EP0331992A3 - Kapazitiver Schallwandler - Google Patents

Kapazitiver Schallwandler Download PDF

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Publication number
EP0331992A3
EP0331992A3 EP19890103276 EP89103276A EP0331992A3 EP 0331992 A3 EP0331992 A3 EP 0331992A3 EP 19890103276 EP19890103276 EP 19890103276 EP 89103276 A EP89103276 A EP 89103276A EP 0331992 A3 EP0331992 A3 EP 0331992A3
Authority
EP
European Patent Office
Prior art keywords
electrode structure
counter
membrane unit
sound transducer
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19890103276
Other languages
English (en)
French (fr)
Other versions
EP0331992B1 (de
EP0331992A2 (de
Inventor
Wolfgang Dipl.-Ing. Kühnel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sennheiser Electronic GmbH and Co KG
Original Assignee
Sennheiser Electronic GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sennheiser Electronic GmbH and Co KG filed Critical Sennheiser Electronic GmbH and Co KG
Publication of EP0331992A2 publication Critical patent/EP0331992A2/de
Publication of EP0331992A3 publication Critical patent/EP0331992A3/de
Application granted granted Critical
Publication of EP0331992B1 publication Critical patent/EP0331992B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Measuring Fluid Pressure (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

Kapazitive Schallwandler sehr kleiner Bauart, insbesondere Mikrofone, bestehen aus mindestens zwei zusammengefügten Halbleiterchips, welche eine Membraneinheit und eine feststehende Gegenelektrodenstruktur ver­ körpern und mittels bekannter Methoden der Halbleitertechnologie herge­ stellt werden. Durch die sehr kleine Bauart entstehen hohe Strömungs­ verluste, welche zu einem hohen Rauschen und einer geringen Empfind­ lichkeit und einem schlechten Frequenzgang führen.
Der Wandler nach der Erfindung weist besonders geringe Strömungsver­ luste auf, wodurch die genannten Nachteile stark vermindert werden. Er ist dadurch gekennzeichnet, daß der akustisch aktive Teil der Mem­ braneinheit (1) mit mindestens einer Gegenelektrodenstruktur (3), wel­ che von der Membraneinheit durch einen Luftspalt getrennt ist, ein ei­ nem Feldeffekttransistor vergleichbares System bildet. Die aus halblei­ tendem Grundmaterial gebildete Membraneinheit umfaßt eine akustisch ak­ tive Membranfläche (2), deren der Gegenelektrodenstruktur zugewandte Sei­ te (5) elektrisch leitend ist. Die Gegenelektrodenstruktur (3) besteht aus einer aus halbleitendem Grundmaterial herausgearbeiteten durch ei­ ne Source-Drain-Anordnung begrenzte Kanalstrecke (8), deren geometri­ sche Breitenabmessung in der Größenordnung von einem Zehntel der late­ ralen Abmessung der aktiven Membranfläche liegt.
EP89103276A 1988-03-05 1989-02-24 Kapazitiver Schallwandler Expired - Lifetime EP0331992B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3807251 1988-03-05
DE3807251A DE3807251A1 (de) 1988-03-05 1988-03-05 Kapazitiver schallwandler

Publications (3)

Publication Number Publication Date
EP0331992A2 EP0331992A2 (de) 1989-09-13
EP0331992A3 true EP0331992A3 (de) 1991-07-03
EP0331992B1 EP0331992B1 (de) 1994-08-31

Family

ID=6348950

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89103276A Expired - Lifetime EP0331992B1 (de) 1988-03-05 1989-02-24 Kapazitiver Schallwandler

Country Status (6)

Country Link
US (1) US4922471A (de)
EP (1) EP0331992B1 (de)
JP (1) JPH01316099A (de)
AT (1) ATE110919T1 (de)
CA (1) CA1298396C (de)
DE (2) DE3807251A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5146435A (en) * 1989-12-04 1992-09-08 The Charles Stark Draper Laboratory, Inc. Acoustic transducer
FR2697675B1 (fr) * 1992-11-05 1995-01-06 Suisse Electronique Microtech Procédé de fabrication de transducteurs capacitifs intégrés.
DE4314888C1 (de) * 1993-05-05 1994-08-18 Ignaz Eisele Verfahren zum Abscheiden einer ganzflächigen Schicht durch eine Maske und optionalem Verschließen dieser Maske
US5446413A (en) * 1994-05-20 1995-08-29 Knowles Electronics, Inc. Impedance circuit for a miniature hearing aid
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
TW387198B (en) * 1997-09-03 2000-04-11 Hosiden Corp Audio sensor and its manufacturing method, and semiconductor electret capacitance microphone using the same
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
WO1999063652A1 (en) * 1998-06-05 1999-12-09 Knowles Electronics, Inc. Solid-state receiver
FI105880B (fi) 1998-06-18 2000-10-13 Nokia Mobile Phones Ltd Mikromekaanisen mikrofonin kiinnitys
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
EP1142442A2 (de) * 1999-01-07 2001-10-10 Sarnoff Corporation Hörhilfegerät mit grossmembran-mikrofonelement einschliesslich leiterplatte
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
WO2001050814A1 (en) * 2000-01-06 2001-07-12 Sarnoff Corporation Microphone assembly with jfet flip-chip buffer for hearing aid
DE10026474B4 (de) * 2000-05-27 2005-06-09 Sennheiser Electronic Gmbh & Co. Kg Wandler mit halbleitender Membran
US6842964B1 (en) 2000-09-29 2005-01-18 Tucker Davis Technologies, Inc. Process of manufacturing of electrostatic speakers
US6671379B2 (en) 2001-03-30 2003-12-30 Think-A-Move, Ltd. Ear microphone apparatus and method
US6647368B2 (en) 2001-03-30 2003-11-11 Think-A-Move, Ltd. Sensor pair for detecting changes within a human ear and producing a signal corresponding to thought, movement, biological function and/or speech
US7065224B2 (en) * 2001-09-28 2006-06-20 Sonionmicrotronic Nederland B.V. Microphone for a hearing aid or listening device with improved internal damping and foreign material protection
US7142682B2 (en) * 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
US7415121B2 (en) * 2004-10-29 2008-08-19 Sonion Nederland B.V. Microphone with internal damping
DE102005017357A1 (de) * 2005-04-14 2006-10-26 Siemens Audiologische Technik Gmbh Mikrofonvorrichtung für ein Hörgerät
US20060233412A1 (en) * 2005-04-14 2006-10-19 Siemens Audiologische Technik Gmbh Microphone apparatus for a hearing aid
EP1742506B1 (de) * 2005-07-06 2013-05-22 Epcos Pte Ltd Mikrofonanordnung mit P-typ Vorverstärkerseingangsstufe
DE102005031601B4 (de) * 2005-07-06 2016-03-03 Robert Bosch Gmbh Kapazitives, mikromechanisches Mikrofon
US7317234B2 (en) * 2005-07-20 2008-01-08 Douglas G Marsh Means of integrating a microphone in a standard integrated circuit process
DE102005043690B4 (de) * 2005-09-14 2019-01-24 Robert Bosch Gmbh Mikromechanisches Mikrofon
US7983433B2 (en) 2005-11-08 2011-07-19 Think-A-Move, Ltd. Earset assembly
DE102005056759A1 (de) * 2005-11-29 2007-05-31 Robert Bosch Gmbh Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
US7502484B2 (en) 2006-06-14 2009-03-10 Think-A-Move, Ltd. Ear sensor assembly for speech processing
US20080042223A1 (en) * 2006-08-17 2008-02-21 Lu-Lee Liao Microelectromechanical system package and method for making the same
US20080075308A1 (en) * 2006-08-30 2008-03-27 Wen-Chieh Wei Silicon condenser microphone
US20080083957A1 (en) * 2006-10-05 2008-04-10 Wen-Chieh Wei Micro-electromechanical system package
US20080083958A1 (en) * 2006-10-05 2008-04-10 Wen-Chieh Wei Micro-electromechanical system package
US7894622B2 (en) 2006-10-13 2011-02-22 Merry Electronics Co., Ltd. Microphone
TWI336770B (en) 2007-11-05 2011-02-01 Ind Tech Res Inst Sensor
US8208671B2 (en) * 2008-01-16 2012-06-26 Analog Devices, Inc. Microphone with backside cavity that impedes bubble formation
US8855350B2 (en) * 2009-04-28 2014-10-07 Cochlear Limited Patterned implantable electret microphone
US9060229B2 (en) 2010-03-30 2015-06-16 Cochlear Limited Low noise electret microphone
DE102011002457A1 (de) * 2011-01-05 2012-07-05 Robert Bosch Gmbh Mikromechanische Mikrofoneinrichtung und Verfahren zum Herstellen einer mikromechanischen Mikrofoneinrichtung
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2130887B1 (de) * 1971-06-22 1972-09-07 Willco Hoergeraete Med Appbau Richtmikrophon fuer am Kopf zu tragende Kleinhoergeraete
DE3325961A1 (de) * 1983-07-19 1985-01-31 Dietmar Hohm Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3624315A (en) * 1967-01-23 1971-11-30 Max E Broce Transducer apparatus and transducer amplifier system utilizing insulated gate semiconductor field effect devices
SE358801B (de) * 1971-10-13 1973-08-06 Ericsson Telefon Ab L M
JPS4859823A (de) * 1971-11-24 1973-08-22
JPS5011787A (de) * 1973-06-04 1975-02-06
FR2425912A1 (fr) * 1978-05-17 1979-12-14 Muller Alfred Dispositif de coupe, en particulier coupe-boulon
JPS57193198A (en) * 1981-05-22 1982-11-27 Toshiba Corp Electrostatic microphone
US4429190A (en) * 1981-11-20 1984-01-31 Bell Telephone Laboratories, Incorporated Continuous strip electret transducer array
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US4691363A (en) * 1985-12-11 1987-09-01 American Telephone & Telegraph Company, At&T Information Systems Inc. Transducer device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2130887B1 (de) * 1971-06-22 1972-09-07 Willco Hoergeraete Med Appbau Richtmikrophon fuer am Kopf zu tragende Kleinhoergeraete
DE3325961A1 (de) * 1983-07-19 1985-01-31 Dietmar Hohm Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 5, Nr. 44 (E-50)[716], 24. März 1981; & JP-A-55 166 400 (NIPPON DENKI K.K.) 25-12-1980 *
PATENT ABSTRACTS OF JAPAN, Band 9, no. 27 (E-294)[1750], 6. Februar 1985; & JP-A-59 171 298 (MATSUSHITA DENKI SANGYO K.K.) 27-09-1984 *
RADIO, FERNSEHEN, ELEKTRONIK, Band 12, 1986, Seite 749, Berlin, DD; Spalte 3, 3. Bericht v.o. *

Also Published As

Publication number Publication date
CA1298396C (en) 1992-03-31
EP0331992B1 (de) 1994-08-31
DE3807251A1 (de) 1989-09-14
ATE110919T1 (de) 1994-09-15
US4922471A (en) 1990-05-01
JPH01316099A (ja) 1989-12-20
DE58908250D1 (de) 1994-10-06
EP0331992A2 (de) 1989-09-13

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