EP0285020A2 - Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte - Google Patents

Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte Download PDF

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Publication number
EP0285020A2
EP0285020A2 EP88104822A EP88104822A EP0285020A2 EP 0285020 A2 EP0285020 A2 EP 0285020A2 EP 88104822 A EP88104822 A EP 88104822A EP 88104822 A EP88104822 A EP 88104822A EP 0285020 A2 EP0285020 A2 EP 0285020A2
Authority
EP
European Patent Office
Prior art keywords
microwave
window
conductor
energy
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP88104822A
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German (de)
English (en)
Other versions
EP0285020A3 (fr
Inventor
Jörg Dr. Kieser
Hans-Georg Dr. Lotz
Gonde Dr. Dittmer
Michael Dr. Sellschopp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0285020A2 publication Critical patent/EP0285020A2/fr
Publication of EP0285020A3 publication Critical patent/EP0285020A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/78—Arrangements for continuous movement of material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines

Definitions

  • the invention relates to a device for introducing microwave energy into an at least partially permeable container for microwave energy with at least one microwave transmitter and an open microwave conductor connected to the microwave transmitter, which is located in the immediate vicinity of the container.
  • Such a container can either consist entirely of a material which is permeable to microwave energy, that is to say can be formed by a quartz tube, for example, or have a microwave-permeable window made of such a material.
  • a device of the type described above with a window is known for example from DE-PS 31 47 986.
  • the "open microwave conductor” consists of a metallic, ladder-shaped structure with two parallel bars and numerous rungs, which are at right angles to the bars and connect the bars in an electrically conductive manner, and which are equidistant from one another.
  • the rungs alternate with each other With such structures it is possible to emit the microwave power supplied at one end approximately uniformly over the length of the structure into the interior of the container.
  • slow wave structures which can also be translated with “delay structures”.
  • delay structures are microwave conductors, over which a bound electromagnetic wave travels in a defined direction.
  • the electrical power is in the form of the electrical field, that surrounds the structure with the so-called group velocity v g .
  • group velocity v Ph the phase of the wave moves with the phase velocity v Ph .
  • the two speeds are also independent in terms of their sign, so that it can easily happen that group and phase speeds run in opposite directions.
  • the term “slow” in connection with the waveguide structure can refer to both the phase velocity and the group velocity.
  • the group speed can be between 0 and the speed of light in a vacuum.
  • the value "0" applies to a structure that consists of resonance resonant circuits that are not coupled to each other and over which no wave runs.
  • the speed of light is achieved in a smooth conductor.
  • the phase speed can also assume values that are greater than the speed of light.
  • the group speed is reduced by the load on a straight conductor with periodically arranged obstacles, in the case of the above-mentioned conductor structure by the "rungs" mentioned. Depending on the arrangement of these obstacles, speeds between 1 and 100% of the speed of light can be set in practice.
  • a detailed one A discussion of the properties of periodic structures at microwave frequencies can be found in AS Harvey, IRE Transactions on Microwave Theory and Techniques, January 1960, 30.
  • the structure or structures at an acute angle of attack is proposed both in the aforementioned DE-PS 31 47 986 as well as in US Pat. No. 3,472,200 and in US Pat. No. 3,814,983 to be placed opposite the neighboring matter.
  • a uniform plasma is to be achieved over the entire length of this container.
  • the effectiveness and limits of this measure are described in DE-PS 31 47 986, so that the use of two structures intersecting at an acute angle with opposing energy supply is proposed to eliminate the disturbing influences.
  • the known solution led to a uniformity sufficient for many applications over a length of the excited plasma of approx.
  • the invention is therefore based on the object of improving a device of the type described at the outset in such a way that a great length expansion of the excited plasma with an extremely uniform energy distribution in the plasma is achieved with little structural outlay.
  • the object is achieved in that the open microwave guide is provided with a microwave feed line at least at both ends thereof.
  • each microwave conductor can first be arranged completely parallel to the container surface or to the window.
  • the substrate no longer has to pass through two plasma zones one after the other, possibly with different thicknesses, so that a much more homogeneous layer structure can be achieved.
  • the open microwave conductor is practically as often as desired along its length with other microwaves supply lines, there are no practical limits to the length change.
  • the arrangement is not only mechanically but also electrically stabilized.
  • the number of microwave inlets is an even number, e.g. two microwave feed lines can be connected to a single microwave transmitter via a T-shaped divider.
  • At least two microwave feed lines with a fixed phase relationship are connected to the at least one microwave transmitter. This is preferably possible by coupling one transmitter to two microwave feed lines through the line branch described above. However, several transmitters with a fixed phase relationship can also be used, so that in this case the microwave feed lines are each connected to their own microwave transmitter.
  • window thicknesses of approximately 15 to 20 mm can be expected purely by calculation.
  • partial reflection of the microwave energy occurs both on the front and on the back of the window, so that a corresponding interference can be observed.
  • a corresponding electromagnetic wave is formed in the dielectric of the window.
  • the surface of the window facing the microwave guide has a covering made of a material with a smaller refractive index than that of the window material.
  • the microwave guide is V-shaped in a symmetrical arrangement and has a smaller distance from the window at the apex of the “V” than at its feed points.
  • FIG. 1 shows a partial length of an open microwave conductor 1 of the type described above above a microwave-permeable window 7.
  • the microwave conductor 1 is made of metal, namely from two parallel bars 2 and 3, which are bridged at equidistant intervals by rungs 4 extending at right angles to the bars. The rungs are alternately connected to one of two center conductors 5 and 6.
  • the microwave-permeable window 7 is also only shown in a partial section. It consists of a quartz glass pane 8 facing the plasma with a thickness of 30 mm and a covering 9 made of polytetrafluroethylene with a thickness of 5 mm.
  • Such a window 7 is also shown in FIG. 2, it closes the upper wall 10 of a vacuum chamber 11, which is bounded at the bottom by a further wall 12.
  • a substrate holder 13 with numerous substrates 14 becomes through the space between the walls 10 and 12 emotional.
  • the direction of movement is indicated by an arrow 15; it runs at right angles to the longest axis of window 7.
  • the open simplified microwave guide 1 is arranged in parallel. Only the rear part of a shielding housing 16 is shown.
  • the microwave conductor 1 is provided at intervals with microwave feed lines 17 and 18 which are connected to a microwave transmitter 21 via a T-shaped distributor piece 19 and a connecting piece 20.
  • the microwave feed line 17 is connected to one end of the microwave conductor 1.
  • the microwave feed line 18 opens into the microwave guide 1 at a location distant therefrom.
  • a mirror-symmetrical arrangement is located at the other end of the microwave guide 1, which is not shown further here.
  • FIG. 3 shows an arrangement which can be thought of as a result of doubling the relationships according to FIG. 2.
  • a further microwave transmitter 22 is provided, which merges via a T-shaped distributor piece 23 into two further microwave feed lines 24 and 25, which open into the microwave guide 1 in a mirror-symmetrical arrangement to the feed lines 17 and 18.
  • the microwave transmitters 21 and 22 are operated in a fixed phase relationship to one another, and the same fixed phase position is also ensured with respect to the microwave conductor 1 by the line branches or distributors 19 and 23.
  • FIG. 4 shows a graphic representation of the test results for two differently designed microwave conductors, each 900 mm long.
  • This microwave guide was provided at both ends with the microwave feed lines 17 and 18. This resulted in a layer thickness distribution as given by the upper curve 26.
  • the weak formation of a minimum in the middle of the microwave guide was observed. Through a weakly V-shaped configuration of a microwave conductor 1 a, which is indicated by the dashed lines, this minimum could be eliminated in the middle, as is evident from the lower curve 27.
  • a length of the microwave guide of 900 mm already doubles the length of the previously available microwave guide.
  • the deviations in the layer thickness uniformity were between approximately ⁇ 5% and ⁇ 10%.
  • the ordinate shows the layer thickness belonging to curves 26 and 27 for coatings made from hexamethylene disilazane and from acetylene in nanometers (nm).
  • FIG. 3 28 denotes an adapter which is designed as a 3-bar tuner. This has a measuring point for the forward power P V. Upstream of each is a circulator 29 for decoupling the reverse power P R , which is fed via a microwave line 30 to a reactive load, not shown. This protects the transmitters 21 and 22 from reverse power.
  • FIG. 5 shows the reflection of a microwave with a frequency of 2.5 GHz from the atmosphere-side surface of the microwave window in both polarization directions for all angles of incidence.
  • the angles of incidence from 0 to 90 degrees are plotted on the abscissa.
  • the solid lines represent a quartz glass surface; the dashed lines for a window with a covering of polytetrafluoroethylene. Integrated across all angles of incidence, there is a significant reduction in reflection to about half if, instead of a pure quartz glass window, one is used which is provided with a 5 mm thick covering made of polytetrafluoroethylene.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Waveguide Aerials (AREA)
EP88104822A 1987-04-02 1988-03-25 Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte Withdrawn EP0285020A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873711184 DE3711184A1 (de) 1987-04-02 1987-04-02 Vorrichtung zur einbringung von mikrowellenenergie mit einem offenen mikrowellenleiter
DE3711184 1987-04-02

Publications (2)

Publication Number Publication Date
EP0285020A2 true EP0285020A2 (fr) 1988-10-05
EP0285020A3 EP0285020A3 (fr) 1990-04-04

Family

ID=6324755

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88104822A Withdrawn EP0285020A3 (fr) 1987-04-02 1988-03-25 Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte

Country Status (3)

Country Link
US (1) US4847460A (fr)
EP (1) EP0285020A3 (fr)
DE (1) DE3711184A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0486943A1 (fr) * 1990-11-22 1992-05-27 Leybold Aktiengesellschaft Dispositif pour l'excitation d'un champ à micro-ondes uniforme
FR2685821A1 (fr) * 1991-12-31 1993-07-02 Thomson Tubes Electroniques Circuit de repartition et de couplage d'energie hyperfrequence.

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5146058A (en) * 1990-12-27 1992-09-08 E. I. Du Pont De Nemours And Company Microwave resonant cavity applicator for heating articles of indefinite length
EP0502269A1 (fr) * 1991-03-06 1992-09-09 Hitachi, Ltd. Méthode et dispositif pour traitements par plasma micro-onde
ATE169458T1 (de) * 1993-11-01 1998-08-15 Unilever Nv Verfahren zum thermischen fixierung von dem überzugsteig eines beschichteten nahrungsmittels durch dielektrische heizung
US5714009A (en) 1995-01-11 1998-02-03 Deposition Sciences, Inc. Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2798552B1 (fr) * 1999-09-13 2001-11-30 Centre Nat Rech Scient Dispositif assurant une division de puissance micro-onde predeterminee sur une pluralite de charges, notamment pour la production de plasma
DE10138693A1 (de) * 2001-08-07 2003-07-10 Schott Glas Vorrichtung zum Beschichten von Gegenständen
US7326872B2 (en) * 2004-04-28 2008-02-05 Applied Materials, Inc. Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks
US20120241445A1 (en) * 2009-09-01 2012-09-27 Lg Electronics Inc. Cooking appliance employing microwaves
US20150034632A1 (en) * 2012-02-14 2015-02-05 Goji Ltd. Device for applying rf energy to a cavity
DE102014204105B3 (de) * 2014-03-06 2015-08-06 Karlsruher Institut für Technologie Vorrichtung zur Eintragung eines Eintragsgutes in einen Reaktor und ihre Verwendung

Citations (8)

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Publication number Priority date Publication date Assignee Title
DE1029963B (de) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Einrichtung zur Einstrahlung von Mikrowellenenergie in dielektrische Koerper
EP0027471A1 (fr) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd Dispositif de chauffage a haute frequence
EP0036040A1 (fr) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Radiateur de microondes à contact pour applications diathermiques
JPS58120303A (ja) * 1982-01-12 1983-07-18 Sanyo Electric Co Ltd マイクロ波加熱装置
FR2520160A1 (fr) * 1982-01-20 1983-07-22 Sairem Sarl Dispositif de traitement ho
EP0085110A1 (fr) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. Dispositif chauffant a haute frequence
FR2525063A1 (fr) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

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US2921174A (en) * 1959-02-13 1960-01-12 Gen Electric Electric surface heating unit system
DE6606894U (de) * 1962-11-07 1970-12-10 Siemens Ag Druckfestes reflexionskompensiertes abschlussfenster fuer hohlleitungen
US3472200A (en) * 1964-05-15 1969-10-14 Litton Industries Inc Striping apparatus for highways
US3496571A (en) * 1967-01-09 1970-02-17 Univ Ohio State Res Found Low profile feedback slot antenna
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
US3611582A (en) * 1969-11-07 1971-10-12 Canadian Patents Dev Microwave package for control of moisture content and insect infestations of grain
FR2076405A5 (fr) * 1970-01-14 1971-10-15 Materiel Telephonique
US3715551A (en) * 1971-07-01 1973-02-06 Raytheon Co Twisted waveguide applicator
US3814983A (en) * 1972-02-07 1974-06-04 C Weissfloch Apparatus and method for plasma generation and material treatment with electromagnetic radiation
US3851132A (en) * 1973-12-10 1974-11-26 Canadian Patents Dev Parallel plate microwave applicator
GB2040103B (en) * 1978-12-08 1983-03-02 Raytheon Co Slow wave coupling circuit
US4266162A (en) * 1979-03-16 1981-05-05 Gte Laboratories Incorporated Electromagnetic discharge apparatus with double-ended power coupling
US4314128A (en) * 1980-01-28 1982-02-02 Photowatt International, Inc. Silicon growth technique and apparatus using controlled microwave heating
DE3147986C2 (de) * 1981-12-04 1992-02-27 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur Erzeugung eines Mikrowellenplasmas für die Behandlung von Substraten, insbesondere zur Plasmapolymerisation von Monomeren
EP0086558A1 (fr) * 1982-02-08 1983-08-24 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Réseau d'antennes
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Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1029963B (de) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Einrichtung zur Einstrahlung von Mikrowellenenergie in dielektrische Koerper
EP0027471A1 (fr) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd Dispositif de chauffage a haute frequence
EP0036040A1 (fr) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Radiateur de microondes à contact pour applications diathermiques
EP0085110A1 (fr) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. Dispositif chauffant a haute frequence
JPS58120303A (ja) * 1982-01-12 1983-07-18 Sanyo Electric Co Ltd マイクロ波加熱装置
FR2520160A1 (fr) * 1982-01-20 1983-07-22 Sairem Sarl Dispositif de traitement ho
FR2525063A1 (fr) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 7, Nr. 229 (E-203)[1374], 12. Oktober 1983; & JP-A-58 120 303 (SANYO DENKI K.K.) 18-07-1983 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0486943A1 (fr) * 1990-11-22 1992-05-27 Leybold Aktiengesellschaft Dispositif pour l'excitation d'un champ à micro-ondes uniforme
US5173640A (en) * 1990-11-22 1992-12-22 Leybold Aktiengesellschaft Apparatus for the production of a regular microwave field
FR2685821A1 (fr) * 1991-12-31 1993-07-02 Thomson Tubes Electroniques Circuit de repartition et de couplage d'energie hyperfrequence.

Also Published As

Publication number Publication date
US4847460A (en) 1989-07-11
EP0285020A3 (fr) 1990-04-04
DE3711184A1 (de) 1988-10-20

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