EP0283736A2 - High vacuum pump with a bell-shaped rotor - Google Patents

High vacuum pump with a bell-shaped rotor Download PDF

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Publication number
EP0283736A2
EP0283736A2 EP88102562A EP88102562A EP0283736A2 EP 0283736 A2 EP0283736 A2 EP 0283736A2 EP 88102562 A EP88102562 A EP 88102562A EP 88102562 A EP88102562 A EP 88102562A EP 0283736 A2 EP0283736 A2 EP 0283736A2
Authority
EP
European Patent Office
Prior art keywords
rotor
bell
pump
high vacuum
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88102562A
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German (de)
French (fr)
Other versions
EP0283736A3 (en
Inventor
Heinz-Dieter Bürger
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Publication of EP0283736A2 publication Critical patent/EP0283736A2/en
Publication of EP0283736A3 publication Critical patent/EP0283736A3/en
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to a high vacuum pump with a bell-shaped rotor, the shaft of which is held by roller bearings, which are located inside the rotor bell, with a stator, which together with the cylindrical inner surface of the rotor on the one hand and together with the cylindrical outer surface of the rotor on the other forms a molecular pump stage, of which at least the former is of the Holwecktype, and with a suction connection, which is located in the region of the apex of the bell-shaped rotor.
  • a neutral purge gas e.g. nitrogen
  • Flushing does not work, however, if a sudden increase in pressure or a vigorous outgassing in the connected vacuum system reduces the fore-vacuum pressure to values of e.g. 1000 Pa can rise. In these cases, the extracted gas strikes with its aggressive components through the sealing gap into the engine and storage space and first destroys the bearings.
  • the object of the invention is therefore to provide a high vacuum pump in which no aggressive gases can penetrate into the area of the motor and the bearing even after a sudden increase in pressure.
  • the fore-vacuum connection of the pump is arranged in the region of the bell rim of the rotor and that the Holweck stage is designed as a dynamic seal pumping in the direction of the bell rim, so that a higher vacuum in the area of the roller bearings than at the bell rim of the rotor prevails.
  • the pumping direction of the pump stage acting over the cylindrical inner surface of the rotor has been reversed and this stage has been converted into a dynamic seal which prevents gases from penetrating into the storage space.
  • the pump has a housing 1, which can be connected to a vessel to be evacuated via a flange 2.
  • the suction connection 3 is therefore within this flange in the area of the apex 4 of a bell-shaped rotor 5 which is inserted into the housing 1.
  • a tubular stator 6, firmly connected to the housing, projects from below and has grooves 7 of a Holweck pumping stage on its cylindrical outer surface. Similar grooves 8, but with larger dimensions, are located on the cylindrical inner surface of the housing 1 and form a further Holweck pumping stage in connection with the outer cylindrical surface 9 of the rotor 5.
  • the direction of inclination of the grooves 7 is the same as that of the grooves 8, so that the pumping action in both stages in the figure runs from top to bottom.
  • the gases to be pumped, which are sucked in at the suction connection 3, are thus sucked down by the Holweck pump formed by the grooves 8 and the rotor outer surface 9 and reach a fore-vacuum pump, not shown, via a side connection 11.
  • the rotor is held in the interior of the tubular stator 6 by two roller bearings 12 and 13, which enclose the motor 14 between them.
  • the details of the motor, such as windings, laminated cores, electrical supply, etc., have not been shown, since this is a technique familiar to the person skilled in the art.
  • purge gas can usually be dispensed with here. To increase safety, however, purge gas can still be fed into the engine compartment in a greatly reduced amount if desired.
  • An important advantage of the pump according to the invention is its insensitivity to short-term pressure increases of up to a few thousand Pa. Even very short pressure increases up to atmospheric pressure do not yet lead to the complete breakdown of the vacuum in the engine compartment 15.
  • the invention is not restricted in all details to the pump shown in the figure, especially since its representation is highly schematic.
  • the invention can also be applied to turbomolecular pumps or mixed pumps in which turbo blading is provided instead of or next to the grooves 8.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Die Erfindung bezieht sich auf eine Molekularhochvakuumpumpe mit einem glockenförmigen Rotor (5), dessen Welle über Wälzlager (12, 13) gehalten wird, die sich im Inneren der Rotorglocke befinden, mit einem Stator (1, 6), der zusammen mit der zylindrischen Innenfläche (10) des Rotors einerseits und zusammen mit der zylindrischen Außenfläche (9) des Rotors andererseits je eine Molekularpumpstufe bildet, von denen zumindest die erstere vom Holwecktyp ist, und mit einem Sauganschluß (3), der sich im Bereich des Scheitels (4) des glokkenförmigen Rotors befindet. Erfindungsgemäß befindet sich der Vorvakuumanschluß (11) der Pumpe im Bereich des Glockenrands des Rotors (5), und beide Pumpstufen fördern Gase zum Glockenrand hin, d.h. sie sind nicht in Reihe geschaltet. Auf diese Weise können aggressive Gase nicht in den Motorraum (15) mit den empfindlichen Lagern eindringen.The invention relates to a molecular high vacuum pump with a bell-shaped rotor (5), the shaft of which is held by roller bearings (12, 13) located inside the rotor bell, with a stator (1, 6) which, together with the cylindrical inner surface (10) of the rotor on the one hand and together with the cylindrical outer surface (9) of the rotor on the other each form a molecular pump stage, of which at least the former is of the Holwecke type, and with a suction connection (3) which is located in the region of the apex (4) of the bell-shaped rotor. According to the invention, the forevacuum connection (11) of the pump is located in the area of the bell rim of the rotor (5), and both pump stages convey gases to the bell rim, i.e. they are not connected in series. In this way, aggressive gases cannot penetrate into the engine compartment (15) with the sensitive bearings.

Description

Die Erfindung bezieht sich auf eine Hochvakuumpumpe mit einem glockenförmigen Rotor, dessen Welle über Wälzlager gehalten wird, die sich im Inneren der Rotorglocke befinden, mit einem Stator, der zusammen mit der zylindrischen Innenfläche des Rotors einerseits und zusammen mit der zylindrischen Außen­fläche des Rotors andererseits je eine Molekularpumpstufe bildet, von denen zumindest die erstere vom Holwecktyp ist, und mit einem Sauganschluß, der sich im Bereich des Scheitels des glockenförmigen Rotors befindet.The invention relates to a high vacuum pump with a bell-shaped rotor, the shaft of which is held by roller bearings, which are located inside the rotor bell, with a stator, which together with the cylindrical inner surface of the rotor on the one hand and together with the cylindrical outer surface of the rotor on the other forms a molecular pump stage, of which at least the former is of the Holwecktype, and with a suction connection, which is located in the region of the apex of the bell-shaped rotor.

Bei bekannten derartigen Molekularpumpen sind die beiden an der Innenseite und an der Außenseite des glockenförmigen Ro­tors ausgebildeten Pumpstufen in Reihe geschaltet. Da der Sauganschluß sich im Bereich des Scheitels der Rotorglocke befindet, wird der Vorvakuumanschluß bei bekannten Pumpen an den zentralen Innenraum des Stators gelegt, so daß die zu pumpenden Gase zuerst außen am Rotor entlang bis zum Glocken­rand und dann weiter von dort in Gegenrichtung in den Glocken­innenraum hineingepumpt werden, in dem sich der Motor der Pumpe und die Lager befinden. Dies bedeutet, daß die von der Pumpe angesaugten Gase und Dämpfe die Lager und die Motorwick­lungen beschädigen können, so daß die Lebensdauer der Pumpe beeinträchtigt wird. Dieses Problem wurde bisher gelegentlich durch eine Abdichtung des Motor- und Lagerraums gegen den Pumpraum über einen engen Spalt gelöst: Ein neutrales Spülgas, z.B. Stickstoff, wurde in den Motorraum mit einem solchen Druck eingespeist, daß keine aggressiven Gase aus dem zu eva­kuierenden Behälter über den unvermeidlichen Spalt in den Motorraum eindringen können.In known molecular pumps of this type, the two pump stages formed on the inside and on the outside of the bell-shaped rotor are connected in series. Since the suction connection is located in the area of the crown of the rotor bell, the forevacuum connection in known pumps is placed on the central interior of the stator, so that the gases to be pumped are first outside along the rotor to the edge of the bell and then from there in the opposite direction to the bell interior be pumped in, in which the motor of the pump and the bearings are located. This means that the gases and vapors sucked in by the pump can damage the bearings and the motor windings, so that the service life of the pump is impaired. This problem has so far been solved occasionally by sealing the engine and storage room from the pump room via a narrow gap: A neutral purge gas, e.g. nitrogen, was fed into the engine room at such a pressure that no aggressive gases from the container to be evacuated via the inevitable gap can enter the engine compartment.

Die Spülung bewährt sich allerdings nicht, wenn ein plötzli­cher Druckanstieg oder eine kräftige Ausgasung im angeschlos­sene Vakuumsystem den Vorvakuumdruck auf Werte von z.B. 1000 Pa ansteigen läßt. In diesen Fällen schlägt nämlich das geförderte Gas mit seinen agressiven Bestandteilen durch den Dichtungsspalt hindurch in den Motor- und Lagerraum und zer­stört zuerst die Lager.Flushing does not work, however, if a sudden increase in pressure or a vigorous outgassing in the connected vacuum system reduces the fore-vacuum pressure to values of e.g. 1000 Pa can rise. In these cases, the extracted gas strikes with its aggressive components through the sealing gap into the engine and storage space and first destroys the bearings.

Aufgabe der Erfindung ist es also, eine Hochvakuumpumpe anzu­geben, bei der auch nach plötzlichem Druckanstieg keine ag­gressiven Gase in den Bereich des Motors und der Lager vor­dringen können.The object of the invention is therefore to provide a high vacuum pump in which no aggressive gases can penetrate into the area of the motor and the bearing even after a sudden increase in pressure.

Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß der Vorvakuumanschluß der Pumpe im Bereich des Glockenrands des Rotors angeordnet ist und daß die Holweckstufe als in Richtung auf den Glockenrand pumpende dynamische Dichtung ausgebildet ist, so daß im Betrieb im Bereich der Wälzlager ein höheres Vakuum als am Glockenrand des Rotors herrscht. Mit anderen Worten wurde die Pumprichtung der über die zylindrische Innen­fläche des Rotors wirkende Pumpstufe umgekehrt und diese Stufe zu einer dynamischen Dichtung umgestaltet, die verhindert, daß Gase in den Lagerraum eindringen können.This object is achieved in that the fore-vacuum connection of the pump is arranged in the region of the bell rim of the rotor and that the Holweck stage is designed as a dynamic seal pumping in the direction of the bell rim, so that a higher vacuum in the area of the roller bearings than at the bell rim of the rotor prevails. In other words, the pumping direction of the pump stage acting over the cylindrical inner surface of the rotor has been reversed and this stage has been converted into a dynamic seal which prevents gases from penetrating into the storage space.

Bezüglich von Merkmalen einer bevorzugten Ausführungsform der Erfindung wird auf die Unteransprüche verwiesen.With regard to features of a preferred embodiment of the invention, reference is made to the subclaims.

Nachfolgend wird die Erfindung anhand dieses bevorzugten Aus­führungsbeispiels mithilfe der einzigen Figur näher erläutert, die in schematischer Darstellung eine Holweckpumpe gemäß der Erfindung zeigt.The invention is explained in more detail below on the basis of this preferred exemplary embodiment with the aid of the single figure, which shows a Holweck pump according to the invention in a schematic illustration.

Die Pumpe bestizt ein Gehäuse 1, das über einen Flansch 2 an ein zu evakuierendes Gefäß anschließbar ist. Der Sauganschluß 3 befindet sich also innerhalb dieses Flansches im Bereich des Scheitels 4 eines glockenförmigen Rotors 5, der in das Gehäuse 1 eingesetzt ist. Von unten ragt in das Gehäuse ein mit diesem fest verbundener rohrförmiger Stator 6 hinein, der an seiner zylindrischen Außenfläche Nuten 7 einer Holweckpump­stufe besitzt. Ähnliche Nuten 8, jedoch mit größeren Abmessun­gen, befinden sich an der zylindrischen Innenfläche des Ge­häuses 1 und bilden in Verbindung mit der äußeren Zylinder­fläche 9 des Rotors 5 eine weitere Holweckpumpstufe. Die Nei­gungsrichtung der Nuten 7 ist der der Nuten 8 gleichgerichtet, so daß die Pumpwirkung in beiden Stufen in der Figur von oben nach unten verläuft. Die zu pumpenden Gase, die am Saugan­schluß 3 angesaugt werden, werden also durch die von den Nuten 8 und der Rotoraußenfläche 9 gebildete Holweckpumpe nach unten gesaugt und gelangen über einen seitlichen Anschluß 11 zu einer nicht dargestellten Vorvakuumpumpe.The pump has a housing 1, which can be connected to a vessel to be evacuated via a flange 2. The suction connection 3 is therefore within this flange in the area of the apex 4 of a bell-shaped rotor 5 which is inserted into the housing 1. A tubular stator 6, firmly connected to the housing, projects from below and has grooves 7 of a Holweck pumping stage on its cylindrical outer surface. Similar grooves 8, but with larger dimensions, are located on the cylindrical inner surface of the housing 1 and form a further Holweck pumping stage in connection with the outer cylindrical surface 9 of the rotor 5. The direction of inclination of the grooves 7 is the same as that of the grooves 8, so that the pumping action in both stages in the figure runs from top to bottom. The gases to be pumped, which are sucked in at the suction connection 3, are thus sucked down by the Holweck pump formed by the grooves 8 and the rotor outer surface 9 and reach a fore-vacuum pump, not shown, via a side connection 11.

Der Rotor wird im Inneren des rohrförmigen Stators 6 durch zwei Wälzlager 12 und 13 gehalten, die zwischen sich den Motor 14 einschließen. Auf die Darstellung der Einzelheiten des Motors wie Wicklungen, Blechpakete, elektrische Speisung usw. wurde verzichtet, da es sich hier um eine dem Fachmann ver­traute Technik handelt.The rotor is held in the interior of the tubular stator 6 by two roller bearings 12 and 13, which enclose the motor 14 between them. The details of the motor, such as windings, laminated cores, electrical supply, etc., have not been shown, since this is a technique familiar to the person skilled in the art.

Gase, die sich im Motor- und Lagerraum 15 befinden, werden durch die von den Nuten 7 und der zylindrischen Rotor-Innen­fläche 10 gebildete Holweckpumpstufe in Richtung auf den Vor­vakuumanschluß 11 abgesaugt. Werden aggressive Dämpfe über den Sauganschluß 3 abgepumpt, dann können diese nicht in den Motorraum 15 eindringen, da die von den Nuten 7 und der Rotor-­Innenfläche 10 gebildete Pumpstufe entgegen ihrer Pumprichtung von diesen Gasen durchströmt werden müßte. Diese Pumpstufe wirkt also als dynamische Dichtung, die praktisch keine Pump­leistung vollbringen muß, sondern nur eine Druckdifferenz herstellen soll. Somit können die Nuten 7 wesentlich weniger tief in den Stator eingeschnitten werden und näher beieinander liegen als die Nuten 8 der eigentlichen Pumpstufe. So kann beispielsweise die dynamische Dichtung eine Druckdifferenz von 5000 Pa und mehr aufrechterhalten.Gases, which are located in the engine and storage space 15, are sucked off through the Holweck pump stage formed by the grooves 7 and the cylindrical rotor inner surface 10 in the direction of the forevacuum connection 11. If aggressive vapors are pumped out through the suction connection 3, these cannot penetrate into the engine compartment 15, since the pump stage formed by the grooves 7 and the rotor inner surface 10 would have to be flown through by these gases contrary to their pumping direction. This pump stage thus acts as a dynamic seal, which has to perform practically no pumping power, but only a pressure difference to manufacture. Thus, the grooves 7 can be cut much less deeply into the stator and are closer together than the grooves 8 of the actual pump stage. For example, the dynamic seal can maintain a pressure differential of 5000 Pa and more.

Auf die Verwendung von Spülgas kann hier meist verzichtet werden. Zur Erhöhung der Sicherheit kann allerdings, falls erwünscht, Spülgas in stark reduzierter Menge nach wie vor in den Motorraum eingespeist werden.The use of purge gas can usually be dispensed with here. To increase safety, however, purge gas can still be fed into the engine compartment in a greatly reduced amount if desired.

Ein wichtiger Vorteil der erfindungsgemäßen Pumpe liegt in ihrer Unempfindlichkeit gegenüber kurzzeitigen Druckanstiegen bis zu einigen tausend Pa. Sogar sehr kurze Druckanstiege bis zu Atmosphärendruck führen noch nicht zum völligen Zusammen­bruch des Vakuums im Motorraum 15.An important advantage of the pump according to the invention is its insensitivity to short-term pressure increases of up to a few thousand Pa. Even very short pressure increases up to atmospheric pressure do not yet lead to the complete breakdown of the vacuum in the engine compartment 15.

Die Erfindung ist nicht in allen Einzelheiten auf die in der Figur dargestellte Pumpe beschränkt, zumal deren Darstellung stark schematisiert ist. Insbesondere läßt sich die Erfindung auch auf Turbomolekularpumpen oder gemischte Pumpen anwenden, bei denen statt der oder neben den Nuten 8 eine Turbobeschau­felung vorgesehen ist.The invention is not restricted in all details to the pump shown in the figure, especially since its representation is highly schematic. In particular, the invention can also be applied to turbomolecular pumps or mixed pumps in which turbo blading is provided instead of or next to the grooves 8.

Claims (3)

1. Hochvakuumpumpe mit einem glockenförmigen Rotor (5), dessen Welle über Wälzlager (12, 13) gehalten wird, die sich im Inne­ren der Rotorglocke befinden, mit einem Stator (1, 6), der zusammen mit der zylindrischen Innenfläche (10) des Rotors einerseits und zusammen mit der zylindrischen Außenfläche (9) des Rotors andererseits je eine Molekularpumpstufe bildet, von denen zumindest die erstere vom Holwecktyp ist, und mit einem Sauganschluß (3), der sich im Bereich des Scheitels (4) des glockenförmigen Rotors (5) befindet, dadurch gekennzeichnet, daß der Vorvakuumanschluß (11) der Pumpe im Bereich des Glok­kenrands des Rotors (5) angeordnet ist und daß die Holweck­stufe (7, 10) als in Richtung auf den Glockenrand pumpende dynamische Dichtung ausgebildet ist, so daß im Betrieb im Bereich der Wälzlager (12, 13) ein höheres Vakuum als am Glockenrand des Rotors (5) herrscht.1. High vacuum pump with a bell-shaped rotor (5), the shaft of which is held by roller bearings (12, 13), which are located inside the rotor bell, with a stator (1, 6), which together with the cylindrical inner surface (10) of the The rotor on the one hand and together with the cylindrical outer surface (9) of the rotor on the other each form a molecular pump stage, at least the former of which is of the Holwecke type, and with a suction connection (3) which is located in the region of the apex (4) of the bell-shaped rotor (5 ), characterized in that the forevacuum connection (11) of the pump is arranged in the area of the bell edge of the rotor (5) and that the Holweck stage (7, 10) is designed as a dynamic seal pumping in the direction of the bell edge, so that during operation In the area of the roller bearings (12, 13) there is a higher vacuum than at the bell edge of the rotor (5). 2. Hochvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß der die Pumpe antreibende Motor (14) im Inneren der Rotor­glocke (5) zwischen zwei Wälzlagern (12, 13) liegt.2. High vacuum pump according to claim 1, characterized in that the motor driving the pump (14) inside the rotor bell (5) lies between two roller bearings (12, 13). 3. Hochvakuumpumpe nach Anspruch 1 oder 2, dadurch gekenn­zeichnet, daß beide Pumpstufen (7, 10; 8, 9) vom Holwecktyp sind und daß die Nutentiefe und -breite sowie der Abstand zwischen Stator und Rotor in der von der Außenfläche (9) des Rotors (5) und der entsprechenden Statorfläche gebildete Pump­stufe wesentlich größer als in der anderen Pumpstufe (7, 10) gewählt ist.3. High vacuum pump according to claim 1 or 2, characterized in that both pump stages (7, 10; 8, 9) are of the Holwecktyp and that the groove depth and width and the distance between the stator and rotor in the of the outer surface (9) of Rotor (5) and the corresponding stator surface formed pump stage is selected to be significantly larger than in the other pump stage (7, 10).
EP88102562A 1987-02-24 1988-02-22 High vacuum pump with a bell-shaped rotor Withdrawn EP0283736A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873705912 DE3705912A1 (en) 1987-02-24 1987-02-24 HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR
DE3705912 1987-02-24

Publications (2)

Publication Number Publication Date
EP0283736A2 true EP0283736A2 (en) 1988-09-28
EP0283736A3 EP0283736A3 (en) 1989-03-08

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EP88102562A Withdrawn EP0283736A3 (en) 1987-02-24 1988-02-22 High vacuum pump with a bell-shaped rotor

Country Status (4)

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US (1) US4806074A (en)
EP (1) EP0283736A3 (en)
JP (1) JPS63208695A (en)
DE (1) DE3705912A1 (en)

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EP0464292A1 (en) * 1990-07-06 1992-01-08 Alcatel Cit Second stage mechanical vacuum pumping unit and leak detection system using such a unit
WO2006037730A1 (en) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Drag vacuum pump

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DE58905785D1 (en) * 1989-07-20 1993-11-04 Leybold Ag GAS FRICTION PUMP WITH AT LEAST ONE OUTLET THREAD LEVEL.
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
JPH03222895A (en) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd Thread-grooved vacuum pump
JPH0442296U (en) * 1990-08-07 1992-04-09
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19915307A1 (en) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor
JP2002070787A (en) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk Vacuum pump
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
DE102008034948A1 (en) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh vacuum pump
JP7141332B2 (en) * 2018-12-28 2022-09-22 株式会社荏原製作所 vacuum pump equipment

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EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS61145394A (en) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd Molecular pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292A1 (en) * 1990-07-06 1992-01-08 Alcatel Cit Second stage mechanical vacuum pumping unit and leak detection system using such a unit
WO2006037730A1 (en) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Drag vacuum pump
CN100458171C (en) * 2004-10-01 2009-02-04 厄利孔莱博尔德真空技术有限责任公司 Drag vacuum pump

Also Published As

Publication number Publication date
DE3705912A1 (en) 1988-09-01
JPS63208695A (en) 1988-08-30
DE3705912C2 (en) 1989-03-02
US4806074A (en) 1989-02-21
EP0283736A3 (en) 1989-03-08

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