodes is a reduction of 1/20 to 1/30 of the area required by the prior art for superposing the electrodes on each other through an insulating layer. As a result, the probability of short-circuiting between electrodes due to a pinhole in the insulating layer and the electric capacity are decreased to 1/20 to 1/30.
- a film of such a metal as nickel is deposited by evaporation to the thickness of 0.5 ⁇ m over the whole surface of the glass substrate, and formed in stripes by photolithography. Electrodes are formed to the width of 0.1 mm.
- An SiO2 film as thick as 1 ⁇ m is deposited as an insulating layer by the CVD process, and a part of the insulating film over an X-control electrode is removed to form a window for connecting to a cold cathode.
- a tungsten film is deposited by evaporation to the thickness of 0.2 ⁇ m, so that a cold cathode 2, a gate electrode 3 and a Y-control electrode are formed simultaneously by photolithography.
- the Y-control electrode is made as wide as 0.5 mm.
- the protrusions of the cold cathod are set at an interval of 2 ⁇ m from the gate electrode. There are approximately 500 protrusions 8 per electron source unit (which correspond to one pixel). As the next process, the whole substrate is immersed in a buffer etching solution to form a recess 9 at the forward end of the cold cathode as shown in Fig. 2.
- the electrode material for forming an X-control electrode is not limited to nickel metal, but may preferably take the form of aluminum, titanium, gold-chromium alloy or other metal material which has a high adhesion with the glass substrate and low in resistivity. Also, a silver electrode or a gold electrode may be formed by the screen printing process or the like.
- the SiO2 film used as an insulating layer may be replaced by another material of high insulation characteristic such as SiN, SiO or Al2O3. Instead of tungsten, on the other hand, tantalum, molybdenum or an alloy or carbide thereof having a high melting point may be used as a material of the cold cathode with equal effect.
- a glass substrate having electron sources units 13 in the number of 480 x 660 arranged in matrix are disposed in opposed relations with a face plate coated with a ZnO:Zn phosphor material at intervals of 0.3 mm, and the surrounding parts are sealed with frit glass of a low melting point.
- the resulting assembly is evacuated to produce an image display apparatus with a screen size of 10 inches.
- the three primary colors of red, green and blue may be arranged in stripes to produce a color image.
- An electrode configuration of a two-dimensional electron source is shown as a perspective view in Fig. 4.
- Stripe electrodes 10 having a width of 0.1 mm and thickness of 3 ⁇ m are formed by the screen printing method on the surface of the glass substrate 1.
- frit glass of low melting point is laid to the thickness of 1 ⁇ m by screen printing at intersections of the stripe electrodes 10 and Y-control electrodes to form an insulating layer 12.
- Y-control electrodes 11 having a width of 0.05 mm and thickness of 1 ⁇ m are formed in stripes.
- a cold cathode material WSi2 is formed by sputtering over the whole surface, and cold cathodes 2 and gate electrodes 3 are formed at the same time by photolithograhy.
- the cold cathodes 2 and the gate electrodes 3 are engaged in comb, and the sides of these electrodes opposed to each other are arranged in parallel to the X-control electrodes (perpendicular to the longitudinal direction of the Y-control electrodes).
- This arrangement causes emitted electron beams to widen somewhat along the longitudinal direction of the Y-control electrodes but not substantially along the perpendicular direction thereof.
- electron beams are prevented from hitting the phosphor material corresponding to adjacent Y-control electrodes, so that what are called crosstalks rarely occur, thus producing a high-definition image display apparatus.
- color mixing is effectively prevented in a color image display apparatus configured by three-color phosphor materials in stripes.
- a glass substrate 1 making up a two-dimensional electron source and a face plate coated with a phosphor material are sealed with each other in opposed relations and evacuated in the same manner as in the first embodiment thereby to test produce an image display apparatus, which is capable of displaying a clear image substantially free of crosstalks like the first embodiment.
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
Description
- The present invention relates to a thin image display apparatus using a plurality of cold cathodes.
- A number of thin display apparatuses comprising a plurality of cold cathodes arranged two-dimensinally for displaying an image using X-Y matrix electrodes have been disclosed in the related art. Among them, a thin image display apparatus using a cold cathode of electric field emission type is closely watched. This thin diplay apparatus, as shown in Fig. 5A, has a substrate with the surface thereof formed of a plurality of cold cathodes of thin film field emission type in a density as high as 10⁶ to 10⁷ units/cm². As shown in Fig. 5B, these cathodes make up an
X electrode 22 as one part of the matrix electrodes on the surface of asubstrate 21, on which aY electrode 24 is formed as the other part of the matrix electrodes together with aninsulating layer 23. Aminute aperture 25 one µm to 1.5 µm in diameter is formed in the Y electrode at each inter-section of the X-Y electrodes, and theinsulating layer 23 is etched. A substrate assembly thus formed is rotated, while high a melting point metal such as tungsten or molybdenum is diagonally deposited by evaporation thereby to form a conical cold-cathode chip 26. After forming cold cathodes, the unrequired metal layer in the surface is removed to produce a plurality of electron sources of cold cathodes of thin film field emission type. - These X-Y matrix electron sources are arranged in opposed relationship with a
face plate 27 coated with aphosphor material 28 to configure an image display apparatus. - This image display apparatus, which comprises as many as more than 1000 minute electron sources in each pixel, generally has a uniform characteristic in spite of possible variations in the characteristics of individual minute electron sources, thus producing a comparatively uniform brightness over the whole screen.
- The aforementioned image display apparatus with its satisfactory characteristics, however, has not yet found practical applications due to the facts that a complicated production process makes a production cost high and that it is difficult to fabricate uniform cold cathodes of field emission type over an area required of a display apparatus. Another reason is that a laminated structure of an X-control electrode (cold cathode) and Y-control electrode (gate electrode) through an insulating layer therebetween leads to a large electric capacity, resulting in a heavy load imposed on a drive circuit.
- The object of the present invention is to provide a thin image display apparatus comprising an insulating substrate having two-dimensionally arranged electron source units controlled by X-Y matrix control electrodes and a face plate coated with a phosphor material arranged in opposed relationship with the insulating substrate wherein the said electron scorce units corresponding to each intersection of X-Y matrix control electrodes includes a cold cathode connected to an X-control electrode and a gate electrode connected to a Y-control electrode opposed to the cold cathode in the same plane, the electron source being formed in the part of the substrate surface on other than at least one of the X- and Y- control electrodes.
- Upon application of a voltage between the cold cathode and the gate electrode arranged in opposed relationship with each other on the same surface in the manner mentioned above, a high electric field of approximately 10⁷ V/cm is formed at the forward end of the cold cathode and electrons are emitted. A part of the electrons thus emitted enters the anode directly. Another part of the electrons flow into the opposite gate electrode thereby to generate secondary electrons in the surface of the gate electrode. The secondary electrons thus generated are accelerated by a positive voltage (hereinafter called the "anode voltage") applied to the phosphor face of the opposed face plate and bombarded on the phosphor material to emit light.
- The apparatus according to the present invention in which a plurality of cold cathodes of planar field emission type are formed on the surface of an insulating substrate defined by X-control electrodes and Y-control electrodes, has the advantages (1) that the electric capacity between the electrodes is extremely reduced (to 1/20 to 1/30 of the related art), (2) that the production cost is low since cold cathodes and gate electrodes are capable of being formed at the same time, and (3) that crosstalks are very small.
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- Fig. 1 is a partial sectional view of an image display apparatus according to an embodiment of the present invention.
- Fig. 2 is a sectional view of the essential parts of an electron source section according to the same embodiment.
- Fig. 3 is a plan view schematically showing an electrode arrangement according to the same embodiment.
- Fig. 4 is a perspective view of the essential parts of two-dimensional electron sources as configured according to another embodiment of the present invention.
- Figs. 5A and 5B are a perspective view and an enlarged perspective view of the essential parts respectively of a matrix display apparatus of electric field emission type related to the present invention.
- A partial sectional view of an image display apparatus according to the present invention is shown in Fig. 1. The image display apparatus comprises a glass substrate 1 having an electron source for electric field emission at each intersection of X-Y matrix electrodes, and a
face plate 4 coated with phosphor material in opposed relationship with the glass substrate 1. The glass substrate 1 hascold cathode 2 andgate electrodes 3 arranged face to face on the surface. When a positive voltage of, say, 100 V is applied to thegate electrodes 3 with respect to thecold cathodes 2,electron beams 7 are emitted. A part of electrons thus emitted flows into thegate electrodes 3, while the other part is accelerated by a high voltage of, say, 500 V applied to an anode 5 and hits a phosphor surface thereby to cause the phosphor to emit light. - An enlarged perspective view of an electron source is shown in Fig. 2. A multiplicity of sawtoothed protrusions 8 are formed in the surface of the
cold cathode 2 opposed to thegate electrode 3. Further, the surface of the glass substrate 1 has a recess 9 between thecold cathode 2 and thegate electrode 3 to facilitate formation of a high electric field at the forward end of thecold cathode 2. - Fig. 3 shows a part of electrode arrangement. X-control electrodes X₁, X₂, X₃, ... Xn and Y-control electrodes Y₁, Y₂, Y₃, ... Yn make up matrix control electrodes. A plurality of
electron sources 13 are formed on the substrate surface defined by these control electrodes. Eachelectron source 13, which is configured as shown in Fig. 2, includes acold cathode 2 connected to an X-control electrode and agate electrode 3 connected to a Y-control electrode. - This construction of the electron sources 15 not overlaid on the X- or Y-control electrodes is a reduction of 1/20 to 1/30 of the area required by the prior art for superposing the electrodes on each other through an insulating layer. As a result, the probability of short-circuiting between electrodes due to a pinhole in the insulating layer and the electric capacity are decreased to 1/20 to 1/30.
- Now, a method of fabricating two-dimensional electron sources will be explained. A film of such a metal as nickel is deposited by evaporation to the thickness of 0.5 µm over the whole surface of the glass substrate, and formed in stripes by photolithography. Electrodes are formed to the width of 0.1 mm. An SiO₂ film as thick as 1 µm is deposited as an insulating layer by the CVD process, and a part of the insulating film over an X-control electrode is removed to form a window for connecting to a cold cathode. Further, a tungsten film is deposited by evaporation to the thickness of 0.2 µm, so that a
cold cathode 2, agate electrode 3 and a Y-control electrode are formed simultaneously by photolithography. The Y-control electrode is made as wide as 0.5 mm. - The protrusions of the cold cathod are set at an interval of 2 µm from the gate electrode. There are approximately 500 protrusions 8 per electron source unit (which correspond to one pixel). As the next process, the whole substrate is immersed in a buffer etching solution to form a recess 9 at the forward end of the cold cathode as shown in Fig. 2.
- The electrode material for forming an X-control electrode is not limited to nickel metal, but may preferably take the form of aluminum, titanium, gold-chromium alloy or other metal material which has a high adhesion with the glass substrate and low in resistivity. Also, a silver electrode or a gold electrode may be formed by the screen printing process or the like. The SiO₂ film used as an insulating layer may be replaced by another material of high insulation characteristic such as SiN, SiO or Al₂O₃. Instead of tungsten, on the other hand, tantalum, molybdenum or an alloy or carbide thereof having a high melting point may be used as a material of the cold cathode with equal effect.
- In this way, a glass substrate having
electron sources units 13 in the number of 480 x 660 arranged in matrix are disposed in opposed relations with a face plate coated with a ZnO:Zn phosphor material at intervals of 0.3 mm, and the surrounding parts are sealed with frit glass of a low melting point. The resulting assembly is evacuated to produce an image display apparatus with a screen size of 10 inches. - When a voltage of 150 V is applied to the Y-control electrodes (video signal modulation electrodes) as against the X-control electrodes (vertical scanning electrodes), an electron emission current of about 10 µA is produced for each pixel. Also, upon application of 500 V to the surface of the phosphor material with an image displayed by line-at-a-time driving method, a screen brightness of approximately 50 fL is obtained.
- In place of the ZnO:Zn phosphor material used according to the present embodiment, the three primary colors of red, green and blue may be arranged in stripes to produce a color image.
- An electrode configuration of a two-dimensional electron source according to another embodiment is shown as a perspective view in Fig. 4.
Stripe electrodes 10 having a width of 0.1 mm and thickness of 3 µm are formed by the screen printing method on the surface of the glass substrate 1. As the next step, frit glass of low melting point is laid to the thickness of 1 µm by screen printing at intersections of thestripe electrodes 10 and Y-control electrodes to form an insulatinglayer 12. In similar fashion, Y-control electrodes 11 having a width of 0.05 mm and thickness of 1 µm are formed in stripes. Further, a cold cathode material WSi₂ is formed by sputtering over the whole surface, andcold cathodes 2 andgate electrodes 3 are formed at the same time by photolithograhy. - As shown in Fig. 4, the
cold cathodes 2 and thegate electrodes 3 are engaged in comb, and the sides of these electrodes opposed to each other are arranged in parallel to the X-control electrodes (perpendicular to the longitudinal direction of the Y-control electrodes). This arrangement causes emitted electron beams to widen somewhat along the longitudinal direction of the Y-control electrodes but not substantially along the perpendicular direction thereof. As a result, electron beams are prevented from hitting the phosphor material corresponding to adjacent Y-control electrodes, so that what are called crosstalks rarely occur, thus producing a high-definition image display apparatus. In particular, color mixing is effectively prevented in a color image display apparatus configured by three-color phosphor materials in stripes. - In this way, a glass substrate 1 making up a two-dimensional electron source and a face plate coated with a phosphor material are sealed with each other in opposed relations and evacuated in the same manner as in the first embodiment thereby to test produce an image display apparatus, which is capable of displaying a clear image substantially free of crosstalks like the first embodiment.
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP197411/88 | 1988-08-08 | ||
JP63197411A JP2623738B2 (en) | 1988-08-08 | 1988-08-08 | Image display device |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0354750A2 true EP0354750A2 (en) | 1990-02-14 |
EP0354750A3 EP0354750A3 (en) | 1990-10-17 |
EP0354750B1 EP0354750B1 (en) | 1994-07-20 |
Family
ID=16374070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890308020 Expired - Lifetime EP0354750B1 (en) | 1988-08-08 | 1989-08-07 | Image display apparatus and method of fabrication thereof |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0354750B1 (en) |
JP (1) | JP2623738B2 (en) |
CA (1) | CA1323901C (en) |
DE (1) | DE68916875T2 (en) |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0388984A2 (en) * | 1989-03-23 | 1990-09-26 | Canon Kabushiki Kaisha | Electron-beam generator and image display apparatus making use of it |
GB2242064A (en) * | 1990-01-29 | 1991-09-18 | Mitsubishi Electric Corp | Microminiature vacuum tube and production thereof |
FR2661028A1 (en) * | 1990-04-12 | 1991-10-18 | Futaba Denshi Kogyo Kk | DISPLAY DEVICE. |
FR2662301A1 (en) * | 1990-05-17 | 1991-11-22 | Futaba Denshi Kogyo Kk | ELECTRON EMITTING ELEMENT. |
FR2667428A1 (en) * | 1990-09-27 | 1992-04-03 | Futaba Denki Kogyo Kk | IMAGE DISPLAY DEVICE. |
EP0500543A1 (en) * | 1989-09-29 | 1992-09-02 | Motorola, Inc. | Flat panel display using field emission devices |
FR2673481A1 (en) * | 1991-02-28 | 1992-09-04 | Motorola Inc | FIELD EMISSION TYPE DISPLAY UNIT, USING A FLAT FIELD EMISSION DEVICE AS A CONTROL DEVICE. |
GB2259184A (en) * | 1991-03-06 | 1993-03-03 | Sony Corp | Flat image-display apparatus |
EP0535953A2 (en) * | 1991-10-02 | 1993-04-07 | Sharp Kabushiki Kaisha | Field-emission type electronic device |
US5217401A (en) * | 1989-07-07 | 1993-06-08 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a field-emission type switching device |
FR2689311A1 (en) * | 1992-03-27 | 1993-10-01 | Futaba Denshi Kogyo Kk | Field emission cathode for e.g. image display - has protruding rectangular fingers extending above gate with finger spacing to width ratio greater than one |
US5267884A (en) * | 1990-01-29 | 1993-12-07 | Mitsubishi Denki Kabushiki Kaisha | Microminiature vacuum tube and production method |
EP0605881A1 (en) * | 1992-12-29 | 1994-07-13 | Canon Kabushiki Kaisha | Electron source, and image-forming apparatus and method of driving the same |
EP0660367A1 (en) * | 1993-12-22 | 1995-06-28 | Canon Kabushiki Kaisha | Image-forming apparatus |
EP0665571A1 (en) * | 1994-01-28 | 1995-08-02 | Kabushiki Kaisha Toshiba | Device for emitting electrons and method of manufacturing the same |
US5449983A (en) * | 1993-04-20 | 1995-09-12 | Kabushiki Kaisha Toshiba | Color cathode ray tube apparatus |
US5869842A (en) * | 1995-12-20 | 1999-02-09 | Electronics And Telecommunications Research Research Institute | Mux and demux circuits using photo gate transistor |
US6137218A (en) * | 1994-05-20 | 2000-10-24 | Canon Kabushiki Kaisha | Image forming apparatus and a method for manufacturing the same |
CN1068453C (en) * | 1992-12-29 | 2001-07-11 | 佳能株式会社 | Image-forming apparatus, and designation of electron beam diameter at image-forming member in image-forming apparatus |
CN1071488C (en) * | 1993-01-07 | 2001-09-19 | 佳能株式会社 | Electron beam-generating apparatus, image-forming apparatus, and driving methods thereof |
CN1086057C (en) * | 1994-07-12 | 2002-06-05 | 佳能株式会社 | Apparatus for manufacture electronics source and imagery device |
CN1086056C (en) * | 1995-03-13 | 2002-06-05 | 佳能株式会社 | Electron-emitting device and electron source and image-forming apparatus using same as well as method of manufacturing the same |
US6593950B2 (en) | 1991-10-08 | 2003-07-15 | Canon Kabushiki Kaisha | Electron-emitting device, and electron beam-generating apparatus and image-forming apparatus employing the device |
US6992428B2 (en) | 2001-12-25 | 2006-01-31 | Canon Kabushiki Kaisha | Electron emitting device, electron source and image display device and methods of manufacturing these devices |
US7057336B2 (en) | 1994-08-29 | 2006-06-06 | Canon Kabushiki Kaisha | Electron-emitting device, electron source and image-forming apparatus as well as method of manufacturing the same |
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US8093796B2 (en) | 2009-05-11 | 2012-01-10 | Canon Kabushiki Kaisha | Electron beam apparatus and image display apparatus |
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JP2553377Y2 (en) * | 1990-05-01 | 1997-11-05 | 双葉電子工業株式会社 | Fluorescent display |
JP2601085B2 (en) * | 1990-11-28 | 1997-04-16 | 松下電器産業株式会社 | Functional electron-emitting device and method of manufacturing the same |
US5075595A (en) * | 1991-01-24 | 1991-12-24 | Motorola, Inc. | Field emission device with vertically integrated active control |
JP2601091B2 (en) * | 1991-02-22 | 1997-04-16 | 松下電器産業株式会社 | Electron-emitting device |
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JPS62261153A (en) * | 1986-05-08 | 1987-11-13 | Nec Corp | Manufacture of semiconductor device |
JP2654012B2 (en) * | 1987-05-06 | 1997-09-17 | キヤノン株式会社 | Electron emitting device and method of manufacturing the same |
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1988
- 1988-08-08 JP JP63197411A patent/JP2623738B2/en not_active Expired - Fee Related
-
1989
- 1989-08-07 EP EP19890308020 patent/EP0354750B1/en not_active Expired - Lifetime
- 1989-08-07 DE DE1989616875 patent/DE68916875T2/en not_active Expired - Fee Related
- 1989-08-08 CA CA000607771A patent/CA1323901C/en not_active Expired - Fee Related
Patent Citations (1)
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EP0172089A1 (en) * | 1984-07-27 | 1986-02-19 | Commissariat à l'Energie Atomique | Display device using field emission excited cathode luminescence |
Non-Patent Citations (1)
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Cited By (46)
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---|---|---|---|---|
US5185554A (en) * | 1989-03-23 | 1993-02-09 | Canon Kabushiki Kaisha | Electron-beam generator and image display apparatus making use of it |
US5757123A (en) * | 1989-03-23 | 1998-05-26 | Canon Kabushiki Kaisha | Electron-beam generator and image display apparatus making use of it |
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Also Published As
Publication number | Publication date |
---|---|
DE68916875D1 (en) | 1994-08-25 |
JPH0246636A (en) | 1990-02-16 |
CA1323901C (en) | 1993-11-02 |
EP0354750B1 (en) | 1994-07-20 |
EP0354750A3 (en) | 1990-10-17 |
DE68916875T2 (en) | 1995-01-12 |
JP2623738B2 (en) | 1997-06-25 |
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