EP0346819A3 - Verfahren und Vorrichtung zur berührungslosen Vermessung und ggf. abtragenden Bearbeitung von Oberflächen - Google Patents

Verfahren und Vorrichtung zur berührungslosen Vermessung und ggf. abtragenden Bearbeitung von Oberflächen Download PDF

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Publication number
EP0346819A3
EP0346819A3 EP19890110657 EP89110657A EP0346819A3 EP 0346819 A3 EP0346819 A3 EP 0346819A3 EP 19890110657 EP19890110657 EP 19890110657 EP 89110657 A EP89110657 A EP 89110657A EP 0346819 A3 EP0346819 A3 EP 0346819A3
Authority
EP
European Patent Office
Prior art keywords
contour
extent
interferometrically
permissible
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19890110657
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0346819A2 (de
Inventor
Karl-Hermann Dipl.-Ing. Netzel
Werner Dr. Preuss
Rudolf Dipl.-Ing. Fetting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hpo Hanseatische Prazisions- und Orbittechnik I K GmbH
Original Assignee
Hpo Hanseatische Prazisions- und Orbittechnik I K GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hpo Hanseatische Prazisions- und Orbittechnik I K GmbH filed Critical Hpo Hanseatische Prazisions- und Orbittechnik I K GmbH
Publication of EP0346819A2 publication Critical patent/EP0346819A2/de
Publication of EP0346819A3 publication Critical patent/EP0346819A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
EP19890110657 1988-06-14 1989-06-13 Verfahren und Vorrichtung zur berührungslosen Vermessung und ggf. abtragenden Bearbeitung von Oberflächen Withdrawn EP0346819A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3820225A DE3820225C1 (OSRAM) 1988-06-14 1988-06-14
DE3820225 1988-06-14

Publications (2)

Publication Number Publication Date
EP0346819A2 EP0346819A2 (de) 1989-12-20
EP0346819A3 true EP0346819A3 (de) 1991-11-27

Family

ID=6356523

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19890110657 Withdrawn EP0346819A3 (de) 1988-06-14 1989-06-13 Verfahren und Vorrichtung zur berührungslosen Vermessung und ggf. abtragenden Bearbeitung von Oberflächen

Country Status (4)

Country Link
US (1) US5067282A (OSRAM)
EP (1) EP0346819A3 (OSRAM)
JP (1) JPH02118407A (OSRAM)
DE (1) DE3820225C1 (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
US5649849A (en) * 1995-03-24 1997-07-22 Eastman Kodak Company Method and apparatus for realtime monitoring and feedback control of the shape of a continuous planetary polishing surface
US6923711B2 (en) 2000-10-17 2005-08-02 Speedfam-Ipec Corporation Multizone carrier with process monitoring system for chemical-mechanical planarization tool
NL1018943C2 (nl) * 2001-09-13 2003-03-14 Tno Werkwijze en inrichting voor het polijsten van een werkstukoppervlak.
NL1022293C2 (nl) * 2002-12-31 2004-07-15 Tno Inrichting en werkwijze voor het vervaardigen of bewerken van optische elementen en/of optische vormelementen, alsmede dergelijke elementen.
DE10315218B4 (de) * 2003-04-01 2010-12-30 Nagel Maschinen- Und Werkzeugfabrik Gmbh Verfahren und Vorrichtung zur Feinbearbeitung einer Oberfläche eines Werkstücks
JP2006047148A (ja) * 2004-08-05 2006-02-16 Mitsutoyo Corp 形状測定装置、形状測定方法、形状解析装置、形状解析プログラム、記録媒体
JP4938231B2 (ja) * 2004-10-25 2012-05-23 ルネサスエレクトロニクス株式会社 平坦度測定器
US20070117217A1 (en) * 2005-06-16 2007-05-24 The Regents Of The University Of California Large scale parallel immuno-based allergy test and device for evanescent field excitation of fluorescence
US20080011058A1 (en) * 2006-03-20 2008-01-17 The Regents Of The University Of California Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels
US8191403B2 (en) * 2007-03-27 2012-06-05 Richmond Chemical Corporation Petroleum viscosity measurement and communication system and method
FR3023011B1 (fr) * 2014-06-27 2017-10-20 Thales Sa Procede de fabrication d'un miroir
CN113933029B (zh) * 2021-10-15 2024-06-14 中国工程物理研究院激光聚变研究中心 一种离轴非球面元件的加工检测系统和制造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2448417A1 (fr) * 1979-02-09 1980-09-05 Inst Kosm I Procede de commande automatique du regime technologique de faconnage de surfaces optiques de pieces optiques, dispositif pour la mise en oeuvre de ce procede et pieces ainsi faconnees
GB2175687A (en) * 1985-04-26 1986-12-03 Suhl Feinmesszeugfab Veb Interferometric-incremental device for testing flatness

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4365301A (en) * 1980-09-12 1982-12-21 The United States Of America As Represented By The United States Department Of Energy Positional reference system for ultraprecision machining
DE3430499C2 (de) * 1984-08-18 1986-08-14 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Einrichtung zum Läppen oder Polieren von optischen Werkstücken
US4794736A (en) * 1985-12-27 1989-01-03 Citizen Watch Co., Ltd. Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2448417A1 (fr) * 1979-02-09 1980-09-05 Inst Kosm I Procede de commande automatique du regime technologique de faconnage de surfaces optiques de pieces optiques, dispositif pour la mise en oeuvre de ce procede et pieces ainsi faconnees
GB2175687A (en) * 1985-04-26 1986-12-03 Suhl Feinmesszeugfab Veb Interferometric-incremental device for testing flatness

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MESSTECHNIK, Band 81, Nr. 1, Januar 1973, Seiten 23-30, München, DE; K. ECKOLT et al.: "Verfahren zur Ebenheitsmessung" *

Also Published As

Publication number Publication date
EP0346819A2 (de) 1989-12-20
DE3820225C1 (OSRAM) 1989-07-13
US5067282A (en) 1991-11-26
JPH02118407A (ja) 1990-05-02

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